CN202438847U - Coaxial macro-micro compound linear motion platform device - Google Patents
Coaxial macro-micro compound linear motion platform device Download PDFInfo
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- CN202438847U CN202438847U CN201220078459XU CN201220078459U CN202438847U CN 202438847 U CN202438847 U CN 202438847U CN 201220078459X U CN201220078459X U CN 201220078459XU CN 201220078459 U CN201220078459 U CN 201220078459U CN 202438847 U CN202438847 U CN 202438847U
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Abstract
The utility model discloses a coaxial macro-micro compound linear motion platform device. A macro motion platform of the device is guided by an air floatation guide rail and driven by a linear motor, and the position precision of the macro motion platform is detected by a grating scale; a micro motion is driven by the macro motion platform; the micro motion platform comprises four frames formed by cutting and processing an integral metal plate, an inner micro motion platform and flexible hinges playing the roles of connecting and guiding, and the frames are fixed on the macro motion platform; frictional resistance between the micro motion platform and the macro motion platform is eliminated through air floatation; the motion directions of the micro motion platform and the macro motion platform are coaxial; the micro motion platform is connected with the frame bodies through the flexible hinges; the flexible hinges are symmetrically distributed, and the guide and movement of the micro motion platform are guaranteed through trace elastic bending deformation of the material of the flexible hinges; a piezoelectric actuator or a voice coil motor is used for providing power for the motions of the micro motion platform; and a micro motion sensor is used for inducing the displacement of the micro motion platform so as to realize the high-precision displacement and positioning of the micro motion platform.
Description
Technical field
The utility model relates to a kind of coaxial grand little composite straight line exemplary motion stage device.
Background technology
Grand little compound motion platform can be used in the feed system of ultraprecise processing.Grand motion platform is realized big stroke millimeter or micron-sized feeding, and micromotion platform is realized little stroke micron or nanoscale feeding.But the non-axisymmetrical surfaces of the compound processing precise optical element of macro/micromotion can repeat to process the various special-shaped element with complicated shape, for example: free-form surface lens/minute surface, micro mirror array, micro-cannelure array etc.
General grand little compound motion platform is on the basis of grand motion platform, typical case or special-purpose small micro motion platforms such as sharp knife servomechanism is installed, the experimental study that this micromotion platform can't be used to carry certain load or carry out grand little compound platform.
The utility model content
To the general little problem of grand little compound motion platform bearer amount, the purpose of the utility model provides a kind of coaxial grand little composite straight line exemplary motion stage device.
For realizing above-mentioned purpose, the utility model is taked following technical scheme: macro-moving stage adopts air-float guide rail guiding, linear motor driving, grating chi detection position precision; Macro-moving stage drives micromotion platform.Framework around micromotion platform is gone out by bulk metal plate cutting processing, inner micromotion platform and rising is connected and the flexible hinge of guide effect, and frame fixation is on macro-moving stage, and mistake piezoelectric ceramic actuator or voice coil motor provide power.Eliminate frictional resistance through air supporting between micromotion platform and the macro-moving stage.
A kind of coaxial grand little composite straight line exemplary motion stage device that the utility model provides comprises base 1; Air-float guide rail 2 is installed on the base 1; Have elongated slot in the middle of the air-float guide rail length direction upper surface, linear motor stator electric 3 is set in the air-float guide rail elongated slot, and grating scale 4 is equipped with in air-float guide rail 2 sides; Macro-moving stage 6 is installed on the air-float guide rail 2; The bottom shape of macro-moving stage 6 and air-float guide rail 2 surfaces are coupling each other; On the contact-making surface of macro-moving stage 6 and air-float guide rail 2 pore and air flue are arranged, pressure-air sprays from the hole, between air-float guide rail 2 and macro-moving stage 6, forms air film; Linear motor rotor 5 also is installed in the macro-moving stage 6, and linear motor stator electric 3 interacts with linear motor rotor 5, drives macro-moving stage 6 and on air-float guide rail 2, moves; The moving chi 15 of grating also is housed on the macro-moving stage 6, and the moving chi 15 of grating matees with grating scale 4 each other; Four flexible hinges 8 and micromotion platform 9 that framework 7, I shape distribute are formed by a bulk metal cutting, and its middle frame 7 is installed on the macro-moving stage 6, and piezoelectric ceramic actuator or voice coil motor 10 are housed between one side of one side of micromotion platform 9 and framework 7; Micromotion platform 9 is coaxial with the moving direction of macro-moving stage 6, and the bottom of micromotion platform 9 is provided with some pores and air flue, through the gases at high pressure that spray in the hole, makes between micromotion platform 9 and macro-moving stage 6 contact-making surfaces and forms air film; The lower surface of bearing table 11 connects backing plate 13 and together is fixed on the micromotion platform 9; Gapped between bearing table 11 and the framework 7; Between bearing table 11 and the framework 7 the fine motion sensor is housed also, wherein the first fine motion sensor 12 is equipped with in bearing table 11 sides, and the second fine motion sensing 14 is equipped with in framework 7 sides.
Cadre's wider width of above-mentioned each flexible hinge 8, and the hinge width is narrower, each two end of doing is the hinge position; The profile at hinge position is that the circular arc of symmetry is excessive.
Above-mentioned bearing table 11 areas are greater than micromotion platform 9.
Air-float guide rail supporting macro-moving stage, linear electric motors provide the driving force of grand motion, optical grating ruler measurement movement position information.
Micromotion platform is connected with the framework entity through flexible hinge.Flexible hinge is symmetrically distributed, and through the micro-elastic bending deflection of material, guarantees the guiding of micromotion platform and moves.
The power that piezoelectric ceramic actuator or voice coil motor provide micromotion platform to move, the displacement of fine motion sensor sensing micromotion platform.Thereby realize the high precision displacement and the location of micromotion platform.
Through gas membrane micromotion platform and macro-moving stage are isolated, avoid two planes directly to contact, reduce or eliminate frictional resistance.
Micromotion platform connects bearing table through backing plate, and bearing table and area are suitable with the macro-moving stage area, and promptly size is bigger, makes things convenient for the Installation Research instrument.
The utility model has following beneficial effect owing to adopt above technical scheme:
1) through air-float guide rail supporting macro-moving stage, linear electric motors provide the driving force of grand motion, optical grating ruler measurement movement position information.Have the advantages that bearing capacity is strong, kinematic accuracy is high, movement velocity is fast, acceleration is big;
2) direction of motion of micromotion platform and macro-moving stage is coaxial.Micromotion platform is connected with the framework entity through flexible hinge.Flexible hinge is symmetrically distributed, and through the micro-elastic bending deflection of material, guarantees the guiding of micromotion platform and moves.The power that piezoelectric ceramic actuator provides micromotion platform to move, the displacement of fine motion sensor sensing micromotion platform.Thereby realize the high precision displacement and the location of micromotion platform;
3) through gas membrane micromotion platform and macro-moving stage are isolated, avoid two planes directly to contact, reduce or eliminate frictional resistance;
4) micromotion platform connects bearing table through backing plate, and bearing table and area are suitable with the macro-moving stage area, and promptly size is bigger, makes things convenient for the Installation Research instrument.
Description of drawings
Fig. 1 is the utility model schematic representation of apparatus.
Fig. 2 is the structural representation of the micromotion platform of the utility model device.
Wherein: 1 base, 2 air-float guide rail 3 linear motor stator electrics, 4 grating scale 5 linear motor rotors, 6 macro-moving stage 7 frameworks, 8 flexible hinge 9 micromotion platforms, 10 piezoelectric ceramic actuators or voice coil motor 11 bearing tables 12 first fine motion sensors 13 backing plates 14 second fine motion sensors 15 gratings move chi.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is done detailed description further:
As shown in Figure 1, the utility model comprises base 1, is carrying entire infrastructure.Air-float guide rail 2 is installed on the base.Have elongated slot in the middle of the air-float guide rail length direction upper surface, the stator 3 of linear electric motors is set in the air-float guide rail elongated slot.Grating scale 4 is equipped with in the air-float guide rail side.The bottom shape of macro-moving stage 6 and air-float guide rail surface engagement have pore and air flue on the contact-making surface of macro-moving stage and air-float guide rail, pressure-air sprays from the hole, between air-float guide rail and macro-moving stage, form air film, to reduce or eliminate friction.Linear motor rotor 5 is housed in the macro-moving stage.The stator of energising back linear electric motors and the magnetic field effect of mover produce the power drive macro-moving stage and on air-float guide rail, move.The moving chi 15 of grating also is housed on the macro-moving stage, and moving chi of grating and scale act in motion process, detect the positional information of grand displacement.Four flexible hinges 8 and the micromotion platform 9 that go out through the line cutting processing that framework 7, I shape distribute by a bulk metal.Piezoelectric ceramic actuator or sound motor 10 are housed between one side of micromotion platform and the framework.After the energising, piezoelectric ceramic actuator or voice coil motor promote micromotion platform and move.The direction of motion of micromotion platform and macro-moving stage is coaxial.Cadre's wider width of each flexible hinge 8, and the hinge width is narrower.Each two end of doing is the hinge position.Therefore the elastic bending deflection of the stressed generation of material concentrates on narrower hinge, and a cadre does not have distortion.The profile at hinge position is that the circular arc of symmetry is excessive, concentrates to avoid stress.The bottom of micromotion platform is provided with some spileholes and air flue, through the gases at high pressure that spray in the hole, makes between micromotion platform and the macro-moving stage contact-making surface and forms air film, to reduce or eliminate friction.Bearing table 11 is fixed on the micromotion platform through backing plate 13.Backing plate makes a little higher than framework all around of the height of bearing table, avoids contact friction.Bearing table makes the enlarged areas of micromotion platform, is beneficial to carry various instruments to carry out grand little compound research. Fine motion sensor 12 and 14 are housed, to detect the displacement of micromotion platform between bearing table limit and the framework.
Claims (3)
1. coaxial grand little composite straight line exemplary motion stage device; It is characterized in that: this device comprises base (1); Air-float guide rail (2) is installed on the base (1); Have elongated slot in the middle of the air-float guide rail length direction upper surface, linear motor stator electric (3) is set in the air-float guide rail elongated slot, and grating scale (4) is equipped with in air-float guide rail (2) side; Macro-moving stage (6) is installed on the air-float guide rail (2); Mate each other on the bottom shape of macro-moving stage (6) and air-float guide rail (2) surface; On the contact-making surface of macro-moving stage (6) and air-float guide rail (2) pore and air flue are arranged; Pressure-air sprays from the hole, between air-float guide rail (2) and macro-moving stage (6), forms air film; Linear motor rotor (5) also is installed in the macro-moving stage (6), and linear motor stator electric (3) interacts with linear motor rotor (5), drives macro-moving stage (6) and goes up mobile at air-float guide rail (2); The moving chi (15) of grating also is housed on the macro-moving stage (6), and grating moves chi (15) and matees each other with grating scale (4); Four flexible hinges (8) that framework (7), I shape distribute and micromotion platform (9) are formed by a bulk metal cutting; Its middle frame (7) is installed on the macro-moving stage (6), and piezoelectric ceramic actuator or voice coil motor (10) are housed between one side of one side of micromotion platform (9) and framework (7); Micromotion platform (9) is coaxial with the moving direction of macro-moving stage (6), and the bottom of micromotion platform (9) is provided with some pores and air flue, through the gases at high pressure that spray in the hole, makes between micromotion platform (9) and macro-moving stage (6) contact-making surface and forms air film; The lower surface of bearing table (11) connects backing plate (13) and together is fixed on the micromotion platform (9); Gapped between bearing table (11) and the framework (7); Between bearing table (11) and the framework (7) the fine motion sensor is housed also, wherein the first fine motion sensor (12) is equipped with in bearing table (11) side, and the second fine motion sensing (14) is equipped with in framework (7) side.
2. coaxial grand little composite straight line exemplary motion stage device according to claim 1 is characterized in that: cadre's wider width of above-mentioned each flexible hinge (8), and the hinge width is narrower, each two end of doing is the hinge position; The profile at hinge position is that the circular arc of symmetry is excessive.
3. coaxial grand little composite straight line exemplary motion stage device according to claim 1, it is characterized in that: above-mentioned bearing table (11) area is greater than micromotion platform (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220078459XU CN202438847U (en) | 2012-03-05 | 2012-03-05 | Coaxial macro-micro compound linear motion platform device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220078459XU CN202438847U (en) | 2012-03-05 | 2012-03-05 | Coaxial macro-micro compound linear motion platform device |
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| Publication Number | Publication Date |
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| CN202438847U true CN202438847U (en) | 2012-09-19 |
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| CN201220078459XU Withdrawn - After Issue CN202438847U (en) | 2012-03-05 | 2012-03-05 | Coaxial macro-micro compound linear motion platform device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528473A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Coaxial macro/micro combined linear motion platform device |
| CN102922309A (en) * | 2012-09-29 | 2013-02-13 | 黑龙江科技学院 | Precise micro motion platform based on shape memory material coarse motion driver |
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN107044486A (en) * | 2017-01-09 | 2017-08-15 | 中原工学校信息商务学校 | The accurate pneumato-static slideway pair of straight drive that vertical direction is used |
| CN112548598A (en) * | 2020-12-03 | 2021-03-26 | 佛山市华道超精科技有限公司 | Mode switching rigid-flexible coupling motion platform and control method |
| CN113145941A (en) * | 2021-05-12 | 2021-07-23 | 浙江大学 | Sample micro-motion positioning device with force sensing function |
-
2012
- 2012-03-05 CN CN201220078459XU patent/CN202438847U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528473A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Coaxial macro/micro combined linear motion platform device |
| CN102528473B (en) * | 2012-03-05 | 2014-01-08 | 广东工业大学 | Coaxial macro/micro combined linear motion platform device |
| CN102922309A (en) * | 2012-09-29 | 2013-02-13 | 黑龙江科技学院 | Precise micro motion platform based on shape memory material coarse motion driver |
| CN104656682A (en) * | 2014-12-30 | 2015-05-27 | 中国科学院长春光学精密机械与物理研究所 | Macro and micro two-stage driving precision positioning mechanism |
| CN104656682B (en) * | 2014-12-30 | 2017-07-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of grand micro- two-stage drive precision positioning mechanism |
| CN107044486A (en) * | 2017-01-09 | 2017-08-15 | 中原工学校信息商务学校 | The accurate pneumato-static slideway pair of straight drive that vertical direction is used |
| CN112548598A (en) * | 2020-12-03 | 2021-03-26 | 佛山市华道超精科技有限公司 | Mode switching rigid-flexible coupling motion platform and control method |
| CN113145941A (en) * | 2021-05-12 | 2021-07-23 | 浙江大学 | Sample micro-motion positioning device with force sensing function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120919 Effective date of abandoning: 20140108 |
|
| RGAV | Abandon patent right to avoid regrant |