CN202625835U - System for recovering hydrogen chloride from reduction exhaust gas - Google Patents

System for recovering hydrogen chloride from reduction exhaust gas Download PDF

Info

Publication number
CN202625835U
CN202625835U CN2012201519229U CN201220151922U CN202625835U CN 202625835 U CN202625835 U CN 202625835U CN 2012201519229 U CN2012201519229 U CN 2012201519229U CN 201220151922 U CN201220151922 U CN 201220151922U CN 202625835 U CN202625835 U CN 202625835U
Authority
CN
China
Prior art keywords
hydrogenchloride
chlorosilane
absorption
utility
model
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2012201519229U
Other languages
Chinese (zh)
Inventor
司文学
汤传斌
肖荣晖
杨永亮
严大洲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China ENFI Engineering Corp
Original Assignee
China ENFI Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China ENFI Engineering Corp filed Critical China ENFI Engineering Corp
Priority to CN2012201519229U priority Critical patent/CN202625835U/en
Application granted granted Critical
Publication of CN202625835U publication Critical patent/CN202625835U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Gas Separation By Absorption (AREA)

Abstract

The utility model provides a system for recovering hydrogen chloride from reduction exhaust gas. The system for recovering the hydrogen chloride from the reduction exhaust gas comprises a leaching device, an absorption device and a desorption device. Leaching liquid is arranged in the leaching device and used for carrying out leaching treatment to the reduction exhaust gas, and therefore chlorosilane in the reduction exhaust gas can be absorbed by the leaching liquid to obtain leaching solution containing the chlorosilane and a first gas mixture containing hydrogen and the hydrogen chloride. Absorbent material is arranged in the absorption device, the absorption device is used to receive the first gas mixture from the leaching device and carry out absorption treatment to the first gas mixture through the absorbent material, and therefore the hydrogen chloride in the first gas mixture is enabled to be absorbed to obtain an absorption product containing the hydrogen chloride and obtain the hydrogen. The desorption device is used to receive the absorption product containing the hydrogen chloride from the adsorption device and carry out desorption treatment to the absorption product, and therefore the hydrogen chloride in the absorption product is separated out. By means of the system for recovering the hydrogen chloride from the reduction exhaust gas, the hydrogen chloride in the reduction exhaust gas can be effectively recovered.

Description

From reduction tail gas, reclaim the system of hydrogenchloride
Technical field
The utility model relates to the system that from reduction tail gas, reclaims hydrogenchloride.
Background technology
In existing Siemens Method dry back was knocked off skill, the byproduct hydrogen chloride overwhelming majority was lost.
Thereby the technology that from reduction tail gas, reclaims hydrogenchloride at present still remains to be improved.
The utility model content
The utility model is intended to solve at least one of technical problem that exists in the prior art.For this reason, the utility model purpose is to propose a kind of method that can effectively from reduction tail gas, reclaim hydrogenchloride.
Some embodiment according to the utility model; The utility model has also proposed a kind of system that from reduction tail gas, reclaims hydrogenchloride; Said reduction tail gas contains hydrogen, hydrogenchloride and chlorosilane, and said system comprises: elution device is provided with leacheate in the said elution device; Being used for that said reduction tail gas is carried out drip washing handles; So that make the chlorosilane in the said reduction tail gas absorbed by said leacheate, obtain containing the leacheate of chlorosilane, and first gaseous mixture that contains hydrogen and hydrogenchloride; Absorption unit; Said absorption unit links to each other with said elution device; And be provided with absorption agent in the said absorption unit,, make that the hydrogenchloride in said first gaseous mixture is absorbed so that receive said first gaseous mixture and utilize said absorption agent that said first gaseous mixture is absorbed processing from said elution device; Obtain containing the absorption product of hydrogenchloride, and hydrogen; And desorption apparatus; Said desorption apparatus links to each other with said absorption unit; So that from said absorption unit, receive the said absorption product that contains hydrogenchloride, the said absorption product that contains hydrogenchloride is carried out desorb handle, so that make that the hydrogenchloride in the said absorption product is separated out.Utilization can be implemented the aforesaid method that from reduction tail gas, reclaims hydrogenchloride effectively according to the system that from reduction tail gas, reclaims hydrogenchloride of the utility model embodiment, thereby reclaims the hydrogenchloride in the reduction tail gas effectively.
According to the embodiment of the utility model, the above-mentioned system that from reduction tail gas, reclaims hydrogenchloride can also comprise following additional technical feature:
According to an embodiment of the utility model, said leacheate is a chlorosilane.Thus, can effectively the chlorosilane that is comprised in the reduction tail gas be separated with hydrogen chloride gas with hydrogen.
According to an embodiment of the utility model, said elution device is to be suitable for carrying out the device that bubbling drip washing is handled.Thus, can further improve the effect that drip washing is handled, thereby improve the efficient that from reduction tail gas, reclaims hydrogenchloride.
An embodiment according to the utility model; Further comprise condensing works; Said condensing works links to each other with absorption unit with said elution device respectively; Before said first gaseous mixture is absorbed processing, said first gaseous mixture is carried out condensation process, so that separate chlorosilane remaining in said first gaseous mixture.Thus, can further improve the purity of resultant hydrogenchloride, and improve the organic efficiency of chlorosilane.
According to an embodiment of the utility model, further comprise the isolating chlorosilane of institute is purified, so that obtain high-purity chlorosilane.Thus, can further improve the purity and the organic efficiency of chlorosilane.
According to an embodiment of the utility model, said condensing equipment is to be suitable for pressurizeing the device of condensation.Thus, can realize the condensation of chlorosilane effectively, and reduce the cost of condensation process, thus the industrial cost that reduces reduction tail gas.
According to an embodiment of the utility model, the temperature in the said condensing works is-35--45 degree centigrade, pressure is 0.9-1.2MPa.Can realize the condensation of chlorosilane effectively, and reduce the cost of condensation process, thus the industrial cost that reduces reduction tail gas.
An embodiment according to the utility model further comprises the chlorosilane purification devices, and said chlorosilane purification devices links to each other with condensing works with said elution device respectively, so that receive and the purifying chlorosilane from said elution device and condensing works.Thus, can further improve the purity and the organic efficiency of chlorosilane.
According to an embodiment of the utility model, said absorption agent is a chlorosilane.Thus, can realize absorption effectively, thereby improve the efficient that reduction tail gas is handled hydrogenchloride.
According to an embodiment of the utility model, said desorption apparatus is the device that is suitable for carrying out pressure distillation.Thus, can further improve the efficient that reclaims hydrogenchloride.
According to an embodiment of the utility model, the pressure in the said desorption apparatus is 0.8-0.9MPa, and temperature is 70-80 degree centigrade.Thus, can further improve the efficient of hydrogenchloride desorb, thereby improve the efficient that reclaims hydrogenchloride.
Additional aspect of the utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize through the practice of the utility model.
Description of drawings
Above-mentioned and/or additional aspect of the utility model and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 is the schematic flow sheet according to the method for hydrogenchloride that from reduction tail gas, reclaims of an embodiment of the utility model.
Fig. 2 is the schematic flow sheet according to the method for hydrogenchloride that from reduction tail gas, reclaims of another embodiment of the utility model.
Fig. 3 is the synoptic diagram according to the system of hydrogenchloride that from reduction tail gas, reclaims of an embodiment of the utility model.
Fig. 4 is the synoptic diagram according to the system of hydrogenchloride that from reduction tail gas, reclaims of another embodiment of the utility model.
Embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
In the description of the utility model; It will be appreciated that; The orientation of indications such as term " " center ", " vertically ", " laterally ", " on ", D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", " outward " or position relation are for based on orientation shown in the drawings or position relation; only be to describe with simplifying for the ease of describing the utility model; rather than the device or the element of indication or hint indication must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction to the utility model.In addition, term " first ", " second " only are used to describe purpose, and can not be interpreted as indication or hint relative importance.
In the description of the utility model, need to prove that only if clear and definite regulation and qualification are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can link to each other indirectly through intermediary, can be the connection of two element internals.For those of ordinary skill in the art, can particular case understand the concrete implication of above-mentioned term in the utility model.
In addition, in the description of the utility model, except as otherwise noted, the implication of " a plurality of " is two or more.
Understand for ease, at first describe the method that from reduction tail gas, reclaims hydrogenchloride according to the utility model embodiment with reference to figure 1.As shown in Figure 1, comprise the following steps: according to the method that from reduction tail gas, reclaims hydrogenchloride of the utility model embodiment
S100 drip washing is handled
At first, utilize leacheate will reduce tail gas and carry out drip washing and handle,, obtain containing the leacheate of chlorosilane so that make the chlorosilane in the reduction tail gas absorbed by leacheate, and first gaseous mixture that contains hydrogen and hydrogenchloride.Employed in this article term " reduction tail gas " is meant the gaseous mixture that contains hydrogen, hydrogenchloride and chlorosilane that in production of polysilicon industry, is produced.According to the embodiment of the utility model, the type of leacheate does not receive special restriction, as long as can make chlorosilane be dissolved in this leacheate, and hydrogen and hydrogenchloride can not be dissolved in wherein and gets final product.An embodiment according to the utility model can use chlorosilane as leacheate.Thus, can effectively the chlorosilane that is comprised in the reduction tail gas be separated with hydrogen chloride gas with hydrogen, and can reduce the industriallization cost.According to the embodiment of the utility model, the mode that the drip washing that can adopt is handled does not receive special restriction.According to a concrete example, can adopt bubbling drip washing to handle.Thus, can further improve the effect that drip washing is handled, thereby improve the efficient that from reduction tail gas, reclaims hydrogenchloride.Chlorosilane is being carried out after separating, can first gaseous mixture absorbed processing, so that hydrogen is separated with hydrogen chloride gas.
With reference to figure 2, according to an embodiment of the utility model, before first gaseous mixture is absorbed processing, first gaseous mixture is carried out condensation process (S400), so that separate chlorosilane remaining in said first gaseous mixture.Thus, can further improve the purity of resultant hydrogenchloride, and improve the organic efficiency of chlorosilane.According to some examples of the utility model, said condensation process is the pressurization condensation process.Thus, can realize the condensation of chlorosilane effectively, and reduce the cost of condensation process, thus the industrial cost that reduces reduction tail gas.According to a concrete example of the utility model, said pressurization condensation process is under the pressure of 0.9-1.2MPa, carries out under-35--45 degree centigrade the temperature.Thus, can realize the condensation of chlorosilane effectively, and reduce the cost of condensation process, thus the industrial cost that reduces reduction tail gas.
S20 absorbs processing
Next, utilize absorption agent that first gaseous mixture is absorbed processing,, obtain containing the absorption product of hydrogenchloride so that the hydrogenchloride in the gaseous mixture of winning is absorbed, and hydrogen.Because hydrogenchloride and the different solubility of hydrogen in absorption agent, thereby hydrogenchloride can be dissolved in the absorption agent, hydrogen then can be used as the gas discharge, thus, has realized separating of hydrogenchloride and hydrogen.According to the embodiment of the utility model, the type of the absorption agent that can adopt does not receive special restriction.According to the concrete example of the utility model, can adopt chlorosilane as absorption agent.Thus, can realize absorption effectively, thereby improve the efficient that reduction tail gas is handled hydrogenchloride.Simultaneously can in absorption process, not introduce non-existent material in other production of polysilicon industries.
The S300 desorb is handled
The said absorption product that contains hydrogenchloride is carried out desorb handle,, and reclaim said hydrogenchloride so that make that the hydrogenchloride in the said absorption product is separated out.According to some embodiment of the utility model, the method for carrying out the desorb processing does not receive special restriction.According to an embodiment of the utility model, can carry out desorb through pressure distillation and handle.Thus, can be simply, easily the absorption product of absorbing hydrogen chloride is carried out dissection process.According to some examples of the utility model, said desorb is handled and is carried out through pressure distillation.Thus, can further improve the efficient that reclaims hydrogenchloride.According to a concrete example of the utility model, said pressure distillation is under the pressure of 0.8-0.9MPa, carries out under 70-80 degree centigrade the temperature.Thus, can further improve the efficient of hydrogenchloride desorb, thereby improve the efficient that reclaims hydrogenchloride.
Through utilizing the method that from reduction tail gas, reclaims hydrogenchloride according to the utility model embodiment, can from reduction tail gas, reclaim hydrogenchloride effectively, improved the utilising efficiency of hydrogenchloride, reduced the production cost of polysilicon industry, avoided pollution problem.
Understand for ease, describe in the face of being used for implementing the above-mentioned system that reclaims the method for hydrogenchloride from reduction tail gas down.
According to the utility model on the other hand, the utility model provides a kind of system that from reduction tail gas, reclaims hydrogenchloride.With reference to figure 3, comprise according to the system 1000 that from reduction tail gas, reclaims hydrogenchloride of the utility model embodiment: elution device 100, absorption unit 200 and desorption apparatus 300.
Embodiment according to the utility model; Be provided with leacheate in the elution device 100; The tail gas that is used for reducing carries out drip washing to be handled; So that make the chlorosilane in the said reduction tail gas absorbed by said leacheate, obtain containing the leacheate of chlorosilane, and first gaseous mixture that contains hydrogen and hydrogenchloride.According to the embodiment of the utility model, the type of leacheate does not receive special restriction, as long as can make chlorosilane be dissolved in this leacheate, and hydrogen and hydrogenchloride can not be dissolved in wherein and gets final product.An embodiment according to the utility model can use chlorosilane as leacheate.Thus, can effectively the chlorosilane that is comprised in the reduction tail gas be separated with hydrogen chloride gas with hydrogen, and can reduce the industriallization cost.According to the embodiment of the utility model, the mode that the drip washing that can adopt is handled does not receive special restriction.According to a concrete example, can adopt bubbling drip washing to handle.Thus, can further improve the effect that drip washing is handled, thereby improve the efficient that from reduction tail gas, reclaims hydrogenchloride.Chlorosilane is being carried out after separating, can first gaseous mixture absorbed processing, so that hydrogen is separated with hydrogen chloride gas.With reference to figure 4, an embodiment according to the utility model further comprises condensing works 400, and condensing works 400 links to each other with absorption unit 200 with elution device 100 respectively, so that separate chlorosilane remaining in first gaseous mixture.Thus, can further improve the purity of resultant hydrogenchloride, and improve the organic efficiency of chlorosilane.According to some examples of the utility model, condensing equipment 400 is the device of the condensation that is suitable for pressurizeing.Thus, can realize the condensation of chlorosilane effectively, and reduce the cost of condensation process, thus the industrial cost that reduces reduction tail gas.According to a concrete example of the utility model, the temperature in the condensing works 400 are-35--45 degree centigrade, pressure is 0.9-1.2MPa.Thus, can realize the condensation of chlorosilane effectively, and reduce the cost of condensation process, thus the industrial cost that reduces reduction tail gas.An embodiment according to the utility model; Further comprise chlorosilane purification devices (not shown); The chlorosilane purification devices links to each other with condensing works 200 with elution device 100 respectively; So that receive isolating chlorosilane from the reduction tail gas and first gaseous mixture from elution device 100 and condensing works 300, and the chlorosilane of being accepted carried out purifying.Thus, can further improve the purity and the organic efficiency of chlorosilane.
Embodiment according to the utility model; Absorption unit 200 links to each other with elution device 100; And be provided with absorption agent in the absorption unit 200,, make that the hydrogenchloride in said first gaseous mixture is absorbed so that receive first gaseous mixture and utilize absorption agent that said first gaseous mixture is absorbed processing from elution device 100; Obtain containing the absorption product of hydrogenchloride, and hydrogen.Because hydrogenchloride and the different solubility of hydrogen in absorption agent, thereby hydrogenchloride can be dissolved in the absorption agent, hydrogen then can be used as the gas discharge, thus, has realized separating of hydrogenchloride and hydrogen.According to the embodiment of the utility model, the type of the absorption agent that can adopt does not receive special restriction.According to the concrete example of the utility model, can adopt chlorosilane as absorption agent.Thus, can realize absorption effectively, thereby improve the efficient that reduction tail gas is handled hydrogenchloride.Simultaneously can in absorption process, not introduce non-existent material in other production of polysilicon industries.
Embodiment according to the utility model; Desorption apparatus 300 links to each other with absorption unit 200; So that from absorption unit 200, receive the absorption product that contains hydrogenchloride, the absorption product that will contain hydrogenchloride is carried out the desorb processing, so that make that the hydrogenchloride in the absorption product is separated out.Utilization can be implemented the aforesaid method that from reduction tail gas, reclaims hydrogenchloride effectively according to the system 1000 that from reduction tail gas, reclaims hydrogenchloride of the utility model embodiment, thereby reclaims the hydrogenchloride in the reduction tail gas effectively.
Utilization is according to a kind of system that from reduction tail gas, reclaims hydrogenchloride of the utility model embodiment; Reclaim hydrogenchloride in the reduction tail gas that can from production of polysilicon technology, produce effectively; And cost is low, simple to operate, can not produce any pollution simultaneously, meets the requirement of national environmental protection.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained among at least one embodiment or example of the utility model.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.

Claims (10)

1. system that from reduction tail gas, reclaims hydrogenchloride, said reduction tail gas contains hydrogen, hydrogenchloride and chlorosilane, it is characterized in that, and said system comprises:
Elution device; Be provided with leacheate in the said elution device, be used for that said reduction tail gas is carried out drip washing and handle, so that make the chlorosilane in the said reduction tail gas absorbed by said leacheate; Obtain containing the leacheate of chlorosilane, and first gaseous mixture that contains hydrogen and hydrogenchloride;
Absorption unit; Said absorption unit links to each other with said elution device; And be provided with absorption agent in the said absorption unit,, make that the hydrogenchloride in said first gaseous mixture is absorbed so that receive said first gaseous mixture and utilize said absorption agent that said first gaseous mixture is absorbed processing from said elution device; Obtain containing the absorption product of hydrogenchloride, and hydrogen;
Desorption apparatus; Said desorption apparatus links to each other with said absorption unit; So that from said absorption unit, receive the said absorption product that contains hydrogenchloride, the said absorption product that contains hydrogenchloride is carried out desorb handle, so that make that the hydrogenchloride in the said absorption product is separated out.
2. system according to claim 1 is characterized in that, said leacheate is a chlorosilane.
3. system according to claim 1 is characterized in that, said elution device is to be suitable for carrying out the device that bubbling drip washing is handled.
4. system according to claim 1; It is characterized in that; Further comprise condensing works, said condensing works links to each other with absorption unit with said elution device respectively, before said first gaseous mixture is absorbed processing; Said first gaseous mixture is carried out condensation process, so that separate chlorosilane remaining in said first gaseous mixture.
5. system according to claim 4 is characterized in that, said condensing equipment is to be suitable for pressurizeing the device of condensation.
6. system according to claim 5 is characterized in that, the temperature in the said condensing works is-and 35-45 degree centigrade, pressure is 0.9-1.2MPa.
7. system according to claim 4 is characterized in that, further comprises the chlorosilane purification devices, and said chlorosilane purification devices links to each other with condensing works with said elution device respectively, so that receive and the purifying chlorosilane from said elution device and condensing works.
8. system according to claim 1 is characterized in that, said absorption agent is a chlorosilane.
9. system according to claim 1 is characterized in that, said desorption apparatus is the device that is suitable for carrying out pressure distillation.
10. system according to claim 8 is characterized in that, the pressure in the said desorption apparatus is 0.8-0.9MPa, and temperature is 70-80 degree centigrade.
CN2012201519229U 2012-04-11 2012-04-11 System for recovering hydrogen chloride from reduction exhaust gas Expired - Lifetime CN202625835U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012201519229U CN202625835U (en) 2012-04-11 2012-04-11 System for recovering hydrogen chloride from reduction exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012201519229U CN202625835U (en) 2012-04-11 2012-04-11 System for recovering hydrogen chloride from reduction exhaust gas

Publications (1)

Publication Number Publication Date
CN202625835U true CN202625835U (en) 2012-12-26

Family

ID=47379055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012201519229U Expired - Lifetime CN202625835U (en) 2012-04-11 2012-04-11 System for recovering hydrogen chloride from reduction exhaust gas

Country Status (1)

Country Link
CN (1) CN202625835U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110947281A (en) * 2018-09-27 2020-04-03 中国石油化工股份有限公司 Device and method for treating chlorine-containing tail gas, mixture containing hydrochloric acid and application of mixture
CN114436215A (en) * 2021-12-29 2022-05-06 安徽华塑股份有限公司 Dehydrogenation process of hydrogen chloride synthesis gas

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110947281A (en) * 2018-09-27 2020-04-03 中国石油化工股份有限公司 Device and method for treating chlorine-containing tail gas, mixture containing hydrochloric acid and application of mixture
CN114436215A (en) * 2021-12-29 2022-05-06 安徽华塑股份有限公司 Dehydrogenation process of hydrogen chloride synthesis gas
CN114436215B (en) * 2021-12-29 2023-12-29 安徽华塑股份有限公司 Dehydrogenation process of hydrogen chloride synthesis gas

Similar Documents

Publication Publication Date Title
CN101444681B (en) Method for recovering tail gas from trichlorosilane production and special equipment thereof
CN101978234B (en) Separation method for blast furnace gas
CN101723338B (en) Method for extracting krypton-xenon from liquid oxygen
CN1951801A (en) Process for preparing high purity hydrochloric acid by circularly absorbing hydrogen chloride by-product
CN113277471B (en) Method and device for recovering reduction tail gas in polycrystalline silicon production
CN102838121B (en) Method and device for recycling tail gas in production of polycrystalline silicon
CN106139890A (en) Cold-rolled steel sheet heat treatment nitrogen hydrogen mixed tail gas reclaims the apparatus and method purifying
CN102173382B (en) Byproduct hydrogen purification recovery system and method in chlorine industry
CN202625835U (en) System for recovering hydrogen chloride from reduction exhaust gas
CN102641646A (en) Method for recovering hydrogen chloride from reduction tail gas
CN102642812A (en) System for recovering hydrogen chloride from reductive tail gas
CN202766304U (en) Polysilicon production tail gas recycling device
CN104803357A (en) Method for purifying high-purity HCl (hydrogen chloride) in tetrachloroethylene device
CN111174530A (en) Method and device for separating and purifying krypton and xenon
CN101948707A (en) Purification device for oxygen-containing coal bed methane
CN211716983U (en) Device for separating and purifying krypton and xenon
CN114345084A (en) Device and method for absorbing methyl chloride in waste gas by ionic liquid at low temperature and variable pressure
CN104140103B (en) The system of process polycrystalline silicon reduction exhaust
CN204275784U (en) A kind of greenhouse gases are separated removal system
CN104003403B (en) The desorption method of non-condensable gas in a kind of chlorosilane
CN202446969U (en) Water cooling type variable pressure waste gas absorption recycling device
CN214437715U (en) Vapor deposition furnace tail gas recovery device and vapor deposition furnace system
CN204039067U (en) The system of process polycrystalline silicon reduction exhaust
CN201809322U (en) Oxygenous coal bed gas purifying device
CN114477094B (en) Deep desorption process for hydrochloric acid

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20121226