CN202142496U - 离子注入机的分析器 - Google Patents
离子注入机的分析器 Download PDFInfo
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- CN202142496U CN202142496U CN201120265256U CN201120265256U CN202142496U CN 202142496 U CN202142496 U CN 202142496U CN 201120265256 U CN201120265256 U CN 201120265256U CN 201120265256 U CN201120265256 U CN 201120265256U CN 202142496 U CN202142496 U CN 202142496U
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- ion
- analyzer
- screening pipe
- movable screw
- ion screening
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201120265256U CN202142496U (zh) | 2011-07-25 | 2011-07-25 | 离子注入机的分析器 |
Applications Claiming Priority (1)
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CN201120265256U CN202142496U (zh) | 2011-07-25 | 2011-07-25 | 离子注入机的分析器 |
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CN202142496U true CN202142496U (zh) | 2012-02-08 |
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CN201120265256U Expired - Fee Related CN202142496U (zh) | 2011-07-25 | 2011-07-25 | 离子注入机的分析器 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023053437A1 (ja) * | 2021-10-01 | 2023-04-06 | 株式会社日立ハイテク | イオンミリング装置 |
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2011
- 2011-07-25 CN CN201120265256U patent/CN202142496U/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023053437A1 (ja) * | 2021-10-01 | 2023-04-06 | 株式会社日立ハイテク | イオンミリング装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130427 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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TR01 | Transfer of patent right |
Effective date of registration: 20130427 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120208 Termination date: 20180725 |
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CF01 | Termination of patent right due to non-payment of annual fee |