CN202339247U - Calibration box used for measuring vacuum degree of miniature component - Google Patents
Calibration box used for measuring vacuum degree of miniature component Download PDFInfo
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- CN202339247U CN202339247U CN2011205115200U CN201120511520U CN202339247U CN 202339247 U CN202339247 U CN 202339247U CN 2011205115200 U CN2011205115200 U CN 2011205115200U CN 201120511520 U CN201120511520 U CN 201120511520U CN 202339247 U CN202339247 U CN 202339247U
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Abstract
The utility model relates to a calibration box used for measuring the vacuum degree of a miniature component. A miniature component cartridge used for placing the miniature component is arranged in the calibration box; a vacuum sensor is arranged on the miniature component cartridge; the calibration box includes a box body and an upper cover; a vacuum measuring gauge used for measuring the vacuum degree in the calibration box is arranged on the upper cover; a vacuum exhaust tube connected with an external vacuum pump, a vacuum pressure regulating needle valve used for regulating the vacuum degree in the calibration box, and a measuring lead connected with the vacuum sensor and used for measuring the voltage of the vacuum sensor are arranged on the box body; and the measuring lead is connected with an external constant-current power supply. The calibration box has the beneficial effects that the vacuum degree in the calibration box can be accurately measured through mounting the vacuum measuring gauge, so as to enable the point-to-point relation curve of the vacuum degree in the miniature cavity of the component and the voltage measurement value to be obtained; the repeatability is very high; and the measurement reliability is strong.
Description
Technical field
The utility model belongs to the Electronic Packaging field, relates in particular to a kind of demarcation box that is used for time measurement of micro element vacuum tightness.
Background technology
The micro element Vacuum Package is according to the demand of chip operation under vacuum environment; With chip and the encapsulation technology of other component package in device with good impermeability and long-term vacuum tightness; It is ingredient important in the device level encapsulation technology; Be applied in increasing product packaging technology field at present, like non-refrigerated infrared detector spare, gyroscope, MEMS RF switch etc.
Vacuum tightness in the micro devices cavity can reach higher level usually at the encapsulation initial stage, still owing to deflation characteristic, the encapsulation gas leakage effect of internal material, in long process, the phenomenon that vacuum tightness descends gradually must occur.Therefore, carry out long-term tracking measurement for the vacuum tightness in the micro devices cavity, and differentiate the degree whether interior vacuum tightness of cavity has dropped to inefficacy, and then calculate the vacuum life of device, be the research emphasis of device level vacuum sealing technique all the time.Usually; Micro devices has the very little characteristics of cavity volume; Generally have only several milliliters to ten several milliliters; And the chip that wherein also needs work is fixed on the line lead of going forward side by side in the shell, even also need to assemble like assemblies such as TEC (TEC) or getters therein, further occupied space limited in the device.Therefore, traditional vacuum measurement is regulated or vacuum transducer can't be installed on the shell of micro devices or in the cavity, and carries out vacuum tightness and demarcate.
Patent (200810105177.2) has been introduced a kind of vacuum degree measuring equipment that is used for the device level Vacuum Package; Its with one have certain temperature-coefficient of electrical resistance the tinsel two ends be fixed on two pressure welding point in the micro devices cavity; After device package, vacuum tightness in the device is carried out vacuum test then, thereby realized the measurement of reciprocal of duty cycle really in the micro devices through the shell pin that connects two pressure welding point.
In each pressure welding the micro devices of encapsulation of tinsel or vacuum transducer is arranged, adopt a certain bias voltage or electric current to carry out vacuum measurement, can only measure its resistance value under a certain vacuum tightness, and can not know the practical vacuum degree that this resistance value is corresponding.The initial stage of accomplishing the micro element encapsulation in the process of long-term use, constantly change with the decline of vacuum tightness though can measure resistance value wiry, but can not reflect the absolute value of practical vacuum degree.Therefore, in to the vacuum tightness long-term follow measuring process in the micro element cavity, this method can only be described the approximate trend that electrical measured value that vacuum tightness reflects changes, and accurate measured value and change curve that can not actual reflection practical vacuum degree.
The utility model content
The utility model is to solve the problems of the technologies described above to provide a kind of demarcation box that is used for the micro element vacuum measurement.
The technical scheme that the utility model solves the problems of the technologies described above is following: a kind of demarcation box that is used for the micro element vacuum measurement; Be provided with the micro element shell that is used to place micro element in it; Said micro element shell is provided with vacuum transducer; This demarcation box comprises box body and loam cake, covers on said to be provided with to be used to measure the vacuum measurement rule of demarcating vacuum tightness in the box, and said box body is provided with the vacuum exhaust pipe that is connected with external vacuum pump, the vacuum pressure regulation needle-valve that is used to regulate vacuum tightness in the demarcation box; And the measurement lead that is used to measure said vacuum transducer voltage that is connected with vacuum transducer, said measurement lead is connected with external constant-current supply.
Further, said vacuum exhaust pipe is provided with extraction valve.
Further, said vacuum measurement rule are electric capacity rule or Pirani gauge.
Further, cover on said and be provided with handle.
The beneficial effect of the utility model is:
Demarcate the vacuum environment of box simulation micro element with larger-size vacuum tightness; Can accurately measure the vacuum tightness of demarcating in the box through vacuum measurement rule are installed; Make interior vacuum tightness of the small cavity of acquisition device and the point-to-point relation curve of voltage measuring value become feasible; And its repeatability is very high, and reliable measurement property is strong.
In obtaining the small cavity of device, behind vacuum tightness and the point-to-point vacuum calibration curve of voltage measuring value, can convert voltage measuring value into practical vacuum degree value at any time, can directly be used for the monitoring that component vacuum is spent the life-span through voltage measurement.
Description of drawings
Fig. 1 demarcates the box structural representation for the utility model.
Embodiment
Below in conjunction with accompanying drawing the principle and the characteristic of the utility model are described, institute gives an actual example and only is used to explain the utility model, is not the scope that is used to limit the utility model.
As shown in Figure 1; A kind of demarcation box that is used for the micro element vacuum measurement; Be provided with the micro element shell 9 that is used to place micro element in it, said micro element shell 9 is provided with vacuum transducer 11, and this demarcation box comprises box body 1 and loam cake 2; Said loam cake 2 is provided with and is used to measure the vacuum measurement rule 4 of demarcating vacuum tightness in the box; Said box body 1 is provided with the vacuum exhaust pipe 6 that is connected with external vacuum pump, the vacuum pressure regulation needle-valve 7 that is used to regulate vacuum tightness in the demarcation box, and the measurement lead 8 that is used to measure said vacuum transducer 11 voltages that is connected with vacuum transducer 11, and said measurement lead 8 is connected with external constant-current supply.
Vacuum exhaust pipe described in the present embodiment 6 is provided with extraction valve 5.
The rule of vacuum measurement described in the present embodiment 4 are adopted electric capacity rule or Pirani gauge.
Loam cake described in the present embodiment 2 is provided with the convenient handle 3 that loam cake 2 is encapsulated on the said box body 1 or takes off from box body 1.
As shown in Figure 2, a kind of method of application that is used for the demarcation box of micro element vacuum measurement may further comprise the steps:
Step 1: with said micro element shell 9 Vacuum Package in said demarcation box;
Said step 1 is specially:
Step 1.1: said micro element shell 9 is placed in the said box body 1, the lead-in wire of said vacuum transducer 11 is connected on the said measurement lead 8;
Step 1.2: said vacuum measurement rule 4 are connected on the outside vacuum measuring gauge;
Step 1.3: said loam cake 2 is added a cover on said box body 1 airtight locking;
Step 1.4: vacuum exhaust pipe 6 is connected on the high vacuum pump, closes vacuum pressure regulation needle-valve 7, and open vacuum suction valve 5;
Step 1.5: start vacuum pump, when the vacuum measuring instrument shows that vacuum tightness is higher than 1*10-2Pa, close vacuum suction valve 5.
Step 2: set up the vacuum calibration curve;
Said step 2 is specially:
Step 2.1: said measurement lead 8 is connected with external constant-current supply;
Step 2.2: open external constant-current supply, apply little drive current, said drive current is 3mA-10mA;
Step 2.3: practical vacuum degree under the record start state and corresponding voltage measuring value;
Step 2.4: slight turn vacuum pressure regulation needle-valve 7; Said box body 1 interior vacuum tightness is descended gradually; Corresponding voltage measuring value is followed decline; Write down vacuum tightness and its corresponding voltage measuring value in the said box body 1 one by one, drop to until vacuum tightness till the vacuum tightness of the required demarcation of user, break off being connected of said measurement lead and external constant-current supply;
Step 2.5: make the X-Y coordinate diagram, set up vacuum tightness and corresponding voltage measuring value trend map, as the vacuum calibration curve of this micro element shell.
Step 3: measure vacuum tightness in the said demarcation box.
Said step 3 is specially:
Step 3.1: earlier said measurement lead 8 is connected on the voltage table more than constant-current supply and four and half;
Step 3.2: open external constant-current supply, apply the identical little drive current when setting up said vacuum calibration curve, measure the terminal voltage value of said vacuum transducer 11;
Step 3.3:, convert voltage measuring value into practical vacuum degree measured value according to said vacuum calibration curve.
The above is merely the preferred embodiment of the utility model, and is in order to restriction the utility model, not all within the spirit and principle of the utility model, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (4)
1. demarcation box that is used for the micro element vacuum measurement; Be provided with the micro element shell that is used to place micro element in it; Said micro element shell is provided with vacuum transducer; It is characterized in that: this demarcation box comprises box body and loam cake, covers on said to be provided with to be used to measure the vacuum measurement rule of demarcating vacuum tightness in the box, and said box body is provided with the vacuum exhaust pipe that is connected with external vacuum pump, the vacuum pressure regulation needle-valve that is used to regulate vacuum tightness in the demarcation box; And the measurement lead that is used to measure said vacuum transducer voltage that is connected with vacuum transducer, said measurement lead is connected with external constant-current supply.
2. a kind of demarcation box that is used for the micro element vacuum measurement according to claim 1, it is characterized in that: said vacuum exhaust pipe is provided with extraction valve.
3. a kind of demarcation box that is used for the micro element vacuum measurement according to claim 1 is characterized in that: said vacuum measurement rule are electric capacity rule or Pirani gauge.
4. according to claim 1,2 or 3 described a kind of demarcation boxes that are used for the micro element vacuum measurement, it is characterized in that: cover on said and be provided with handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205115200U CN202339247U (en) | 2011-12-09 | 2011-12-09 | Calibration box used for measuring vacuum degree of miniature component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205115200U CN202339247U (en) | 2011-12-09 | 2011-12-09 | Calibration box used for measuring vacuum degree of miniature component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202339247U true CN202339247U (en) | 2012-07-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205115200U Expired - Lifetime CN202339247U (en) | 2011-12-09 | 2011-12-09 | Calibration box used for measuring vacuum degree of miniature component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202339247U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419236A (en) * | 2011-12-09 | 2012-04-18 | 烟台睿创微纳技术有限公司 | Calibration box for measuring vacuum degree of micro device and using method thereof |
| CN104776878A (en) * | 2015-04-22 | 2015-07-15 | 青岛歌尔声学科技有限公司 | Sensor testing tool and testing method |
| CN110702332A (en) * | 2019-08-27 | 2020-01-17 | 华东光电集成器件研究所 | Method for evaluating vacuum packaging performance of MEMS |
-
2011
- 2011-12-09 CN CN2011205115200U patent/CN202339247U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419236A (en) * | 2011-12-09 | 2012-04-18 | 烟台睿创微纳技术有限公司 | Calibration box for measuring vacuum degree of micro device and using method thereof |
| CN104776878A (en) * | 2015-04-22 | 2015-07-15 | 青岛歌尔声学科技有限公司 | Sensor testing tool and testing method |
| CN104776878B (en) * | 2015-04-22 | 2017-05-24 | 青岛歌尔声学科技有限公司 | Testing method for sensor testing tool |
| CN110702332A (en) * | 2019-08-27 | 2020-01-17 | 华东光电集成器件研究所 | Method for evaluating vacuum packaging performance of MEMS |
| CN110702332B (en) * | 2019-08-27 | 2021-03-30 | 华东光电集成器件研究所 | Method for evaluating vacuum packaging performance of MEMS |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP03 | Change of name, title or address |
Address after: 264006 Yantai economic and Technological Development Zone, Guiyang, No. 11 main street, Shandong Patentee after: Yantai Rui micro nano technology Limited by Share Ltd Address before: 539 room 3, E District, 32 overseas Chinese Pioneer Park, Yantai economic and Technological Development Zone, Shandong, Zhujianglu Road 264006, China Patentee before: Yantai Raytron Technology Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20120718 |
|
| CX01 | Expiry of patent term |