CN202592197U - Suspension base plate polishing device capable of being driven actively - Google Patents
Suspension base plate polishing device capable of being driven actively Download PDFInfo
- Publication number
- CN202592197U CN202592197U CN 201220202776 CN201220202776U CN202592197U CN 202592197 U CN202592197 U CN 202592197U CN 201220202776 CN201220202776 CN 201220202776 CN 201220202776 U CN201220202776 U CN 201220202776U CN 202592197 U CN202592197 U CN 202592197U
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- Prior art keywords
- polishing
- basal disc
- base plate
- conditioning ring
- suspension base
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- Expired - Fee Related
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- 239000000725 suspension Substances 0.000 title claims abstract description 53
- 238000007494 plate polishing Methods 0.000 title abstract 3
- 238000005498 polishing Methods 0.000 claims abstract description 67
- 238000000227 grinding Methods 0.000 claims abstract description 18
- 239000003082 abrasive agent Substances 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 230000003750 conditioning effect Effects 0.000 claims description 54
- 239000012530 fluid Substances 0.000 claims description 24
- 239000002245 particle Substances 0.000 abstract description 18
- 230000006378 damage Effects 0.000 abstract description 12
- 238000011161 development Methods 0.000 abstract description 2
- 230000003746 surface roughness Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000012512 characterization method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000012188 paraffin wax Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000012937 correction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 206010061245 Internal injury Diseases 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000011121 hardwood Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a suspension base plate polishing device capable of being driven actively. The polishing device comprises an actively-driven grinding transmission device, a suspension base plate, a correcting ring and a grinding disc, wherein the actively-driven grinding transmission device is fixedly connected with the correcting ring, and drives the correcting ring to rotate; the correcting ring is fixed on the grinding disc through a fixed part, and can be rotated around a fixed central line; the suspension base plate is locked in the correcting ring. The polishing device is characterized in that a plurality of wedge grooves are arranged along the circumferential direction of the suspension base plate; the wedge grooves are full of a polishing solution; the correcting ring drives the suspension base plate to rotationally move; the suspension base plate produces a hydrodynamic pressure during the rotational movement, so a work piece is floated; and the work piece is contacted with an abrasive material of the polishing solution. The suspension base plate polishing device capable of being driven actively disclosed by the utility model is simple in structure and low in cost; the surface roughness and flatness of the work piece can be improved; the work piece is contacted with polishing particles flexibly, so the internal damage of the work piece caused by polishing is reduced; the operating condition is simple; and the polishing device has a wide development prospect.
Description
Technical field
But the utility model relates to a kind of suspension basal disc burnishing device of active drive.
Background technology
Grinding is to go up and inject the different size abrasive material at rigidity lap tool (like soft metal such as cast iron, tin, aluminium or hardwood, plastics etc.), under certain pressure, through the relative slip of lap tool and workpiece, removes the micro-material of finished surface by the cutting of abrasive particle.
Original plane lapping equipment is a kind of processing method of online correction; The frictional force of main inner edge that relies on the workpiece polishing disk on conditioning ring and the basal disc and outside and produce rotation; Be the milling apparatus of a kind of non-active drive conditioning ring and basal disc, as depicted in figs. 1 and 2.This overlaps plane lapping equipment by retainer, workpiece, and basal disc, conditioning ring, the load piece, polishing disk and primary shaft driving device constitute.Workpiece is affixed on the basal disc, rotates the relative slip of accomplishing basal disc and abrasive disk thereby drive abrasive disk through main shaft, drives abrasive material in this way and removes the surface of the work material.But through the proof of practice, there are following two kinds of problems in this equipment:
(1) this polishing grinding equipment is the burnishing device of a kind of non-active drive conditioning ring and basal disc, in this device since the linear velocity of polishing disk outside greater than the linear velocity of inner edge.So it is also big more that the outside frictionally drives the speed of basal disc and conditioning ring.The speed that the inner edge that conditioning ring and basal disc are in polishing disk and outside are produced by frictional force is different and carry out rotation; Because the size of frictional force can receive the influence of polishing disk surface appearance; And the polishing disk surface appearance has very big uncertainty (mainly being by causing the opportunity that adds abrasive material); So this finishing method can cause the rotary speed of polishing disk inhomogeneous, thereby influences quality of finish.
(2) in the ultraprecise processing, the affected layer of needs acquisition often is few, the surface of ultra-smooth, and the contact condition of abrasive particle and surface of the work is depended in the formation on this surface.Because the polishing grinding equipment abrasive material and the surface of the work of non-active drive conditioning ring and basal disc are the rigidity contact conditions, so the damage layer thickness of its generation is bigger than software fluid in contact polishing technology.
Metamorphic layer is few, the important means of super-smooth surface thereby the fluid polishing technology obtains for soft contact becomes.Float glass process polishing, the polishing of bath method, elastic emission polishing, magnetic fluid polishing, ER fluid polishing, magnetic flow liquid polishing, fluid oscillation polishing, ultrasonic magnetic rheology composite polishing, jet polishing, liquid injection and composite polishing method thereof have appearred in fluid polishing technology in succession.These methods exist shortcomings such as financial cost height, control system complex, clearance are low.
For the not high problem of surface quality of the polishing grinding equipment that overcomes above-mentioned non-active drive conditioning ring and basal disc, number of patent application (200910153716.4) proposes the conditioning ring driving mechanism of active drive lapping device, and is as shown in Figure 3.This mechanism can overcome the deficiency that non-active drive, grinding precision are lower, cost is high that online correction drives lapping device, and can obtain higher surface quality.But this device still can't overcome the problem that rigidity contacts the affected layer that is produced in the ultraprecision grinding polishing.
Summary of the invention
In order to overcome the problem that affected layer thickness is big, surface quality is not high that exists in the existing polishing grinding equipment; The utility model provides soft contact of a kind of abrasive material and workpiece to make the affected layer less thick, but can obtain the suspension basal disc burnishing device of the active drive of higher surface quality simultaneously again.
The technical scheme that the utility model adopts is:
But the suspension basal disc burnishing device of active drive comprises active drive grinding transmission device, suspension basal disc, conditioning ring and abrasive disk, and said active drive is ground transmission device and is fixedly connected and drives said conditioning ring rotation with said conditioning ring; Said conditioning ring is fixed on the said abrasive disk through fixture and can rotates around the fixed center line; Said suspension basal disc is stuck in the said conditioning ring, it is characterized in that: said suspension basal disc along the circumferential direction is provided with a plurality of wedge-shaped slots, is full of polishing fluid in the said wedge-shaped slot; Said conditioning ring drives the gyration of said suspension basal disc, and said suspension basal disc produces Hydrodynamic under gyration float workpiece, and described workpiece contacts with the polishing fluid abrasive material.
Further, the external diameter of said suspension basal disc is identical with the internal diameter of said conditioning ring.
When the utility model uses; Processing work sticks in the non-wedge-shaped slot plane of suspension basal disc with paraffin; The suspension basal disc that non-wedge-shaped surface is posted workpiece (can be with workpiece such as silicon chip with paraffin; Sapphire wafer etc.) be stuck in the conditioning ring, the one side that the suspension basal disc that simultaneously workpiece is posted on the surface is provided with workpiece is placed on the abrasive disk and gets final product.Conditioning ring drives the suspension basal disc through frictional force and rotates together; Under certain speed; Floating according to dynamic pressure from principle; Liquid in the wedge-shaped slot of suspension basal disc produces dynamic pressure (also claiming dynamic pressure thrust bearing operation principle), makes workpiece float a height H, thereby reaches the purpose that workpiece contacts with the software of polishing fluid abrasive material.Because this moment, the carrier of workpiece was the plane basal disc,, make workpiece processing back produce the damage layer so the particle in the polishing fluid contacts with the surface of the work rigidity.
Theoretical foundation of the utility model and technical conceive:
Not damaged (metamorphic layer is few) is lacked in requirement when nanometer mechanics characterization sample prepares, surface quality is good, and the contact condition of abrasive particle and surface of the work is depended in the formation of few not damaged, super-smooth surface.Non-active drive polishing grinding equipment (as depicted in figs. 1 and 2) is when attrition process; Abrasive disk is around self axis revolution, and workpiece is controlled by anchor clamps, and the downward pressurized of machined surface is on the abrasive disk surface; And wraparound rotating shaft rotation, lapping liquid is added by the abrasive disk center.The processing mode of this rigidity contact makes characterization sample (plane test specimen) exist top layer and subsurface stratum dislocation, strain, the big equivalent damage problem of residual stress, and can't reach the ultra-smooth requirement.The conditioning ring driving mechanism (Fig. 3) of the active drive lapping device that number of patent application (200910153716.4) proposes is on the basis of original online correction processing method; Carried out the improvement of structure aspects; Installed the active drive motor additional; Make the adjustable-speed of workpiece save, in addition, active drive device in the past relies on the frictional force of roller and conditioning ring to drive the conditioning ring motion and changes Involutes Gears Transmission into; Guaranteed the accuracy of control, the pendulous device that installs additional simultaneously makes this plane polishing equipment more be prone to obtain high-quality surface of the work.After installing the conditioning ring driving mechanism (Fig. 3) of active drive lapping device additional on the non-active drive polishing grinding equipment (Fig. 1 and Fig. 2); Workpiece sticks on the basal disc of plane with paraffin; The basal disc external diameter is identical with the conditioning ring internal diameter; Conditioning ring makes basal disc produce gyration through conditioning ring and the outer peripheral friction of basal disc after being driven by the active drive device.The downward pressurized of workpiece machined surface is on the abrasive disk surface; Polishing fluid is full of between abrasive disk and workpiece; Because abrasive disk is close in the processed plane of workpiece this moment under the effect of pressure, cause the particle in the polishing fluid in process, to contact with the surface of the work rigidity, in this case; Particle can produce the damage layer to the workpiece effect in the polishing fluid, has influenced the internal performance of machined material greatly.In order to reduce workpiece damage layer, adopt the design (shown in Figure 4) of suspension basal disc, make that polishing particles and surface of the work are soft to contact.The suspension basal disc is provided with wedge-shaped slot on circumference; Utilization hydrodynamics phenomenon and powder effect: when the disk that along the circumferential direction is shaped on several clinoplains (wedge-shaped slot) is done gyration in the environment of liquid (polishing fluid); The Hydrodynamic that wedge-shaped slot produces makes basal disc float a height H; Become the soft collision of polishing particles thereby the particle in the polishing fluid does not have powerful rigidity contact when polishing workpiece, and then reduced the damage of workpiece.The conditioning ring driving mechanism of active drive lapping device with make that few not damaged of characterization sample (plane test specimen) and surface quality are high cooperating of suspension basal disc.
The beneficial effect of the utility model is embodied in:
1, device is simple, and cost is lower;
2, can improve the surface roughness and the flatness of workpiece;
3, workpiece has reduced the internal injury that polishing causes to workpiece with soft contact of polishing particles;
4, operating condition is simple, has development prospect widely.
Description of drawings
Fig. 1 is the milling apparatus front view of existing non-active drive conditioning ring and basal disc.
The milling apparatus vertical view of existing non-active drive conditioning ring of Fig. 2 and basal disc.
Fig. 3 is existing active drive lapping device conditioning ring driving mechanism overall structure sketch map.
Fig. 4 the utility model suspension polishing basal disc structural representation.
The suspension basal disc burnishing device work vertical view of Fig. 5 the utility model active drive.
The suspension basal disc burnishing device work front view of Fig. 6 the utility model active drive
Fig. 7 the utility model installs active drive conditioning ring lapping device work front view behind the suspension basal disc additional.
The specific embodiment
With reference to Fig. 4 to Fig. 7; But the suspension basal disc burnishing device of active drive; Comprise active drive grinding transmission device 6, suspension basal disc 4, conditioning ring 5 and abrasive disk 1, said active drive is ground transmission device 6 and is fixedly connected and drives said conditioning ring 5 rotations with said conditioning ring 5; Said conditioning ring 5 is fixed on the said abrasive disk 1 through fixture and can rotates around the fixed center line; Said suspension basal disc 4 is stuck in the said conditioning ring 5, it is characterized in that: said suspension basal disc 4 along the circumferential direction is provided with a plurality of wedge-shaped slots 7, is full of polishing fluid in the said wedge-shaped slot; Said conditioning ring 5 drives said suspension basal disc 4 gyrations, and said suspension basal disc 4 produces Hydrodynamic under gyration float workpiece 3, and described workpiece 3 contacts with the polishing fluid abrasive material.
Further, the external diameter of said suspension basal disc 4 is identical with the internal diameter of said conditioning ring 5.
When the utility model uses; Processing work 3 usefulness paraffin stick in the non-wedge-shaped slot plane 8 of suspension basal disc 4; The suspension basal disc 4 that non-wedge-shaped surface is posted workpiece 3 (can be with workpiece such as silicon chip with paraffin; Sapphire wafer etc.) be stuck in the conditioning ring 5, the one side that the suspension basal disc 4 that simultaneously workpiece is posted on the surface is provided with workpiece 3 is placed on the abrasive disk 1 and gets final product.Conditioning ring 5 drives suspension basal disc 4 through frictional force and rotates together; Under certain speed; Floating according to dynamic pressure from principle; Liquid in the wedge-shaped slot of suspension basal disc 4 produces dynamic pressure (also claiming dynamic pressure thrust bearing operation principle), makes workpiece 3 float a height H, thereby reaches the purpose that workpiece 3 contacts with the software of polishing fluid abrasive material.Because this moment, the carrier of workpiece was the plane basal disc,, make workpiece 3 processing backs produce the damage layer so the particle in the polishing fluid contacts with workpiece 3 surface rigidities.
Theoretical foundation of the utility model and technical conceive:
Not damaged (metamorphic layer is few) is lacked in requirement when nanometer mechanics characterization sample prepares, surface quality is good, and the contact condition of abrasive particle and surface of the work is depended in the formation of few not damaged, super-smooth surface.Non-active drive polishing grinding equipment (as depicted in figs. 1 and 2) is when attrition process; Abrasive disk is around self axis revolution, and workpiece is controlled by anchor clamps, and the downward pressurized of machined surface is on the abrasive disk surface; And wraparound rotating shaft rotation, lapping liquid is added by the abrasive disk center.The processing mode of this rigidity contact makes characterization sample (plane test specimen) exist top layer and subsurface stratum dislocation, strain, the big equivalent damage problem of residual stress, and can't reach the ultra-smooth requirement.The conditioning ring driving mechanism (shown in Figure 3) of the active drive lapping device that number of patent application (200910153716.4) proposes is on the basis of original online correction processing method; Carried out the improvement of structure aspects; Installed the active drive motor additional; Make the adjustable-speed of workpiece save, in addition, active drive device in the past relies on the frictional force of roller and conditioning ring to drive the conditioning ring motion and changes Involutes Gears Transmission into; Guaranteed the accuracy of control, the pendulous device that installs additional simultaneously makes this plane polishing equipment more be prone to obtain high-quality surface of the work.After installing the conditioning ring driving mechanism (Fig. 3) of active drive lapping device additional on the non-active drive polishing grinding equipment (Fig. 1 and Fig. 2); Workpiece sticks on the basal disc of plane with paraffin; The basal disc external diameter is identical with the conditioning ring internal diameter; Conditioning ring makes basal disc produce gyration through conditioning ring and the outer peripheral friction of basal disc after being driven by the active drive device.The downward pressurized of workpiece machined surface is on the abrasive disk surface; Polishing fluid is full of between abrasive disk and workpiece; Because abrasive disk is close in the processed plane of workpiece this moment under the effect of pressure, cause the particle in the polishing fluid in process, to contact with the surface of the work rigidity, in this case; Particle can produce the damage layer to the workpiece effect in the polishing fluid, has influenced the internal performance of machined material greatly.In order to reduce workpiece damage layer, adopt the design (shown in Figure 4) of suspension basal disc, make that polishing particles and surface of the work are soft to contact.The suspension basal disc is provided with wedge-shaped slot on circumference; Utilization hydrodynamics phenomenon and powder effect: when the disk that along the circumferential direction is shaped on several clinoplains (wedge-shaped slot) is done gyration in the environment of liquid (polishing fluid); The Hydrodynamic that wedge-shaped slot produces makes basal disc float a height H; Become the soft collision of polishing particles thereby the particle in the polishing fluid does not have powerful rigidity contact when polishing workpiece, and then reduced the damage of workpiece.The conditioning ring driving mechanism of active drive lapping device with make that few not damaged of characterization sample (plane test specimen) and surface quality are high cooperating of suspension basal disc.
The described content of this specification embodiment only is enumerating the way of realization of inventive concept; Should not being regarded as of the protection domain of the utility model only limits to the concrete form that embodiment states, the protection domain of the utility model also reach in those skilled in the art according to the utility model design the equivalent technologies means that can expect.
Claims (2)
1. but the suspension basal disc burnishing device of active drive comprises active drive grinding transmission device, suspension basal disc, conditioning ring and abrasive disk, and said active drive is ground transmission device and is fixedly connected and drives said conditioning ring rotation with said conditioning ring; Said conditioning ring is fixed on the said abrasive disk through fixture and can rotates around the fixed center line; Said suspension basal disc is stuck in the said conditioning ring, it is characterized in that: said suspension basal disc along the circumferential direction is provided with a plurality of wedge-shaped slots, is full of polishing fluid in the said wedge-shaped slot; Said conditioning ring drives the gyration of said suspension basal disc, and said suspension basal disc produces Hydrodynamic under gyration float workpiece, and described workpiece contacts with the polishing fluid abrasive material.
2. but the suspension basal disc burnishing device of active drive as claimed in claim 1, it is characterized in that: the external diameter of said suspension basal disc is identical with the internal diameter of said conditioning ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220202776 CN202592197U (en) | 2012-05-07 | 2012-05-07 | Suspension base plate polishing device capable of being driven actively |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220202776 CN202592197U (en) | 2012-05-07 | 2012-05-07 | Suspension base plate polishing device capable of being driven actively |
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| CN202592197U true CN202592197U (en) | 2012-12-12 |
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| CN 201220202776 Expired - Fee Related CN202592197U (en) | 2012-05-07 | 2012-05-07 | Suspension base plate polishing device capable of being driven actively |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102699809A (en) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | Suspension base disc polishing device capable of being actively driven |
| CN105415153A (en) * | 2015-12-09 | 2016-03-23 | 浙江工业大学 | Hydraulic pressure suspension polishing device with controllable fluid boundary |
| CN111482666A (en) * | 2020-03-13 | 2020-08-04 | 内蒙古民族大学 | Ultrasonic and gear cutting integrated gear machining device and machining method thereof |
-
2012
- 2012-05-07 CN CN 201220202776 patent/CN202592197U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102699809A (en) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | Suspension base disc polishing device capable of being actively driven |
| CN105415153A (en) * | 2015-12-09 | 2016-03-23 | 浙江工业大学 | Hydraulic pressure suspension polishing device with controllable fluid boundary |
| CN111482666A (en) * | 2020-03-13 | 2020-08-04 | 内蒙古民族大学 | Ultrasonic and gear cutting integrated gear machining device and machining method thereof |
| CN111482666B (en) * | 2020-03-13 | 2022-12-02 | 内蒙古民族大学 | Ultrasonic and gear cutting integrated gear machining device and machining method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121212 Termination date: 20150507 |
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| EXPY | Termination of patent right or utility model |