CN202540008U - Cutter servo compensating drive device for micro-nano scale cutting - Google Patents
Cutter servo compensating drive device for micro-nano scale cutting Download PDFInfo
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- CN202540008U CN202540008U CN2012201444701U CN201220144470U CN202540008U CN 202540008 U CN202540008 U CN 202540008U CN 2012201444701 U CN2012201444701 U CN 2012201444701U CN 201220144470 U CN201220144470 U CN 201220144470U CN 202540008 U CN202540008 U CN 202540008U
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- cutter
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- piezoelectric stack
- knife rest
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Abstract
The utility model discloses a cutter servo compensating drive device for micro-nano scale cutting, and aims at providing a cutter servo compensating drive device for micro-nano scale cutting, with the advantages of high location precision and repeated location precision, high response speed and good stability. The cutter servo compensating drive device for micro-nano scale cutting comprises a base with a rectangular groove, wherein a piezoelectric stack is in interference installation in the rectangular groove and is used as a drive element, a sensor fixing base is adhered on the upper surface of the base, a precise capacitor contact type displacement sensor is arranged in the sensor fixing base in a gap manner, the rear end of the base is provided with a connecting device, the connecting device and the base are of an integer, a cutter rest is connected with the base through three groups of parallel plate type thin-walled flexible hinges, the upper end of the cutter rest is provided with a stop block, the stop block and the cutter rest are of an integer, and a cutter is arranged in a cutter slot on the bottom of the cutter rest through fastening bolts. The cutter servo compensating drive device can realize precise location and drive of the cutter and can meet the requirement of micro-nano scale cutting to a cutter drive device.
Description
Technical field
The utility model relates to a kind of ultra precision cutting processing unit (plant), and particularly a kind of cutter servo compensation drive unit that is used for the micro/nano level cut belongs to mechanical precision cutting processing technique field.
Background technology
In recent years, along with the fast development of subjects such as ultra precision cutting processing, precision optics, semiconductor, storage, microelectric technique, biomedicine, people have increasingly high requirement to the Ultraprecision Machining and the equipment of micro/nano level precision.At present, the engine lathe slide carriage or the numerically controlled lathe knife rest that are used for cut generally adopt driven by motor ball-screw or manual fine thread to realize the location and the driving of cutter.The defective of above-mentioned cutter driving device is: because limited self structure and the accuracy of manufacture and the kind of drive; Have that physical dimension is excessive, positioning accuracy and shortcoming such as repetitive positioning accuracy is low, transmission is not steady; Can not well realize the needs of micro/nano level cut; Machining accuracy and surface quality that this has seriously restricted component of machine and the symmetrical aspherics curved surface of revolution etc. have seriously hindered the development of manufacturing level.
Summary of the invention
The purpose of the utility model is the deficiency that overcomes prior art, provides that a kind of positioning accuracy and repetitive positioning accuracy are high, response speed fast, the cutter servo compensation drive unit that is used for the micro/nano level cut of good stability.This device can be realized accurate straight line location and motion output function, cooperates the machine tool rotary knife rest can realize that also like movement locus be sine curve, trapezoidal, triangle or array of structures isoline, curvilinear motion.This device adopts piezoelectric stack to realize that as driving element the precision of knife rest drives, and adopts the capacitive touch displacement transducer to realize the tool displacement real-time acquisition as signal detection component.
The operation principle of the utility model is when Tool in Cutting is worked; Capacitive touch displacement transducer 6 is through contacting the displacement signal of gathering cutter in real time with block 9; Displacement signal drives piezoelectric stack 3 through control system handles output voltage signal and exports displacement accurately; Control the precision of cutter on the cutting depth direction with this, can make the minimum theoretical cutting depth of the displacement resolution of cutter 10, realize micro/nano level precision cutting processing much smaller than Metal Cutting Machine Tool.
The utility model is achieved through following technical proposals, and accompanying drawings is following:
A kind of cutter servo compensation drive unit that is used for the micro/nano level cut; Mainly form by pedestal, knife rest, cutter, driving element and signal detection component; Described driving element is a piezoelectric stack 3, and signal detection component is accurate capacitive touch displacement transducer 6, and piezoelectric stack 3 interference fit are installed in the rectangular channel that has on the pedestal 1; And through the pre-tightening mechanism pretension; Be fixed with sensor fixed pedestal 7 on the pedestal 1, accurate capacitive touch displacement transducer 6 matched in clearance are installed in the sensor fixed pedestal 7, and fixing through sensor trip bolt 8; Its front end contact probe head contacts with the block 9 of knife rest 2 ends all the time; Pedestal 1 tail end is a jockey 11, and knife rest 2 is connected with pedestal 1 through first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, and cutter 10 is installed in the cutter groove of knife rest 2 through cutter trip bolt 15.
Described sensor fixed pedestal 7 is connected through bonding mode and pedestal 1 or is same integral body with pedestal 1, and described jockey 11, first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, block 9 and knife rest 2 are same integral body with pedestal 1.
Described pre-pressing structure adopts self-locking pretension wedge 4, and its pretightning force is provided by pretension screw 5, and piezoelectric stack 3 is carried out forward pretension and reverse self-locking.
Process through the Wire EDM mode for first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, block 9, knife rest 2 and the sensor fixed pedestal 7 of same integral body with pedestal 1; Slight curves distortion output accurate straight-line displacement to blade 10 takes place in first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 under the driving force effect of piezoelectric stack 3, when the driving force of piezoelectric stack 3 is cancelled, get back to initial position.
Said accurate driver element piezoelectric stack 3 is the accurate actuation element of controllable type, when piezoelectric stack 3 is applied voltage, can realize the accurate controlled rectilinear motion of knife rest 2 along the x direction.Utilize the accurate driving action of piezoelectric stack 3; The minimum cutting depth that the moving displacement resolution ratio of blade 10 can be reached much smaller than Metal Cutting Machine Tool; Thereby realize the surperficial turning of micro/nano level; Utilize the quick response effect of piezoelectric stack 3 and the voltage-output displacement relation of substantially linear, can realize the precision control of cutting depth.
The beneficial effect of the utility model is: the accurate output of cutter actual displacement and piezoelectric stack straight-line displacement is picked up in (1) through accurate capacitive touch displacement transducer; Can be far smaller than the micro cutting of the desired cut degree of depth that stock-removing machine can reach and cutting process is carried out the Real-time Error compensation surface to be machined; Thereby can realize reducing largely workpiece surface roughness, improve the positioning accuracy of tooling system.(2) circular cutter holder of cooperation stock-removing machine; Also can realize the simple harmonic quantity of cutter, intermittently, the characteristics of motion of form such as continuous, accomplish that precision optical machinery parts, the symmetrical aspheric surface of revolution etc. are complex-curved and sinusoidal, the ultraprecise processing and the cutter compensation of the surface of the work of shapes such as rectangle, triangle or array of structures.(3) simple in structure, dynamic property is good, cost is low.
Description of drawings
Fig. 1 is the vertical view that is used for the cutter servo compensation drive unit of micro/nano level cut;
Fig. 2 is the stereogram that is used for the cutter servo compensation drive unit of micro/nano level cut;
Fig. 3 is the front view that is used for the cutter servo compensation drive unit of micro/nano level cut;
Fig. 4 is the cutter servo compensation driving device structure sketch map that is used for the micro/nano level cut;
Fig. 5 is the principle state diagram before the malformation of parallel-plate-type thin shelf flexible hinge;
Fig. 6 is the principle state diagram after the malformation of parallel-plate-type thin shelf flexible hinge.
Among the figure: 1. pedestal 2. knife rests 3. piezoelectric stacks 4. self-locking pretension wedges 5. piezoelectric stack trip bolts 6. accurate capacitive touch displacement transducer 7. sensor fixed pedestals 8. sensor trip bolts 9. blocks 10. cutters 11. jockeys 12. first parallel-plate-type thin shelf flexible hinges 13. second parallel-plate-type thin shelf flexible hinges 14. the 3rd parallel-plate-type thin shelf flexible hinge 15. blade trip bolts.
The specific embodiment
Below in conjunction with the accompanying drawing instance the utility model content is done further to describe.
Consult Fig. 1-4, this device comprises the knife rest 2 that is connected with pedestal 1 through first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, and knife rest 2 upper ends are block 9, and block 9 is same integral body with knife rest 2; Cutter 10 is installed in the cutter groove of knife rest 2 bottoms through cutter trip bolt 15; Pedestal 1 top has rectangular channel; The driving element of piezoelectric stack 3 as this device installed in interference in rectangular channel; Piezoelectric stack 3 carries out pretension through self-locking pretension wedge 4 and piezoelectric stack trip bolt 5, piezoelectric stack 3 and pedestal 1 and self-locking pretension wedge 4 equal interference fit; Pedestal 1 upper surface is bonded with sensor fixed pedestal 7; At sensor fixed pedestal 7 internal clearances accurate capacitive touch displacement transducer 6 is installed; Accurate capacitive touch displacement transducer 6 is as the signal detection component of this device; Accurate capacitive touch displacement transducer 6 is fixing through sensor trip bolt 8, and its front end contact probe head contacts with block 9 all the time; Pedestal 1 rear end is a jockey 11, is used for the fixing of this device and platen or turret.
Fig. 5-the 6th, the state diagram of parallel-plate-type thin shelf flexible hinge structural principle; First, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 is under the driving force effect of piezoelectric stack 3; Small flexural deformation can take place, thereby exports accurate straight-line displacement, among Fig. 5
δ=
F/
K,
KBe the bending stiffness of flexible hinge,
δBe the little distortion of flexible hinge,
FFor being added in the free-ended external force of flexible hinge.
Pedestal 1 fuses through first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 with knife rest 2; Need not to assemble link and transmission link; The block 9 that receives the knife rest 2 of piezoelectric stack 3 driving action and the cipher telegram of being fertilized to hold tangent displacement sensor 6 roof pressure effects does not all produce phenomenons such as friction and wear when with pedestal 1 relative motion taking place; Also do not have transmission chain error and stiffness effect, can improve the positioning accuracy of device, the stability and the service life of increase system operation greatly.
Knife rest 2 is under the driving force power effect of piezoelectric stack 3; Can realize along x direction Precision Linear Moving; And, cooperate piezoelectric stack 3 controlled displacements outputs can realize the precision positioning of cutter through accurate capacitive touch displacement transducer 6 real-time cutter 10 displacement informations of gathering.Cutter 10 is supporting formula interchangeable elements with cutter trip bolt 15, can be according to the cutter or the dissimilar molding cutter that require to change different angles and material under the actual cut condition.
The concrete course of work is following:
This device is fixed on platen or the circular cutter holder through the jockey 11 of pedestal 1 rear end, and during original state, piezoelectric stack 3 no powers carry out carrying out forward pretension and reverse self-locking along the y direction through 5 pairs of piezoelectric stacks of piezoelectric stack trip bolt 3; The front end elasticity probe of accurate capacitive touch sensor 6 contacts with block 9; When piezoelectric stack 3 energising elongations; Strain takes place down and promotes knife rest 2 and make Precision Linear Moving along the x direction in piezoelectric stack 3 effect in first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, and the displacement that piezoelectric stack 3 is exported acts on the cutter 10; When piezoelectric stack 3 outage retraction, first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 drive knife rest 2 under himself reverse reverting power effect is got back to initial position.Energising carry-out bit at piezoelectric stack 3 moves past in the journey; Accurate contact capacitance sensor 6 is gathered the displacement signal of block 9 in real time; The error computing is carried out through the control system in displacement signal of being gathered and target location; And to error amount change, computing and amplification, finally control system's output voltage control signal and drive piezoelectric stack 3 and export displacement accurately, utilize the accurate driving action of piezoelectric stack 3; Can make the Motion Resolution rate of the moving displacement resolution ratio of cutter 10 far above the stock-removing machine feed system; Thereby realize the surperficial turning of micro/nano level, utilize the quick response effect and the voltage-output displacement relation of substantially linear of the displacement drive of piezoelectric stack 3, can realize that the elaborate servo of cutting-in is controlled.
When given input signal was sine wave signal, the waveform voltage signal that drives piezoelectric stack 3 was sinusoidal wave, and correspondingly cutter 10 is the past complex line of simple harmonic motion along the movement locus of x direction; When given input signal was square-wave signal, the waveform voltage signal that drives piezoelectric stack 3 was a square wave, and correspondingly cutter 10 is the past complex line of intermittent movement rule along the movement locus of x direction; When given input signal was triangular signal, the waveform voltage signal that drives piezoelectric stack 3 was a triangular wave, and correspondingly cutter 10 is the past complex line of continuous motion rule along the movement locus of x direction; When given input signal is dot matrix, linear array and face battle array signal, also can realize the cut of parts end face micro-nano structure array.To the control of the input voltage waveform of accurate driver element piezoelectric stack 3, cooperate lathe brick tower knife rest, cutter 10 can realize that also like movement locus be sine curve, trapezoidal or triangle isoline, curvilinear motion.
The preferred embodiment that the above is merely the utility model is not limited to the utility model, and for a person skilled in the art, the utility model can have various changes and variation.All within the spirit and principle of the utility model, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (5)
1. cutter servo compensation drive unit that is used for the micro/nano level cut; Be made up of pedestal, knife rest, cutter, driving element and signal detection component, it is characterized in that, described driving element is piezoelectric stack (3); Signal detection component is an accurate capacitive touch displacement transducer (6); Piezoelectric stack (3) interference fit is installed in the rectangular channel that has on the pedestal (1), and through the pre-tightening mechanism pretension, is fixed with sensor fixed pedestal (7) on the pedestal (1); Accurate capacitive touch displacement transducer (6) matched in clearance is installed in the sensor fixed pedestal (7); And fixing through sensor trip bolt (8), its front end contact probe head contacts with the block (9) of knife rest (2) end all the time, and pedestal (1) tail end is jockey (11); Knife rest (2) is connected with pedestal (1) through first, second and third parallel-plate-type thin shelf flexible hinge (12,13,14), and cutter (10) is installed in the cutter groove of knife rest (2) through cutter trip bolt (15).
2. a kind of cutter servo compensation drive unit that is used for the micro/nano level cut according to claim 1; It is characterized in that; Described sensor fixed pedestal (7) is connected through bonding mode and pedestal (1) or is same integral body with pedestal (1), and described jockey (11), first, second and third parallel-plate-type thin shelf flexible hinge (12,13,14), block (9) and knife rest (2) are same integral body with pedestal (1).
3. a kind of cutter servo compensation drive unit that is used for the micro/nano level cut according to claim 1; It is characterized in that; Described pre-pressing structure adopts self-locking pretension wedge (4); Its pretightning force is provided by pretension screw (5), and piezoelectric stack (3) is carried out forward pretension and reverse self-locking.
4. a kind of cutter servo compensation drive unit that is used for the micro/nano level cut according to claim 1; It is characterized in that, process through the Wire EDM mode for first, second and third parallel-plate-type thin shelf flexible hinge (12,13,14), block (9), knife rest (2) and the sensor fixed pedestal (7) of same integral body with pedestal (1); First, second and third parallel-plate-type thin shelf flexible hinge (12,13,14) is under the driving force effect of piezoelectric stack (3); Slight curves distortion output accurate straight-line displacement to blade (10) takes place; When the driving force of piezoelectric stack (3) is cancelled, get back to initial position.
5. a kind of cutter servo compensation drive unit that is used for the micro/nano level cut according to claim 1; It is characterized in that; Said accurate driver element piezoelectric stack (3) is the accurate actuation element of controllable type; Through when applying voltage, realizing the accurate controlled rectilinear motion of knife rest (2) along the x direction to piezoelectric stack (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201444701U CN202540008U (en) | 2012-04-09 | 2012-04-09 | Cutter servo compensating drive device for micro-nano scale cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201444701U CN202540008U (en) | 2012-04-09 | 2012-04-09 | Cutter servo compensating drive device for micro-nano scale cutting |
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| CN202540008U true CN202540008U (en) | 2012-11-21 |
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| CN2012201444701U Expired - Lifetime CN202540008U (en) | 2012-04-09 | 2012-04-09 | Cutter servo compensating drive device for micro-nano scale cutting |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104637859A (en) * | 2013-11-14 | 2015-05-20 | 先进科技新加坡有限公司 | WIRE clamp, method and apparatus for applying a preload force to a piezoelectric actuator |
| CN106945444A (en) * | 2017-03-17 | 2017-07-14 | 广东工业大学 | A kind of sharp knife of full closed loop control is micro- to engrave device |
| CN108274647A (en) * | 2018-04-09 | 2018-07-13 | 沈阳航空航天大学 | A kind of monocrystal material cuts adaptive fine tuning tool rest and cutting process |
| CN108287502A (en) * | 2018-01-18 | 2018-07-17 | 西安应用光学研究所 | A kind of Electric-Optic Turret powers off Time delay from lock control system |
| CN111545836A (en) * | 2020-05-12 | 2020-08-18 | 山东理工大学 | Multi-frequency coupling cross-scale hierarchical micro-nano structure creation device |
| CN112276236A (en) * | 2020-10-19 | 2021-01-29 | 浙大宁波理工学院 | Honing reamer |
-
2012
- 2012-04-09 CN CN2012201444701U patent/CN202540008U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104637859A (en) * | 2013-11-14 | 2015-05-20 | 先进科技新加坡有限公司 | WIRE clamp, method and apparatus for applying a preload force to a piezoelectric actuator |
| CN106945444A (en) * | 2017-03-17 | 2017-07-14 | 广东工业大学 | A kind of sharp knife of full closed loop control is micro- to engrave device |
| CN106945444B (en) * | 2017-03-17 | 2020-02-21 | 广东工业大学 | Full-closed-loop-controlled fast knife micro engraving device |
| CN108287502A (en) * | 2018-01-18 | 2018-07-17 | 西安应用光学研究所 | A kind of Electric-Optic Turret powers off Time delay from lock control system |
| CN108287502B (en) * | 2018-01-18 | 2020-03-24 | 西安应用光学研究所 | Photoelectric turret power-off triggering delay self-locking control system |
| CN108274647A (en) * | 2018-04-09 | 2018-07-13 | 沈阳航空航天大学 | A kind of monocrystal material cuts adaptive fine tuning tool rest and cutting process |
| CN108274647B (en) * | 2018-04-09 | 2023-07-04 | 沈阳航空航天大学 | Self-adaptive trimming tool rest for cutting monocrystalline material and cutting method |
| CN111545836A (en) * | 2020-05-12 | 2020-08-18 | 山东理工大学 | Multi-frequency coupling cross-scale hierarchical micro-nano structure creation device |
| CN112276236A (en) * | 2020-10-19 | 2021-01-29 | 浙大宁波理工学院 | Honing reamer |
| CN112276236B (en) * | 2020-10-19 | 2021-09-14 | 浙大宁波理工学院 | Honing reamer |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |