CN202166010U - No-electrode plasma lamp array equipment - Google Patents

Abstract

The utility model provides no-electrode plasma lamp array equipment, wherein a large amount of electromagnetic radiations (visible ray, infrared ray, ultraviolet ray, or combination of visible ray, infrared ray and ultraviolet ray) are generated through a plurality of plasma lamps. The equipment comprises the following components: a plurality of plasma lamp devices which are arranged in an array structure of M*N from 1 to X, wherein X is larger than 1, M is an integer which is larger than or equal with 1, and N is an integer which is larger than or equal with 2; a plurality of radio frequency power sources which are respectively coupled with the plurality of plasma lamp devices, each in the plurality of radio frequency power sources comprises a radio frequency output end and a control input end, the plurality of radio frequency power sources respectively comprise 1-X control input ends; and a controller which is configured for the plurality of radio frequency power sources and is coupled with the control input end, wherein the controller is configured for selectively adjusting the radio frequency powers from the plurality of radio frequency power sources.

Description

The electrode-less plasma lamps array apparatus

Technical field

The utility model relates to and utilizes electrode-less plasma lamps to produce the electromagnetic radiation equipment and the method for (comprising visible light, ultraviolet ray and infrared ray).The utility model provides the plasma lamp that is driven by radio frequency source, and need not to use the electrode that is positioned at gas filling containers (bulb) inside.More specifically, the utility model relates to and sets up the electrode-less plasma lamps array.This electrode-less plasma lamps array can be applicable to following application scenario; Such as stadium, safety devices, parking lot, military affairs and defense installation, street, large-scale and aedicula, headlight for vehicle, aircraft lands, bridge, warehouse, ultraviolet water processing, ultraviolet epoxy resin cure, semiconductor machining, annealing, heating, agricultural, architectural lighting, stage illumination, lighting, medical illumination, projecting apparatus and display, and similar application scenario.

Background technology

Plasma lamp provides very bright broad band light, and very practical in such as the application scenario of general illumination, optical projection system and industrial treatment.The typical plasma lamp air inclusion of making now and the mixture of trace materials utilize the heavy current of the closely spaced electrode of flowing through to excite said mixture to form plasma.But this structure can stand the loss of electrode, so limited service life.

The electrode-less plasma lamps that is driven by microwave source has overcome the problem relevant with export license, thereby has obtained longer, spectrum-stable of life-span and the higher lamp of efficient.Traditional structure comprises the plasma filler in the sealing recess in the dielectric substance that is encapsulated in the bulb or forms waveguide; Wherein microwave energy is provided by the source such as solid-state power amplifier or magnetron, and is introduced in the waveguide and then resistive ground (resistively) heating plasma.U.S. Patent application No.20090322240A1 and United States Patent (USP) 7,291,985,7,362,056 and 6,737,809 provide other instances, and each piece document all is incorporated into this to quote mode as proof.In order to realize higher electromagnetic radiation output (for example, higher lumen) needing bigger bulb and more high-power radio frequency source from electrode-less plasma lamps.Although radio-frequency power capable of using surpasses the microwave source such as magnetron of 1000W, the reliability that magnetron does not have solid-state power amplifier to have under the situation of compact profile general layout (form factor).Though might come to realize higher radio frequency power output the whole efficiency that this meeting causes radio-frequency loss and influences radio frequency source owing to combiner (combiner) through combining a plurality of solid-state power amplifiers from solid-state power amplifier.Use is in the efficient that the power amplifier that hangs down operating frequency can improve power amplifier.And, use bigger bulb to improve the RF energy that under lower operating frequency, is coupled in bulb, but be difficult to the performance of optimization system so that make coupling the best of the efficiency optimization and the bulb of power amplifier.In addition, in some application scenarios,, also be difficult to realize that from single big bulb uniform electromagnetism distributes even be not impossible.In addition, the required huge and poor efficiency of power supply is used in some high lumen/electromagnetic radiation.And, in some application scenarios, hope to have the ability of change lighting condition (colour temperature, CRI, distribution or the like).

From above-mentioned visible, be starved of the technology that is used to improve illumination.

The utility model content

The utility model provides and has utilized electrode-less plasma lamps to produce the equipment and the method for electromagnetic radiation (comprising visible light, ultraviolet ray and infrared ray).More specifically, the utility model provides the electrode-less plasma lamps array and relevant method by the radio frequency source driving that need not to use electrode.This electrode-less plasma lamps array can be applicable to following application scenario, such as stadium, safety devices, parking lot, military affairs/defense installation, street, large-scale and aedicula, bridge, warehouse, agricultural, ultraviolet water processing, ultraviolet epoxy resin cure, semiconductor machining, annealing, heating, architectural lighting, stage illumination, lighting, medical illumination, projecting apparatus and display etc.

According to the first aspect of the utility model, a kind of electrode-less plasma lamps array apparatus is provided, said equipment comprises:

A plurality of plasma lamp devices from 1 to X, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange with the array structure of M * N, and wherein M is at least 1 integer, and N is at least 2 integer;

A plurality of radio-frequency power supplies are respectively coupled to said a plurality of plasma lamp device, and each in said a plurality of radio-frequency power supplies comprises RF output end and control input end, and said a plurality of radio-frequency power supplies comprise the said control input end from 1 to X separately; And

Controller is arranged to said a plurality of radio-frequency power supply, and is coupled to said control input end, and said controller is configured to optionally regulate the radio-frequency power from said a plurality of radio-frequency power supplies.

Preferably, the equipment according to the first aspect of the utility model further comprises one or more photodetectors.

Preferably, the equipment according to the first aspect of the utility model further comprises supporting construction.

Preferably, the equipment according to the first aspect of the utility model further comprises heat exchanger.

Preferably, the equipment according to the first aspect of the utility model further comprises housing, and this housing has and allows a plurality of openings of flow of pressurized gas through said equipment.

Preferably, the equipment according to the first aspect of the utility model further comprises heat exchanger and housing, and this housing has and allows a plurality of openings of flow of pressurized gas through said equipment.

Preferably, according to the equipment of the first aspect of the utility model, said support structure configuration becomes to be used for stadium lighting.

Preferably, according to the equipment of the first aspect of the utility model, said support structure configuration becomes to be used for theatre lighting.

Preferably, according to the equipment of the first aspect of the utility model, said lamp is through globe joint and utilize servomotor to be coupled to said supporting construction.

Preferably, according to the equipment of the first aspect of the utility model, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation.

Preferably, according to the equipment of the first aspect of the utility model, at least one plasma lamp in the said array is configured to launch the infrared ray electric magnetic radiation.

Preferably, according to the equipment of the first aspect of the utility model, at least one plasma lamp in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the first aspect of the utility model, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation, and another plasma lamp at least in the said array is configured to launch the infrared ray electric magnetic radiation.

Preferably, according to the equipment of the first aspect of the utility model, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the first aspect of the utility model, at least one plasma lamp in the said array is configured to launch the infrared ray electric magnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably; Equipment according to the first aspect of the utility model; At least one plasma lamp in the said array is configured to launch visible electromagnetic radiation; Another plasma lamp at least in the said array is configured to launch the infrared ray electric magnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the first aspect of the utility model, said supporting construction comprises in order to increase the fin as the surface area of the said supporting construction of radiator.

According to the second aspect of the utility model, a kind of electrode-less plasma lamps array apparatus is provided, said equipment comprises:

A plurality of plasma lamp devices from 1 to X, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange with the array structure of M * N, and wherein M is at least 1 integer, and N is at least 2 integer;

The single radio frequency power supply is respectively coupled to said a plurality of plasma lamp device, and said single radio frequency power supply comprises RF output end; And

A plurality of controllers from 1 to X are arranged to said single radio frequency power supply, and said controller is configured to optionally regulate the radio-frequency power that is transferred into each the independent plasma lamp device in the said array.

Preferably, according to the equipment of the utility model second aspect, further comprise one or more photodetectors.

Preferably, according to the equipment of the utility model second aspect, further comprise supporting construction.

Preferably, according to the equipment of the utility model second aspect, further comprise heat exchanger.

Preferably, according to the equipment of the utility model second aspect, further comprise housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

Preferably, according to the equipment of the utility model second aspect, further comprise heat exchanger and housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

Preferably, according to the equipment of the utility model second aspect, said support structure configuration becomes to be used for stadium lighting.

Preferably, according to the equipment of the utility model second aspect, said support structure configuration becomes to be used for theatre lighting.

Preferably, according to the equipment of the utility model second aspect, said lamp is through globe joint and utilize servomotor to be coupled to said supporting construction.

Preferably, according to the equipment of the utility model second aspect, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation.

Preferably, according to the equipment of the utility model second aspect, at least one plasma lamp in the said array is configured to launch the infrared ray electric magnetic radiation.

Preferably, according to the equipment of the utility model second aspect, at least one plasma lamp in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the utility model second aspect, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation, and another plasma lamp at least in the said array is configured to launch the infrared ray electric magnetic radiation.

Preferably, according to the equipment of the utility model second aspect, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the utility model second aspect, at least one plasma lamp in the said array is configured to launch the infrared ray electric magnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably; Equipment according to the utility model second aspect; At least one plasma lamp in the said array is configured to launch visible electromagnetic radiation; Another plasma lamp at least in the said array is configured to launch the infrared ray electric magnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the utility model second aspect, said supporting construction comprises the fin in order to the surface area that increases the said supporting construction that is used as radiator.

The third aspect according to the utility model provides a kind of electrode-less plasma lamps array apparatus, and said equipment comprises:

A plurality of plasma lamp devices from 1 to X, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange with the array structure of M * N, and wherein M is at least 1 integer, and N is at least 2 integer;

A plurality of radio-frequency power supplies are respectively coupled to said a plurality of plasma lamp device, and each in a plurality of radio-frequency power supplies includes RF output end; And

A plurality of controllers from 1 to X are configured to be respectively applied for said a plurality of radio-frequency power supply, and each of said controller is configured to optionally regulate the radio-frequency power that is transferred into each plasma lamp device.

Preferably, according to the equipment of the utility model third aspect, further comprise one or more photodetectors.

Preferably, according to the equipment of the utility model third aspect, further comprise supporting construction.

Preferably, according to the equipment of the utility model third aspect, further comprise heat exchanger.

Preferably, according to the equipment of the utility model third aspect, further comprise housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

Preferably, according to the equipment of the utility model third aspect, further comprise heat exchanger and housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

Preferably, according to the equipment of the utility model third aspect, said support structure configuration becomes to be used for stadium lighting.

Preferably, according to the equipment of the utility model third aspect, said support structure configuration becomes to be used for theatre lighting.

Preferably, according to the equipment of the utility model third aspect, said lamp is through globe joint and utilize servomotor to be coupled to said supporting construction.

Preferably, according to the equipment of the utility model third aspect, said a plurality of controllers utilize daisy chain or mesh network to communicate.

Preferably, according to the equipment of the utility model third aspect, said a plurality of controllers utilize the combination in any of power line network, wireless network or cable network to communicate.

Preferably, according to the equipment of the utility model third aspect, said array is used for rapid thermal treatment.

Preferably, according to the equipment of the utility model third aspect, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation.

Preferably, according to the equipment of the utility model third aspect, at least one plasma lamp in the said array is configured to launch the infrared ray electric magnetic radiation.

Preferably, according to the equipment of the utility model third aspect, at least one plasma lamp in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the utility model third aspect, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation, and another plasma lamp at least in the said array is configured to launch the infrared ray electric magnetic radiation.

Preferably, according to the equipment of the utility model third aspect, at least one plasma lamp in the said array is configured to launch visible electromagnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the utility model third aspect, at least one plasma lamp in the said array is configured to launch the infrared ray electric magnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably; Equipment according to the utility model third aspect; At least one plasma lamp in the said array is configured to launch visible electromagnetic radiation; Another plasma lamp at least in the said array is configured to launch the infrared ray electric magnetic radiation, and another plasma lamp at least in the said array is configured to the electromagnetic radiation of emitted in ultraviolet line.

Preferably, according to the equipment of the utility model third aspect, said supporting construction comprises the fin in order to the surface area that increases the said supporting construction that is used as radiator.

According to the fourth aspect of the utility model, a kind of electrode-less plasma lamps array apparatus is provided, said equipment comprises:

From a plurality of plasma lamp devices of 1 to X numbering, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange that with the array structure of M * N wherein M is the integer more than 1, and N is the integer more than 2;

A plurality of radio-frequency power supplies are respectively coupled to said a plurality of plasma lamp device, and each in a plurality of radio-frequency power supplies includes RF output end; And

At least one controller; Be configured and be respectively applied for said a plurality of radio-frequency power supply; Said controller is configured to optionally regulate each the radio-frequency power that is transferred in said a plurality of plasma lamp device; To regulate the colour temperature of at least one plasma lamp device of from said a plurality of plasma lamp devices, selecting, be used for the colour rendering of said a plurality of plasma lamp devices of said array structure.

In a specific embodiment, the utility model provides a kind of array that is used for the electromagnetic radiation of extensive heat and/or illumination application occasion and/or every field.In a specific embodiment of the utility model, a kind of array of electrode-less plasma lamps is provided.This array comprises at least two electrode-less plasma lamps that are installed on the rigid support frame.Said plasma lamp or by a plurality of radio frequency sources power supply independently or supply power by the single radio frequency source.Controller is regulated the radio-frequency power that is sent to each individual light in this array, thereby allows the intensity and the distribution of control output electromagnetic radiation.These lamps in the array can comprise the have different-colour bulb of (for example, 3000K and 6000K).Be sent to the radio-frequency power of each lamp in the array through change, can change distribute light whole colour temperature and colour rendering index (color rendering index) from the teeth outwards.For example, in general illumination application occasion, people will have the ability with the cool colour temperature of colour temperature from the temperature change of 3000K warm colour to 6000K of surround lighting.

The single bulb that has expectation spectrum with use is compared, and through selecting to have two lamps of greater efficiency and combining their spectrum, can improve the whole efficiency of this system.In the horticultural applications occasion, during the life cycle of plant, need the light of different-colour.The ability of adjustment light source color temperature allows to optimize the growth of plant.In other embodiments, controller can be configured to individually, jointly perhaps control with any compound mode the array of more than two lamps, one group of lamp or whole lamp.In other embodiments, the radio frequency source that is used for each lamp is by a microprocessor controls, and wherein radio-frequency power detector and/or photodetector are regulated the radio-frequency power of lamp, thereby realizes the lighting condition of hope.Microcontroller in the array can be controlled by single controller, perhaps replacedly, can pass through daisy chain (daisy chain, daisy chain) connection, netted connection (mesh connection), combination or other connected modes and be directly connected in each other.These microcontrollers can come to intercom mutually through RS232 interface, USB interface, electric source line interface or through radio or other similar interfaces.

The application scenario is made in industry for the even ultraviolet source of needs, and for example the epoxy resin cure occasion utilizes the array of the electrode-less plasma lamps with ultraviolet spectrogram that significant benefits is provided.The radio-frequency power that uses independently a plurality of microcontrollers to control each lamp in the array provides the control to the illumination style on the high surface area, and keeps constant level of illumination, perhaps allows to change the illumination style to realize the desired process condition.For the thermal management application occasion of using in manufacturing or the semiconductor machining, people can use the electrode-less plasma lamps array that comprises the bulb with infrared spectrum.Again, compare, utilize the array of electrode-less plasma lamps can on high surface area, realize better process control with the situation of using single headlight.

In another embodiment, a kind of array with electrode-less plasma lamps of heat exchanger is provided.These electrode-less plasma lamps are installed on the rigid support frame of the conduction heat that lamp produced.Heat exchanger is arranged on the opposite side of support frame, the heat that is produced to transmit lamp effectively.

In another embodiment, the array of electrode-less plasma lamps and an air flow module couple, so that improved heat transfer characteristics to be provided.These lamps are installed on the rigid support frame of the conduction heat that lamp produced.Shell structure is surrounded the side of the external modulation in support frame and the array.Opening on the opposite side allows air to flow through shell structure.If desired, can use fan to increase flowing velocity.

In a replaceable embodiment, the array of electrode-less plasma lamps and heat exchanger and air flow system couple, so that further improved heat transfer characteristics to be provided.This array has at least two electrode-less plasma lamps on the rigid support frame that is installed in the conduction heat that lamp produced.One heat exchanger is arranged on the opposite side of support frame.One shell structure is surrounded the side of the external modulation in heat exchanger, support frame and the array.Housing comprises two openings on opposite side, flow through shell structure to allow air.When air flow through housing, it not only absorbed the heat from heat exchanger, and absorbed the heat of self-supporting frame and lamp, thereby improved the overall heat transfer characteristic of array effectively.

In another embodiment, the removable array of electrode-less plasma lamps is provided.Particularly, these electrode-less plasma lamps are coupled to servomotor.Then servomotor/lamp assembly is installed on the rigidity supporting structure.Can control and regulate servomotor, thus the array of lamp with combination or independently mode move, with the intensity and the distribution of the light (or output electromagnetic radiation) of realize hoping.

If hope, can a photodetector be used in combination with the electrode-less plasma lamps array, to confirm light emitted intensity.Photodetector makes the control system can control the radio-frequency power input rank of these lamps that are input to array, thereby guarantees to keep constant strength grade, and guarantees intensity and light profile adjustment to the ability of hoping grade.

In a specific embodiment, the utility model provides a kind of method of using the electrode-less plasma lamps array apparatus to develop the color.This method is optionally regulated the radio-frequency power of the plasma lamp device in a plurality of plasma lamp devices that are sent in the array structure, is used for the colour temperature of the colour developing of a plurality of plasma lamps with adjusting.In a replaceable embodiment, this method with radio-frequency power optionally export in the plasma lamp device in the array structure at least one or a plurality of so that make the output illumination colour developing of array.

The benefit that foundation is used for the electrode-less plasma lamps array of various application scenarios comprises: for identical lumen output (or illumination profile), compare with conventional incandescent or LED illumination array, this array uses the power of much less.In addition, use the electrode-less plasma lamps in the array to reduce the needs for the electrode that carries a large amount of power, these electrodes are easy to fault.Compare with traditional electrode plasma lamp, use the electrode-less plasma lamps that is positioned at array to cause improved heat transfer characteristics, and long life-span, better lumen/strength maintenance, better uniformity and more stable spectrum.The utility model utilizes known technology to realize these benefits and other benefits.These are described in whole specification with other benefits, and will more specifically describe below.

Description of drawings

Description related to the preferred embodiment below considering, and combine with the accompanying drawing that provides here and to read, with the more complete understanding that obtains the utility model and advantage thereof.In accompanying drawing and explanation, reference number is represented each characteristic of the utility model, and in all accompanying drawings and explanation, similar reference number is represented similar characteristic.

Figure 1A is the general schematic view that capacitively is coupled to the gas filling containers of a radio frequency source.

Figure 1B be irritability be coupled to the general schematic view of the gas filling containers of a radio frequency source.

Fig. 2 A is the simplified perspective view that comprises the external resonator electrodeless lamp of an external radio frequency amplifier.

Fig. 2 B is the simplified perspective view of the external resonator electrodeless lamp that comprises an external radio frequency source of a replacement.

Fig. 2 C is the simplified perspective view of the external resonator electrodeless lamp of a replacement.

Fig. 2 D is the simplified perspective view of the external resonator electrodeless lamp of a replacement.

Fig. 2 E is the reduced graph of dielectric waveguide/resonator electrode-less plasma lamps.

Fig. 3 A is the simplified block diagram of electrode-less plasma lamps, shows radio driver and AC-DC converter with control input end.

Fig. 3 B is that wherein each light fixture has independently radio driver according to the simplified block diagram of the array of two electrode-less plasma lamps of an embodiment of the utility model, and two lamps of a controller control.

Fig. 3 C is that wherein each light fixture has independently radio driver according to the simplified block diagram of the array of the electrode-less plasma lamps of an embodiment of the utility model, and all lamp of controller control.

Fig. 3 D is the simplified block diagram of the array of an electrode-less plasma lamps; Wherein each light fixture has independently radio driver; And a controller is connected in first lamp in the array, but each the follow-up lamp in the array is connected in last lamp and is connected in next lamp with the daisy chain form.

Fig. 3 E is that each lamp is coupled to a radio frequency source independently according to the simplified block diagram of the circuit diagram of the electrode-less plasma lamps array of an embodiment of the utility model.

Fig. 4 is that said lamp is coupled to the single radio frequency source according to the simplified block diagram of the circuit diagram of the electrode-less plasma lamps array of an embodiment of the utility model.

Fig. 5 is that wherein each radio frequency source is supplied power at least two electrode-less plasma lamps according to the simplified block diagram of the circuit diagram of the electrode-less plasma lamps array of an embodiment of the utility model.

Fig. 6 is that this array is combined with at least one heat exchanger in supporting construction according to the simplified perspective view of the electrode-less plasma lamps array of an embodiment of the utility model.

Fig. 7 is that this array is combined with shell structure according to the simplification decomposition diagram of the electrode-less plasma lamps array of an embodiment of the utility model, and this shell structure allows the concentrated array component that flows through of air.

Fig. 8 is the simplified perspective view that a globe joint is coupled to the removable lamp of a supporting construction of passing through according to an embodiment of the utility model, thereby moves through driven by servomotor is this.

Fig. 9 is the simplified perspective view according to the lamp array of the another replacement embodiment of the utility model.

The specific embodiment

The utility model provides a kind of array of electrode-less plasma lamps; More high-intensity light (or electromagnetic radiation) distributes or specific light (or electromagnetic radiation) distributes to produce; Such as even light distribution, a kind of colour temperature of illumination and method of colour rendering index of changing is provided also.The array of this electrode-less plasma lamps can be applicable to following application scenario; Such as stadium, safety devices, parking lot, military affairs and defense installation, street, large-scale and aedicula, headlight for vehicle, aircraft lands, bridge, warehouse, ultraviolet water processing, ultraviolet epoxy resin cure, semiconductor machining, annealing, heating, agricultural, architectural lighting, stage illumination, lighting, medical illumination, projecting apparatus and display, and similar application scenario.

Fig. 1 and Fig. 2 show the electrode-less plasma lamps in the array that can be used for the utility model.Figure 1A shows the general schematic view that the effective energy from radio frequency source 110 to gas filling containers 130 transmits.Energy from radio frequency source is directed into impedance matching network 210, and this impedance matching network can effectively be delivered to resonance structure 220 from radio frequency source with energy.The instance of this impedance matching network is E field or H field coupling element, but also can adopt other types.And then another impedance matching network 230 can be delivered to gas filling containers 130 with energy from resonator efficiently.The instance of this impedance matching network is E field or H field coupling element.

The gas filling containers is processed by suitable material, such as quartz or other transparent or semitransparent materials.The gas filling containers is filled with inert gas (like argon gas) and fluorophor or illuminator (like mercury, receive, dysprosium, sulphur or metal halide salt (like indium bromide, scandium bromide or cesium iodide)).This container can contain multiple fluorophor or illuminator simultaneously.According to a specific embodiment, the gas filling containers also can comprise metal halide or emit other metallic compounds (piece) of electromagnetic radiation discharge.Certainly, can there be other variation, modification and replacement.

Utilize a capacitive coupling structure 131 to give the gas filler in the bulb 130 with transmission of rf energy.As well-known, capacity coupler generally includes two electrodes that limited extent ground surrounds a volume, and electric field (E field) comes coupling energy thereby mainly utilize at least.As it will be recognized by those of ordinary skills, shown in schematic form here, impedance matching network 210 and 230 and resonance structure 220 may be interpreted as the equivalent-circuit model of distribution electromagnetic coupled between radio frequency source and the capacitive coupling structure.The use of impedance matching network also allows said source to have the impedance except that 50 ohm; Advantage with respect to the radio frequency source performance is heating or the power consumption that reduces from radio frequency source.Reduction from the power consumption of radio frequency source be lost in the higher efficient that can realize lamp on the whole.To recognize also that like those of ordinary skills impedance matching network 210 needn't be identical with 230.

Figure 1B shows the general schematic view that the effective energy from radio frequency source 110 to gas filling containers 130 transmits.Energy from radio frequency source is directed into impedance matching network 210, and this impedance matching network can effectively be delivered to resonance structure 220 from radio frequency source with energy.And then another impedance matching network 230 can be delivered to gas filling containers 130 with energy from resonator efficiently.Utilize an induction coupled structure 140 to give the gas filler in the bulb 130 with transmission of rf energy.As well-known, inductive coupling apparatus generally includes the electric wire of finite length (extent) or the electric wire of coiled type also mainly utilizes magnetic field (H field) to come coupling energy.As schematic form here shown in, impedance matching network 210 and 230 and resonance structure 220 can regard the equivalent-circuit model of the distribution electromagnetic coupled between radio frequency source and the induction coupled structure as.The use of impedance matching network also allows said source to have the impedance except that 50 ohm; Advantage with respect to the radio frequency source performance is heating or the power consumption that reduces from radio frequency source.Reduction can realize the higher efficient of lamp on the whole from the power consumption of radio frequency source and loss.

Fig. 2 A is the perspective view of electrode-less plasma lamps, and it adopts lamp body 600, and the outer surface 601 of lamp body is the also ground connection of conduction.Show columniform lamp body, but also can adopt rectangle or other shapes.This conductibility can be through using the conduction facing or realizing through the selection conductive material.The instance of conductibility facing is an aluminium paint, and perhaps replacedly, lamp body can be processed by the thin slice such as the conductive material of aluminium.Integrated bulb/output coupling element assembly 100 passes opening 610 closely to be held by lamp body 600.Bulb/output coupling element assembly 100 comprises bulb 130, and this bulb is the final gas filling containers that produces illumination output.

The output coupling element 120 that is positioned at assembly 100 bottoms is 101 place's ground connection and reach lamp body 600 and conductive surface 601 thereof on the plane.Collect and guiding by external reflector 670 from the illumination of bulb output, this external reflector or conduction, if perhaps processed by dielectric material then have conductive liner, and this external reflector is connected to lamp body 600 and electrically contacts with it.102 places reach lamp body 600 via earth bus 710 with reflector 670 ground connection to the top coupling element 125 that is positioned at assembly 100 tops on the plane.Replacedly, if there is not reflector 670, then earth bus and lamp body 600 directly electrically contact.Reflector 670 is depicted as parabolic shape, and bulb 130 is positioned near its focus.Can design the needs that multiple possible reflector shape satisfies beam direction.For example, said shape can be the combination of taper shape, convex, spill, trapezoidal, pyramid or these shapes, and other shapes.Short feedback E field coupling element 635 is coupled from a small amount of RF energy of bulb/output coupling element assembly 100, and to the radio frequency amplifier input 211 of radio frequency amplifier 210 feedback is provided.Couples back element 635 passes opening 612 closely to be held by lamp body 600, is not to contact with the conductive surface 601 direct direct currents of lamp body therefore.Input coupling element 630 is electrically connected with radio frequency amplifier output 212.Input coupling element 630 passes opening 611 closely to be held by lamp body 600, is not to contact with the conductive surface 601 direct direct currents of lamp body therefore.Yet the top of input coupling element is 631 place's ground connection and reach lamp body 600 and conductive surface 601 thereof on the plane.

Radio-frequency power mainly from input coupling element 630 irritability be coupled to bulb/output coupling element assembly 100, this is approaching through physics, the positioned opposite of their relative length and their ground plane realizes.The surface 637 of bulb/output coupling element assembly is coated with conduction facing or conductive material, and is connected to lamp body 600 and conductive surface 601 thereof.Other surfaces of bulb/output coupling element assembly (comprising surface 638,639 and 640) are not coated with conductive layer.Surface 640 optically is transparent or translucent.Find that through electromagnetical analogies and through direct measurement the coupling between input coupling element 630 and output coupling element 120 and lamp assembly 100 and the lamp body 600 is high frequency-selecting.This frequency-selecting provides resonant oscillator in the circuit that comprises input coupling element 630, bulb/output coupling element assembly 100, lamp body 600, couples back element 635 and amplifier 210.This resonant oscillator is equal to the radio frequency source 110 that schematically shows among Figure 1A and Figure 1B.

Fig. 2 B is the perspective view of an electrode-less plasma lamps; Only be its radio frequency source with the difference shown in Fig. 2 A; This radio frequency source is not distributed pierce circuit, but the independent oscillator 205 that is electrically connected with the radio frequency amplifier input 211 of radio frequency amplifier 210.Radio frequency amplifier output 212 is electrically connected with input coupling element 630, and this input coupling element transmits radio-frequency power to bulb/output coupling element assembly 100.The resonance-characteristic and the radio frequency source of the coupling between the output coupling element in input coupling element 630 and the bulb/output coupling element assembly 100 are frequency match, to optimize the radio-frequency power transmission.Certainly, can there be other variation, modification and replacement.

Fig. 2 C is the perspective view of an electrodeless lamp, and it is similar with the electrodeless lamp shown in Fig. 2 A, and the top coupling element 125 in bulb assembly utilizes earth bus 715 to be connected directly to the lamp body 600.

Fig. 2 D is the perspective view of an electrode-less plasma lamps, and the difference shown in itself and Fig. 2 B is its lamp/output coupling element assembly 100.This lamp/output coupling element assembly has solid metal (metal column) 120, and it is recessed to hold gas filling containers 130 at the top.The other end of coupling element reaches lamp body surperficial 101 place's ground connection.Skim dielectric material or refractory metal (like molybdenum) layer can be used as the interface between bulb and the metal column.Replacedly, the top of metal column or whole metal column can be processed by refractory metal, and its outer surface is coated the metal with one deck high conductivity, such as silver or copper.The inside of metal column also can be hollow.At Espiau, Frederick M; Brockett, Timothy J.; And Matloubian; The U.S. Patent Application Serial Number No.61/075 that " the Electrodeless Lamps withExternally-Grounded Probes and Improved Bulb Assemblies " of Mehran and on June 25th, 2008 submit to; Described the instance of plasma lamp device in 735, it is incorporated into this to quote mode as proof.Other instances comprise the United States Patent(USP) No. 7,362,056 that transfers actiontec electronics, inc. city Luxim company.

Fig. 2 E is the perspective view of an electrode-less plasma lamps, and it comprises solid dielectric waveguide/resonator 701, and this dielectric waveguide/resonator is coupled to gas filling containers 130 with RF energy from radio frequency source 205.The major part of the arc of bulb 115 is surrounded by dielectric waveguide/resonator.Probe 640 is coupled to RF energy in the dielectric resonator.The U.S. Patent application No.20090322240A1 that is entitled as " Electrodeless Lamps withExternally-Grounded Probes and Improved Bulb Assemblies "; United States Patent(USP) No. 7,291,985; With United States Patent(USP) No. 7,362, other instances of plasma lamp device have been described in 056.

Fig. 3 A is the simplified block diagram of electrode-less plasma lamps 800, its show have control input end 870, the radio driver 900 of control output end 875 and AC-DC converter 840 with ac input end 860.In these parts, radio driver comprises radio-frequency oscillator 205, one or more amplifier 210, microcontroller 850, RF coupler 830 and radio-frequency power detector 820.Electrode-less plasma lamps has reflector 670 and photodetector 810, from the output electromagnetic radiation of lamp and to microcontroller/radio driver feedback is provided to measure.The frequency of microcontroller adjustable radio-frequency oscillator and power and the bias voltage of supplying with radio-frequency oscillator and amplifier are to regulate the radio-frequency power of electrode-less plasma lamps.The input power grade of lamp and can measure through coupler 830 and radio-frequency power detector 820 from the reflection power of lamp.Be used to the feedback from radio-frequency power detector 820 and/or photodetector 810, microcontroller can be controlled radio-frequency oscillator and/or amplifier, to realize changing from the constant output of lamp or according to the parameter of expectation the output of lamp.Through the pulse width adjustment of radio frequency source, microcontroller can change the radio frequency power output of lamp.Standard interface (like RS232 or USB) can be passed through with control output end 875 in control input end 870 for radio driver, and perhaps it can pass through power line or wireless, like Zigbee.

Fig. 3 B is the simplified block diagram of array of two electrode-less plasma lamps of an embodiment of the utility model; Embodiment according to the utility model; Each light fixture has independently radio driver 900A and the 900B that is similar to radio driver among Fig. 3 A, and these two lamps of controller control.Therefore, according to the interval between the lamp, the radio-frequency power of each lamp output can change independently, and the radio-frequency power of each lamp, illumination pattern can change, to realize the lighting condition of expectation.Also expectation is to use the bulb with different-colour for each lamp.For example, a lamp can have the bulb of 6000K colour temperature, and another lamp can have the bulb of 3000K colour temperature.Through combining also to control radio-frequency power grade, can the colour temperature in whole source be changed to 6000K from 3000K, and have the ability that changes colour rendering index for each bulb from the light of these two bulbs.This also can help to improve the whole efficiency in said source, for example in the source of 3000K and 6000K than the source of 4500K more under the situation of Energy Efficient, the 3000K of available two low lumens outputs and the sources of 6000K combine to obtain the source of 4500K.Though among the figure peripheral control unit has been shown, expectation to be this array do not work under the situation of peripheral control unit having, but only utilize the inner microcontroller of radio driver.And two radio driver power line capable of using connects or wireless connections come to intercom mutually.

Fig. 3 C is the simplified block diagram of array of electrode-less plasma lamps of an embodiment of the utility model; Embodiment according to the utility model; Wherein each light fixture has the independently radio driver of the radio driver that is similar among Fig. 3 A, and all lamp of controller control.In the figure, show six electrode-less plasma lamps, still, also can use other big or small arrays.Being connected between controller and the radio driver can be passed through interface (like RS232 or USB), and perhaps it can pass through power line or wireless connections.Also expectation is the mutual direct communication of radio driver of lamp, and need not to utilize separate controller.

Fig. 3 D is the simplified block diagram of array of electrode-less plasma lamps of an embodiment of the utility model, and wherein each light fixture has independently radio driver.A controller is connected in first lamp in the array, but each lamp in succession in the array is connected in previous lamp and is connected in the next light with the daisy chain form.Being connected between controller and the radio driver can be passed through interface (like RS232 or USB), and perhaps it can pass through power line or wireless connections.Also expectation is the mutual direct communication of radio driver of lamp, and need not to utilize independently controller.Replace the daisy chain form, radio driver connects through mesh network.

Fig. 3 E is the simplified block diagram of circuit of array apparatus of an embodiment of the utility model.This array comprises from 1 to X (wherein X＞1) numbering and a plurality of electrode-less plasma lamps of arranging with the array structure of M * N.Replacedly, arranged in linear arrays that can 1 * N, wherein M is the quantity of the lamp arranged along first axle, and N is along usually perpendicular to the quantity of the lamp of second axis arranged of first axle.This array comprises from a plurality of radio-frequency power supplies of 1 to X numbering.Each radio frequency power source comprises RF output end and controller.The RF output end of radio-frequency power supply directly is coupled to the plasma lamp in the array.Controller can be controlled the power output of each radio-frequency power supply independently.The photodetector that is positioned at each plasma lamp place can provide feedback to controller.Controller is regulated and is sent to the amount of the radio-frequency power of each lamp from radio-frequency power supply, thereby controls effectively from the intensity of each independent electromagnetic radiation that lamp sent, and the distribution of this intensity.

Control is guaranteed to realize consistent strength grade (if necessary) from the ability of the intensity of each independent electromagnetic radiation that lamp sent.Form consistent field of illumination and allow array structure to be suitable for a large amount of industrial applications, for example polymer cure, photoresist solidify, anneal or paint is dry.In addition, this array can be used for the ink solidification application or the micro polymer moulding is used.This micro polymer moulding is used and is comprised the manufacturing of making micro-optical systems and/or microfluidic device.This array also can be used in the application scenario that relates to epoxy resin cure.The application of this epoxy resin cure comprises that foundation is used for the mould of industrial lathe and encapsulated circuit on printed circuit board (PCB).This array also can be used in the ultraviolet water treatment system and in the rapid thermal treatment of semiconductor fabrication applications.In these are used, use an advantage of electrode-less plasma lamps array to be, the light fixture in the array has high every stream watt (lumens perwatt) characteristic.Therefore, use this array than before the array cost cheaper and efficient is high.

This array can be configured to visible emitting, infrared ray or ultraviolet electromagnetic radiation.Can use any combination of the lamp of the electromagnetic radiation of launching above type, thereby form the array of the electromagnetic radiation of emission different wave length.

Fig. 4 is the simplified block diagram of circuit of array apparatus of another embodiment of the utility model.As last embodiment, this array comprises from 1 to X (wherein X＞1) and a plurality of electrode-less plasma lamps that arrange with the array structure of M * N, perhaps alternatively, and with the arranged in linear arrays of 1 * N.In this embodiment, the single radio frequency power supply is supplied power to whole array.This radio-frequency power supply comprises the RF output end that directly is coupled to a plurality of controllers of numbering from 1 to X (wherein X＞1).These controllers directly are coupled to each independent plasma lamp through feedback configuration.This feedback configuration allows controller to confirm to be transferred into the amount of the radio-frequency power of lamp.This controller is regulated the power that is sent to lamp from the single radio frequency source, thus the intensity of the electromagnetic radiation that control is launched.Like what discussed before, this control allows array to be adapted to various application scenarios.

Fig. 5 is the simplified block diagram of circuit of array apparatus of another embodiment of the utility model.This array comprises from 1 to X (wherein X＞1) numbering and a plurality of electrode-less plasma lamps of arranging with the array structure of M * N.This array comprises a plurality of radio-frequency power supplies.Each radio-frequency power supply comprises the radio frequency output element.Each radio-frequency power supply is used for a plurality of lamp power supplies in the array.The radio frequency output element directly is coupled to a plurality of controllers, corresponding to each lamp that power is provided by radio-frequency power supply.The quantity of controller from 1 to X, as the quantity of lamp in the array.As last embodiment, controller is coupled to each lamp through feedback loop.These controllers are used for regulating the amount that is sent to the power of each the independent lamp the array from each radio-frequency power supply, thus the intensity of the electromagnetic radiation that control is launched.Like what discussed before, this control allows array to be adapted to various application scenarios.

In a replacement embodiment of the utility model, each electrode-less plasma lamps in the array comprises independent heat exchanger.Heat exchanger can provide through any suitable mechanism, to siphon away heat from lamp and radio driver.Heat exchanger allows more effectively to disperse heat energy from lamp and radio driver, thereby guarantees longer device lifetime and improve reliability.

Fig. 6 is the simplified perspective view of the array system that comprises heat exchanger of the utility model.This system comprises a plurality of electrode-less plasma lamps.Said a plurality of lamp is by the frame supported of heat conduction.These lamps can be coupled to framework through any suitable mode, and for example welding or bolt connect, as long as be connected to support frame through the heat of radio frequency output coupling element conduction, so that heat is passed to support frame.Framework can be processed by any Heat Conduction Material that intensity is enough to support this array.These lamps can be perhaps by single radio frequency source power supply or by a plurality of radio frequency sources power supplies.Whole array need can be positioned any media top of exposure by any way.This media can comprise the water that is used for ultraviolet water and handles, photoresist, any other media that maybe need solidify.This array also can be positioned on the top of roofbolt, to be used for other application scenarios of street lighting, stadium lighting or a large amount of light of needs.Owing to be heat conduction, heat is delivered to supporting construction from lamp.So supporting construction is passed to surrounding environment with heat, thus the heat that transmits lamp effectively and produced.

One heat exchanger is attached in the supporting construction, with the heat transfer characteristics of further raising array.A heat exchanger or a series of heat exchanger can be attached in the rigidity supporting structure, perhaps are arranged on opposite, the back side or the side of supporting construction.Heat exchanger is used for further heat being conducted supporting construction, thereby improves the overall heat transfer characteristic of array.Can use various heat exchangers, comprise shell-and-tube (the shell and tube) heat exchanger that is similar to employed heat exchanger in many air-conditioners commonly used.This heat exchanger utilizes steam compressed freeze cycle to take away heat from supporting construction.In a replacement embodiment, the heat exchanger of supporting construction combines with lamp in the array, and wherein each light fixture in the array has independent heat exchanger.Through a heat exchanger is attached to each independent lamp on the supporting construction that combines of heat exchanger in, improved the heat energy diffusion characteristic of array.

Fig. 7 is the decomposition diagram of the utility model one replacement embodiment, and this embodiment has combined to have the shell structure of air-flow, with help heat is transferred away from supporting construction.As embodiment before, in this embodiment, array comprises the electrode-less plasma lamps that is installed on the heat conduction rigidity supporting structure.The mode that shell structure is not capped with the bottom of lamp is surrounded the side of the external modulation of whole supporting construction and array.Shell structure comprises opening on the relative wall of structure, let enough strong air communication cross and be conducted through the passage of array to provide.The air-flow that is dimensioned to generation maximum in array of said opening.Air-flow can be perhaps being helped by fan of convection current.Along with air is advanced through supporting construction and lamp, the heat that the absorption of air lamp is produced, thus improve the heat transfer characteristics of array effectively.

In an embodiment again of the utility model, the shell structure that will have air-flow through the design of last embodiment combines with heat exchanger, so that further improved heat transfer characteristics to be provided.As embodiment before, this assembly comprises the lamp of the supporting construction that attaches to heat conduction.With at least one heat exchanger or be combined in the actual supporting construction, perhaps be placed on the side of supporting construction, preferably with lamp attached side relative.The mode that the shell structure of last embodiment is not capped with the bottom of lamp is surrounded the external modulation of heat exchanger, supporting construction and array.This supporting construction also can comprise fin (fin, fin), so that the bigger surface area as the radiator in the assembly to be provided.This shell structure comprises opening on the relative wall of structure, it provides and lets air communication cross and be conducted through the means of array.Like this, air not only flows through lamp, and flows through supporting construction and heat exchanger, thereby disperses heat from all these three parts of assembly.Can air-flow be provided through any proper device, include but not limited to fan.

As shown in Figure 8, in another embodiment of the utility model,, the removable array of electrode-less plasma lamps is provided through using servomotor.Each lamp allows lamp to be coupled to a servomotor along the joint that the direction of expecting moves through one.Spherical (for example) joint be heat conduction and directly be coupled to supporting construction, guaranteeing that heat is passed to supporting construction, thereby allow heat is transferred away from lamp effectively.Servomotor is through a resistance thermal spacers and a joint heat insulation, and this resistance thermal spacers contacts with joint, and then the control joint, and minimum heat is passed to servomotor.Servomotor preferably through one be not used in each lamp producing plasma the power supply of independently power supply.Servomotor can be relatedly be controlled through single control system, is perhaps controlled through a plurality of control system individually.Removable lamp array has increased the quantity of the application scenario of this plasma lamp array, such as the curing of three-dimensional body and in concert or theatre lighting system, use.

In another embodiment, photodetector is used for controlling light intensity level with array.This photodetector is arranged in the illumination zone of array.Therefore, the output signal of photodetector can be controlled the light intensity of being launched.One feedback control system is connected in photodetector and is used for controlling the amount of the radio-frequency power that is sent to lamp little.Like this, control system guarantees that lamp launches the light of constant strength grade.

Fig. 9 is the simplified perspective view according to the lamp array of another replacement embodiment of the utility model.As shown in the figure, the lamp array causes heat energy and/or electromagnetic radiation as the media shown in the panel.This media can comprise annealing/curing or other similar processing, lamination and ultraviolet water processing and multiple other processing of the solar panel, epoxy resin or the photoresist that stand lamination (lamination) or test.In a specific embodiment, this array can be used in the quick thermal annealing process, like employed those processing in the semi-conductor electronic device.Through using the feedback of photodetector and controller, can regulate radio-frequency power independently for each lamp in the array, thereby realize the illumination or the heating characteristic of expectation.

Other instances of electrodeless lamp and details can find in the PCT/US2009/048174 that is called " Electrodeless Lamps with Externally-Grounded Probes and Improved BulbAssemblies " that submitted on June 22nd, 2009 in the name with Frederick M.Espiau, Timothy J.Brockett and Mehran Matloubian; This application is co-assigned, and is incorporated into this to quote mode as proof.

Although more than be comprehensive description of the specific embodiment, can use various modifications, replacement structure and equivalent.Therefore, more than describe and explain should not be regarded as the scope that limits the utility model, the scope of the utility model is defined by the following claims.

Claims (27)

1. an electrode-less plasma lamps array apparatus is characterized in that, said equipment comprises:

A plurality of plasma lamp devices from 1 to X, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange with the array structure of M * N, and wherein M is at least 1 integer, and N is at least 2 integer;

A plurality of radio-frequency power supplies are respectively coupled to said a plurality of plasma lamp device, and each in said a plurality of radio-frequency power supplies comprises RF output end and control input end, and said a plurality of radio-frequency power supplies comprise the said control input end from 1 to X separately; And

Controller is arranged to said a plurality of radio-frequency power supply, and is coupled to said control input end, and said controller is configured to optionally regulate the radio-frequency power from said a plurality of radio-frequency power supplies.

2. equipment according to claim 1 is characterized in that, further comprises one or more photodetectors.

3. equipment according to claim 1 is characterized in that, further comprises supporting construction.

4. equipment according to claim 1 is characterized in that, further comprises heat exchanger.

5. equipment according to claim 1 is characterized in that, further comprises housing, and this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

6. equipment according to claim 1 is characterized in that, further comprises heat exchanger and housing, and this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

7. equipment according to claim 3 is characterized in that, said lamp is through globe joint and utilize servomotor to be coupled to said supporting construction.

8. equipment according to claim 3 is characterized in that, said supporting construction comprises the fin in order to the surface area that increases the said supporting construction that is used as radiator.

9. an electrode-less plasma lamps array apparatus is characterized in that, said equipment comprises:

A plurality of plasma lamp devices from 1 to X, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange with the array structure of M * N, and wherein M is at least 1 integer, and N is at least 2 integer;

The single radio frequency power supply is respectively coupled to said a plurality of plasma lamp device, and said single radio frequency power supply comprises RF output end; And

A plurality of controllers from 1 to X are arranged to said single radio frequency power supply, and said controller is configured to optionally regulate the radio-frequency power that is transferred into each the independent plasma lamp device in the said array.

10. equipment according to claim 9 is characterized in that, further comprises one or more photodetectors.

11. equipment according to claim 9 is characterized in that, further comprises supporting construction.

12. equipment according to claim 9 is characterized in that, further comprises heat exchanger.

13. equipment according to claim 9 is characterized in that, further comprises housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

14. equipment according to claim 9 is characterized in that, further comprises heat exchanger and housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

15. equipment according to claim 11 is characterized in that, said lamp is through globe joint and utilize servomotor to be coupled to said supporting construction.

16. equipment according to claim 11 is characterized in that, said supporting construction comprises the fin in order to the surface area that increases the said supporting construction that is used as radiator.

17. an electrode-less plasma lamps array apparatus is characterized in that, said equipment comprises:

A plurality of plasma lamp devices from 1 to X, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange with the array structure of M * N, and wherein M is at least 1 integer, and N is at least 2 integer;

A plurality of radio-frequency power supplies are respectively coupled to said a plurality of plasma lamp device, and each in a plurality of radio-frequency power supplies includes RF output end; And

A plurality of controllers from 1 to X are configured to be respectively applied for said a plurality of radio-frequency power supply, and each of said controller is configured to optionally regulate the radio-frequency power that is transferred into each plasma lamp device.

18. equipment according to claim 17 is characterized in that, further comprises one or more photodetectors.

19. equipment according to claim 17 is characterized in that, further comprises supporting construction.

20. equipment according to claim 17 is characterized in that, further comprises heat exchanger.

21. equipment according to claim 17 is characterized in that, further comprises housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

22. equipment according to claim 17 is characterized in that, further comprises heat exchanger and housing, this housing has a plurality of openings of permission flow of pressurized gas through said equipment.

23. equipment according to claim 19 is characterized in that, said lamp is through globe joint and utilize servomotor to be coupled to said supporting construction.

24. equipment according to claim 17 is characterized in that, said a plurality of controllers utilize daisy chain or mesh network to communicate.

25. equipment according to claim 17 is characterized in that, said a plurality of controllers utilize the combination in any of power line network, wireless network or cable network to communicate.

26. equipment according to claim 19 is characterized in that, said supporting construction comprises the fin in order to the surface area that increases the said supporting construction that is used as radiator.

27. an electrode-less plasma lamps array apparatus is characterized in that, said equipment comprises:

From a plurality of plasma lamp devices of 1 to X numbering, wherein X is greater than 1, and said a plurality of plasma lamp devices arrange that with the array structure of M * N wherein M is the integer more than 1, and N is the integer more than 2;

A plurality of radio-frequency power supplies are respectively coupled to said a plurality of plasma lamp device, and each in a plurality of radio-frequency power supplies includes RF output end; And

At least one controller; Be configured and be respectively applied for said a plurality of radio-frequency power supply; Said controller is configured to optionally regulate each the radio-frequency power that is transferred in said a plurality of plasma lamp device; To regulate the colour temperature of at least one plasma lamp device of from said a plurality of plasma lamp devices, selecting, be used for the colour rendering of said a plurality of plasma lamp devices of said array structure.

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