CN202582051U - Silicon material drying device - Google Patents
Silicon material drying device Download PDFInfo
- Publication number
- CN202582051U CN202582051U CN 201220031838 CN201220031838U CN202582051U CN 202582051 U CN202582051 U CN 202582051U CN 201220031838 CN201220031838 CN 201220031838 CN 201220031838 U CN201220031838 U CN 201220031838U CN 202582051 U CN202582051 U CN 202582051U
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- Prior art keywords
- silicon material
- microwave
- microwave cavity
- drying plant
- material drying
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Abstract
The utility model discloses a silicon material drying device. The silicon material drying device comprises a microwave cavity (1), a wet-wind exhaust fan (2), a wet exhaust pipe (3), a temperature sensor (5), a material frame guide rail (6) and a material frame (7), wherein the wet-wind exhaust fan (2) is installed at the top of the microwave cavity (1), the wet exhaust pipe (3) is connected with the wet-wind exhaust fan (2), the temperature sensor (5) is installed inside microwave cavity (1), the material frame guide rail (6) is fixed on the side wall of the microwave cavity (1), and the material frame (7) is installed on the material frame guide rail (6). The silicon material drying device is characterized by further comprising a microwave generator or a plurality of microwave generators which are installed inside the microwave cavity (1). The silicon material drying device can effectively improve utilization efficiency of energy, shorten process time by a large margin, and improve production efficiency.
Description
Technical field
The utility model belongs to the technical field of drying of solar energy materials, specifically, relates to a kind of silicon material drying plant and method for using thereof.
Background technology
In the production process of solar silicon wafers; Need to use a large amount of original silicon material; But the surface of original silicon material is often attaching some impurity, and this impurity can have influence on the purity of final silicon chip, and therefore original silicon material is thrown and need be carried out clean before stove uses; To remove the impurity on silicon material surface, improve the quality of silicon ingot/rod.Usually after the silicon material cleans, need it is dried processing, to remove moisture attached to silicon material surface.Drying mode commonly used at present is the heater heating, drying; Use heat exchange pattern like the disclosed special baking oven for silicon material of CN101749929A, the silicon material is placed on the Turnover Box, utilize hot-air to be heat carrier; Mode through thermal convection current, conduction is with heat transferred silicon material; The heat that the moisture absorption transfer of air on silicon material surface is come, evaporation is also overflowed, and makes the material dry tack free.But the heat of this mode of heating always from outward appearance to inner essence transmits heating, has thermograde inside and outside the silicon material, heats inhomogeneously, produces hot-spot, influences dries quantity; And the integrated environment temperature is high, and thermal loss is big, and utilization efficiency of heat energy is low; Intensification is long non-cutting time, and production efficiency is low.
The utility model content
In view of the above-mentioned shortcoming of prior art, the utility model provides a kind of material of silicon efficiently drying plant, and it uses microwave that the silicon material is heated; Improve the dries quantity of silicon material; Also effectively improve simultaneously the utilization ratio of energy, shortened the process time significantly, improved production efficiency.
The purpose of the utility model provides a kind of silicon material drying plant; This equipment comprises microwave cavity, is arranged on the dehumidifier blower fan at the top of microwave cavity, the dehumidification tube that is connected with the dehumidifier blower fan, be arranged on temperature sensor in the microwave cavity, be fixed on the material frame guide rail on the microwave cavity sidewall and be arranged on the material frame on the material frame guide rail; It is characterized in that this equipment also comprises the one or more microwave generators that are arranged in the microwave cavity.
According to one of the utility model preferred embodiment, said temperature sensor preferably is arranged on the inwall of microwave cavity.
Preferred embodiment the dehumidifier blower fan is installed in the middle body on the top of microwave cavity according to one of the utility model, and the inlet scoop of dehumidifier blower fan is connected with dehumidification tube, and the moisture in the microwave cavity is discharged.
Preferred embodiment said microwave generator can be arranged on the inwall of microwave cavity according to one of the utility model, on the inwall of preferred microwave cavity top and/or bottom, thus the penetration capacity of enhancing microwave.Preferred embodiment the microwave frequency that the utility model adopted is 900-3000MHZ according to one of the utility model, preferred 915-2450MHZ.
The principle of microwave drying is that polar water molecules is under the microwave electromagnetic field action; Polarity orientation changes along with the variation of electromagnetism direction, in the inner formation of hydrone molecular motion and mutual friction mutually, produces sharply and heats up; Polar water molecules itself becomes heater like this; Do not need heat conducting process, can reach heat drying at short notice, improve energy utilization ratio.The utility model preferably is arranged on microwave generator the top and the bottom of microwave cavity, can make the microwave of generation be prone to resonate, and improves the amplitude of molecular vibration, strengthens degree of drying.
According to one of the utility model preferred embodiment, said microwave cavity is a metal material, is preferably stainless steel.Preferably, said microwave cavity is built into the casing frame of entire equipment, also plays the effect of shield microwaves simultaneously, makes the microwave leakage amount meet the national security sanitary standard.
According to one of the utility model preferred embodiment, the material frame that is used for placing the silicon material is a sandwich construction, and this structure can improve the silicon material amount of each drying more than or equal to two-layer, enhances productivity.
According to one of the utility model preferred embodiment, said silicon material is selected from monocrystalline silicon or polycrystalline silicon material.
Above-mentioned silicon material drying plant carries out the oven dry of silicon material to be used according to following steps:
(1) the silicon material is placed on the material frame;
The material frame that (2) will occupy the silicon material is in material frame guide rail propelling microwave cavity;
(3) start the dehumidifier blower fan, treat that dehumidifier is in stable condition;
(4) open microwave generator, dry;
(5) after oven dry finished, the silicon material took out, and is cooled to room temperature, packing.
The frequency of utilization of said microwave generator is 900-3000MHZ, preferred 915-2450MHZ.
The principle that the utility model utilizes moisture that microwave is absorbed, promptly polar water molecules is under the microwave electromagnetic field action, and polarity orientation changes along with the variation of electromagnetism direction; In the inner formation of hydrone molecular motion and mutual friction mutually; Produce sharply and heat up, polar water molecules itself becomes heater like this, does not need heat conducting process; Can reach heat drying at short notice, improve energy utilization ratio.And microwave has good penetrability, can make inside and outside the product almost dryly simultaneously, and dries quantity is good.
It is specific as follows to use above-mentioned silicon material drying plant to carry out the method for silicon material oven dry: after the silicon material cleans up, the silicon material is placed in the material basket, and then the layering of material basket is placed on the multilayer dose frame.In the material frame that occupies the silicon material advanced microwave cavity along guide rail, start the dehumidifier blower fan then, treat that dehumidifier is in stable condition after, open microwave generator; Frequency of utilization is adjusted into 900-3000MHZ, and preferred 915-2450MHZ carries out stoving process; The time of microwave drying is relevant with the shape and the initial water content of silicon material, and this technology is applicable to the silicon material of different shape, like primary silicon material; Block cycle stock, broken silicon material etc., initial water content generally is no more than 3%.Compare with traditional hot conduction technology, microwave drying technology can shorten the process time more than 60%, has greatly improved operating efficiency.Take out silicon material oven dry back, need be cooled to room temperature, packing.
Description of drawings
Fig. 1 is the cutaway view of the utility model silicon material drying plant;
Fig. 2 is the cutaway view of the another kind of silicon material of the utility model drying plant;
Fig. 3 is the cutaway view of the another kind of silicon material of the utility model drying plant;
Wherein 1 is microwave cavity; 2 are the dehumidifier blower fan, and 3 is dehumidification tube, and 4 is microwave generator, and 5 is temperature sensor, and 6 is that material frame guide rail and 7 is the material frame.
The specific embodiment
The utility model silicon material drying plant referring to Fig. 1; The microwave cavity of being processed by stainless steel 1 constitutes the shell of entire equipment; The dehumidification tube 3 that is provided with dehumidifier blower fan 2 and is connected in the center of top of microwave cavity 1 with dehumidifier blower fan 2; Be provided with temperature sensor 5 in microwave cavity 1 top inner wall central authorities, material frame guide rail 6 is arranged on microwave cavity 1 inside; Guide rail 6 is provided with doubling bin 7, and wherein the top inner wall of microwave cavity 1 is provided with 4 microwave generators 4, and the bottom interior wall of microwave cavity 1 is provided with 4 microwave generators 4.
The primary polycrystalline silicon material that cleans up is placed in the material basket, on the bin of layering pose again 7, then material frame 7 is advanced in the microwave cavity 1 along material frame guide rail 6.Start dehumidifier blower fan 2, treat the dehumidifier fan condition show stable after, open microwave generator 4, uses microwave frequency to be 2450MHZ, take out behind the silicon material bone dry, to be cooled to room temperature, pack.
The utility model silicon material drying plant referring to Fig. 2; The microwave cavity of being processed by stainless steel 1 constitutes the shell of entire equipment; The dehumidification tube 3 that is provided with dehumidifier blower fan 2 and is connected in the center of top of microwave cavity 1 with dehumidifier blower fan 2; Be provided with temperature sensor 5 in microwave cavity 1 top inner wall central authorities, material frame guide rail 6 is arranged on microwave cavity 1 inside, guide rail 6 is provided with three layers of material frame 7, wherein the top inner wall of microwave cavity 1 is provided with 2 microwave generators 4.
The bulk circulation monocrystalline silicon material that cleans up is placed in the material basket, on the bin of layering pose again 7, then material frame 7 is advanced in the microwave cavity 1 along material guide rail 6.Start dehumidifier blower fan 2, treat the dehumidifier fan condition show stable after, open microwave generator 4, uses microwave frequency to be 915MHZ, take out behind the silicon material bone dry, to be cooled to room temperature, pack.
The utility model silicon material drying plant referring to Fig. 3; The microwave cavity of being processed by stainless steel 1 constitutes the shell of entire equipment; The dehumidification tube 3 that is provided with dehumidifier blower fan 2 and is connected in the center of top of microwave cavity 1 with dehumidifier blower fan 2; Be provided with temperature sensor 5 in microwave cavity 1 top inner wall central authorities, material frame guide rail 6 is arranged on microwave cavity 1 inside, guide rail 6 is provided with doubling bin 7, wherein the bottom interior wall of microwave cavity 1 is provided with 4 microwave generators 4.
The bulk circulation polycrystalline silicon material that cleans up is placed in the material basket, on the bin of layering pose again 7, then material frame 7 is advanced in the microwave cavity 1 along material guide rail 6.Start dehumidifier blower fan 2, treat the dehumidifier fan condition show stable after, open microwave generator 4, uses microwave frequency to be 915MHZ, take out behind the silicon material bone dry, to be cooled to room temperature, pack.
Experimental example 1:
Silicon material drying plant disclosed in the utility model is compared with traditional heat conduction drying plant, and the consumed power of drying efficiency and per kilogram silicon material all has very remarkable advantages.The weight of drying efficiency=at every turn dry silicon material/at every turn dry the employed time weight of electric weight/each oven dry that consumed power=oven dry is each time consumed wherein
Claims (10)
1. silicon material drying plant; This equipment comprises microwave cavity (1), is arranged on the dehumidifier blower fan (2) at the top of microwave cavity (1), the dehumidification tube (3) that is connected with dehumidifier blower fan (2), be arranged on temperature sensor (5) in the microwave cavity (1), be fixed on the material frame guide rail (6) of microwave cavity (1) sidewall and be arranged on the material frame (7) on the material frame guide rail (6); It is characterized in that this equipment also comprises the one or more microwave generators (4) that are arranged in the microwave cavity (1).
2. silicon material drying plant according to claim 1 is characterized in that said one or more microwave generator (4) is arranged on the inwall of microwave cavity (1).
3. silicon material drying plant according to claim 2 is characterized in that said one or more microwave generator (4) is arranged on the inwall of top and/or bottom of microwave cavity (1).
4. silicon material drying plant according to claim 1 is characterized in that said temperature sensor (5) is arranged on the inwall of microwave cavity (1).
5. according to the arbitrary described silicon material drying plant of claim 1-4, it is characterized in that the frequency of utilization of said microwave generator (4) is 900-3000MHZ.
6. silicon material drying plant according to claim 5 is characterized in that the frequency of utilization of said microwave generator (4) is 915-2450MHZ.
7. according to the arbitrary described silicon material drying plant of claim 1-4, it is characterized in that said microwave cavity (1) processed by metal material.
8. according to the arbitrary described silicon material drying plant of claim 1-4, it is characterized in that said metal material is a stainless steel.
9. according to the arbitrary described silicon material drying plant of claim 1-4, it is characterized in that said material frame (7) is more than or equal to two-layer sandwich construction.
10. according to the arbitrary described silicon material drying plant of claim 1-4, it is characterized in that said silicon material is selected from monocrystalline silicon or polycrystalline silicon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220031838 CN202582051U (en) | 2012-02-01 | 2012-02-01 | Silicon material drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220031838 CN202582051U (en) | 2012-02-01 | 2012-02-01 | Silicon material drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202582051U true CN202582051U (en) | 2012-12-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220031838 Expired - Lifetime CN202582051U (en) | 2012-02-01 | 2012-02-01 | Silicon material drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202582051U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108775778A (en) * | 2018-04-27 | 2018-11-09 | 中国科学院青岛生物能源与过程研究所 | A kind of drying device and drying means |
| CN109378355A (en) * | 2018-08-24 | 2019-02-22 | 曾杰 | Non-traditional photovoltaic silicon wafer based on microwave treatment is cleaned and dried technique |
-
2012
- 2012-02-01 CN CN 201220031838 patent/CN202582051U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108775778A (en) * | 2018-04-27 | 2018-11-09 | 中国科学院青岛生物能源与过程研究所 | A kind of drying device and drying means |
| CN108775778B (en) * | 2018-04-27 | 2023-11-07 | 中国科学院青岛生物能源与过程研究所 | Drying device and drying method |
| CN109378355A (en) * | 2018-08-24 | 2019-02-22 | 曾杰 | Non-traditional photovoltaic silicon wafer based on microwave treatment is cleaned and dried technique |
| CN109378355B (en) * | 2018-08-24 | 2020-05-05 | 曾杰 | Non-traditional photovoltaic silicon wafer cleaning and drying process based on microwave treatment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121205 |
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| CX01 | Expiry of patent term |