CN202331148U - Programmable logic controller (PLC) virtual equipment control system of vacuum film plating equipment - Google Patents

Programmable logic controller (PLC) virtual equipment control system of vacuum film plating equipment Download PDF

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Publication number
CN202331148U
CN202331148U CN2011204468277U CN201120446827U CN202331148U CN 202331148 U CN202331148 U CN 202331148U CN 2011204468277 U CN2011204468277 U CN 2011204468277U CN 201120446827 U CN201120446827 U CN 201120446827U CN 202331148 U CN202331148 U CN 202331148U
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China
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plc
equipment
control system
virtual unit
virtual
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Expired - Fee Related
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CN2011204468277U
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Chinese (zh)
Inventor
戚晖
耿达
张国栋
张华威
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Sky Technology Development Co Ltd
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Shenyang Scientific Instrument R&D Center of CAS
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The utility model discloses a programmable logic controller (PLC) virtual equipment control system of vacuum film plating equipment and mainly solves the problem that a control mode needs to be designed again when the equipment is changed. The PLC virtual equipment control system comprises a PLC, an upper computer and peripheral equipment, wherein the PLC is main control equipment and comprises virtual equipment and PLC input/output ports, the virtual equipment is connected with the peripheral equipment through the PLC input/output ports, the upper computer is a computer, is in communication connection with the PLC and controls control parameters of the peripheral equipment to be written into a control parameter region of the virtual equipment corresponding to the PLC, and the PLC programming and control is realized. The PLC virtual equipment control system has the characteristics that virtualized input/output ports are adopted in the PLC, the process flow realization is not correlative with the peripheral equipment, the peripheral equipment change is ensured only through simply modifying configuration parameters, the design requirement of the control system can be reached, the effect that the vacuum film plating equipment uses a set of control system for adapting to different peripheral component is realized, so the reliability and the stability of the control system are ensured.

Description

A kind of PLC virtual unit control system of vacuum coating equipment
Technical field
The utility model belongs to vacuum equipment technology control field, particularly relates to a kind of PLC virtual unit control system of vacuum coating equipment.
Technical background
Vacuum coating equipment generally is made up of vacuum acquiring system, vacuum measurement system, kinetic control system, heating system, gas delivery system, technology power-supply system (comprising direct supply, radio-frequency power supply, intermediate frequency power supply, electron gun power supply, ion gun etc.), warning system.The composition system of different vacuum coating equipments specifically forms mode and all there are differences; When the part of appliance that changes is controlled, must design control mode again and comprise hardware and software these differences; Be easy to cause design objective to strengthen, production cost increases and also loses time.
The utility model content
Technical matters to above-mentioned existence; The utility model provides a kind of PLC virtual unit control system of vacuum coating equipment; Realize that vacuum coating equipment uses a cover control system to adapt to different external components; Can reduce the software design task, reduce production cost, thereby guarantee the reliability and stability of control system.
In order to realize the foregoing invention purpose, the technical scheme of the utility model is following:
A kind of PLC virtual unit control system of vacuum coating equipment; It is characterized in that comprising PLC, host computer, external unit; Wherein PLC is that main control equipment comprises each virtual unit and PLC input/output end port, and each virtual unit connects external unit through the PLC input/output end port; The PLC input port connects the feedback signal of external unit, and the PLC output port connects the control end of external unit; Host computer is that computing machine is connected with the PLC communication, and the controlled variable of control external unit is written in the corresponding virtual unit controlled variable of the PLC zone, realizes programming and control to PLC.
Each virtual unit in the PLC comprises 8 way switch amount input ports, 8 way switch amount output ports, 4 tunnel analog quantity input ports, 2 tunnel analog quantity output ports.
64 virtual units can be set at most in PLC.
In PLC, preferably can be set to 1~32 virtual unit.
Said PLC input/output end port is made up of switching value module and analog module.
The utility model compared with prior art beneficial effect is:
1, the utility model mainly solves the problem that change equipment needs again design hardware and software; And this method simplicity of design; Be prone to implement; Mainly in PLC, adopt virtual input/output end port, make technological process realization and external unit onrelevant, the change of assurance external unit only need be revised configuration parameter simply and just can reach the Control System Design requirement.
2, the control method of the utility model vacuum coating equipment; Through using virtual unit parameter addressing method; Mainly utilizing PLC index technology that the port of input/output end port and virtual unit is set up mapping gets in touch; Realize that vacuum coating equipment uses a cover control system to adapt to different external components, thereby guaranteed the reliability and stability of control system.
Description of drawings
Fig. 1 is the utility model system architecture diagram;
Fig. 2 is Fig. 1 virtual unit input/output end port synoptic diagram;
Fig. 3 is a virtual unit I/O data processing general flow chart;
Fig. 4 is virtual unit input flow chart of data processing figure;
Fig. 5 is a virtual unit output data processing flow chart.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model scheme is done further explain.
As shown in Figure 1, be the utility model system architecture diagram.A kind of PLC virtual unit control system of vacuum coating equipment; It is characterized in that comprising PLC, host computer, external unit; Wherein PLC is that main control equipment comprises each virtual unit and PLC input/output end port, and each virtual unit connects external unit through the PLC input/output end port; The feedback signal PLC output port that the PLC input port connects external unit connects the control end of external unit; Host computer is that computing machine is connected with the PLC communication, and the controlled variable of control external unit is written in the corresponding virtual unit controlled variable of the PLC zone, realizes programming and control to PLC.
External unit comprises the vacuum execution unit of vacuum pump, valve, well heater, deposition power supply, mass flow controller.
Maximum can be provided with 64 virtual units in the PLC.
1~32 virtual unit preferably can be set in the PLC, can adjust the quantity of virtual unit according to the demand of peripherals.
Said PLC input/output end port is made up of switching value module and analog module.
As shown in Figure 2, be virtual unit input/output end port synoptic diagram.
Each virtual unit in PLC comprises 8 way switch amount input port DI1~DI8,8 way switch amount output port DO1~DO8,4 tunnel analog quantity input port AD1~AD4,2 tunnel analog quantity output port DA1, DA2.
As shown in Figure 3, be virtual unit I/O data processing general flow chart.The control method of the PLC virtual unit control system of this vacuum coating equipment comprises the steps:
Read PLC input port data;
Each virtual unit carries out addressing according to its configuration parameter to PLC input port data to be handled, and obtains the switching value and/or the analog data of virtual unit;
The technique for vacuum coating flow process is controlled each virtual unit according to switching value and/or analog quantity, through required switching value and/or the analog quantity of each virtual unit output external unit;
Each virtual unit carries out the addressing processing according to configuration parameter to the switching value and/or the analog quantity of its output, sends it to the PLC output port.
Said virtual unit configuration parameter comprises that virtual unit quantity, switching value quantity, analog quantity quantity, PLC input/output end port module I D number, analog quantity resolution, analog quantity range comprise voltage 0~10V; Electric current 4~20MA, this virtual unit configuration parameter are that the band according to actual field equipment carries I/O electric current, voltage range and corresponding the setting.
As shown in Figure 4, be virtual unit input flow chart of data processing figure.It is following that concrete steps are handled in virtual unit switching value and/or analog data input addressing:
Read PLC switching value input data and deposit the data working area in;
The configuration parameter of working area data and virtual unit is carried out computing, and operation result is set to the switching value input port DI1~DI8 state of virtual unit; Judge whether the switching value number is less than or equal to 8,, read the PLC analog quantity and be input to the data working area, carry out computing, result of calculation is made as the analog quantity input port AD1~AD4 data of virtual unit according to the configuration parameter of virtual unit if greater than 8; Judge then whether the analog quantity number is less than or equal to 4, as accomplishing greater than 4 addressing processes.
If the analog quantity number is not more than at 4 o'clock, return execution parameter operation program step.
If the switching value number is to be less than or equal to 8, the execution parameter that continues operation program step.
Said switching value input state calculation step: the configuration parameter of working area data and virtual unit is carried out AND operation; The configuration parameter of operation result and virtual unit is compared; Identical like comparative result; The switching value input port DI1~DI8 state of virtual unit is set to 1, if different, the switching value input port DI1~DI8 state of virtual unit is set to 0.
Said analog quantity input state calculation step: the configuration parameter according to virtual unit calculates current analog quantity input point physical address; Use indexed instruction to read analog quantity numerical value, analog quantity input port AD1~AD4 that numerical value is set to virtual unit imports data.
As shown in Figure 5, be virtual unit output data processing flow chart.It is following that concrete steps are handled in virtual unit switching value and/or analog data output addressing:
Read PLC switching value output data and deposit the data working area in;
The configuration parameter and the virtual unit switching value output port DO1~DO8 state of working area data, virtual unit are carried out computing; Judge whether the switching value number is less than or equal to 8; If number is greater than 8; Operation result is write PLC switching value output port, carry out computing, operation result is write PLC analog quantity output port according to configuration parameter and virtual unit analog quantity output port DA1, the DA2 data of virtual unit; Judge then whether the analog quantity number is less than or equal to 2, accomplish greater than 2 addressing processes like number.
Be not more than at 2 o'clock like the analog quantity number, return execution parameter operation program step.
If the switching value number is to be less than or equal to 8, the execution parameter that continues operation program step.
Said switching value output state calculation step: as virtual unit switching value output port DO1~when the DO8 state is 1; Configuration parameter according to virtual unit calculates current switching value output point in the address in working area, according to this address the working area data is carried out set 1 operation.
As virtual unit switching value output port DO1~when the DO8 state is 0, calculate virtual unit switching value output point in the address in working area according to the configuration parameter of virtual unit, according to the address to 0 operation that resets of working area data.
Said analog quantity output state calculation step: the configuration parameter according to virtual unit calculates current analog quantity input point physical address, uses indexed instruction that analog quantity output port DA1, the DA2 data of virtual unit are written to the PLC physical address.

Claims (4)

1. the PLC virtual unit control system of a vacuum coating equipment; It is characterized in that comprising PLC, host computer, external unit; Wherein PLC is that main control equipment comprises each virtual unit and PLC input/output end port, and each virtual unit connects external unit through the PLC input/output end port; The PLC input port connects the feedback signal of external unit, and the PLC output port connects the control end of external unit; Host computer is that computing machine is connected with the PLC communication, and the controlled variable of control external unit is written in the corresponding virtual unit controlled variable of the PLC zone, realizes programming and control to PLC.
2. by the PLC virtual unit control system of the described a kind of vacuum coating equipment of claim 1, it is characterized in that: each virtual unit in PLC comprises 8 way switch amount input ports (DI1~DI8), 8 way switch amount output ports (DO1~DO8), 4 tunnel analog quantity input ports (AD1~AD4), 2 tunnel analog quantity output ports (DA1, DA2).
3. by the PLC virtual unit control system of claim 1 or 2 described a kind of vacuum coating equipments, it is characterized in that: 64 virtual units can be set at most in PLC.
4. by the PLC virtual unit control system of the described a kind of vacuum coating equipment of claim 3, it is characterized in that: in PLC, preferably can be set to 1~32 virtual unit.
CN2011204468277U 2011-11-11 2011-11-11 Programmable logic controller (PLC) virtual equipment control system of vacuum film plating equipment Expired - Fee Related CN202331148U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103103491A (en) * 2011-11-11 2013-05-15 中国科学院沈阳科学仪器研制中心有限公司 PLC virtual device control system for vacuum coating equipment and control method
CN105612466A (en) * 2013-09-03 2016-05-25 西门子公司 Systems and methods for virtualizing a programmable logic controller
CN108642468A (en) * 2017-06-16 2018-10-12 兰州交通大学 The evaporation source control device and its control method of vacuum coating equipment based on CAN bus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103103491A (en) * 2011-11-11 2013-05-15 中国科学院沈阳科学仪器研制中心有限公司 PLC virtual device control system for vacuum coating equipment and control method
CN105612466A (en) * 2013-09-03 2016-05-25 西门子公司 Systems and methods for virtualizing a programmable logic controller
US9954733B2 (en) 2013-09-03 2018-04-24 Siemens Aktiengesellschaft Systems and methods for virtualizing a programmable logic controller
CN105612466B (en) * 2013-09-03 2019-05-31 西门子公司 System and method for being virtualized to programmable logic controller (PLC)
CN108642468A (en) * 2017-06-16 2018-10-12 兰州交通大学 The evaporation source control device and its control method of vacuum coating equipment based on CAN bus
CN108642468B (en) * 2017-06-16 2024-03-22 兰州交通大学 Evaporation source control device of vacuum coating equipment based on CAN bus and control method thereof

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120711

Termination date: 20141111

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