CN202629027U - Rotary motion transmission device - Google Patents
Rotary motion transmission device Download PDFInfo
- Publication number
- CN202629027U CN202629027U CN 201220224168 CN201220224168U CN202629027U CN 202629027 U CN202629027 U CN 202629027U CN 201220224168 CN201220224168 CN 201220224168 CN 201220224168 U CN201220224168 U CN 201220224168U CN 202629027 U CN202629027 U CN 202629027U
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- seal ring
- axle sleeve
- attachment hole
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 103
- 238000007789 sealing Methods 0.000 claims abstract description 69
- 230000007246 mechanism Effects 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 claims abstract description 32
- 230000008878 coupling Effects 0.000 claims description 21
- 238000010168 coupling process Methods 0.000 claims description 21
- 238000005859 coupling reaction Methods 0.000 claims description 21
- 238000012546 transfer Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000002386 leaching Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The utility model discloses a rotary motion transmission device comprising a driving mechanism, a coupler, a transmission rod, a transmission gear and a sealing mechanism. The sealing mechanism is hermetically mounted on a lateral side of a sealed chamber, a connecting hole and a compressed air inlet are formed on the sealing mechanism, the transmission shaft is hermetically penetratingly arranged in the connecting hole, the transmission gear is mounted at one end of the transmission shaft, the other end of the transmission shaft is connected with one end of the coupler, the other end of the coupler is connected with an output shaft of the driving mechanism which drives the transmission shaft to rotate via the coupler, the transmission shaft drives the transmission gear to rotate so as to hermetically transmit rotary motion to an aqueous environment, compressed air is compressed into the connecting hole via the compressed air inlet so as to keep a high-pressure environment in the connecting hole, so that liquid can be effectively prevented from leaking out of the sealed chamber via the transmission shaft, and good dynamic sealing is formed. The sealing mechanism which is hermetically mounted is capable of effectively preventing external environment from polluting the interior of the sealed chamber and keeping good air impermeability and high cleanliness in the sealed chamber, and the rotary motion transmission device is simple in structure and low in cost.
Description
Technical field
The utility model relates to a kind of transmission device, relates in particular to a kind of will rotatablely moving and is passed to the transmission device of liquid environment hermetically.
Background technique
Along with rapid development of science and technology, industrial technology is required to increase day by day, vacuum technique shows wide application prospect in the development of high-tech industryization, especially be embodied in vacuum environment is required in the high digital display floater industry.For example; Thin film transistor (LCD-TFT; Liquid Crystal Display-Thin Film Transistor), organic light emitting display (OLED; Organic Light-Emitting Diode) in panel, solar panel and other fellows' the processing procedure,, promptly must under vacuum state and in the clean fully space environment, carry out because the technological requirement of this type of processing procedure is relatively stricter.For example; In the processing procedure of LCD-TFT, OLED and solar panel; The photoetching step that is absolutely necessary; The target of photoetching production is according to designing requirement, generates accurate in size feature pattern, and general photoetching process will experience glass substrate surface cleaning, drying, linging, spin coating optical resist, soft baking, aim at operations such as exposure, back baking, development, hard baking, etching, detection; Wherein, photochemical etching (photochemical etching) is also claimed in etching, is meant through after exposure plate-making, developing; Protective film that will etching area is removed; The contact chemical solution reaches the effect of dissolved corrosion when etching, forms the effect of concavo-convex or hollow out moulding.Therefore; Steps such as etching are all carried out having under corrosive liquid environment; And in realizing the equipment of automatic production, often need be at transmission glass substrate under the liquid environment, or carry out action such as valve opening; In the input process of these actions, higher requirement is proposed also Seal of Equipment property.
In above-mentioned processing procedure, the sealing transmission under the liquid environment has highlighted its significance, and the sealing transmission under the liquid environment is often testing the reliability of the vacuum system that is used for whole processing procedure.The existing sealing transmission equipment that is used under the liquid environment is provided with a large amount of rollers, ball push rod and sucker in vacuum chamber, driving mechanism is complicated; In order to guarantee the synchronous operation of whole conveying system, all delivery rollers that generally adopt a driving mechanism to drive chamber interior rotate synchronously, utilize frictional force at the uniform velocity to transmit glass substrate etc.; Because driving mechanism is complicated; The outside being rotatablely moved when transferring to the liquid environment in the seal chamber, along with the operation of transfer mechanism, the liquid in the seal chamber can slowly leach outside the seal chamber through transmission axle; Pollute, and influence the sealing of vacuum environment.
Therefore, be necessary to provide a kind of high cleanliness, high leak tightness, transmission device simple in structure, with low cost to solve the deficiency of existing technology.
The model utility content
The purpose of the utility model is to provide a kind of high cleanliness, high leak tightness, the transmission device that rotatablely moves simple in structure, with low cost.
For realizing above-mentioned purpose; The technological scheme of the utility model is: a kind of transmission device that rotatablely moves is provided; Be installed on hermetically on the seal chamber that fills liquid, be used for transferring to liquid environment hermetically, offer mounting hole on the sidewall of said seal chamber rotatablely moving; The said transmission device that rotatablely moves comprises driving mechanism, coupling, transmission shaft, driving gear and sealing mechanism; Said sealing mechanism is installed in the mounting hole on the said sidewall hermetically, offers the attachment hole that is communicated with said seal chamber on the said sealing mechanism, also offers the compressed air inlet that is communicated with said attachment hole on the said sealing mechanism; Said transmission shaft is arranged in the said attachment hole hermetically; And an end that stretches in the said seal chamber of said transmission shaft is equipped with said driving gear, and the other end of said transmission shaft stretches out outside the said sealing mechanism and with an end of said coupling and is connected, and the other end of said coupling is connected with the output shaft of said driving mechanism; Said driving mechanism drives said transmission shaft through said coupling and rotates, thereby said transmission shaft drives said driving gear rotation said rotatablely moving is transferred to liquid environment.
Preferably; Said sealing mechanism comprises seal connector, sealing clamp, bearing, axle sleeve, first seal ring and second seal ring; Offer said attachment hole and said compressed air inlet on the said seal connector; Said seal connector is installed in the said mounting hole hermetically and stretches in the said seal chamber, and the end with said compressed air inlet is positioned at outside the said seal chamber, and said bearing is arranged in the said attachment hole; Said sealing clamp is installed on the outer end of the said seal chamber of being positioned at of said seal connector hermetically; And offer on the said sealing clamp and the corresponding through hole of said attachment hole, said axle sleeve, first seal ring and second seal ring all are sheathed on the said transmission shaft, and said axle sleeve is between said first seal ring and said second seal ring; Said transmission shaft passes said through hole successively and said attachment hole stretches in the said seal chamber, and said drive bearing is stated from the said bearing; Get into the pressurized air of attachment hole through the compressed air inlet; Between first seal ring and second seal ring, form hyperbaric environment; Therefore, in the process that transmission rotatablely moves, even first seal ring, second seal ring have the wearing and tearing of a little; Hyperbaric environment in the attachment hole can prevent effectively that also liquid from leaching into outside the external sealed cavity through transmission shaft, forms good motive sealing.
Preferably; Said attachment hole runs through the rear and front end of said seal connector; The middle part of said seal connector outwards protrudes out a junction, and the front end of said seal connector stretches in the said seal chamber, and said joint is connected with the sidewall of said seal chamber hermetically; The rear end of said seal connector is positioned at outside the said seal chamber, and said compressed air inlet is opened in the rear end of said seal connector.
Preferably, said first seal ring is pressed in the through hole of said sealing clamp, and said second seal ring is pressed in the attachment hole of said seal connector; And said second seal ring is pressed into the front end of said seal connector, said first seal ring and second seal ring all with said transmission shaft interference fit, first seal ring and second seal ring all adopt abrasive rubber to process; And all with the transmission shaft interference fit; Therefore, and the good motive sealing of formation between the transmission shaft, good airproof performance and durable.
Preferably, said bearing comprises two, and two said bearings all are arranged in the said attachment hole, and two bearings is arranged between said first seal ring and said second seal ring.
Preferably, said axle sleeve comprises external axle sleeve and internal axle sleeve, and said internal axle sleeve is sheathed on the said transmission shaft, and said external axle sleeve is sheathed on outside the said internal axle sleeve, and said external axle sleeve and internal axle sleeve are all between two said bearings.
Preferably; Said sealing mechanism also comprises first seal ring and second seal ring; Said first seal ring is located between said sealing clamp and the said seal connector, and said second seal ring is arranged between the sidewall of said joint and said seal chamber, is tightly connected through first seal ring and second seal ring; Make seal chamber and seal connector all keep the static seal state, improve sealability.
Preferably; Said driving mechanism is an actuating motor; The actuating motor speed of response is fast, precision is high, and the control voltage signal that can will import steadily converts the mechanical output quantity on the motor shaft fast into, makes substrate effectively, accurately and steadily reliable fast in the process that transmits.
Compared with prior art; Because the transmission device that rotatablely moves of the utility model comprises driving mechanism, coupling, transmission shaft, driving gear and sealing mechanism, said sealing mechanism is installed in the mounting hole of said seal chamber hermetically; Offer the attachment hole that is communicated with said seal chamber on the said sealing mechanism; Also offer the compressed air inlet that is communicated with said attachment hole on the said sealing mechanism, said transmission shaft is arranged in the said attachment hole hermetically, and an end that stretches in the said seal chamber of said transmission shaft is equipped with said driving gear; The other end of said transmission shaft stretches out outside the said sealing mechanism and with an end of said coupling and is connected; The other end of said coupling is connected with the output shaft of said driving mechanism, and said driving mechanism drives said transmission shaft through said coupling and rotates, thereby said transmission shaft drives said driving gear rotation said rotatablely moving is transferred to liquid environment hermetically; In the attachment hole of compressed air inlet with pressurized air indentation sealing mechanism; Keep hyperbaric environment in the said attachment hole thereby make, prevent that effectively liquid from leaching into outside the seal chamber through transmission shaft, form good motive sealing; And sealing mechanism is installed in the mounting hole of said seal chamber hermetically; Effectively avoid external environment condition to give the pollution that brings in the seal chamber, make vacuum environment keep good air-tightness and high cleanliness, and this transmission device that rotatablely moves is simple in structure, with low cost.
Description of drawings
Fig. 1 is the rotatablely move structural representation of transmission device of the utility model.
Fig. 2 is the enlarged diagram of A part among Fig. 1.
Embodiment
With reference now to accompanying drawing, describe the embodiment of the utility model, the similar elements label is represented similar elements in the accompanying drawing.
Like Fig. 1, shown in Figure 2, the transmission device 1 that rotatablely moves that the utility model provided is installed on the seal chamber 2 that fills liquid hermetically; Be used for seal chamber 2 outer rotatablely moving are transferred to liquid environment hermetically; Particularly, offer mounting hole 211 on the sidewall 21 of said seal chamber 2, the said transmission device 1 that rotatablely moves is installed in the said mounting hole 211 hermetically; And the one of which end stretches in the liquid in the seal chamber 2, and the other end is positioned at outside the seal chamber 2.
Like Fig. 1, shown in Figure 2; The said transmission device 1 that rotatablely moves comprises driving mechanism 10, coupling 20, transmission shaft 30, driving gear 40 and sealing mechanism 50; Offer the attachment hole 511 that runs through its rear and front end on the said sealing mechanism 50; The rear end of said sealing mechanism 50 also offers the compressed air inlet 512 that is communicated with said attachment hole 511, and said sealing mechanism 50 is installed in the mounting hole 211 on the said sidewall 21 hermetically, and its front end stretches in the seal chamber 2; Its rear end is positioned at outside the seal chamber 2; Said attachment hole 511 is communicated with seal chamber 2, and said transmission shaft 30 is arranged in the said attachment hole 511 hermetically, and an end of transmission shaft 30 stretches in the liquid in the seal chamber 2; The other end of transmission shaft 30 is positioned at outside the sealing mechanism 50; An end that stretches in the said seal chamber 2 of said transmission shaft 30 is equipped with driving gear 40, and the said sealing mechanism 50 outer ends that are positioned at of said transmission shaft 30 are connected with an end of said coupling 20, and the other end of said coupling 20 is connected with the output shaft of said driving mechanism 10; Said driving mechanism 10 drives said transmission shaft 30 through said coupling 20 and rotates, thereby said transmission shaft 30 drives said driving gear 40 rotations said rotatablely moving is transferred to liquid environment.
Continue to combine Fig. 1, shown in Figure 2, said sealing mechanism 50 comprises seal connector 51, sealing clamp 52, two bearings 53a, 53b, internal axle sleeve 54a, external axle sleeve 54b, the first seal ring 55a, the second seal ring 55b, the first seal ring 56a and the second seal ring 56b.Offer said attachment hole 511 on the said seal connector 51; And attachment hole 511 runs through the rear and front end of seal connector 51; The middle part of said seal connector 51 outwards protrudes out a junction 513; The front end of said seal connector 51 stretches in the said seal chamber 2, and said joint 513 is connected with the sidewall 21 of said seal chamber 2 hermetically, and the said second seal ring 56b is arranged between the sidewall 21 of said joint 513 and said seal chamber 2; Be tightly connected through the second seal ring 56b between said joint 513 and the sidewall 21, keep good static seal.The rear end of said seal connector 51 is positioned at outside the said seal chamber 2, and said compressed air inlet 512 is opened in the rear end of said seal connector 51, and this compressed air inlet 512 is connected with attachment hole 511.In addition; In attachment hole 511, also be provided with said bearing 53a, 53b, two said bearing 53a, 53b being arranged in the attachment hole 511, particularly at interval; One bearing 53a is arranged at the rear end of seal connector 51, and another bearing 53b is arranged at the position near the front end of seal connector 51.
Said sealing clamp 52 is installed on the rear end of said seal connector 51, and is tightly connected through the first seal ring 56a between sealing clamp 52 and the seal connector 51, on said sealing clamp 52, offers and said attachment hole 511 corresponding through holes 521; The said first seal ring 55a is pressed in the through hole 521 of said sealing clamp 52; The said second seal ring 55b is pressed in the attachment hole 511 of said seal connector 51; And the said second seal ring 55b is pressed into the front end end of said seal connector 51; Therefore, two bearings 53a, 53b are arranged between said first seal ring 55a and the said second seal ring 55b.Said internal axle sleeve 54a is sheathed on the said transmission shaft 30, and said external axle sleeve 54b is sheathed on outside the said internal axle sleeve 54a.During installation; Said transmission shaft 30 passes said through hole 521 successively and said attachment hole 511 stretches in the said seal chamber 2; And said transmission shaft 30 is carried on said bearing 53a, 53b is last, and makes said external axle sleeve 54b and internal axle sleeve 54a all between two bearings 53a, 53b, and the said first seal ring 55a and the second seal ring 55b all with said transmission shaft 30 interference fit; The first seal ring 55a and the second seal ring 55b all adopt abrasive rubber to process; Therefore, and the good motive sealing of formation between the transmission shaft 30, good airproof performance and durable; Get into the pressurized air of attachment hole 511 through compressed air inlet 512; Between the first seal ring 55a and the second seal ring 55b, form hyperbaric environment; Therefore, in the process that transmission rotatablely moves, even the first seal ring 55a, the second seal ring 55b have the wearing and tearing of a little; Hyperbaric environment in the attachment hole 511 can prevent effectively that also liquid from leaching into outside the external sealed cavity 2 through transmission shaft 30, forms good motive sealing.
Preferably; Said seal connector 51 is a sealing flange; Said driving mechanism 10 is an actuating motor; The actuating motor speed of response is fast, precision is high, and the control voltage signal that can will import steadily converts the mechanical output quantity on the motor shaft fast into, makes substrate effectively, accurately and steadily reliable fast in the process that transmits.
In conjunction with Fig. 1, shown in Figure 2; When in operations such as etching, needing under liquid environment the transmission glass substrate; Said driving mechanism 10 drives transmission shaft 30 through coupling 20 and rotates; Transmission shaft 30 drives driving gear 40 motion again, and then will rotatablely move and transfer in the liquid environment in the seal chamber 2, and then realizes the transmission under liquid environment such as glass substrate.Owing to be pressed into pressurized air in attachment hole 511 through said compressed air inlet 512; Make between the first seal ring 55a and the second seal ring 55b and form hyperbaric environment; Therefore; In the process that transmission rotatablely moves, the liquid that can not in the seal chamber 2 leaches into outside the external sealed cavity 2 through transmission shaft 30, forms good motive sealing; Simultaneously, be tightly connected through the first seal ring 56a between sealing clamp 52 and the seal connector 51, be tightly connected through the second seal ring 56b between the sidewall 21 of seal connector 51 and seal chamber 2, form good static sealing.
Because the transmission device 1 that rotatablely moves of the utility model; Comprise driving mechanism 10, coupling 20, transmission shaft 30, driving gear 40 and sealing mechanism 50; Said sealing mechanism 50 is installed in the mounting hole 211 of said seal chamber 2 hermetically; Offer the attachment hole 511 that is communicated with said seal chamber 2 on the said sealing mechanism 50, also offer the compressed air inlet 512 that is communicated with said attachment hole 511 on the said sealing mechanism 50, said transmission shaft 30 is arranged in the said attachment hole 511 hermetically; And an end that stretches in the said seal chamber 2 of said transmission shaft 30 is equipped with said driving gear 40; The other end of said transmission shaft 30 stretches out outside the said sealing mechanism 50 and with an end of said coupling 20 and is connected, and the other end of said coupling 20 is connected with the output shaft of said driving mechanism 10, and said driving mechanism 10 drives said transmission shaft 30 through said coupling 20 and rotates; Thereby said transmission shaft 30 drives said driving gear 40 rotations said rotatablely moving is transferred to liquid environment; And through compressed air inlet 512 can attachment hole 511 with pressurized air indentation sealing mechanism 50 in, keep hyperbaric environments thereby make in the said attachment hole 511, prevent that effectively liquid from leaching into outside the external sealed cavity 2 through transmission shaft 30; Form good motive sealing; And sealing mechanism 50 is installed in the mounting hole 211 of said seal chamber 2 hermetically, effectively avoids external environment condition to give the pollution that brings in the seal chamber 2, makes vacuum environment keep good air-tightness and high cleanliness.
The utility model transmission device 1 that rotatablely moves is not limited to the transmission of glass substrate under liquid environment, also can be used for other similar dull and stereotyped object transmission under liquid environment according to actual needs.
The above disclosed preferred embodiment that is merely the utility model can not limit the interest field of the utility model certainly with this, so according to the equivalent variations that the utility model claim is done, still belong to the scope that the utility model is contained.
Claims (8)
1. transmission device that rotatablely moves; Be installed on hermetically on the seal chamber that fills liquid; Be used for to rotatablely move and transfer to liquid environment hermetically; Offer mounting hole on the sidewall of said seal chamber, it is characterized in that: the said transmission device that rotatablely moves comprises driving mechanism, coupling, transmission shaft, driving gear and sealing mechanism, and said sealing mechanism is installed in the mounting hole on the said sidewall hermetically; Offer the attachment hole that is communicated with said seal chamber on the said sealing mechanism; Also offer the compressed air inlet that is communicated with said attachment hole on the said sealing mechanism, said transmission shaft is arranged in the said attachment hole hermetically, and an end that stretches in the said seal chamber of said transmission shaft is equipped with said driving gear; The other end of said transmission shaft stretches out outside the said sealing mechanism and with an end of said coupling and is connected; The other end of said coupling is connected with the output shaft of said driving mechanism, and said driving mechanism drives said transmission shaft through said coupling and rotates, thereby said transmission shaft drives said driving gear rotation said rotatablely moving is transferred to liquid environment.
2. the transmission device that rotatablely moves as claimed in claim 1; It is characterized in that: said sealing mechanism comprises seal connector, sealing clamp, bearing, axle sleeve, first seal ring and second seal ring; Offer said attachment hole and said compressed air inlet on the said seal connector; Said seal connector is installed in the said mounting hole hermetically and stretches in the said seal chamber; And the end with said compressed air inlet is positioned at outside the said seal chamber; Said bearing is arranged in the said attachment hole, and said sealing clamp is installed on the outer end of the said seal chamber of being positioned at of said seal connector hermetically, and offers on the said sealing clamp and the corresponding through hole of said attachment hole; Said axle sleeve, first seal ring and second seal ring all are sheathed on the said transmission shaft; And said axle sleeve is between said first seal ring and said second seal ring, and said transmission shaft passes said through hole successively and said attachment hole stretches in the said seal chamber, and said drive bearing is stated from the said bearing.
3. the transmission device that rotatablely moves as claimed in claim 2; It is characterized in that: said attachment hole runs through the rear and front end of said seal connector; The middle part of said seal connector outwards protrudes out a junction, and the front end of said seal connector stretches in the said seal chamber, and said joint is connected with the sidewall of said seal chamber hermetically; The rear end of said seal connector is positioned at outside the said seal chamber, and said compressed air inlet is opened in the rear end of said seal connector.
4. the transmission device that rotatablely moves as claimed in claim 2; It is characterized in that: said first seal ring is pressed in the through hole of said sealing clamp; Said second seal ring is pressed in the attachment hole of said seal connector; And said second seal ring is pressed into the front end of said seal connector, said first seal ring and second seal ring all with said transmission shaft interference fit.
5. the transmission device that rotatablely moves as claimed in claim 4 is characterized in that: said bearing comprises two, and two said bearings all are arranged in the said attachment hole, and two bearings is arranged between said first seal ring and said second seal ring.
6. the transmission device that rotatablely moves as claimed in claim 5; It is characterized in that: said axle sleeve comprises external axle sleeve and internal axle sleeve; Said internal axle sleeve is sheathed on the said transmission shaft, and said external axle sleeve is sheathed on outside the said internal axle sleeve, and said external axle sleeve and internal axle sleeve are all between two said bearings.
7. the transmission device that rotatablely moves as claimed in claim 3; It is characterized in that: said sealing mechanism also comprises first seal ring and second seal ring; Said first seal ring is located between said sealing clamp and the said seal connector, and said second seal ring is arranged between the sidewall of said joint and said seal chamber.
8. the transmission device that rotatablely moves as claimed in claim 1 is characterized in that: said driving mechanism is an actuating motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220224168 CN202629027U (en) | 2012-05-17 | 2012-05-17 | Rotary motion transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220224168 CN202629027U (en) | 2012-05-17 | 2012-05-17 | Rotary motion transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202629027U true CN202629027U (en) | 2012-12-26 |
Family
ID=47382232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220224168 Expired - Fee Related CN202629027U (en) | 2012-05-17 | 2012-05-17 | Rotary motion transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202629027U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102678934A (en) * | 2012-05-17 | 2012-09-19 | 东莞宏威数码机械有限公司 | Sealed transmission device |
| CN103912588A (en) * | 2012-12-28 | 2014-07-09 | 财团法人金属工业研究发展中心 | High-sensitivity vacuum power introducing device and vacuum processing equipment |
| CN107575578A (en) * | 2017-10-17 | 2018-01-12 | 江苏港星方能超声洗净科技有限公司 | Vacuum rotatory sealing structure |
| CN108518482A (en) * | 2018-06-11 | 2018-09-11 | 江苏港星方能超声洗净科技有限公司 | The rotary seal structure of special-shaped vacuum slot |
| CN109058438A (en) * | 2018-09-19 | 2018-12-21 | 珠海格力电器股份有限公司 | Dynamic sealing device of vacuum equipment and vacuum equipment |
| CN112696495A (en) * | 2019-10-22 | 2021-04-23 | 湖北亿钧耀能新材股份公司 | Guiding mechanism with dynamic seal and using method thereof |
| CN113236782B (en) * | 2021-04-29 | 2023-11-17 | 西安航天精密机电研究所 | High-pressure-resistant low-friction dynamic sealing structure |
-
2012
- 2012-05-17 CN CN 201220224168 patent/CN202629027U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102678934A (en) * | 2012-05-17 | 2012-09-19 | 东莞宏威数码机械有限公司 | Sealed transmission device |
| CN103912588A (en) * | 2012-12-28 | 2014-07-09 | 财团法人金属工业研究发展中心 | High-sensitivity vacuum power introducing device and vacuum processing equipment |
| CN107575578A (en) * | 2017-10-17 | 2018-01-12 | 江苏港星方能超声洗净科技有限公司 | Vacuum rotatory sealing structure |
| CN108518482A (en) * | 2018-06-11 | 2018-09-11 | 江苏港星方能超声洗净科技有限公司 | The rotary seal structure of special-shaped vacuum slot |
| CN109058438A (en) * | 2018-09-19 | 2018-12-21 | 珠海格力电器股份有限公司 | Dynamic sealing device of vacuum equipment and vacuum equipment |
| CN112696495A (en) * | 2019-10-22 | 2021-04-23 | 湖北亿钧耀能新材股份公司 | Guiding mechanism with dynamic seal and using method thereof |
| CN113236782B (en) * | 2021-04-29 | 2023-11-17 | 西安航天精密机电研究所 | High-pressure-resistant low-friction dynamic sealing structure |
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| C14 | Grant of patent or utility model | ||
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Date of cancellation: 20141205 Granted publication date: 20121226 |
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