CN202432826U - Helium purification device - Google Patents
Helium purification device Download PDFInfo
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- CN202432826U CN202432826U CN2011205186174U CN201120518617U CN202432826U CN 202432826 U CN202432826 U CN 202432826U CN 2011205186174 U CN2011205186174 U CN 2011205186174U CN 201120518617 U CN201120518617 U CN 201120518617U CN 202432826 U CN202432826 U CN 202432826U
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Abstract
The utility model discloses a helium purification device, and belongs to the field of gas purification devices. The helium purification device comprises a purification system and a cooling system. The purification system comprises a raw helium dryer, a high-pressure condensation separator and a low-temperature nitrogen-oxygen adsorber, which are sequentially communicated, wherein the raw helium dryer removes H2O and CO2 from raw helium; the high-pressure condensation separator primarily condenses and removes nitrogen and oxygen; and the low-temperature nitrogen-oxygen adsorber adsorbs and finely removes the nitrogen and the oxygen through filled activated carbon. The cooling system comprises a pipeline system and vacuumizing equipment, wherein liquid helium is introduced into the pipeline system; the vacuumizing equipment vacuumizes the pipeline system, so that the pipeline system enters a negative pressure state; and the pipeline system is communicated with the high-pressure condensation separator and the low-temperature nitrogen-oxygen adsorber respectively, so that the high-pressure condensation separator and the low-temperature nitrogen-oxygen adsorber work at negative pressure liquid helium evaporation temperature. The helium purification device is used for removing the nitrogen, oxygen, carbon dioxide and saturated steam impurities in air from helium to prepare high-purity helium with the purity of 99.999 percent.
Description
Technical field
The utility model belongs to the gas purification apparatus field, relates in particular in order to remove contained nitrogen, oxygen, carbon dioxide and the saturated steam impurity of entrained air in the helium.
Background technology
Helium is a kind of rare gas, and its volume content in dry air is merely 5.24ppm.Because the specific physical chemical property of helium, it has crucial purposes on industry, scientific research and national defence.
Utilize the inertia of helium and good thermal conductivity; Can do senior alloy welding; Inertia protective gas when important meals such as titanium, zirconium, germanium and silicon and semiconductor are smelted, available helium is made thermophore in the ventilation type atomic reactor, in rocket and MISSILE LAUNCHING, can be used as the force feed agent of fuel.
Because the diffusivity of helium is very strong, helium is used to the indicator of pressure vessel and vacuum system leak detection.Helium and oxygen are made into gaseous mixture, can supply the deep sea diving personnel to breathe, and avoid dizzy and forfeiture intelligence, in medical treatment, also can be used for treating asthma disease.
In addition; Helium also can be used to filling balloon and dirigible and is widely used as the carrier gas in the chromatography; Along with development of scientific research; Helium also is used for plasma industry and gas laser (generating laser), and helium is very big in aspect effects such as radar detection, photography, Metal Cutting and operations, and helium also is used for low-temperature electronics and optics instrument aspect.
Because the boiling point low (4.2K) of helium, near absolute zero, so it is an optimal refrigerant in the low-temperature physics research.In national defence science and sophisticated technology research and using, often to use liquid helium.Liquid helium EGR discharge tail gas often uses air bag to reclaim, and the tail gas of recovery receives air pollution, contains helium only about 90% (volume), and major impurity is nitrogen, oxygen, carbon dioxide and saturated steam.For recycling this part helium resource, be necessary this raw helium purifying, be 99.999% high-pure helium to produce purity, and rework solution helium cycle system.
The utility model content
The purpose of the utility model is: proposing a kind ofly in order to removing the helium purification devices of contained nitrogen, oxygen, carbon dioxide and saturated steam impurity of entrained air in the helium, is 99.999% high-pure helium to produce purity.
The utility model purpose realizes through following technical proposals:
A kind of helium purification devices comprises purification system and cooling system, said purification system comprise successively be communicated with from the raw material helium, remove H
2O, CO
2Raw helium drier, the high pressure condensation separator that preliminary condensation removes nitrogen oxygen; And the nitrogen oxygen low-temperature adsorber of the smart denitrogenation oxygen of filling charcoal absorption; Said cooling system comprises the pipe-line system that is connected with liquid nitrogen; And this pipe-line system of finding time makes its vaccum-pumping equipment that reaches negative pressure state, and said pipe-line system is communicated with said high pressure condensation separator respectively, nitrogen oxygen low-temperature adsorber works under the negative pressure liquid nitrogen vaporization temperature it.
As optimal way, said raw helium drier is filled the 5A molecular sieve.
As optimal way, also comprise the negative pressure evaporation nitrogen heat exchanger that is communicated between raw helium drier, the high pressure condensation separator, said negative pressure evaporation nitrogen heat exchanger is communicated with cooling system carry out the heat exchange cooling through the raw material helium in it.
As optimal way; Also comprise regenerative system; Said regenerative system comprises the regeneration gas heater; Said regeneration gas heater is provided with regeneration usefulness gas nitrogen inlet, regeneration with the outlet of hot gas nitrogen, and said regeneration is communicated between raw helium drier and the high pressure condensation separator on the purification system pipeline with the outlet of hot gas nitrogen, and through its interior regeneration with hot gas nitrogen to the reverse activation of raw helium drier of valve control; Or with hot gas nitrogen heating low-temperature adsorber chuck, and simultaneously the absorber inner core is found time with activated carbon.
As optimal way, said nitrogen oxygen low-temperature adsorber outside is provided with the liquid nitrogen chuck, and it is its cooling that said cooling system is communicated with said liquid nitrogen chuck.
As optimal way; Said high pressure condensation separator outside is provided with the liquid nitrogen chuck, and inside is provided with inner core, and it is its cooling that said cooling system is communicated with said liquid nitrogen chuck; Be provided with coil pipe in the said liquid nitrogen chuck, the raw material helium is crossed the cold said inner core condensation that gets into again through said coil pipe earlier.
As optimal way, said raw helium drier is used alternatingly at least 2 parallel connections.
As optimal way, said nitrogen oxygen low-temperature adsorber is used by the parallel connection of at least 2 groups, and every group by at least 2 nitrogen oxygen low-temperature adsorber series connection uses.
As optimal way, said high pressure condensation separator, nitrogen oxygen low-temperature adsorber are located in the ice chest, are filled with insulation in the said ice chest and use expanded perlite.
As optimal way, said negative pressure evaporation nitrogen heat exchanger is located in the ice chest, is filled with insulation in the said ice chest and uses expanded perlite.
The beneficial effect of the utility model: because the boiling point of helium is lower than nitrogen oxygen, the utility model adopts the low-temperature receiver of liquid nitrogen as device, and H is removed in the absorption of raw helium drier
2O, CO
2Adopt the vaccum-pumping equipment evacuation system; Obtain negative pressure evaporation nitrogen grade low-temp; Make a large amount of nitrogen oxygen impurities condensation in the high pressure condensation separator in the helium, utilize the active carbon in the nitrogen oxygen low-temperature adsorber under negative pressure evaporation nitrogen grade low-temp, to adsorb smart denitrogenation oxygen impurities again, finally obtain 99.999% pure helium.
Description of drawings
Fig. 1 is the overall device flow chart of the utility model embodiment;
Fig. 2 is first section equipment flowsheet of the segmentation enlarged drawing of Fig. 1;
Fig. 3 is second section equipment flowsheet of the segmentation enlarged drawing of Fig. 1;
Fig. 4 is the 3rd a section equipment flowsheet of the segmentation enlarged drawing of Fig. 1;
Fig. 5 is the 4th a section equipment flowsheet of the segmentation enlarged drawing of Fig. 1.
The specific embodiment
Following non-limiting examples is used to explain the utility model.
To shown in Figure 5, a kind of helium purification devices comprises purification system and cooling system like Fig. 1, said purification system comprise be communicated with successively from the raw material helium, remove H
2O, CO
2Raw helium drier, the high pressure condensation separator that preliminary condensation removes nitrogen oxygen; And the nitrogen oxygen low-temperature adsorber of the smart denitrogenation oxygen of filling charcoal absorption; Said cooling system comprises the pipe-line system that is connected with liquid nitrogen; And this pipe-line system of finding time makes its vaccum-pumping equipment that reaches negative pressure state, and said pipe-line system is communicated with said high pressure condensation separator respectively, nitrogen oxygen low-temperature adsorber works under the negative pressure liquid nitrogen vaporization temperature it.
1. capital equipment and effect:
Raw helium drier: operating pressure: 3.5～4.0MPa; Operating temperature: normal temperature; Activation temperature: 200 ℃.Interior dress 5A molecular sieve mainly removes the H in the helium
2O, CO
2, prevent line clogging.The parallel connection of drying tower double tower is used, one group of use, and another organizes regeneration, and be 48h service time.
Regeneration gas heater: power: 2kW.Be mainly used in heated nitrogen and come regeneration activating raw helium drier and absorber.
High pressure condensation separator: operating pressure: 3.5～4.0MPa; Operating temperature: negative pressure liquid nitrogen temperature.Be mainly used in gas-liquid separation, remove most of oxygen and a part of nitrogen in the unstripped gas.
Nitrogen oxygen low-temperature adsorber: operating pressure: 3.5～4.0MPa; Operating temperature: negative pressure liquid nitrogen temperature; Activation temperature: normal temperature.Be mainly used in the nitrogen oxygen impurities in the absorption unstripped gas, the helium purity behind the absorption impurity can reach 99.999%.
Vavuum pump: pumping speed: 8L/s.Mainly be used for taking out negative pressure, make the pressure of cryogenic system be lower than normal pressure.
2. operating procedure:
Raw helium Compressed Gas (3.5 ~ 4.0MPa) the about 6.0Nm that contain saturation vapour
3/ h gets into one of two raw helium driers (interior dress 5A molecular sieve) V-101 that is used alternatingly at normal temperatures through V1A or V1B valve.Through the raw helium drier, steam and the carbon dioxide in the raw helium removed in absorption, freezes and blocking pipe and equipment under the low temperature avoiding.Dried air-flow gets into the cold-zone with expanded perlite (pearlife) cold insulation through V2A or V2B valve; The negative pressure of flowing through nitrogen heat exchanger E-102; With the heat exchange of negative pressure evaporation nitrogen, make temperature drop to about 90K, feed the coil pipe in the high pressure condensation separator E-104 chuck subsequently; By the negative pressure liquid nitrogen cross be as cold as about 68 K after, get into high pressure condensation separator E-104 inner core.At high pressure condensation separator inner core; According to the helium-nitrogen under operating pressure 3.5 MPa and the negative pressure nitrogen temperature and helium-oxygen equilibrium; Most of the nitrogen and oxygen are condensed into liquid state, and the helium that in liquid nitrogen/oxygen, dissolves is about 1%, are condensed into liquid nitrogen/oxygen through V6 valve intermittent discharge.Must keep certain liquid level in the attention equipment, can not condensate liquid be emitted fully, otherwise can uncooled gaseous state raw helium be discharged system through V6.Under operating condition, it is about 97.5% that uncooled gaseous state raw helium contains helium in the high pressure condensation separator, flowed out by the equipment top, gets into one of two groups of nitrogen oxygen low-temperature adsorbers (interior dress active carbon) V-102 that under negative pressure nitrogen temperature, is used alternatingly through V15A or V15B valve.Through nitrogen oxygen low-temperature adsorber, remove remaining nitrogen oxygen impurities in the helium by charcoal absorption, obtain 99.999% high-pure helium product.Product goes out system through V16A or V16B valve flow, and get into empty temperature heater E-103 re-heat and to normal temperature, loop back the liquid helium device,
Preparation before driving first:
Naked cold pressurize test:
Before filling expanded perlite thermal-nsulation material; Earlier with each Cryo Equipment of drying nitrogen displacement; For reducing naked cold pressurize experimentation cost, replace each Cryo Equipment of helium filling to about 4.0MPa with dry hydrogen again, add liquid nitrogen for the liquid nitrogen chuck of each relevant Cryo Equipment through V17, V18A/B valve simultaneously; Nitrogen oxygen low-temperature adsorber, high pressure condensation separator outside are provided with the liquid nitrogen chuck; Evaporate the nitrogen steam that from the liquid nitrogen chuck through valve V19A/B or directly get into the vaporized nitrogen house steward, behind the negative pressure of the flowing through nitrogen heat exchanger, again by V7 valve (through vavuum pump) emptying.In the apparatus cools process, because temperature constantly descends, constantly hydrogen make-up in Cryo Equipment to keep Hydrogen Vapor Pressure in the equipment, no longer can be carried out the pressurize operation to equipment because of variations in temperature reduces up to pressure.In the pressure maintaining period, note to observe pressure changing at any time, keep basically within 8h like pressure invariable, then naked cold pressurize pass the test.Change greatly like pressure, then tackle equipment, valve, pipeline, pipe fitting and joint etc. and hunt leak, and the leak source of checking out is suitably disposed, till not leaking.The mending-leakage if leakage point need be got angry must emit the liquid nitrogen in the equipment chuck, just can get angry after qualified with hydrogen emptying in the equipment and with nitrogen replacement simultaneously.
Mending-leakage and pressurize are carried out by as above step repeatedly, until naked cold pressurize pass the test, promptly pressure keep basically within the 8h invariable till.To the system of naked cold pressurize pass the test, liquid nitrogen and the device interior that should drain in the equipment chuck divide pressurize hydrogen, treat that temperature rises to normal temperature after, the hydrogen in the emptying equipment again.
The molecular sieve activation processing:
Like what load in the raw helium drier is molecular sieve in bulk, in the process of long-term ingress of air, might adsorb airborne water and carbon dioxide, must before the use that formally feeds intake, carry out activation processing.Activation processing is identical with the regenerative operation method of molecular sieve in the normal running, promptly adopts the low pressure hot nitrogen of reverse flow that molecular sieve in the raw helium drier is heated.The low-pressure nitrogen that from system's external pressure is 0.02 ~ 0.05MPa gets into regeneration gas heater E-101 through valve V5 through regeneration usefulness gas nitrogen inlet; After being heated to about 250 ℃; The regeneration of regeneration gas heater is communicated between raw helium drier and the high pressure condensation separator on the purification system pipeline with hot gas nitrogen outlet; Get into raw helium drier V-101A/B simultaneously by the V3A/B valve; In the raw helium drier by the steam of 5A molecular sieve adsorption and carbon dioxide behind hot nitrogen heating desorption and desorption, go out the raw helium drier with hot nitrogen through the V4A/B valve flow again, pass through the emptying of V10 valve at last.When nitrogen goes out the raw helium dryer temperature greater than 100 ℃, stop heating to nitrogen, continue after outlet temperature drops to normal temperature, to close V10, V4A/B and V3A/B valve successively the raw helium drier is carried out pressurize with normal temperature nitrogen cold blowing raw helium drier.Before feeding intake, formal driving should not bleed off the low-pressure nitrogen in the equipment.
Active carbon activates to be handled:
Like what load in the nitrogen oxygen low-temperature adsorber is active carbon in bulk, in the process of long-term ingress of air, might adsorb carbon dioxide in air, must use the line activating that advances to handle formally feeding intake.Processing method is: send into nitrogen through V5; Launch regeneration gas heater E-101; The control heating-up temperature is not higher than 100 ℃, more successively through valves such as V3A/B, V2A/B, V15A/B and V16A/B, borrows the mobile direct heat activated charcoal adsorbent of hot nitrogen; Make the impurity such as carbon dioxide that are adsorbed from active carbon, separate adsorption desorption and come out, and take system out of with hot nitrogen.After the temperature that goes out system's nitrogen is higher than 30 ℃ of environment temperatures, stop heating, continue logical nitrogen cold blowing adsorbent, after outlet temperature drops to normal temperature, close the V5 valve and stop to feed nitrogen.When nitrogen oxygen low-temperature adsorber pressure drops near zero gauge pressure, close V16A/B, V2A/B and V3A/B valve successively, open V13A/B and V9-2 valve, start vavuum pump P-101 system is vacuumized.Find time to close V9-2 and V13A/B valve behind the 30min, charge into the pure helium of low pressure by pure helium out pipe through the V16A/B valve system is carried out pressurize.Before formal driving feeds intake, close all valves, the system of remaining is in the main schedule pressure condition.
Driving normally feeds intake:
After device is transported to the scene, check whether all valves are in closed condition, whether raw helium drier and nitrogen oxygen low-temperature adsorber Pressure gauge have kept the main schedule pressure condition.Normal like all, driving then can formally feed intake.
The operation of raw helium drier:
The driving that formally feeds intake is preceding to the processing of raw helium drier pressurize with low-pressure nitrogen: explain as follows that into example the V10 valve through V4A and the emptying of V10 valve, is closed with pressurize nitrogen then in elder generation, drives the V9-1 valve it is carried out evacuation processes earlier V-101A is driven to feed intake.About 30min of evacuation processes time.When V-101A is implemented discharging pressurize nitrogen and evacuation processes, should open V17, V18A/B and V7 valve and add liquid nitrogen to high pressure condensation separator chuck and nitrogen oxygen low-temperature adsorber chuck respectively, vaporized nitrogen through the V7 valve by vavuum pump P-102 emptying.When the liquid level of liquid nitrogen reaches about 1/3 height in the chuck, can start vavuum pump P-102 and find time to produce negative pressure evaporation nitrogen grade low-temp.After the evacuation processes to V-101A finishes, can slowly open the V1A valve and formally feed intake to V-101A,, pressure can open the V2A valve after rising to routine operating pressure 3.5 ~ 4.0MPa gradually, and raw helium drier V-101A gets into normal operation.And then V-101B being carried out same putting presses and evacuation processes; Find time to finish; Slowly open the V2B valve, through the port of export V-101B is carried out reverse cushion steam, reach balance until the two pressure by the V-101A that is in normal drying process; Standard-sized sheet V2B valve, V-101B can be in the drying process stand-by state.So far, the raw helium drier V-101A/B normal running dry and regeneration that can hocket.The design cycle of dry regeneration is 48h.
High pressure condensation separator operation:
Get into the high pressure condensation separator in the cold-zone of expanded perlite (pearlife) cold insulation through V2A or V2B valve through the air-flow after the dried, high pressure condensation separator outside is provided with the liquid nitrogen chuck, and inside is provided with inner core, is provided with coil pipe in the liquid nitrogen chuck.The high pressure condensation separator can reach routine operating pressure 3.5 ~ 4.0MPa very soon.After raw helium was flowed through negative pressure nitrogen heat exchanger E-102 and the heat exchange of negative pressure evaporation nitrogen, temperature can drop to about 90K, fed the coil pipe in the high pressure condensation separator E-104 chuck subsequently, by the negative pressure liquid nitrogen cross be as cold as about 68K after, entering high pressure condensation separator E-104 inner core.At high pressure condensation separator inner core; According to the helium-nitrogen under operating pressure 3.5 ~ 4.0MPa and the negative pressure evaporation nitrogen temperature and helium-oxygen equilibrium; Most of the nitrogen and oxygen are condensed into liquid state, and the helium that in liquid nitrogen/oxygen, dissolves is about 1%, are condensed into liquid nitrogen/oxygen through V6 valve intermittent discharge.Must keep certain liquid level in the attention equipment, can not the nitrogen oxygen liquid that condensation is got off be emitted fully, otherwise can make uncooled gaseous state raw helium discharge system through the V6 valve.The time interval of condensate discharge is by the nitrogen oxygen content decision of raw material raw helium.Under operating condition, it is about 97.5% ~ 98.0% that uncooled gaseous state raw helium contains helium in the high pressure condensation separator, flowed out by the equipment top, gets into one of two groups of nitrogen oxygen low-temperature adsorber V-102 that under negative pressure evaporation nitrogen temperature, are used alternatingly through V15A or V15B valve.Be in the high pressure condensation separator in the normal running, must possess the amount of liquid nitrogen of 1/3 ~ 2/3 height in its chuck.
The operation of nitrogen oxygen low-temperature adsorber:
With earlier to nitrogen oxygen low-temperature adsorber V-102A drive to feed intake into the example explanation as follows: get into normally at raw helium drier V-101A and to move; And high pressure condensation separator pressure reaches in routine operating pressure 3.5 ~ 4.0MPa; Slowly opening the V15A valve formally feeds intake to V-102A; After pressure rises to routine operating pressure 3.5 ~ 4.0MPa gradually, can open the V16A valve, nitrogen oxygen low-temperature adsorber V-102A gets into normal operation, and qualified high-pure helium is output system after sky temperature heater E-103 re-heat.Meanwhile, slowly open the V16B valve, through the port of export V-102B is carried out reverse cushion steam by the V-102A that is in the normal sorption operation, after the two pressure reaches balance, standard-sized sheet V16B valve, V-102B can be in the adsorption operations stand-by state.So far, nitrogen oxygen low-temperature adsorber V-102A/B can hocket absorption and regeneration normal running.The design cycle of adsorption-regeneration is 24h, is in the nitrogen oxygen low-temperature adsorber in the normal sorption operation, the amount of liquid nitrogen that must possess 1/3 ~ 2/3 height in its chuck.
The above is merely the preferred embodiment of the utility model; Not in order to restriction the utility model; Any modification of being done within all spirit and principles at the utility model, be equal to replacement and improvement etc., all should be included within the protection domain of the utility model.
Claims (9)
1. helium purification devices is characterized in that: comprise purification system and cooling system, said purification system comprise be communicated with successively from the raw material helium, remove H
2O, CO
2Raw helium drier, the high pressure condensation separator that preliminary condensation removes nitrogen oxygen; And the nitrogen oxygen low-temperature adsorber of the smart denitrogenation oxygen of filling charcoal absorption; Said cooling system comprises the pipe-line system that is connected with liquid nitrogen; And this pipe-line system of finding time makes its vaccum-pumping equipment that reaches negative pressure state, and said pipe-line system is communicated with said high pressure condensation separator respectively, nitrogen oxygen low-temperature adsorber works under the negative pressure liquid nitrogen vaporization temperature it.
2. helium purification devices as claimed in claim 1; It is characterized in that: also comprise the negative pressure evaporation nitrogen heat exchanger that is communicated between raw helium drier, the high pressure condensation separator, said negative pressure evaporation nitrogen heat exchanger is communicated with cooling system carry out the heat exchange cooling through the raw material helium in it.
3. helium purification devices as claimed in claim 1; It is characterized in that: also comprise regenerative system; Said regenerative system comprises the regeneration gas heater; Said regeneration gas heater is provided with regeneration usefulness gas nitrogen inlet, regeneration with the outlet of hot gas nitrogen, and said regeneration is communicated between raw helium drier and the high pressure condensation separator on the purification system pipeline with the outlet of hot gas nitrogen, and through its interior regeneration with hot gas nitrogen to the reverse activation of raw helium drier of valve control; Or with hot gas nitrogen heating low-temperature adsorber chuck, and simultaneously the absorber inner core is found time with activated carbon.
4. helium purification devices as claimed in claim 1 is characterized in that: said nitrogen oxygen low-temperature adsorber outside is provided with the liquid nitrogen chuck, and it is its cooling that said cooling system is communicated with said liquid nitrogen chuck.
5. helium purification devices as claimed in claim 1; It is characterized in that: said high pressure condensation separator outside is provided with the liquid nitrogen chuck; Inside is provided with inner core; It is its cooling that said cooling system is communicated with said liquid nitrogen chuck, is provided with coil pipe in the said liquid nitrogen chuck, and the raw material helium is crossed the cold said inner core condensation that gets into again through said coil pipe earlier.
6. helium purification devices as claimed in claim 1 is characterized in that: said raw helium drier is used alternatingly at least 2 parallel connections.
7. helium purification devices as claimed in claim 1 is characterized in that: said nitrogen oxygen low-temperature adsorber is used by the parallel connection of at least 2 groups, and every group by at least 2 nitrogen oxygen low-temperature adsorber series connection uses.
8. the helium purification devices described in arbitrary claim in the claim 1,3 to 7, it is characterized in that: said high pressure condensation separator, nitrogen oxygen low-temperature adsorber are located in the ice chest, are filled with insulation in the said ice chest and use expanded perlite.
9. the helium purification devices described in claim 2, it is characterized in that: said negative pressure evaporation nitrogen heat exchanger is located in the ice chest, is filled with insulation in the said ice chest and uses expanded perlite.
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| CN2011205186174U CN202432826U (en) | 2011-12-13 | 2011-12-13 | Helium purification device |
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| CN2011205186174U CN202432826U (en) | 2011-12-13 | 2011-12-13 | Helium purification device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102949911A (en) * | 2012-11-20 | 2013-03-06 | 东南大学 | Device for efficiently separating gas mixture of helium and carbon dioxide and separation method |
| CN103278374A (en) * | 2013-06-14 | 2013-09-04 | 中国科学院广州能源研究所 | In situ Raman analysis device for representing hydrate and in situ Raman analysis method of hydrate sample |
| CN108704452A (en) * | 2018-04-17 | 2018-10-26 | 中国地质大学（武汉） | A kind of gas drier |
| CN114111219A (en) * | 2021-11-02 | 2022-03-01 | 深圳供电局有限公司 | Gas purification device based on low-temperature refrigerator |
| CN114413572A (en) * | 2021-12-28 | 2022-04-29 | 苏州金宏气体股份有限公司 | Device and method for removing fluoromethane impurities by low-temperature freezing method |
| CN114590786A (en) * | 2022-03-22 | 2022-06-07 | 中国科学院合肥物质科学研究院 | Full-automatic efficient purification device and purification method |
| CN114988377A (en) * | 2022-05-09 | 2022-09-02 | 中国科学院合肥物质科学研究院 | Helium purification system capable of removing hydrogen and neon |
-
2011
- 2011-12-13 CN CN2011205186174U patent/CN202432826U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102949911A (en) * | 2012-11-20 | 2013-03-06 | 东南大学 | Device for efficiently separating gas mixture of helium and carbon dioxide and separation method |
| CN103278374A (en) * | 2013-06-14 | 2013-09-04 | 中国科学院广州能源研究所 | In situ Raman analysis device for representing hydrate and in situ Raman analysis method of hydrate sample |
| CN103278374B (en) * | 2013-06-14 | 2015-04-22 | 中国科学院广州能源研究所 | In situ Raman analysis device for representing hydrate and in situ Raman analysis method of hydrate sample |
| CN108704452A (en) * | 2018-04-17 | 2018-10-26 | 中国地质大学（武汉） | A kind of gas drier |
| CN114111219A (en) * | 2021-11-02 | 2022-03-01 | 深圳供电局有限公司 | Gas purification device based on low-temperature refrigerator |
| CN114413572A (en) * | 2021-12-28 | 2022-04-29 | 苏州金宏气体股份有限公司 | Device and method for removing fluoromethane impurities by low-temperature freezing method |
| CN114590786A (en) * | 2022-03-22 | 2022-06-07 | 中国科学院合肥物质科学研究院 | Full-automatic efficient purification device and purification method |
| CN114590786B (en) * | 2022-03-22 | 2022-12-27 | 中国科学院合肥物质科学研究院 | Full-automatic efficient purification device and purification method |
| CN114988377A (en) * | 2022-05-09 | 2022-09-02 | 中国科学院合肥物质科学研究院 | Helium purification system capable of removing hydrogen and neon |
| CN114988377B (en) * | 2022-05-09 | 2022-12-27 | 中国科学院合肥物质科学研究院 | Helium purification system capable of removing hydrogen neon |
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Owner name: SOUTHWEST RESEARCH + DESIGN INSTITUTE OF CHEMICAL Free format text: FORMER NAME: SOUTHWEST RESEARCH + DESIGN INSTITUTE OF CHEMICAL INDUSTRY |
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Address after: No. 5 high tech Zone Gaopeng road in Chengdu city of Sichuan Province in 610225 Patentee after: Southwest Chemical Research & Design Institute Co., Ltd. Address before: No. 5 high tech Zone Gaopeng road in Chengdu city of Sichuan Province in 610225 Patentee before: Xinan Chemical Research & Design Inst. |
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Granted publication date: 20120912 |
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