CN202330688U - Calibration device for radio frequency and mixed signal integrated circuit test system - Google Patents
Calibration device for radio frequency and mixed signal integrated circuit test system Download PDFInfo
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- CN202330688U CN202330688U CN2011204868320U CN201120486832U CN202330688U CN 202330688 U CN202330688 U CN 202330688U CN 2011204868320 U CN2011204868320 U CN 2011204868320U CN 201120486832 U CN201120486832 U CN 201120486832U CN 202330688 U CN202330688 U CN 202330688U
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Abstract
The utility model discloses a calibration device for a radio frequency and mixed signal integrated circuit test system. The calibration device is used for accurately metering each index of a high-end radio frequency and mixed signal integrated circuit test system, and can make metered values traceable to national standards. The calibration device consists of an external standard instrument, a local area network/general purpose interface bus (LAN/GPIB) gateway, a calibration adaptation unit and a connecting cable. A calibration program runs through a computer of the test system to automatically calibrate the system and trace the metered values. The standard instrument adopts an imported split bench instrument, and communication between the computer and the standard instrument is realized through a GPIB/RS232 interface by utilizing a local area network technology. The standard instrument is connected with a test head of the test system through the interface, the connecting cable and the calibration adaptation unit to realize the excitation and acquisition of a signal. The calibration device has the advantages that: a calibration result is consistent with an actual service condition; calibration is facilitated; the requirements of high-accuracy metering can be met; and the calibration device is simple in structure and easy to implement.
Description
Technical field
The present invention relates to integrated circuit test system metering and technical field of measurement and test, specifically a kind of calibrating installation that is applicable to radio frequency and composite signal integrated circuits test macro.
Background technology
Integrated circuit test system is to carry out the equipment that value is measured in the design, production, use of SIC (semiconductor integrated circuit).As a kind of test macro; Accuracy of itself and reliability will directly influence whole test process, have only the integrated circuit test system of measuring can guarantee that just its value that reappears can interrelate through uncertainty known trace to the source chain and benchmark value.General integrated circuit test system all is furnished with self check software, but these checks all are closure, are not traceable to the world or national standard from system, can only verifying test system function correctness but be not sure of the measuring error of system.Radio frequency that uses at present and composite signal integrated circuits test macro are more and more, and this its frequency range of adhesive integrated circuit test macro is high-end can be to millimeter wave and submillimeter wave, and low side then can begin from direct current.Therefore this adhesive integrated circuit test macro function is comparatively complicated, and parameter and measurement unit are also with countless changes.Along with the technology of integrated circuit testing equipment is brought in constant renewal in; Metering to integrated circuit test system has proposed new requirement; Particularly radio frequency and composite signal integrated circuits test macro have complicacy and diversity, and it is calibrated and magnitude tracing faces very big pressure.Therefore, study a kind of calibrating installation that is fit to high-end radio frequency and composite signal integrated circuits test macro, system's each item index is carried out accurate measurement and can be traceable to national standard, have great importance.
Summary of the invention
The purpose of the utility model is the calibrating installation of a kind of radio frequency of design and composite signal integrated circuits test macro; This device has that the calibration parameter kind is many, calibration range ability is wide, technical indicator is high characteristics; Can satisfy the requirement of high-end radio frequency and the accurate measurement of composite signal integrated circuits test macro each item index; And can be traceable to national standard, guarantee that its value that reappears can interrelate through uncertainty known trace to the source chain and benchmark value.
A kind of radio frequency and composite signal integrated circuits test macro calibrating installation is characterized in that, comprise external reference instrument, LAN/GPIB gateway, calibration adaptation unit, stube cable.Calibrating installation and test macro are formed a closed-loop system, test macro is calibrated automatically and carried out magnitude tracing through the computer run calibration software of test macro.
External reference instrument adopts the discrete desk-top instrument of import, and its technical indicator is higher than by 3 times of school integrated circuit test systems.External reference instrument comprises multi-functional calibration source, digital multimeter, Arbitrary Waveform Generator, peak-reading voltmeter, radio-frequency signal source, measuring receiver, adopts local area network technology to realize communicating by letter between system computer and reference instrument through gpib interface.External reference instrument is interconnected based on gpib bus or RS232 bus and LAN/GPIB gateway; The LAN/GPIB gateway is set up TCP/IP with the workstation of test macro through Ethernet and is connected, and realizes the transmission of the synchronous and data of control signal; Calibration software is carried out by the workstation of test macro; External reference instrument is connected with the calibration adaptation unit through interface and connection cable; The calibration adaptation unit directly places on the measuring head of test macro when calibration.Calibrating installation with carried out network through the LAN/GPIB gateway between the test macro of school and be connected, test macro sends the order of SCPI reference instrument through reference instrument control storehouse SICL control LAN/GPIB gateway the GPIB/RS232 instrument is programmed to send excitation or measurement data.Calibration software is through " calibration application program ", " software interface ", " instrument drivers " control criterion instrument.
The advantage of a kind of radio frequency of the utility model and composite signal integrated circuits test macro calibrating installation is:
(1) adopt whole original position calibration, calibration procedure is moved by the computing machine of integrated circuit test system automatically, and its result meets actual operating position and calibration is convenient;
(2) reference instrument adopts the discrete desk-top instrument of import, can satisfy the requirement of high-end integrated circuit test system high-precision measuring;
(3) utilize local area network technology to realize communicating by letter between principal computer and system instrument, have knot of tissue constitute simple, characteristics such as realization easily;
(4) be traceable to national benchmark through the canonical reference source from system's end, can guarantee accuracy, reliability and the consistance of test macro measurement result.
Description of drawings
Fig. 1 is that the calibrating installation of the utility model makes up synoptic diagram.
Fig. 2 is the calibrating installation network connection layout of the utility model.
Fig. 3 is the calibration software structural drawing of the utility model.
Fig. 4 is the subitem calibration process figure of the utility model.
Embodiment
The embodiment of this patent is described below in conjunction with Figure of description.
The utility model is to radio frequency and composite signal integrated circuits test macro parameter kind is many, range ability is wide, technical indicator is high characteristics; Select the discrete desk-top instrument of import to make up calibrating installation and also developed calibration software, can carry out automatically high-end radio frequency and composite signal integrated circuits test macro each item index, the gamut accurate measurement.
As shown in Figure 1, a kind of radio frequency and composite signal integrated circuits test macro calibrating installation comprise LAN/GPIB gateway 2, external reference instrument 3, calibration adaptation unit 4, interface and stube cable 5.Calibrating installation and test macro are formed a closed-loop system, calibrate automatically and carry out magnitude tracing through 1 pair of test macro of computer run calibration software of test macro.External reference instrument 3 comprises multi-functional calibration source 31, digital multimeter 32, Arbitrary Waveform Generator 33, peak-reading voltmeter 34, radio-frequency signal source 35, measuring receiver 36.External reference instrument 3 is connected with the test macro workstation through LAN/GPIB gateway 2, is connected with calibration adaptation unit 4 through interface and connection cable 5, and calibration adaptation unit 4 directly places on the measuring head of test macro when calibration.
As shown in Figure 2, external reference instrument 3 adopts the discrete desk-top instrument of imports, and its technical indicator is higher than by 3 times of school integrated circuit test systems, adopts local area network technology to communicate between test macro computing machine and the external reference instrument 3.Link together with the GPIB standard cable through gpib interface between multi-functional calibration source 31, Arbitrary Waveform Generator 33, peak-reading voltmeter 34, radio-frequency signal source 35, the measuring receiver 36; Interconnected based on gpib bus and LAN/GPIB gateway 2; Digital multimeter 32 is interconnected based on RS232 bus and LAN/GPIB gateway 2; LAN/GPIB gateway 2 is set up TCP/IP with the workstation of test macro through Ethernet and is connected, and realizes the transmission of the synchronous and data of control signal.
As shown in Figure 3, calibration software 1 is made up of calibration application program 11, software interface 12, instrument drivers 13.Calibration software 1 is carried out by the workstation of test macro, sends the order of SCPI reference instrument through reference instrument control storehouse SICL control LAN/GPIB gateway 2 external reference instrument 3 is controlled to send excitation or measurement data.When 1 pair of external reference instrument 3 of calibration software is controlled, at first the instrument hardware bottom is programmed, write corresponding instrument drivers 13 with communicating by letter to the control of instrument according to the programming handbook of external reference instrument 3.Control storehouse SICL as software interface 12 with reference instrument then, call the instrument drivers 13 of bottom and control external reference instrument 3 operations, realize being connected of instrument drivers 13 and calibration application program 11.Calibration application program 11 is developed in the programmed environment of test macro, is divided into a plurality of modules by the system instrument operating function, and is separate between module and the module, and each module is accomplished the measurement and calibration work of a project.The canonical process of each subitem calibration is as shown in Figure 4.
When the utility model was calibrated the direct supply measurement component of radio frequency and composite signal integrated circuits test macro, process was to send galvanic currents by the multi-functional calibration source 31 of calibration software 1 control to press V
S1Or DC current I
S1, signal is successively via interface and connection cable 5, calibration adaptation unit 4, and the direct supply that is loaded into radio frequency and composite signal integrated circuits test macro is measured on the passage, and the DC voltage measured on this passage of calibration software 1 control direct supply is V subsequently
M1Or DC current is I
M1, obtain the dc voltage measurement error at last and be V
S1With V
M1Difference, the dc current measurement error is I
S1With I
M1Difference.
When the utility model was calibrated the direct supply driver part of radio frequency and composite signal integrated circuits test macro, process was to be sent the DC voltage V of regulation by the direct supply in calibration software 1 control radio frequency and the composite signal integrated circuits test macro
X2Or DC current I
X2, signal via calibration adaptation unit 4, interface and connection cable 5, is loaded on the measuring junction of digital multimeter 32 successively, and calibration software 1 control figure multimeter 32 measuring DC voltage are V subsequently
S2Or DC current is I
S2, obtain the direct voltage drive error at last and be V
S2With V
X2Difference, the direct current driven error is I
S2With I
X2Difference.
The utility model is during to the calibration of the waveform digitization appearance parts of radio frequency and composite signal integrated circuits test macro, and process is to be V by calibration software 1 control Arbitrary Waveform Generator 33 transmission amplitudes
S3, frequency is F
S3AC signal; Signal is successively via interface and connection cable 5, calibration adaptation unit 4; The waveform digitization appearance that is loaded into radio frequency and composite signal integrated circuits test macro is measured on the passage, and the AC signal amplitude on this passage of calibration software 1 control waveform digitizer measurement subsequently is V
M3, frequency is F
M3, obtain waveform digitization appearance range error at last and be V
S3With V
M3Difference, frequency error is F
S3With F
M3Difference.
The utility model is during to the calibration of the Arbitrary Waveform Generator parts of radio frequency and composite signal integrated circuits test macro, and process is that to send amplitude by the Arbitrary Waveform Generator in calibration software 1 control radio frequency and the composite signal integrated circuits test macro be V
X4, frequency is F
X4AC signal, signal via calibration adaptation unit 4, interface and connection cable 5, is loaded on the measuring junction of peak-reading voltmeter 33 successively, calibration software 1 control peak-reading voltmeter 33 amplitude of measuring these signals is V subsequently
S4, frequency is F
S4, obtain the AWG range error at last and be V
S4With V
X4Difference, frequency error is F
S4With F
X4Difference.
The utility model is during to the calibration of the radio-frequency measurement parts of radio frequency and composite signal integrated circuits test macro, and process is to be P by calibration software 1 control radio-frequency signal source 35 transmitted powers
S5, frequency is F
S5Radiofrequency signal; Signal is successively via interface and connection cable 5, calibration adaptation unit 4; Be loaded on the radio-frequency measurement passage of radio frequency and composite signal integrated circuits test macro, the power of the radiofrequency signal on calibration software 1 this passage of control radio-frequency measurement parts measurement is P subsequently
M5, frequency is F
M5, obtain radio-frequency measurement parts power measurement error at last and be P
S5With P
M5Difference, frequency error is F
S5With F
M5Difference.Sensitivity and dynamic range for the radio-frequency measurement parts also can obtain through the radio-frequency measurement parts measurement correlation parameter of same measuring route by calibration software 1 control radio-frequency signal source 35 and test macro according to the definition of its parameter.
When the utility model was calibrated the radio-frequency driven parts of radio frequency and composite signal integrated circuits test macro, process was that the radio-frequency driven parts transmitted power of controlling radio frequency and composite signal integrated circuits test macro by calibration software 1 is P
X6, frequency is F
X6Radiofrequency signal, signal via calibration adaptation unit 4, interface and connection cable 5, is loaded on the measuring junction of measuring receiver 36 successively, calibration software 1 control survey receiver 36 power of measuring these signals is P subsequently
S6, frequency is F
S6, obtain radio-frequency driven parts power drive error at last and be P
S6With P
X6Difference, frequency error is F
S6With F
X6Difference.Also can obtain through the radio-frequency driven parts measurement correlation parameter of same measuring route with making an uproar mutually for the harmonic wave of radio-frequency driven parts according to the definition of its parameter by calibration software 1 control survey receiver 36 and test macro.
The utility model not only is confined to above-mentioned embodiment, can adopt other multiple embodiment to implement the utility model, so can form a plurality of embodiment.
Claims (2)
1. radio frequency and composite signal integrated circuits test macro calibrating installation is characterized in that: comprise LAN/GPIB gateway (2), external reference instrument (3), calibration adaptation unit (4), interface and stube cable (5); Described external reference instrument (3) comprises multi-functional calibration source (31), digital multimeter (32), Arbitrary Waveform Generator (33), peak-reading voltmeter (34), radio-frequency signal source (35), measuring receiver (36); External reference instrument (3) is connected with the test macro workstation through LAN/GPIB gateway (2), is connected with calibration adaptation unit (4) through interface and connection cable (5), and calibration adaptation unit (4) directly places on the measuring head of test macro when calibration.
2. described a kind of radio frequency of root a tree name claim 1 and composite signal integrated circuits test macro calibrating installation; Its characteristic also is: external reference instrument (3) adopts the discrete desk-top instrument of import; And its technical indicator is higher than by 3 times of school integrated circuit test systems; Adopt local area network technology to communicate between test macro computing machine and the external reference instrument (3); Multi-functional calibration source (31), Arbitrary Waveform Generator (33), peak-reading voltmeter (34), radio-frequency signal source (35), measuring receiver link together with the GPIB standard cable through gpib interface between (36); Interconnected based on gpib bus LAN/GPIB gateway (2); Digital multimeter (32) is interconnected based on RS232 bus and LAN/GPIB gateway (2), and LAN/GPIB gateway (2) is set up TCP/IP with the workstation of test macro through Ethernet and is connected, and realizes the transmission of the synchronous and data of control signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204868320U CN202330688U (en) | 2011-11-30 | 2011-11-30 | Calibration device for radio frequency and mixed signal integrated circuit test system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204868320U CN202330688U (en) | 2011-11-30 | 2011-11-30 | Calibration device for radio frequency and mixed signal integrated circuit test system |
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| CN202330688U true CN202330688U (en) | 2012-07-11 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675647A (en) * | 2013-12-10 | 2014-03-26 | 中国船舶重工集团公司第七〇九研究所 | Calibration device and method based on integrated circuit standard sample |
| CN104391263A (en) * | 2014-10-09 | 2015-03-04 | 中国船舶重工集团公司第七0九研究所 | Onsite calibrating apparatus of circuit board fault diagnosis automatic test system |
| CN104535950A (en) * | 2014-12-19 | 2015-04-22 | 中国船舶重工集团公司第七0九研究所 | Multi-channel symmetric calibration method of integrated circuit testing system and interface switching device of integrated circuit testing system |
| CN107102182A (en) * | 2017-05-25 | 2017-08-29 | 中国电力科学研究院 | Centralized surge voltage reference waveform method for generation and system for magnitude tracing |
| CN108051767A (en) * | 2018-01-04 | 2018-05-18 | 南京国睿安泰信科技股份有限公司 | A kind of auto-check system for integrated circuit tester |
| CN109188254A (en) * | 2018-10-26 | 2019-01-11 | 中电科仪器仪表有限公司 | Calibration method and device for the measurement of microwave semiconductor integrated circuit electrical characteristic |
| CN109901089A (en) * | 2018-12-19 | 2019-06-18 | 北京航天计量测试技术研究所 | A kind of calibration system of digital units tester |
| CN110412496A (en) * | 2019-07-29 | 2019-11-05 | 中电科仪器仪表有限公司 | The test function quick self-checking circuit and method of integrated circuit multi parameter tester |
| CN113447846A (en) * | 2021-06-29 | 2021-09-28 | 国网北京市电力公司 | Charging pile testing device calibration system |
| CN114968871A (en) * | 2022-05-06 | 2022-08-30 | 松山湖材料实验室 | Signal synchronous acquisition method and device and electronic equipment |
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2011
- 2011-11-30 CN CN2011204868320U patent/CN202330688U/en not_active Expired - Lifetime
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675647A (en) * | 2013-12-10 | 2014-03-26 | 中国船舶重工集团公司第七〇九研究所 | Calibration device and method based on integrated circuit standard sample |
| CN104391263A (en) * | 2014-10-09 | 2015-03-04 | 中国船舶重工集团公司第七0九研究所 | Onsite calibrating apparatus of circuit board fault diagnosis automatic test system |
| CN104535950A (en) * | 2014-12-19 | 2015-04-22 | 中国船舶重工集团公司第七0九研究所 | Multi-channel symmetric calibration method of integrated circuit testing system and interface switching device of integrated circuit testing system |
| CN107102182A (en) * | 2017-05-25 | 2017-08-29 | 中国电力科学研究院 | Centralized surge voltage reference waveform method for generation and system for magnitude tracing |
| CN108051767B (en) * | 2018-01-04 | 2019-07-19 | 南京国睿安泰信科技股份有限公司 | A kind of automatic diagnosis method for integrated circuit tester |
| CN108051767A (en) * | 2018-01-04 | 2018-05-18 | 南京国睿安泰信科技股份有限公司 | A kind of auto-check system for integrated circuit tester |
| CN109188254A (en) * | 2018-10-26 | 2019-01-11 | 中电科仪器仪表有限公司 | Calibration method and device for the measurement of microwave semiconductor integrated circuit electrical characteristic |
| CN109901089A (en) * | 2018-12-19 | 2019-06-18 | 北京航天计量测试技术研究所 | A kind of calibration system of digital units tester |
| CN109901089B (en) * | 2018-12-19 | 2021-10-08 | 北京航天计量测试技术研究所 | Calibration system of digital unit tester |
| CN110412496A (en) * | 2019-07-29 | 2019-11-05 | 中电科仪器仪表有限公司 | The test function quick self-checking circuit and method of integrated circuit multi parameter tester |
| CN110412496B (en) * | 2019-07-29 | 2021-05-07 | 中电科思仪科技股份有限公司 | Test function quick self-checking circuit and method for integrated circuit multi-parameter tester |
| CN113447846A (en) * | 2021-06-29 | 2021-09-28 | 国网北京市电力公司 | Charging pile testing device calibration system |
| CN114968871A (en) * | 2022-05-06 | 2022-08-30 | 松山湖材料实验室 | Signal synchronous acquisition method and device and electronic equipment |
| CN114968871B (en) * | 2022-05-06 | 2023-03-10 | 松山湖材料实验室 | Signal synchronous acquisition method and device and electronic equipment |
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| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120711 |
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