CN202267485U - Miniature adaptive fiber ultrasonic sensor - Google Patents
Miniature adaptive fiber ultrasonic sensor Download PDFInfo
- Publication number
- CN202267485U CN202267485U CN 201120197994 CN201120197994U CN202267485U CN 202267485 U CN202267485 U CN 202267485U CN 201120197994 CN201120197994 CN 201120197994 CN 201120197994 U CN201120197994 U CN 201120197994U CN 202267485 U CN202267485 U CN 202267485U
- Authority
- CN
- China
- Prior art keywords
- quartz ampoule
- quartz tube
- sensor
- optical fibre
- fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The utility model discloses a miniature adaptive fiber ultrasonic sensor, comprising a thick quartz tube, a thin quartz tube, a coated fiber, an aluminum film, an air bag and a side-hole fiber. The top end of the coated fiber is bonded in the thin quartz tube of which the top end is bonded in the thick quartz tube, the end face of the thick quartz tube is bonded with the aluminum film, and a clearance exists between the top end of the coated fiber and the aluminum film; the air bag is arranged at the outer peripheral surfaces of the tail ends of the thin quartz tube and the thick quartz tube, and the side-hole fiber is fixed between the thick quartz tube and the thin quartz tube. By using the miniature adaptive fiber ultrasonic sensor of the utility model, the static pressure resistance capability of an extrinsic fabry-perot sensor based on a film is improved, and the drifts of sensor working points induced by the changes of the environment factors, such as temperature, etc., are eliminated automatically at the same time.
Description
Technical field
The utility model relates to sensory field of optic fibre; Specifically; Be a kind of extrinsic enamel Fabry-Perot-type optical fibre ultrasonic sensor of based thin film structure, be a kind of can eliminate automatically static pressure influence, can the autostable working point, can be used for the optical fibre ultrasonic sensor that underwater ultrasound is surveyed.
Background technology
That Fibre Optical Sensor has is highly sensitive, electrical insulation capability is good, anti-electromagnetic interference (EMI), plurality of advantages such as corrosion-resistant; Optical fiber sound wave and ultrasonic sensor its mainly to use be fibre optic hydrophone; With regard to it realized technology, the most successful optical fibre ultrasonic sensor was based on interference technique.Its remolding sensitivity traditional piezoelectric Senior Three one magnitude of fibre optic hydrophone based on interference technique has incomparable advantage.Its ultimate principle is that sensor fibre is placed body to be measured as sensor probe; When receiving the sound wave disturbance; Sensor fibre receives the acoustic pressure effect to cause fiber lengths, diameter or refractive index to change and produces phase of light wave and change, and measures the variation of phase of light wave in the sensor fibre and can know corresponding acoustic pressure.Therefore this sensor belongs to phase modulation-type, and phase place changed after wherein a branch of light received the effect of acoustic pressure, the phase differential of two light beams is changed, thereby the output intensity after causing two-beam relevant received the sound wave modulation.
In interferometric sensor, extrinsic enamel Fabry-Perot-type interferometric optical fiber sensor has dexterity simple in structure, volume is little, cost is low advantage.It also has following advantage with respect to the interferometer sensor of other forms such as Michelson, Mach-Zehnder, Sagnac: 1. the optical fiber materials are few, deluster in same optical fiber, to transmit with light echo.2. because optical path difference is very short, generally 10
-4About m,, reduce requirement, also reduced the generation of interferometric phase noise and polarization decay simultaneously light source so do not need light source that very narrow live width is arranged.3. need not carry out enhanced sensitivity or go quick processing optical fiber itself.
The extrinsic enamel Fabry-Perot-type interferometer type sensor of based thin film structure is experienced acoustical signal by elastic film, and when the sensor of the type was used for underwater survey, it was exactly to tolerate very high static pressure that distinct issues are arranged.When working sensor was in darker water, powerful static pressure can make the deformation of film exceed its elastic range, even damaged; The problem that another one need solve is the offset problem of working sensor point; When adopting the intensity demodulation mode, sensor measuring system has simple, the fireballing advantage of signal Processing, yet when the variation of the static pressure around the sensor or temperature change; Can cause the inside and outside pressure difference of extrinsic enamel Fabry-Perot-type interference cavity to change; Thereby cause that sensor departs from the quadrature duty, cause the output jitter, even blanking.Therefore need take certain method to overcome the harmful effect of extraneous static pressure and the working point of stability sensor.
The utility model content
The utility model technical matters to be solved is, overcomes the deficiency that exists in the prior art, and a kind of mini self-adaptive optical fibre ultrasonic sensor that can the static pressure of self-poise is provided.
The utility model mini self-adaptive optical fibre ultrasonic sensor, concrete technical scheme is: comprise thick quartz ampoule, thin quartz ampoule, coated optical fibre, aluminium film, air bag and side-hole fiber; Said coated optical fibre top is bonded in the thin quartz ampoule; Thin quartz ampoule top is bonded in the thick quartz ampoule; The bonding aluminium film of rubble English pipe end face; Have the gap between coated optical fibre top and the aluminium film, air bag is installed on the outer peripheral face of thin quartz ampoule tail end and thick quartz ampoule tail end, and side-hole fiber is fixed between thick quartz ampoule and the thin quartz ampoule.
Coated optical fibre is the single-mode fiber that is coated with reflectance coating on the end face.
The beneficial effect of the utility model: improved the ability of tolerance static pressure of the extrinsic enamel Fabry-Perot-type sensor of based thin film, also eliminated the drift that changes the working sensor point of introducing by environmental factors such as temperature simultaneously automatically.
The Fibre Optical Sensor of the utility model can be worked under high static pressure, promptly can carry out the deep water supersonic sounding, for new field has been started in the application of the extrinsic enamel Fabry-Perot-type of diaphragm type optical fibre ultrasonic sensor.The Fibre Optical Sensor of the utility model has the function of autostable working point, realizes that for adopting close wavelength-division multiplex technology array measurement lays the foundation.
Description of drawings
Fig. 1 is the longitudinal sectional drawing of mini self-adaptive optical fibre ultrasonic sensor;
Fig. 2 is the transverse sectional view of mini self-adaptive optical fibre ultrasonic sensor.
Embodiment
Below in conjunction with accompanying drawing the utility model is specified:
As shown in Figure 1, the utility model comprises coated optical fibre 1, thin quartz ampoule 2, side-hole fiber 3, thick quartz ampoule 4, aluminium film 5 and air bag 6; The external diameter of optical fiber 1 is 125 μ m, internal diameter 126 μ m, the external diameter 1.8mm of thin quartz ampoule 2, and the internal diameter of thick quartz ampoule 4 is 2mm, the effective diameter of aluminium film 5 is 2mm just also; Said coated optical fibre top is bonded in the thin quartz ampoule; Thin quartz ampoule top is bonded in the thick quartz ampoule; The bonding aluminium film of rubble English pipe end face; Have the gap between coated optical fibre top and the aluminium film, air bag is installed on the outer peripheral face of thin quartz ampoule tail end and thick quartz ampoule tail end, and side-hole fiber is fixed between thick quartz ampoule and the thin quartz ampoule.
Slightly, between the thin quartz ampoule, between coated optical fibre 1 and the thin quartz ampoule 2, slightly can use glue (like 353 glue) to bond together between quartz ampoule 4 tops and the aluminium film 5; There is the gap between coated optical fibre 1 top and the aluminium film 5; Its clearance distance arrives between the hundreds of micron tens; Intermediate space constitutes interference cavity (air chamber) 8, and fiber end face and aluminium film have just constituted two reflectings surface of enamel Fabry-Perot-type interferometer like this, and two bundle reflected light form interference in coated optical fibre 1.When sensing head was arranged in sound field, aluminium film 5 produced vibration because of receiving the acoustic pressure disturbance, and the chamber length that is equivalent to enamel Fabry-Perot-type interference cavity receives the modulation of outer signals, demodulated the long Changing Pattern in chamber, just can obtain measured signal.Wherein parameters such as the material of vibration film, radius and thickness can be according to the characteristics of measured characteristic and test environment optimal design in addition, and its design concept can be with reference to the Elasticity and the round and elastic plate theory of material.
In order to improve the sensitivity of sensor; The thickness of the aluminium film of choosing 5 is very little, and the thickness of this sensor aluminium film 5 is merely 10 μ m, and described enamel Fabry-Perot-type interference cavity is an air chamber; Only lean on the layer of aluminum film to bear external pressure, cause it to tolerate the scarce capacity of high static pressure.Survey if sensor is used for underwateracoustic, static pressure is very large with respect to the acoustic pressure of being surveyed in the water, and aluminium film 5 is damaged.For this reason, the utility model is provided with bag structure 6.When sensor was in the liquid, ambient pressure evenly distributed, and outside pressure can be delivered in the interference cavity 8 through the air bag 6 of soft material, and the pressure that aluminium film 5 two sides are received reaches unanimity.Interference cavity 8 external pressure change, and its inside also and then changes, and inside and outside pressure difference always goes to zero, so sensor can be operated under the very high static pressure.Through experimental verification, bag structure 6 makes the highest static pressure of work of sensor bring up to more than the 10MPa from 0.3MPa.
When the position that sensor is arranged in liquid constantly changed, outside pressure was also in continuous variation; When environment temperature changed, expanding with heat and contract with cold of sensor internal gas caused that internal pressure changes.Above both of these case all shows as the change of the inside and outside pressure difference of sensor; It is long that this variable quantity has influenced the chamber of sensor; Show as the drift of working sensor point; The effect of the bag structure of sensing head is exactly to eliminate the inside and outside pressure difference of interference cavity 8, so it has also eliminated the drift of the working sensor point of being introduced by environmental disturbances automatically when having solved the tolerance static pressure problem of sensor.It is thus clear that solve the working point that the air bag of sensor tolerance static pressure has been stablized sensor again simultaneously.
In order to let air bag 6 not influence the low frequency characteristic of sensor; Between interference cavity 8 and airbag chamber 7, connect with a Gent kind side-hole fiber 3, the circulation of air in the air bag in air and the interference cavity 8 is to carry out through the aperture in the optical fiber, and the diameter of aperture is 32 μ m only; So pressure change slowly; Variation like the depth of water, temperature etc. all is gradual amount, can pass through the inside and outside pressure of this hole counter balance pocket, but then not have influence for the ultrasonic signal of alternation.
Claims (3)
1. a mini self-adaptive optical fibre ultrasonic sensor is characterized in that: comprise thick quartz ampoule, thin quartz ampoule, coated optical fibre, aluminium film, air bag and side-hole fiber; Said coated optical fibre top is bonded in the thin quartz ampoule; Thin quartz ampoule top is bonded in the thick quartz ampoule; The bonding aluminium film of rubble English pipe end face; Have the gap between coated optical fibre top and the aluminium film, air bag is installed on the outer peripheral face of thin quartz ampoule tail end and thick quartz ampoule tail end, and side-hole fiber is fixed between thick quartz ampoule and the thin quartz ampoule.
2. mini self-adaptive optical fibre ultrasonic sensor according to claim 1 is characterized in that: said air bag is a soft material.
3. mini self-adaptive optical fibre ultrasonic sensor according to claim 1 is characterized in that: coated optical fibre is the single-mode fiber that is coated with reflectance coating on the end face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120197994 CN202267485U (en) | 2011-06-14 | 2011-06-14 | Miniature adaptive fiber ultrasonic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120197994 CN202267485U (en) | 2011-06-14 | 2011-06-14 | Miniature adaptive fiber ultrasonic sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202267485U true CN202267485U (en) | 2012-06-06 |
Family
ID=46158278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120197994 Expired - Fee Related CN202267485U (en) | 2011-06-14 | 2011-06-14 | Miniature adaptive fiber ultrasonic sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202267485U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487129A (en) * | 2013-01-18 | 2014-01-01 | 上海大学 | Point contact type ultrasonic wave sensor |
| CN114486016A (en) * | 2021-12-22 | 2022-05-13 | 之江实验室 | Micro-nano optical fiber touch sensor based on liquid sac structure |
-
2011
- 2011-06-14 CN CN 201120197994 patent/CN202267485U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487129A (en) * | 2013-01-18 | 2014-01-01 | 上海大学 | Point contact type ultrasonic wave sensor |
| CN103487129B (en) * | 2013-01-18 | 2016-04-27 | 上海大学 | Point contact type optical fiber ultrasonic sensor |
| CN114486016A (en) * | 2021-12-22 | 2022-05-13 | 之江实验室 | Micro-nano optical fiber touch sensor based on liquid sac structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102353441A (en) | Small-sized adaptive optical-fiber ultrasonic sensor | |
| CN101769783A (en) | Static pressure balanced fiber ultrasonic sensor array | |
| CN108036852B (en) | A kind of fibre-optical acoustic sensor and multiple spot acoustic detector | |
| Li et al. | Ultra-high sensitive quasi-distributed acoustic sensor based on coherent OTDR and cylindrical transducer | |
| Zhou et al. | Demodulation of a hydroacoustic sensor array of fiber interferometers based on ultra-weak fiber Bragg grating reflectors using a self-referencing signal | |
| US11629979B2 (en) | Diaphragm-based fiber acoustic sensor | |
| CN103528665A (en) | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor | |
| CN100526819C (en) | Apparatus for measuring libration by optical fibre and measuring method | |
| Wang et al. | Extrinsic Fabry–Pérot underwater acoustic sensor based on micromachined center-embossed diaphragm | |
| Wang et al. | Experimental research of an all-polarization-maintaining optical fiber vector hydrophone | |
| CN105222883A (en) | Diaphragm manifold type extrinsic Fiber Optic Sensor FP sensor probe | |
| Druet et al. | Passive guided waves measurements using fiber Bragg gratings sensors | |
| CN203551100U (en) | Novel Fabry-Perot interference-type MEMS sound wave sensor | |
| CN110553715B (en) | Optical fiber array type sound wave signal acquisition device based on laser interference | |
| Liu et al. | A compact fiber optic Fabry–Perot sensor for simultaneous measurement of acoustic and temperature | |
| CN110530500B (en) | Optical fiber hydrophone array structure based on compensation interference | |
| CN109374112B (en) | Optical fiber two-dimensional vibration sensor and manufacturing method thereof | |
| CN109945965A (en) | The arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam | |
| CN107631739B (en) | Fiber grating vibration/stress composite sensor | |
| CN106813766A (en) | Sound magnetic is with the distributed optical fiber sensing system surveyed | |
| CN202267485U (en) | Miniature adaptive fiber ultrasonic sensor | |
| CN109164364B (en) | Space full-angle ultrasonic optical fiber Fabry-Perot sensor for monitoring partial discharge of liquid-solid composite insulating power equipment | |
| CN208984207U (en) | Optical-fiber two-dimensional vibrating sensor | |
| Wu et al. | A novel optical accelerometer based on slant-ended fiber | |
| CN104316159B (en) | A kind of method for realizing quasi-distributed vibrating sensing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120606 Termination date: 20140614 |
|
| EXPY | Termination of patent right or utility model |