CN202631590U - Multi-probe device for manual probe table - Google Patents
Multi-probe device for manual probe table Download PDFInfo
- Publication number
- CN202631590U CN202631590U CN 201220297076 CN201220297076U CN202631590U CN 202631590 U CN202631590 U CN 202631590U CN 201220297076 CN201220297076 CN 201220297076 CN 201220297076 U CN201220297076 U CN 201220297076U CN 202631590 U CN202631590 U CN 202631590U
- Authority
- CN
- China
- Prior art keywords
- probe
- hollow collar
- adjuster bar
- manual
- threaded hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
The utility model provides a multi-probe device for a manual probe table. The multi-probe device comprises an adjustable rod and a plurality of probes which are perpendicularly connected with the adjustment rod and can move relative to the adjustment rod. By the multi-probe device for the manual probe table, the acupuncture frequency can be reduced; the test success rate can be increased; the operation complexity can be reduced; and the test time is shortened.
Description
Technical field
The utility model relates to a kind of experimental facilities, and is particularly related to a kind of multiprobe device that is used for manual probe station.
Background technology
Probe station is to be used in that semiconductor applications carries out characteristic or fault analysis to the device on the wafer and the accurate board that uses.In the research and development of integrated circuit, the manufacturing, actual effect analytic process, often to measure inner electrical quantity, because process feature sizes is more and more lower, have no idea to come detectable signal with simple multimeter, oscillographic test pencil.The manual analyzing probe station can well help the engineering staff to realize the electrical parameter test of small position.The probe station system is usually by plummer, probe base, microscope, test machine, and other auxiliary enhanced system compositions, and general outfit is counted to through probe and realized that each PAD is connected with the stable of test machine on the chip, is judged the characteristic of chip on the wafer by test machine.
That probe station can be divided into is manual, semi-automatic/full-automatic probe station.Manually probe station mainly is used for carrying out failure analysis, and device property analysis and process certification analysis etc. are resolved and the research and development purposes, are applicable to and analyze 6 cun/8 cun/12 cun wafers, chip, generally are equipped with 2～4 probe bases.
Because the design complexities of chip is increasingly high, the test PAD on chip reaches thousands of, in concrete test, often need to several PAD simultaneously applying condition test.For example; Failure analysis is to certain chip electric performance test the time; Need apply identical voltage to a plurality of PAD of a certain row, if use present single probe needle stand, the process of then need repeatedly having an acupuncture treatment; Need regulate the microscope focal length repeatedly in each acupuncture treatment process and confirm with the coordinate of probe XYZ direction whether probe fully contacts with PAD, guarantee the success ratio of acupuncture treatment; On test machine, will repeat repeatedly to be provided with the test of every probe then, complicated operation and efficient are low.If also need can only increase the quantity of probe base, greatly improve testing cost to other PAD applying condition.
The utility model content
In order to overcome probe device complicated operation and the inefficient problem that exists in the prior art, the utility model provides a kind of multiprobe device that is used for manual probe station.
To achieve these goals, the utility model proposes a kind of multiprobe device that is used for manual probe station, comprising: adjuster bar; A plurality of probes vertically link to each other with said adjuster bar, and can move with respect to said adjuster bar.
Optional, said probe links to each other with said adjuster bar through union thimble.
Optional, said union thimble comprises the first continuous hollow collar and the second hollow collar.
Optional, said adjuster bar is through the said first hollow collar, and said probe is through the said second hollow collar.
Optional, the said first hollow collar and the said second hollow collar are metal material.
Optional, the screw that a threaded hole and said threaded hole be used respectively is set on the said first hollow collar and the said second hollow collar can fixes said adjuster bar and said probe respectively through threaded hole separately.
Optional, said adjuster bar is provided with scale.
The beneficial effect that the utility model is used for the multiprobe device of manual probe station mainly shows: the utility model is in the electrical parameter testing of semiconductor; Use a kind of multiprobe device to replace the single probe on traditional single probe needle stand; Having broken single probe needle stand can only be to the limitation to a pad, and this multiprobe device can be installed a plurality of parallel probes, and each probe spacing is from adjustable; Adjustable angle; The complicacy of test process has been simplified in number of probes quantitative limitation when having solved manual probe station and need apply the same test condition to a plurality of pad, has practiced thrift testing cost and test duration.
Description of drawings
Fig. 1 is used for the structural representation of the multiprobe device of manual probe station for the utility model.
Fig. 2 is used for the union thimble structural representation of the multiprobe device of manual probe station for the utility model.
Fig. 3 is a chip layout to be measured.
Embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is done further to describe.
Fig. 1 is an embodiment of the utility model, among Fig. 1, the multiprobe device comprise adjuster bar 12 with four with the said adjuster bar 12 vertical probes that link to each other 11, the quantity of probe 11 can determine according to actual conditions.Probe 11 can move with respect to said adjuster bar 12; Move mode mainly comprises following three kinds: 1. every probe 11 can move horizontally with respect to adjuster bar 12; Adjuster bar 12 is provided with scale, can know the distance that shows that probe 11 moves and is separated by to each other; 2. but every probe 11 is with respect to the angle manual adjustments of adjuster bar 12; 3. every probe 11 in vertical direction can up-down adjustment with respect to adjuster bar 12.
Above-mentioned three kinds of move modes are realized through a kind of union thimble structure, please refer to Fig. 2, and union thimble 13 and 14 comprises the first hollow collar 14 and the second hollow collar 13 that links to each other; Wherein adjuster bar 12 is through the said first hollow collar 14; Probe 11 is through the said second hollow collar 13, and the above-mentioned first hollow collar 14 and the second hollow collar 13 are metal material, because the needs of surveying; Probe 11 also is metal with adjuster bar 12; For the secured adjusted bar 12 and the first hollow collar 14, on the first hollow collar 14, a threaded hole is set, with one close use with threaded hole screw 15 pass threaded hole; The head of screw 15 withstands on the adjuster bar 12, so secured adjusted bar 12; For the stationary probe 11 and the second hollow collar 13, on the second hollow collar 13, a threaded hole is set too, with one close use with threaded hole the screw (not shown) pass threaded hole, the head of screw withstands on the probe 11, so stationary probe.Preferably, threaded hole is the hexagon socket head cap screw hole, and what be used is hexagon socket head cap screw.When the inside precession of screw, adjuster bar 12 is fixed in the collar 13 and 14 with 11 of probes.
Please refer to Fig. 3; In a failure analysis, use 12 cun manual probe stations that are equipped with four probe bases, one piece of chip is carried out electrical quantity confirm; PAD a, b, c, d need ground connection simultaneously; PADe, f, g need apply different voltages with different, if use conventional single probe needle stand, then need seven probe bases.Use the adjustable four-probe arrangement of parallel spacing now, promptly present embodiment replaces one of them single probe needle stand.
Earlier adjust the distance and the position of four parallel probes, through probe base XYZ adjusting knob four probes are pricked at PAD a, b, c, d last, then will remaining three single probe bases bundles last then at PAD e, f, g according to the spacing of a, b, c, four PAD of d.Then according to four probe base corresponding port; Electrical condition is set on test machine respectively; Because the electrical condition that PAD is a, b, c, d need apply is identical; And four probes of contact are installed on the same probe base with it, therefore on test machine, only need to be provided with once, as long as whole test process also is provided with four times.The acupuncture treatment be provided with after the end, can test.
Though the utility model discloses as above with preferred embodiment, so it is not in order to limit the utility model.Has common knowledge the knowledgeable in the technical field under the utility model, in spirit that does not break away from the utility model and scope, when doing various changes and retouching.Therefore, the protection domain of the utility model is as the criterion when looking claims person of defining.
Claims (7)
1. a multiprobe device that is used for manual probe station is characterized in that, comprising:
Adjuster bar;
A plurality of probes vertically link to each other with said adjuster bar, and can move with respect to said adjuster bar.
2. multiprobe device according to claim 1 is characterized in that: said probe links to each other with said adjuster bar through union thimble.
3. multiprobe device according to claim 2 is characterized in that: said union thimble comprises the first continuous hollow collar and the second hollow collar.
4. multiprobe device according to claim 3 is characterized in that: said adjuster bar is through the said first hollow collar, and said probe is through the said second hollow collar.
5. multiprobe device according to claim 3 is characterized in that: the said first hollow collar and the said second hollow collar are metal material.
6. multiprobe device according to claim 3; It is characterized in that: the screw that a threaded hole and said threaded hole be used respectively is set on the said first hollow collar and the said second hollow collar can fixes said adjuster bar and said probe respectively through threaded hole separately.
7. multiprobe device according to claim 1 is characterized in that: said adjuster bar is provided with scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220297076 CN202631590U (en) | 2012-06-21 | 2012-06-21 | Multi-probe device for manual probe table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220297076 CN202631590U (en) | 2012-06-21 | 2012-06-21 | Multi-probe device for manual probe table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202631590U true CN202631590U (en) | 2012-12-26 |
Family
ID=47384780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220297076 Expired - Lifetime CN202631590U (en) | 2012-06-21 | 2012-06-21 | Multi-probe device for manual probe table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202631590U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113009324A (en) * | 2021-05-24 | 2021-06-22 | 中国电子科技集团公司第二十九研究所 | Curved surface multi-probe test fixture |
-
2012
- 2012-06-21 CN CN 201220297076 patent/CN202631590U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113009324A (en) * | 2021-05-24 | 2021-06-22 | 中国电子科技集团公司第二十九研究所 | Curved surface multi-probe test fixture |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102768348B (en) | System for automatically testing service life of probe | |
| CN202975075U (en) | Test probe station and test system for transistor characteristics | |
| CN105118791A (en) | Directly-inserted power semiconductor module test clamp | |
| CN103267940B (en) | Multimode parallel test system | |
| CN102608428A (en) | Testing device for direct-current (DC) resistance of cable conductor | |
| CN103439537A (en) | Lossless sample clamp of solar battery current-voltage testing system | |
| CN205091435U (en) | PCB testing arrangement | |
| CN102288639A (en) | Power semiconductor light-emitting diode (LED) thermal resistance rapid batch screening device and method | |
| CN106597247A (en) | Measuring system for volt-ampere characteristic curve of radiation effect semiconductor device based on four-probe method | |
| CN105445557A (en) | High-flux resistivity testing device | |
| CN202631590U (en) | Multi-probe device for manual probe table | |
| CN203688747U (en) | Circuit board bearing test mechanism of electronic circuit board multi-contact test tool | |
| CN203350338U (en) | Cell phone PCB plate voltage testing jig | |
| CN103412173B (en) | A kind of Mobile phone PCB voltage tester tool | |
| CN203688632U (en) | Capacitor module voltage test clamp | |
| CN207380185U (en) | A kind of artificial puncture device of electric wire spark machine sensitivity calibrating instrument | |
| CN103529247B (en) | A kind of tool for measuring surface mounting crystal electrical quantity | |
| CN203069626U (en) | Clamping device for ammeter detection | |
| CN103837811B (en) | Transistor curve tracer high-resolution test device | |
| CN206270455U (en) | A kind of power semiconductor modular measurement jig | |
| CN209432955U (en) | A kind of bridge-type module test device and test macro | |
| CN204255990U (en) | A kind of ultra-miniature package Hall switch component testing seat | |
| CN205643418U (en) | Inductance test fixture | |
| CN204679531U (en) | A kind of sheet capacitor high-frequency parameter test fixture | |
| CN209342773U (en) | A kind of mobile phone center resistance detection equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121226 |
|
| CX01 | Expiry of patent term |