CN202415400U - Unit for preparing high-purity carbon tetrafluoride - Google Patents
Unit for preparing high-purity carbon tetrafluoride Download PDFInfo
- Publication number
- CN202415400U CN202415400U CN2011205309348U CN201120530934U CN202415400U CN 202415400 U CN202415400 U CN 202415400U CN 2011205309348 U CN2011205309348 U CN 2011205309348U CN 201120530934 U CN201120530934 U CN 201120530934U CN 202415400 U CN202415400 U CN 202415400U
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- rectifying tower
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- condensing surface
- pipeline
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Abstract
The utility model relates to a unit for preparing high-purity carbon tetrafluoride, which comprises a first fractionating column, a first condenser, a second condenser, a separator, a second fractionating column, a third condenser, a third fractionating column and a fourth condenser, which are connected through pipelines. The unit is used for efficiently separating mixture of carbon tetrafluoride/nitrogen trifluoride to prepare high-purity carbon tetrafluoride by azeotropic distillation or extractive distillation, is low in cost and continuous in process and is suitable for industrial popularization.
Description
Technical field
The utility model belongs to chemical field; Relate to a kind of device for preparing high-pure carbon tetrafluoride; Particularly utilize azeotropic distillation or extracting rectifying to come high efficiency separation tetrafluoro-methane/nitrogen trifluoride mixture to prepare the device of high-pure carbon tetrafluoride, be particularly useful for producing high-pure carbon tetrafluoride.
Background technology
Tetrafluoro-methane is incombustible colourless, tasteless high pressure liquefied gas.Tetrafluoro-methane is the maximum plasma etch gases of consumption in the present microelectronics industry; In the electron device surface cleaning; The production of solar cell; Laser technology, gas phase insulation, cryogenic refrigeration, leak check agent, control cosmic rocket attitude, the aspects such as stain remover during printed wiring is produced are also used in a large number.Because its chemicalstability, tetrafluoro-methane can be used for Metal smelting, for example: copper, stainless steel, carbon steel, aluminium, Monel etc.; Also can be used for plastic industry; As: viton, X 050, also can be widely used in silicon, silicon-dioxide, silicon nitride, the etching of thin-film materials such as phosphorosilicate glass and tungsten is in the electron device surface cleaning.Prior art is that fluorochloromethane and hydrogen fluoride (HF) carry out gas-phase reaction and prepares tetrafluoromethane and since fluorochloromethane fluoridize corresponding methane difficulty, obtain very difficulty of tetrafluoromethane, preparation cost is also very high.
Summary of the invention
The utility model problem to be solved is; Overcome the deficiency of prior art; A kind of device for preparing high-pure carbon tetrafluoride is provided, utilizes azeotropic distillation or extracting rectifying to come high efficiency separation tetrafluoro-methane/nitrogen trifluoride mixture to prepare high-pure carbon tetrafluoride, greatly reduce cost; Technology is carried out continuously, is suitable for industrialization promotion.
The utility model solves its technical problem and takes following technical scheme to realize:
A kind of device for preparing high-pure carbon tetrafluoride that provides according to the utility model; Comprise rectifying tower one, rectifying tower two, rectifying tower three, condensing surface one, condensing surface two, condensing surface three and separator; Rectifying tower one is provided with feed(raw material)inlet, the HCI inlet of rectifying tower one, the rectifying tower one NF3 outlet of rectifying tower one; The outlet of rectifying tower one connects the inlet of condensing surface one through pipeline; The outlet one of condensing surface one is through the inlet one of pipeline connection rectifying tower one, and the outlet two of condensing surface one is through the inlet of pipeline connection condensing surface two, and the outlet of condensing surface two connects the inlet of separator through pipeline; The outlet one of separator connects the inlet one of rectifying tower two through pipeline; The outlet one of rectifying tower two is through the inlet of pipeline connection condensing surface three, and the outlet of condensing surface three connects the inlet of condensing surface two and the inlet two of rectifying tower two respectively through pipeline, and rectifying tower two also is provided with the outlet two of rectifying tower two; The outlet two of separator connects the inlet two of rectifying tower one and the inlet one of rectifying tower three respectively through pipeline; The outlet one of rectifying tower three connects the inlet of condensing surface four through pipeline, the outlet of condensing surface four connect respectively through pipeline condensing surface two inlet and rectifying tower three inlet two, rectifying tower three is provided with the outlet two of rectifying tower three.
The utility model compared with prior art has significant advantage and beneficial effect:
Because the utility model adopts azeotropic distillation or extracting rectifying to come high efficiency separation tetrafluoro-methane/nitrogen trifluoride mixture to prepare high-pure carbon tetrafluoride, greatly reduces cost, technology is carried out continuously, is suitable for industrialization promotion.
The embodiment of the utility model is provided by following examples and accompanying drawing thereof in detail.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Wherein: 1; Rectifying tower 1; The feed(raw material)inlet 102 of rectifying tower one; The HCI inlet 103 of rectifying tower one; The NF3 outlet 104 of rectifying tower one; The outlet 105 of rectifying tower one; The inlet 1 of rectifying tower one; The inlet 22 of rectifying tower one; Condensing surface 1; The inlet 202 of condensing surface one; The outlet 1 of condensing surface one; The outlet 23 of condensing surface one; Condensing surface 2 301; The inlet 302 of condensing surface two; The outlet 4 of condensing surface two; Separator 401; The inlet 402 of separator; The outlet 1 of separator; The outlet 25 of separator; Rectifying tower 2 501; The inlet 1 of rectifying tower two; The inlet 2 503 of rectifying tower two; The outlet 1 of rectifying tower two; The outlet 26 of rectifying tower two; Condensing surface 3 601; The inlet 602 of condensing surface three; The outlet 7 of condensing surface three; Rectifying tower 3 701; The inlet 1 of rectifying tower three; Rectifying tower three inlet 2 703; The outlet 1 of rectifying tower three; The outlet 28 of rectifying tower three; Condensing surface 4 801; The inlet 802 of condensing surface four; The outlet of condensing surface four.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, to embodiment, structure, characteristic and the effect thereof that provides according to the utility model, specify as after.
A kind of device for preparing high-pure carbon tetrafluoride as shown in Figure 1; Comprise rectifying tower 1, rectifying tower 25, rectifying tower 37, condensing surface 1, condensing surface 23, condensing surface 36 and separator 4; Rectifying tower 1 is provided with feed(raw material)inlet 101, the HCI inlet 102 of rectifying tower one, the rectifying tower one NF3 outlet 104 of rectifying tower one; The outlet of rectifying tower one connects the inlet 201 of condensing surface one through pipeline; The outlet 1 of condensing surface one connects the inlet 1 of rectifying tower one through pipeline; The outlet 2 203 of condensing surface one connects the inlet 301 of condensing surface two through pipeline; The outlet 302 of condensing surface two is through the inlet 401 of pipeline connection separator, and the outlet 1 of separator is through the inlet 1 of pipeline connection rectifying tower two, and the outlet 1 of rectifying tower two connects the inlet 601 of condensing surface three through pipeline; The outlet 602 of condensing surface three connects the inlet 301 of condensing surface two and the inlet 2 502 of rectifying tower two respectively through pipeline; Rectifying tower two also is provided with the outlet 2 504 of rectifying tower two, and the outlet 2 403 of separator connects the inlet 2 106 of rectifying tower one and the inlet 1 of rectifying tower three respectively through pipeline, and the outlet 1 of rectifying tower three connects the inlet 801 of condensing surface four through pipeline; The outlet 802 of condensing surface four connect respectively through pipeline condensing surface two inlet 301 and rectifying tower three inlet 2 702, rectifying tower three is provided with the outlet 2 704 of rectifying tower three.
Utilize azeotropic distillation or extracting rectifying to come high efficiency separation tetrafluoro-methane/nitrogen trifluoride mixture to prepare the technological process of high-pure carbon tetrafluoride: entrainer is used HCl usually; It and CF4 form a kind of lower boiling azeotrope; Thereby changed the relative volatility of CF4 and NF3, made both can rectifying separation.Gas mixture gets into rectifying tower 1 from the middle part, HCl gets into below the gas mixture inlet, at the bottom of tower, reclaims pure NF3.The gas mixture of CF4 and HCl gets into condensing surface 1 from cat head, and a liquefaction back part is returned as backflow, and all the other get into condensing surface 23, and then get into separator 4.Make liquid be divided into 2 parts by a membrane separation apparatus here, the flow that is rich in HCl is circulated back to rectifying tower one at last, and the flow that is rich in CF4 is admitted to rectifying tower 25.Reclaim pure CF4 from rectifying tower two bottoms, the cat head gas mixture gets into condensing surface 36, and a liquefaction back part is as refluxing remaining return condensed device two circulation.If desired, the logistics that is rich in HCl also can get into another rectifying tower 37, reclaims pure HCl from rectifying tower three bottoms, the circulation after condensing surface 48 liquefaction of gas phase part.
Claims (1)
1. device for preparing high-pure carbon tetrafluoride; Comprise rectifying tower one, rectifying tower two, rectifying tower three, condensing surface one, condensing surface two, condensing surface three and separator; It is characterized in that: described rectifying tower one is provided with feed(raw material)inlet, the HCI inlet of rectifying tower one, the rectifying tower one NF3 outlet of rectifying tower one; The outlet of rectifying tower one connects the inlet of condensing surface one through pipeline; The outlet one of condensing surface one is through the inlet one of pipeline connection rectifying tower one, and the outlet two of condensing surface one is through the inlet of pipeline connection condensing surface two, and the outlet of condensing surface two connects the inlet of separator through pipeline; The outlet one of separator connects the inlet one of rectifying tower two through pipeline; The outlet one of rectifying tower two is through the inlet of pipeline connection condensing surface three, and the outlet of condensing surface three connects the inlet of condensing surface two and the inlet two of rectifying tower two respectively through pipeline, and rectifying tower two also is provided with the outlet two of rectifying tower two; The outlet two of separator connects the inlet two of rectifying tower one and the inlet one of rectifying tower three respectively through pipeline; The outlet one of rectifying tower three connects the inlet of condensing surface four through pipeline, the outlet of condensing surface four connect respectively through pipeline condensing surface two inlet and rectifying tower three inlet two, rectifying tower three is provided with the outlet two of rectifying tower three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205309348U CN202415400U (en) | 2011-12-19 | 2011-12-19 | Unit for preparing high-purity carbon tetrafluoride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205309348U CN202415400U (en) | 2011-12-19 | 2011-12-19 | Unit for preparing high-purity carbon tetrafluoride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202415400U true CN202415400U (en) | 2012-09-05 |
Family
ID=46740182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205309348U Expired - Fee Related CN202415400U (en) | 2011-12-19 | 2011-12-19 | Unit for preparing high-purity carbon tetrafluoride |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202415400U (en) |
-
2011
- 2011-12-19 CN CN2011205309348U patent/CN202415400U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20121219 |