CN202433389U - Microfluidic chip with micro-channel with high depth-to-width ratio - Google Patents
Microfluidic chip with micro-channel with high depth-to-width ratio Download PDFInfo
- Publication number
- CN202433389U CN202433389U CN2011205027835U CN201120502783U CN202433389U CN 202433389 U CN202433389 U CN 202433389U CN 2011205027835 U CN2011205027835 U CN 2011205027835U CN 201120502783 U CN201120502783 U CN 201120502783U CN 202433389 U CN202433389 U CN 202433389U
- Authority
- CN
- China
- Prior art keywords
- substrate
- micro
- upper strata
- lower floor
- fluid channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Micromachines (AREA)
Abstract
The utility model discloses a microfluidic chip with a micro-channel with a high depth-to-width ratio. The microfluidic chip comprises an upper substrate and a lower substrate, both the upper substrate and the lower substrate are made of transparent polydimethylsiloxane, are of micro-structures with low depth-to-width ratios, and are combined together in an overlapped manner, so that the micro-structures are communicated to one another to form the micro-channel, and through holes are respectively arranged at two ends of the micro-structure of the upper substrate, and are respectively used as an entrance and an exit of the micro-channel. The microfluidic chip is low in cost, simple in process and low in requirement on equipment, and can be fast prepared in a laboratory by the aid of the substrates of micro-channels with the low depth-to-width ratios. The thicknesses of the substrates are not required to be controlled accurately, and troublesome repeated positioning and aligning procedures are avoided.
Description
Technical field
The utility model belongs to the analyzer of subjects such as biological chemistry, relates in particular to the micro-fluidic chip technology.
Background technology
Microflow control technique has been widely used in fundamental researchs such as clinical diagnosis, biochemical analysis, biological study and precision optics or the practical applications as the new method of a kind of efficient manipulation fluid or particle.Along with microflow control technique research deeply and widen, the structure and the function complexity increasing demand of micro-fluidic chip increased, this has proposed new severe challenge to the supporting Micrometer-Nanometer Processing Technology of micro-fluidic chip.How fast, the satisfactory high-performance micro-fluidic chip of low-cost production has become a research content in the field of micro-Na manufacture.Because the successful commercialization of traditional MEMS device, silica-based three-dimensional microstructures process technology reaches its maturity.But shortcomings such as the process equipment of complicated processing technology, costliness and cost make it and are not suitable for low cost, the quick Fabrication of laboratory short run prototype test chip.In addition, silica-based rigidity, opaqueness and be difficult for shortcomings such as bonding encapsulation and make its application in micro-fluidic chip receive great restriction.
The soft lithography of Whitesides seminar of Harvard University exploitation utilizes method of molding to make dimethyl silicone polymer (PDMS) material micro-fluidic chip, and advantage has become the main flow material of facture of microchip to PDMS because its processing and fabricating is simple, cost is low, optical characteristics and bio-compatibility are good etc.And the conventional softer photoetching technique utilizes the printing film mask to substitute expensive chrome mask photoetching making formpiston, and this technology only limits to make simple flat surface structure micro-fluidic chip and printing film mask precision is lower.Part Study person utilizes the femtosecond laser etch polymers to make the three-dimensional structure micro-fluidic chip in the recent period, but the expensive laser instrument and complicated light path of this Technology Need should not be promoted the use of.Other has the polymer three-dimensional labyrinth fluid channel manufacturing technology based on metal fibril, but the fluid channel structure of this fabrication techniques and size-constrained cross sectional shape and size, winding or localization method, the technology etc. of reeling off raw silk from cocoons in microfilament.
The utility model content
The utility model purpose: to the problem and shortage of above-mentioned existing existence, the utility model provides a kind of low cost, has made up the micro-fluidic chip and preparation method thereof of fluid channel fast.
Technical scheme: for realizing above-mentioned utility model purpose; The utility model adopts following technical scheme: a kind of micro-fluidic chip with high-aspect-ratio fluid channel; Comprise upper strata substrate and lower floor's substrate; Said upper strata substrate and lower floor's substrate material are transparent dimethyl silicone polymer, and all have the microstructure of low depth-to-width ratio, and said upper strata substrate and lower floor substrate be overlapping to combine and said microstructure is communicated with form fluid channel; The two ends of said upper strata substrate microstructure are respectively equipped with through hole, and this through hole is respectively as the entrance and exit of said fluid channel.
Substrate through containing the microstructure of low depth-to-width ratio with two piles up in opposite directions; And by manufacture craft of hanging down the depth-to-width ratio runner and hardware condition realization quick Fabrication micro-fluidic chip; Make the fluid channel in this micro-fluidic chip form the three dimensional tortuous structure, thereby make sample shuttle between upper strata substrate and lower floor's substrate.
As preferably; This sinusoidal shape runner of said microstructure as connection; And the position of this runner and shape mirror each other on said upper strata substrate and the lower floor's substrate; When said upper strata substrate and lower floor's substrate are superimposed together, thereby this sinusoidal shape runner overlaps fully and forms the fluid channel that is communicated with, and is the twice of the runner before superimposed thereby make the depth-to-width ratio of the fluid channel of acquisition.
As preferably; The microstructure of said upper strata substrate is the rectangular groove of parallel array; The rectangular groove of the microstructure of said lower floor substrate for vertically being interspersed; When said upper strata substrate and lower floor's substrate are superimposed together, thereby the on-chip rectangular groove of upper strata substrate and lower floor joins end to end and forms the fluid channel that is communicated with, thereby makes the micro-fluidic chip of acquisition have complicated three-dimensional runner.
Improvement to technique scheme; Said upper strata substrate and lower floor's substrate are provided with the alignment mark structure of a plurality of mirrors each other; Thereby this alignment mark structure can improve upper strata substrate and lower floor's substrate when folded greatly for cruciform, square or dihedral, and microstructure is superimposed precision fully.
As preferably; Said entrance and exit place is inserted with microtubule, and this microtubule external diameter is slightly larger than the aperture of said entrance and exit, thereby utilizes the elasticity of dimethyl silicone polymer; Microtubule and upper strata substrate are sealed, make things convenient for the sealing-in between the utility model and other fluid drives equipment.
Beneficial effect: compared with prior art, the utlity model has following advantage: cost is low, and the technology simple device requires low, can utilize the substrate of low depth-to-width ratio fluid channel to make in the laboratory fast; And need not accurate control, avoided loaded down with trivial details repeatedly location alignment process substrate thickness.
Description of drawings
Fig. 1 is the utility model process chart;
Fig. 2 be the said upper strata substrate with sinusoidal waveform fluid channel of the utility model and lower floor's substrate structural representation;
Fig. 3 is Fig. 2 substrate and the superimposed back of lower floor's substrate A-A cross-sectional view at the middle and upper levels;
Fig. 4 is the assembling synoptic diagram of Fig. 2 when substrate and lower floor's substrate are superimposed at the middle and upper levels;
To be that the utility model is said have the upper strata substrate of 3 D complex structure runner and a structural representation of lower floor's substrate to Fig. 5;
Fig. 6 is the structural representation of Fig. 5 when substrate and lower floor's substrate are superimposed at the middle and upper levels;
Fig. 7 is an A-A cross-sectional view among Fig. 6.
Wherein, upper strata substrate 1, lower floor's substrate 2, sinusoidal shape runner 3, inlet 4, outlet 5, housing saltire structure 6, in the rectangular groove of solid cross structure 7, parallel array 8, vertically be interspersed that rectangular groove 9, SU-8 photoresist layer 101, silicon circle are brilliant 102, dummy mask 121, mercury-arc lamp 122, horizontal hot plate 132, developer solution 141, PDMS microstructure substrate 161, through hole 172.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment; Further illustrate the utility model; Should understand these embodiment only be used to the utility model is described and be not used in the restriction the utility model scope; After having read the utility model, those skilled in the art all fall within the application's accompanying claims institute restricted portion to the modification of the various equivalent form of values of the utility model.
Embodiment 1:
Present embodiment is the micro-fluidic chip with sinusoidal waveform runner; It comprises upper strata substrate 1 and lower floor's substrate 2; And material is dimethyl silicone polymer (PDMS); And make by soft lithography, the used formpiston of this micro-fluidic chip casting then adopts the processing of SU-8 maskless lithography, and this technology has flexible high, advantage such as cost of manufacture is low and the cycle is short.The preparation method of said micro-fluidic chip is following:
At first, silicon circle brilliant 102 through after cleaning, is dried up and places dehydration baking on the horizontal hot plate 132 with nitrogen.After treating that silicon circle brilliant 102 is cooled to room temperature, above that with certain rotating speed spin coating SU-8 photoresist layer 101.
Then, the silicon circle brilliant 102 of the intact photoresist of spin coating placed on the horizontal hot plate 132 carry out preceding baking, be used for removing the excessive organic solvent of SU-8 photoresist layer 101.To be cooled to room temperature; Utilize the micro light figure (this micro light figure is a sinusoidal shape) of digital micro-mirror projection in the maskless lithography system that SU-8 photoresist layer 101 is carried out maskless lithography processing; Make and make that the zone of solidifying is the microstructure of sinusoidal shape by the glue-line generation crosslinking curing that UV-irradiation is regional.This technology reflects the specific wavelength spectral line that mercury-arc lamp 122 produces through the open and-shut mode of control figure micro mirror (DMD), thereby plays " dummy mask 121 ".Brilliant 102 of band optical cement layer silicon circle after then will making public places the back baking of exposing to the sun on the hot plate, the cross-linking reaction of accelerating ultraviolet irradiation area.For preventing that glue-line from cracking because of thermal stress and come off, should take progressively temperature-raising method in the bake process, also adopt with the hot plate natural cooling during cooling.After cooling, can see rough microstructure profile on SU-8 photoresist layer 101 surfaces.Then it is dipped in the special-purpose developer solution 141 of SU-8 and develops, and with the isopropyl alcohol flushing, clear and do not have milky and appear as development and indicate completely with the SU-8 microstructure.After the microstructure substrate that develops dries up with deionized water rinsing and with nitrogen, place baking firmly on the horizontal hot plate 132, thereby obtain the microstructure formpiston.
Then, the microstructure formpiston is carried out the surface silicon alkanisation with silylating reagent handle, make its surface produce the unimolecule passivation layer, thereby reduce the adhesion between PDMS and the formpiston.Then, the microstructure formpiston of silanization is fixed in carries out the PDMS injection moulding in the double dish, PDMS performed polymer and hardening agent carry out the vacuum outgas processing with certain mass than fully mixing the back with ing on formpiston.After liquid PDMS to be poured into does not have obvious naked eyes visible bubble in bubble, double dish placed on the hot plate be heating and curing.After waiting to solidify, PDMS microstructure substrate 161 is taken off from formpiston, thereby obtained the substrate of low depth-to-width ratio runner.The allotment ratio between PDMS performed polymer and the hardening agent of regulating can be used for the preparation of different flexible substrates and realizes irreversible from bonding between the substrates of different.The thickness of PDMS microstructure substrate 161 can be realized through the amount of the used PDMS of control unit cast area.For thin PDMS microstructure substrate 161, can realize by spin-coating method according to the empirical parameter of rotating speed and thickness.
Make the substrate of two plots of low depth-to-width ratio runners through said method; Get wherein a substrate as upper strata substrate 1; And with the special-purpose punching device of given diameter or syringe needle at said substrate two ends ad-hoc location get through hole 172 respectively as the inlet 4 and outlet 5 of fluid channel, get another piece substrate as lower floor's substrate 2; Microstructure on said upper strata substrate 1 and the lower floor's substrate 2 is sinusoidal shape runner 3 shown in Fig. 2-4, and mirror each other; Said upper strata substrate 1 has identical size with lower floor substrate 2, and is provided with a plurality of alignment mark structures at its boundary vicinity place, and is the edge and is symmetrically distributed to guarantee the low depth-to-width ratio runner precision during substrate stack up and down.Contained alignment mark structure and as shown in Figure 2 in on-chip layout, its shape can be cruciform, square or dihedral etc.Cross-shaped alignment marks is formed a complete set of with housing saltire structure 6 by interior solid cross structure 7 and forms.Said upper strata substrate 1 inlet 4 and export 5 places and get through hole 172 and be used for the sealing-in between chip and the macrofluid driving arrangement with polymer matrix film punching is technological.
At last the microstructure face of upper strata substrate 1 and lower floor substrate 2 is advanced surface modification or makes that subtegulum has different proportionings when the preparation microstructure substrate with methods such as uv/ozone, oxygen plasma treatment.When piling up; Make upper strata substrate 1 and lower floor's substrate 2 contain the microstructure face in opposite directions and right; And through the accurate location between stereoscope or the special aligned equipment realization upper strata substrate 1 lower floor's substrate 2; Making that said sinusoidal shape runner 3 microstructures are overlapping fully, is original twice thereby make the depth-to-width ratio of the fluid channel of acquisition.Light pressure substrate makes between two substrates and does not have entrained air bubbles after aiming at.Be placed on then in 80 ℃ of baking ovens and heated 2 hours, make its complete bonding.The inlet 4 of substrate 1 inserts microtubule with outlet 5 places on said upper strata, and this microtubule external diameter is slightly larger than the aperture, utilizes the elasticity of PDMS to realize the withstand voltage sealing-in of sealing.Lower floor's substrate 2 bottom surfaces still can be through the encapsulation of bonding techniques realization and microslide or metal electrode substrate etc.
Present embodiment is that micro-fluidic chip with 3 D complex structure runner and preparation method thereof is all identical with embodiment 1 other places, and different is:
In manufacturing process, utilize the micro light figure of the projection of digital micro-mirror in the maskless lithography system that SU-8 photoresist layer 101 is carried out maskless lithography processing, make the glue-line generation crosslinking curing in UV-irradiation zone.Micro light figure is different in this step; Make that the microstructure of upper strata substrate 1 is the rectangular groove 8 of parallel array (cross section is square); The microstructure of said lower floor substrate 2 is the rectangular groove 9 that vertically is interspersed (cross section is square); When said upper strata substrate 1 and lower floor's substrate 2 are superimposed together, the fluid channel that formation is communicated with thereby the rectangular groove on upper strata substrate 1 and the lower floor's substrate 2 joins end to end, this fluid channel is three-dimensional square waveform runner.
Claims (6)
1. micro-fluidic chip with high-aspect-ratio fluid channel; It is characterized in that: comprise upper strata substrate (1) and lower floor's substrate (2); Said upper strata substrate (1) and lower floor's substrate (2) material are transparent dimethyl silicone polymer, and all have the microstructure of low depth-to-width ratio; Said upper strata substrate (1) and lower floor's substrate (2) are superimposed together and said microstructure are communicated with form fluid channel, and the two ends of said upper strata substrate (1) microstructure are respectively equipped with through hole, this through hole respectively as the inlet (4) of said fluid channel with export (5).
2. according to the said micro-fluidic chip of claim 1 with high-aspect-ratio fluid channel; It is characterized in that: this sinusoidal shape runner (3) of said microstructure as connection; And the position of last this runner of said upper strata substrate (1) and lower floor's substrate (2) and shape be mirror each other; When said upper strata substrate (1) and lower floor's substrate (2) when being superimposed together, this sinusoidal shape runner (3) thus overlap fully and form the fluid channel that is communicated with.
3. according to the said micro-fluidic chip of claim 1 with high-aspect-ratio fluid channel; It is characterized in that: the microstructure of said upper strata substrate (1) is the rectangular groove of parallel array (8); The microstructure of said lower floor substrate (2) is the rectangular groove (9) that vertically is interspersed; When said upper strata substrate (1) and lower floor's substrate (2) when being superimposed together, upper strata substrate (1) and lower floor's substrate (2) thus on rectangular groove join end to end and form the fluid channel of connection.
4. according to the said micro-fluidic chip with high-aspect-ratio fluid channel of claim 1, it is characterized in that: said upper strata substrate (1) and lower floor's substrate (2) are provided with the alignment mark structure of a plurality of mirrors each other.
5. according to the said micro-fluidic chip with high-aspect-ratio fluid channel of claim 4, it is characterized in that: said alignment mark structure is cruciform, square or dihedral.
6. according to the said micro-fluidic chip with high-aspect-ratio fluid channel of claim 1, it is characterized in that: said inlet (4) and outlet (5) locate to be inserted with microtubule.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205027835U CN202433389U (en) | 2011-12-06 | 2011-12-06 | Microfluidic chip with micro-channel with high depth-to-width ratio |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205027835U CN202433389U (en) | 2011-12-06 | 2011-12-06 | Microfluidic chip with micro-channel with high depth-to-width ratio |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202433389U true CN202433389U (en) | 2012-09-12 |
Family
ID=46782828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205027835U Expired - Fee Related CN202433389U (en) | 2011-12-06 | 2011-12-06 | Microfluidic chip with micro-channel with high depth-to-width ratio |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202433389U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411060A (en) * | 2011-12-06 | 2012-04-11 | 东南大学 | Microfluidic chip with high-aspect-ratio micro-fluidic channel and fabrication method thereof |
| CN102897710A (en) * | 2012-10-22 | 2013-01-30 | 清华大学 | Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device |
| CN106215986A (en) * | 2016-08-10 | 2016-12-14 | 杭州电子科技大学 | A kind of PDMS microfluidic chip structure and preparation method thereof |
| CN108187767A (en) * | 2017-12-30 | 2018-06-22 | 北京化工大学 | A kind of programmable modularized PDMS Micro-fluidic chip die systems |
-
2011
- 2011-12-06 CN CN2011205027835U patent/CN202433389U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411060A (en) * | 2011-12-06 | 2012-04-11 | 东南大学 | Microfluidic chip with high-aspect-ratio micro-fluidic channel and fabrication method thereof |
| CN102897710A (en) * | 2012-10-22 | 2013-01-30 | 清华大学 | Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device |
| CN102897710B (en) * | 2012-10-22 | 2015-05-20 | 清华大学 | Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device |
| CN106215986A (en) * | 2016-08-10 | 2016-12-14 | 杭州电子科技大学 | A kind of PDMS microfluidic chip structure and preparation method thereof |
| CN108187767A (en) * | 2017-12-30 | 2018-06-22 | 北京化工大学 | A kind of programmable modularized PDMS Micro-fluidic chip die systems |
| CN108187767B (en) * | 2017-12-30 | 2020-02-21 | 北京化工大学 | Programmable modular PDMS micro-fluidic chip mold system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102411060A (en) | Microfluidic chip with high-aspect-ratio micro-fluidic channel and fabrication method thereof | |
| Lin et al. | Soft lithography based on photolithography and two-photon polymerization | |
| CN107305214B (en) | A kind of production method of hard micro-fluid chip | |
| CN107176588B (en) | A kind of preparation method of hollow microchannel structure | |
| CN101598717A (en) | Mould the method that legal system is equipped with polydimethylsiloxanechip chip based on the liquid of hydrogel planar micro-patterning | |
| CN102012633B (en) | Method for making self-supporting structure of nano fluid system based on SU-8 photoresist | |
| CN102967890B (en) | Simple preparation method and application of polydimethylsiloxane (PDMS) polymer microlens array | |
| CN202433389U (en) | Microfluidic chip with micro-channel with high depth-to-width ratio | |
| CN108620143A (en) | Digital microcurrent-controlled chip and its driving method | |
| CN106902906B (en) | A method of no sheath fluid formula particle three-dimensional focuses micro-fluid chip and its focusing | |
| CN102128777A (en) | 3D (Three Dimensional) micro-fluidic structure for cell detection and preparation method thereof | |
| CN105498871A (en) | Three-dimensional focusing microfluid chip and manufacturing method thereof | |
| WO2017157304A1 (en) | Microfluid ion source chip and preparation method therefor | |
| CN104561286A (en) | Novel polymerase chain reaction (PCR) microfluidic chip control system and preparation method thereof | |
| CN104056674B (en) | A kind of electron spray micro-fluid chip, preparation method and mask plate equipment | |
| CN108212231A (en) | A kind of miniflow macrofluid control chip and preparation method thereof | |
| CN102674241B (en) | Method for manufacturing variable-height micro flow channel based on maskless gray-scale lithography | |
| CN114527525A (en) | Method for making artificial compound eye | |
| CN107754870B (en) | Three-dimensional microfluidic chip, and preparation method and application thereof | |
| KR102171936B1 (en) | A method for liquid patterning and cell immobilization in microfluidic platform using surface tension | |
| CN101716473B (en) | Chip-in micro-mixer and preparation method thereof | |
| KR101053772B1 (en) | Forming module for manufacturing microfluidic chip mold, method for manufacturing microfluidic chip mold using the same and microfluidic chip mold manufactured by the same | |
| CN103360459B (en) | Method of protein crystallization and open constant current diffusible proteins matter crystalline arrays chip of constant current diffusion and preparation method thereof and application | |
| CN116286349A (en) | New preparation method of 3D high-flux organ chip | |
| CN110862926A (en) | Multilayer paper chip based on microfluidic technology and construction method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120912 Termination date: 20131206 |