CN202213063U - Special cutting tool for digging holes in silicon crystal rods - Google Patents

Special cutting tool for digging holes in silicon crystal rods Download PDF

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Publication number
CN202213063U
CN202213063U CN2011203151109U CN201120315110U CN202213063U CN 202213063 U CN202213063 U CN 202213063U CN 2011203151109 U CN2011203151109 U CN 2011203151109U CN 201120315110 U CN201120315110 U CN 201120315110U CN 202213063 U CN202213063 U CN 202213063U
Authority
CN
China
Prior art keywords
cutting tool
cutting
cutter
circular arc
silicon crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011203151109U
Other languages
Chinese (zh)
Inventor
张学强
赵世锋
荆新杰
王雷雷
董士杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YANGGUANG GUIFENG ELECTRONIC SCIENCE & TECHNOLOGY CO., LTD.
Original Assignee
HEBEI YUJING ELECTRONIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HEBEI YUJING ELECTRONIC TECHNOLOGY Co Ltd filed Critical HEBEI YUJING ELECTRONIC TECHNOLOGY Co Ltd
Priority to CN2011203151109U priority Critical patent/CN202213063U/en
Application granted granted Critical
Publication of CN202213063U publication Critical patent/CN202213063U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Milling Processes (AREA)

Abstract

The utility model relates to a special cutting tool for digging holes in silicon crystal rods, which comprises a tubular cutting tool substrate, wherein one end of the cutting tool side wall is provided with a round cutting tool base, the circle center part of the cutting tool base is provided with a shaft hole, a plurality of connecting holes are arranged in the cutting tool base and are uniformly distributed around the shaft hole in a circumferential type, the other end of the cutting tool side wall is provided with a plurality of projected cutting edges, and a gap is arranged between each two adjacent cutting edges. The special cutting tool is characterized in that the gaps are in a circular arc shape, and the cross section of the cutting edges is in the circular arc shape. The special cutting tool has the beneficial effects that because of the adoption of the circular arc-shaped cutting edges and the gaps, the cutting work area is enlarged, the cutting process is stable, the problems of single crystal crushing and edge breakage while cutting caused by cutting tool stress concentration are solved, in addition, the abrasion of the cutting tool is reduced, and the production efficiency is improved.

Description

A kind of silicon crystal bar is drawn the hole dedicated tool
Technical field
The utility model relates to a kind of silicon crystal bar machining equipment, and particularly a kind of silicon crystal bar is drawn the hole dedicated tool.
Background technology
At present, along with the continuous increase of diameter of czochralski silicon monocrystalline, its derived product type is on the increase, and the processing method of silicon single crystal has been pulled out new requirement.The known spot facing cutter of drawing all is to copy water to bore structure to make, and edge of a knife cross section is a rectangle, and promptly the edge of a knife is a flat-bottom structure, utilizes the cutter rotation that silicon single crystal is cut.This cutter structure meets the conventional design thinking; Processing technology is simple, still, in cutting process, has problem of stress concentration at edge of a knife right angle; Make monocrystalline produce cracked easily and when going out cutter suddenly, produce and collapse the limit; This structure only end face plane abrasive material participation cutting in process in addition, tool wear is big, and efficient is lower.
The utility model content
The purpose of the utility model provides a kind of the solution because cutter stress concentrates the monocrystalline that is caused cracked and go out cutter and collapse the limit problem, and can reduce tool wear, and the silicon crystal bar of enhancing productivity is drawn the hole dedicated tool.
To achieve these goals, the technical scheme of the utility model employing is:
A kind of silicon crystal bar is drawn the hole dedicated tool, comprises columnar cutter sidewall, and an end of cutter sidewall is provided with circular cutter base; The position, the center of circle of cutter base is provided with axis hole; Cutter base be provided with a plurality of connecting holes be circumferential be distributed on axis hole around, the other end of described cutter sidewall is provided with the cutting edge of a plurality of convexities, is provided with the gap between two adjacent cutting edges; Described gap is a circular arc, and the section of described cutting edge is a circular arc.
The thickness of described cutting edge is greater than the thickness of cutter sidewall.
Described cutting edge surface is covered with diamond particles.
The beneficial effect of the utility model is: owing to adopt the cutting edge and the gap of circular arc; Strengthened the work area of cutting; The working angles trend steadily; Overcome because cutter stress concentrates the monocrystalline that is caused cracked and go out cutter and collapse the limit problem, and reduced the wearing and tearing of cutter, improved production efficiency.
Description of drawings
Fig. 1 is the generalized section of the utility model.
Fig. 2 is the enlarged diagram at A position among Fig. 1.
Fig. 3 is the enlarged diagram at B position among Fig. 1.
Among the figure, 1, cutter base, 2, the cutter sidewall, 3, cutting edge, 4, axis hole, 5, the gap, 6, connecting hole.
The specific embodiment
The utility model is that a kind of silicon crystal bar is drawn the hole dedicated tool; Owing to adopt the cutting edge and the gap of circular arc; Strengthened the work area of cutting, the working angles trend has steadily overcome because cutter stress concentrates the monocrystalline that is caused cracked and go out cutter and collapse the limit problem; And reduced the wearing and tearing of cutter, improved production efficiency.
Below in conjunction with accompanying drawing the utility model is further specified:
Specific embodiment, like Fig. 1, Fig. 2, shown in Figure 3, a kind of silicon crystal bar is drawn the hole dedicated tool; Comprise columnar cutter sidewall 2, an end of cutter sidewall 2 is provided with circular cutter base 1, and the rotating shaft that the position, the center of circle of cutter base 1 is provided with axis hole 4 and lathe links; Around axis hole 4, be circumferential and be evenly distributed with 4 connecting holes 6, pass connecting hole 6 with bolt the utility model is fixed on the lathe, the rotating shaft of lathe will drive the utility model and rotate together; The other end of cutter sidewall 2 is provided with the cutting edge 3 that a plurality of raised surface are covered with diamond particles; The section of cutting edge 3 is a circular arc, and the thickness of cutting edge 3 has increased the work area of cutting like this greater than the thickness of cutter sidewall 2; Be provided with the gap 5 of circular arc between two adjacent cutting edges 3, overcome the problem that stress is concentrated.Owing to adopt the cutting edge and the gap of circular arc, strengthened the work area of cutting, the working angles trend has steadily overcome because cutter stress concentrates the monocrystalline that is caused cracked and go out cutter and collapse the limit problem, and has reduced the wearing and tearing of cutter, has improved production efficiency.

Claims (3)

1. a silicon crystal bar is drawn the hole dedicated tool; Comprise columnar cutter sidewall (2); One end of cutter sidewall (2) is provided with circular cutter base (1), and the position, the center of circle of cutter base (1) is provided with axis hole (4), cutter base (1) be provided with a plurality of connecting holes (6) be circumferential be distributed on axis hole (4) around; The other end of described cutter sidewall (2) is provided with the cutting edge (3) of a plurality of convexities; Be provided with gap (5) between adjacent two cutting edges (3), it is characterized in that: described gap (5) are circular arc, and the section of described cutting edge (3) is a circular arc.
2. a kind of silicon crystal bar according to claim 1 is drawn the hole dedicated tool, it is characterized in that: the thickness of described cutting edge (3) is greater than the thickness of cutter sidewall (2).
3. a kind of silicon crystal bar according to claim 1 is drawn the hole dedicated tool, it is characterized in that: described cutting edge (3) surface is covered with diamond abrasive.
CN2011203151109U 2011-08-26 2011-08-26 Special cutting tool for digging holes in silicon crystal rods Expired - Fee Related CN202213063U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011203151109U CN202213063U (en) 2011-08-26 2011-08-26 Special cutting tool for digging holes in silicon crystal rods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011203151109U CN202213063U (en) 2011-08-26 2011-08-26 Special cutting tool for digging holes in silicon crystal rods

Publications (1)

Publication Number Publication Date
CN202213063U true CN202213063U (en) 2012-05-09

Family

ID=46012332

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011203151109U Expired - Fee Related CN202213063U (en) 2011-08-26 2011-08-26 Special cutting tool for digging holes in silicon crystal rods

Country Status (1)

Country Link
CN (1) CN202213063U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110394903A (en) * 2019-06-05 2019-11-01 中建深业建设发展有限公司 A kind of large-scale perforating device of construction
CN114986726A (en) * 2022-05-30 2022-09-02 宁夏盾源聚芯半导体科技股份有限公司 Polysilicon cylinder processing device and polysilicon cylinder processing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110394903A (en) * 2019-06-05 2019-11-01 中建深业建设发展有限公司 A kind of large-scale perforating device of construction
CN114986726A (en) * 2022-05-30 2022-09-02 宁夏盾源聚芯半导体科技股份有限公司 Polysilicon cylinder processing device and polysilicon cylinder processing method
CN114986726B (en) * 2022-05-30 2024-04-30 宁夏盾源聚芯半导体科技股份有限公司 Polysilicon barrel processing device and polysilicon barrel processing method

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: YANGGUANG GUIFENG ELECTRONICS TECHNOLOGY CO., LTD.

Free format text: FORMER OWNER: HEBEI YUJING ELECTRONIC TECHNOLOGY CO., LTD.

Effective date: 20131108

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20131108

Address after: 065201 Langfang city of Hebei province Sanhe Yanjiao economic and Technological Development Zone Yingbin Road Jinglong Group Industrial Park

Patentee after: YANGGUANG GUIFENG ELECTRONIC SCIENCE & TECHNOLOGY CO., LTD.

Address before: 065201 Langfang city of Hebei province Sanhe Yanjiao economic and Technological Development Zone Yingbin Road Jinglong Group Industrial Park

Patentee before: Hebei Yujing Electronic Technology Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120509

Termination date: 20150826

EXPY Termination of patent right or utility model