CN202114645U - Diamond wire saw - Google Patents
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- CN202114645U CN202114645U CN2011200292957U CN201120029295U CN202114645U CN 202114645 U CN202114645 U CN 202114645U CN 2011200292957 U CN2011200292957 U CN 2011200292957U CN 201120029295 U CN201120029295 U CN 201120029295U CN 202114645 U CN202114645 U CN 202114645U
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Abstract
The utility model discloses a diamond wire saw, which comprises a metal base wire body and diamond particles embedded on the surface of the metal base wire body. The metal base wire body comprises the following parts: a core body made of a carbon steel and being 0.1mm to 04mm wide; a sand planting layer covered on the surface of the core body and being 0.001mm to 0.004mm thick; and a nickel base layer covered on the surface of the sand planting layer and being 0.001mm to 0.05mm thick, wherein the nickel base layer is made of nickel or a first nickel alloy; the first nickel alloy contains one or more of Co, W, Fe, Al, Mo, Nb, Si, Ti, V, Y and Zr, wherein a groove is formed on the surface of the sand planting layer, and the groove is embedded with the diamond particles. According to the diamond wire saw of the embodiment of the utility model, the sand planting layer with groove is covered outside the steel wire, so on one hand, the processing speed for plating the diamond particles can be improved, on the other hand, the service life of the diamond wire saw is improved remarkably.
Description
Technical field
The utility model relates to the manufacture field of wafer, especially relates to the diamond fretsaw that is used for cut crystal.
Background technology
When making various semiconductor devices, the raw material ingot cutting processing such as silicon, sapphire that will comprise monocrystalline, polycrystalline or amorphous through slice processing are the thin plate or the wafer of predetermined thickness dimension.
Along with the develop rapidly of electronics industry, the application of wafer more and more widely, Wafer Machining also more and more comes into one's own, wherein wafer cutting is the important procedure of yield rate height in the restriction subsequent handling.
The scroll saw cutting method that can be used for hard brittle materials such as silicon crystal now mainly contains two kinds of the cutting of using free abrasive and the cutting of using concretion abrasive.In the cutting processing of semi-conducting materials such as silicon crystal, mainly adopt the scroll saw cutting technique of free abrasive, its liquid that utilizes the steel wire rapid movement will contain abrasive material is brought the workpiece joint-cutting into, produces shear action.The section amount was big when its main feature was narrow, the multi-thread cutting of joint-cutting, the section cost is low, but cutting speed is slower, and cutting efficiency is low.Because abrasive material is difficult to reclaim, and considers the cost problem, also can't use diamond dust at present as free abrasive material.To these problems; The concretion abrasive diamond fretsaw progressively began to get into commercial Application in recent years, and promptly incisory saw silk surface has been consolidated with diamond abrasive grain, thereby cutting efficiency is improved greatly; Compare with free abrasive, cutting efficiency rises to original more than 3 times.
Because electroplating diamond wire saw has the coat of metal, thereby hear resistance and wearability advantages of higher high relatively to the hold of abrasive particle, coating, electroplating diamond wire saw is used widely just gradually.In order to guarantee that production efficiency and production length are several kilometers perhaps tens of kilometers diamond fretsaws, need in the steel wire moving process, accomplish diamond particle and deposit to the steel wire surface and be cemented in the steel wire surface by the coat of metal, this process also is known as sand.Conventional electroplating diamond wire saw is divided into two kinds usually; A kind of diamond surface is carried out preliminary treatment (for example metalized or carry out modification through cationic surfactant) thus make it chargedly in the liquid environment of electroplating bath make it deposit to the steel wire surface, another kind of method be with diamond abrasive steel wire is all buried and make under the situation of energising stick under the effect of abrasive material that contact with steel wire in electro-deposition the steel wire surface with realization on sand.
Yet, in above-mentioned two kinds of methods, all there is the problem of adamantine initial stage hold, this has determined the steel wire translational speed that necessary employing is very low, thereby causes shortcomings such as production efficiency is low, production cost height.And still there are shortcomings such as the hold of abrasive particle remains further to be improved, the service life of saw silk is relatively short by the diamond fretsaw of existing electroplating technology production.
The utility model content
The utility model is intended to solve at least one of technical problem that exists in the prior art.
For this reason, the purpose of the utility model is to propose the diamond fretsaw of a kind of cutting efficiency height, long service life.
According to the diamond fretsaw of the utility model embodiment, by the metal base body with contain the diamond particles that is embedded in said metal base surface and constitute, said metal base body comprises: core body, said core body are made up of carbon steel and diameter is 0.1～0.4mm; Plant layer of sand, said to plant surface and the thickness that layer of sand is covered in said core body be 0.001～0.04mm; And Ni-based layer; It is 0.001～0.05mm that said Ni-based layer is covered in said surface and thickness of planting layer of sand; Said Ni-based layer is made up of the nickel or first nickel alloy; Contain among Co, W, Fe, Al, Mo, Nb, Si, Ti, V, Y, the Zr one or more in said first nickel alloy, the wherein said layer of sand surface of planting is formed with groove, and said groove includes and is embedded with said diamond particles.
Utilize the diamond fretsaw of the utility model the foregoing description; Because the surface groove embedding through metal composite wire in the process of electroplated diamond particle and Ni-based layer contains diamond particles; Can significantly improve the adhesive force of plating initial stage diamond particles, thereby improve the working (machining) efficiency of electroplating on the steel wire surface.In addition, to be embedded in the diamond and the confining force between the said steel wire of planting the groove part in the layer of sand stronger owing to contain, so its cutting efficiency is higher, longer service life.
In addition, according to the metal composite wire of the utility model the foregoing description, can also have following additional technical characterictic:
According to an embodiment of the utility model, said groove extends along the said layer of sand surface spiral of planting.In the case, the steel wire surface diamond covers more even, in the process of cut crystal, is more conducive to chip removal, thereby can further improve cutting efficiency and cutting quality.
The degree of depth and width about said groove do not have special limitation, as long as the degree of depth of said groove does not reach core surface deeply.For example, can suitably regulate according to concrete conditions such as employed diamond particle size.Shape about said groove does not have special limitation, as long as be suitable for adhering to diamond particles.For example, said groove can be U-lag, dovetail groove etc.
The particle diameter of said diamond particles can be set according to institute's product processed etc., for example can be 1～60 μ m.
According to some embodiment of the utility model, said diamond particles is handled through cationic surfactant.Wherein, said cationic surfactant can be for being selected from softex kw, hexadecyltrimethylammonium chloride, OTAC, DTAC and the tetradecyl trimethyl ammonium chloride one or more.Diamond particles after the process cationic surfactant is handled is stronger in the initial stage hold on steel wire surface, more helps reducing the production cost of diamond fretsaw.
According to some embodiment of the utility model, said diamond particles surface is formed with metal level, and said metal level constitutes by being selected among Co, W and the Ni one or more.Thus, can improve and diamond particles between wellability and improve the hold of diamond particles on steel wire surface, thereby help further improving the stock-removing efficiency and the service life of scroll saw.
According to some embodiment of the utility model, the said layer of sand of planting is made up of copper or copper alloy, contains among Zn, Sn, Pb, Sb, Al, Mg, Ti and the Fe one or more in the said copper alloy.
Other embodiment according to the utility model; The said layer of sand of planting is made up of soft copper layer and hard layer; Wherein said soft copper layer is formed at said core surface and thickness is 0.0005～0.01mm; Surface and thickness that said hard layer is formed at said soft copper laminar surface are 0.0005～0.03mm; Wherein said hard layer surface is formed with said groove and tortoise plastron shape crackle and said hard layer and is made up of zinc, kirsite, nickel or second nickel alloy; Contain among Cu, Sn, Pb, Sb, Al, Mg, Ti, the Fe one or more in the said kirsite, contain among Co, W, Fe, Al, Mo, Nb, Si, Ti, V, Y, the Zr one or more in said second nickel alloy.Thus; Because the existence of hard layer; After through hot candied processing, plant the layer of sand surface and not only be formed with groove and spread all over tortoise plastron shape crackle, and the existence of tortoise plastron shape crackle can be adhered to more diamond particles; Further improve the working (machining) efficiency of diamond fretsaw when electroplating, thereby and since the hold that the existence of tortoise plastron shape crackle has improved between diamond particles and the steel wire can enhance productivity, reduce production costs.
Need to prove when hard layer and Ni-based layer constitute by nickel alloy, do not have mutual restriction to concern that promptly contained separately alloying element can be the same or different between the alloying element in alloying element that is contained in the hard layer and the Ni-based layer.
Additional aspect of the utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize through the practice of the utility model.
Description of drawings
Above-mentioned and/or additional aspect of the utility model and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 a is the schematic flow sheet of preparation according to the diamond fretsaw of the utility model first embodiment;
Fig. 1 b is the schematic partial cross-sectional view according to the diamond fretsaw of an embodiment of the utility model;
Fig. 2 a is the schematic flow sheet of preparation according to the diamond fretsaw of the utility model second embodiment;
Fig. 2 b is the schematic cross-section according to the diamond fretsaw of the utility model second embodiment;
Fig. 2 c is the structural representation of planting the layer of sand surface in the diamond fretsaw according to the utility model second embodiment; And
Fig. 2 d is that the master according to the diamond fretsaw of the utility model second embodiment looks sketch map.
The specific embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
First embodiment
Below, in order to understand structure better, at first combine Fig. 1 a to describe the process of the diamond fretsaw of preparation the utility model embodiment according to the diamond fretsaw of the utility model first embodiment.
1) heart yearn is provided.
Can select for use the high-carbon steel material to form as the material of heart yearn, for example No. 77 steel, No. 82 steel, No. 92 steel etc.Wherein, the diameter of heart yearn is 0.7mm.
In a concrete example of the utility model, the carbon steel line as heart yearn is carried out the surface remove the passivation layer processing, thus, can improve the bond strength of heart yearn and soft copper layer.
2) form the intermediate layer on the heart yearn surface, obtain metal wire rod.
In this embodiment, the intermediate layer is made up of soft copper layer.
Particularly, forming the intermediate layer is realized by following steps.
In some concrete examples of the utility model, under inert atmosphere, carry out, the red copper melt that uses 1100-1250 ℃ is to implement hot dipping copper facing on the heart yearn surface.Through the hauling speed and the hot dipping time of control steel wire, forming thickness is the soft copper layer of 0.02mm.Other concrete operations of hot dipping copper can be adopted the routine operation of hot dipping, omit its explanation at this.
Need to prove, except copper, can also adopt one or more the copper alloy that contains among Zn, Sn, Pb, Sb, Al, Mg, Ti and the Fe.
3) hot candied processing obtains metal composite wire.
Next; Traction is formed with the metal wire rod in intermediate layer and processes to carry out wire drawing through the through hole of wire drawing processing mould; Be provided with outstanding to the inside processing sword in the said through hole; And after the said metal wire rod of traction is through the through hole of said processing mould, said metal composite wire carrying out twisted filament processing, spiral extends on said metal composite wire surface to obtain surface reeded metal composite wire of formation and said groove.The diameter of gained metal composite wire is 0.14mm.
4) electroplated diamond particle and Ni-based layer obtain diamond fretsaw.
At last, make said metal composite wire, obtain diamond fretsaw through accommodating diamond particles and Ni-based electrolyte solution.
Particularly, be negative electrode with the metal composite wire, be that (concentration of nickel sulfate 300g/l, sulfuric acid tungsten concentration is 15g/l to electrolyte solution, boric acid: 40g/l, pH:2.5,50 degrees centigrade of liquid temperature, current density 20A/dm with the aqueous solution of sulfur acid nickel and sulfuric acid tungsten
2), and to be dispersed with average grain diameter in the said electrolyte solution be the diamond particles that 10 μ m and coating surface have the tungsten metal level, is sacrificial anode with nickel or nickel alloy plate.Under these conditions; Nickel ion, tungsten ion in the electrolyte solution move towards negative electrode; Promptly deposit on the metal composite wire, simultaneously, diamond particles also is deposited on the heart yearn surface under the function of current; And because the metal composite wire surface has groove; Along with the moving of metal composite wire, this part groove is to containing the chucking power that the diamond particles that is embedded in wherein is applied with physical action, so the hold between this part diamond particles and the metal composite wire comprises the chucking power of chemisorbed power and physical action in electroplating process; Its hold is significantly increased than smooth metal wire surface, so the hauling speed of steel wire can be brought up to 10-100m/min.
Through the control electroplating time, finally in metal composite wire electroplating surface diamond, forming thickness is the Ni-based layer of 0.008mm.
Need to prove that the size of diamond particles does not receive particular restriction, can select usefulness according to requirement of cutting object, cutting accuracy etc., for example, can select average grain diameter for use is the diamond particles of 1～60 μ m.In addition, for improve diamond particles at the sedimentation rate on steel wire surface and diamond particles in the initial stage hold on metal composite wire surface, select for use coating surface that the diamond particles of tungsten metal level is arranged.Except tungsten, can also select for use coating surface that the diamond particles of cobalt or nickel metal layer is arranged.Plating has the diamond particles of above-mentioned metal level, can improve the working (machining) efficiency of electroplated diamond particle on the one hand, also helps to improve the chip removal ability of diamond fretsaw on the other hand.
Following with reference to the diamond fretsaw of figure 1b description according to the utility model first embodiment.
Shown in Fig. 1 b, according to the diamond fretsaw of the utility model first embodiment, comprise core body 10, plant layer of sand 20, Ni-based layer 30 and diamond particles 40.
The diameter of the core body 10 that wherein, after wire drawing processing, is formed by heart yearn is 0.12mm.
The thickness of planting layer of sand 20 that after wire drawing processing, is formed by soft copper layer is 0.01mm.Wherein, be formed with groove 21 on said surface of planting layer of sand 20.Groove 21 has been shown among Fig. 1 b has been the situation of trapezoidal groove, but the shape of groove is not limited to this, for example, can be U-shaped groove, special impression etc.
Need to prove, about the degree of depth of groove and width can according to the concrete conditions such as size of the diamond particles of being selected for use through the processing sword in the through hole of regulating the processing mould width and highly suitably regulate.For example, be the diamond particles of 10 μ m to the average grain diameter of being selected for use, can make the degree of depth of groove be roughly 3 μ m～7 μ m through the width of regulating the processing sword, width is about 5-30 μ m.Groove with this size range in electroplating process, can make diamond particles better embedding be contained in this groove, therefore can improve working (machining) efficiency and the cutting quality of prepared diamond fretsaw when cutting processing further.
The thickness of Ni-based layer 30 is 0.008mm.Wherein, diamond particles 40 covers and plants the surperficial of layer of sand 20 and be fixed on the surface of planting layer of sand 20 by Ni-based layer 30.Shown in Fig. 1 b, contain diamond particles 40 in that groove 21 is embedded, and the diamond particles surface is formed with tungsten metal level 41.As stated, because the existence of groove 21 can significantly improve the process velocity when electroplating.In addition, because the hold of this part diamond particles 40 is higher, service life that can the significant prolongation diamond fretsaw.
Second embodiment
Below, in order to understand structure better, at first combine Fig. 2 a to describe the process of the diamond fretsaw of preparation the utility model embodiment according to the diamond fretsaw of the utility model second embodiment.
1) heart yearn is provided.
Identical with first embodiment, omit its explanation at this.
2) form the intermediate layer on the heart yearn surface, obtain metal wire rod.
In this embodiment, the intermediate layer is made up of soft copper layer and the hard layer that covers soft copper laminar surface.Particularly, forming the intermediate layer is realized by following steps.
2-a) form soft copper layer on the heart yearn surface.
In a concrete example of the utility model, form soft copper layer on the surface of heart yearn through electro-coppering.Particularly, be negative electrode with the heart yearn, be electrolyte solution (concentration of copper sulfate 300g/l, boric acid: 40g/l, pH:2.5,50 degrees centigrade of liquid temperature, current density 20A/dm with acidified copper sulphate or acidifying cupric pyrophosphate
2), be sacrificial anode with the fine copper plate, the hauling speed of steel wire is 2m/min, forming thickness is the soft copper layer of 0.01mm.
2-b) form hard layer at said soft copper laminar surface.
Then; Under inert atmosphere, make plating have the steel wire of soft copper layer after paying out machine, straightener, pickled surface and oven dry are handled, to pass working furnace (being provided with 800 degrees centigrade zinc-copper (copper content 10wt%) alloy melt in the working furnace); Make around the soft copper layer hard layer that constitutes by pltine on the even plating; Through regulating the hauling speed of wire rod, the thickness of control hard layer is 0.03mm.After this through the supercooling take-up.
The ductility of pure zinc is relatively poor, and its ductility is more far short of what is expected than fine copper, and is prone to become fragile after surpassing 200 degrees centigrade.In addition, after pure zinc added a small amount of alloying element such as Cu, Sn, Pb, Sb, Al, Mg, Ti, Fe etc., its plasticity and ductility significantly descended.In zinc, add copper and can improve intensity, hardness and impact flexibility, but reduce plasticity and ductility, so preferred said kirsite is a pltine.But,, the copper addition becomes the phase that Cu-Zn dissolves each other fully when surpassing 60wt%, and its plasticity and ductility begin again to strengthen.Therefore the copper content in the pltine is preferably 1～60wt%.
In hot-dip process, the temperature of said pltine melt can suitably be selected according to copper content.And, can control the thickness of the superficial layer that is generated through the hauling speed, the displacement of wire rod in melt etc. of control wire rod.
In addition; Except using galvanizing by dipping or kirsite to form the said hard layer; Can also form said hard layer through electrogalvanizing or kirsite, concrete electrogalvanizing or kirsite technology and parameter can adopt existing plating technology and parameter, omit its explanation at this.
In addition; The material that forms hard layer is not limited in pltine; From ductility, with the copper layer and after the compatibility of the Ni-based layer stated consider, can also select for use contain among Sn, Pb, Sb, Al, Mg, Ti, the Fe one or more kirsite, zinc, nickel or contain one or more the nickel alloy among Co, W, Fe, Al, Mo, Nb, Si, Ti, V, Y, the Zr.
This be because, the ductility of nickel is also relatively poor, and in nickel, adds after a small amount of alloying element Co, W, Fe, Al, Mo, Nb, Si, Ti, V, Y, the Zr etc., its plasticity and ductility also will significantly descend.Wire drawing adds man-hour because the amount of plastic deformation of hard layer greatly also can produce tortoise plastron shape crackle under the stress effect carrying out.
When the material that forms hard layer is nickel or above-mentioned nickel alloy, consider that the fusing point of nickel and nickel alloy is higher, preferably use the method for electronickelling or nickel alloy to form said hard layer at soft copper laminar surface.
3) hot candied processing obtains metal composite wire.
Next; Traction is formed with the metal wire rod in intermediate layer and processes to carry out wire drawing through the through hole of wire drawing processing mould; Be provided with outstanding to the inside processing sword in the said through hole; And in the traction through hole of said metal wire rod, said processing mould rotate with respect to said metal wire rod, obtain metal composite wire and said groove that the surface is formed with tortoise plastron shape crackle and groove in the spiral extension of said metal composite wire surface through said processing mould.The diameter of metal composite wire is 0.14mm.
Owing on soft copper layer, be formed with hard layer, therefore after hot candied processing, the surface of metal composite wire also is formed with tortoise plastron shape crackle except being formed with groove.This tortoise plastron shape crackle can add the loss that reduces mould man-hour through the impregnation lubricant in wire drawing on the one hand; On the other hand; The existence of tortoise plastron shape crackle also can contain the embedding diamond particles; Thereby help to improve the coverage rate of diamond particles, and help further improving the service life of diamond fretsaw.
4) electroplated diamond particle and Ni-based layer obtain diamond fretsaw.
At last, make said metal composite wire, obtain diamond fretsaw through accommodating diamond particles and Ni-based electrolyte solution.
Particularly, be negative electrode with the metal composite wire, be that (boric acid 40g/l, pH are 2.5 to electrolyte solution for concentration of nickel sulfate 300g/l, cobalt sulfate concentration 15g/l, 50 degrees centigrade of liquid temperature, current density 20A/dm with the aqueous solution of sulfur acid nickel and cobaltous sulfate
2), and to be dispersed with average grain diameter in the said electrolyte solution be 10 μ m and the diamond particles that carries out finishing by hexadecyltrimethylammonium chloride, is sacrificial anode with nickel or nickel alloy plate.Under these conditions; Nickel ion, cobalt ions in the electrolyte solution move towards negative electrode; Promptly deposit on the metal composite wire, simultaneously, diamond particles also is deposited on the heart yearn surface under the function of current; And because the metal composite wire surface has tortoise plastron shape crackle and groove; Along with the moving of metal composite wire, this part tortoise plastron shape crackle and groove are to containing the chucking power that the diamond particles that is embedded in wherein is applied with physical action, so the hold between this part diamond particles and the metal composite wire comprises the chucking power of chemisorbed power and physical action in electroplating process; Its hold is significantly increased than smooth metal wire surface, so the hauling speed of steel wire can be brought up to 10-100m/min.
Through the control electroplating time, finally in metal composite wire electroplating surface diamond, forming thickness is the Ni-based layer of 0.008mm.
In addition, for improve diamond particles at the sedimentation rate on steel wire surface and diamond particles in the initial stage hold on metal composite wire surface, select for use through cationic surfactant hexadecyltrimethylammonium chloride surface-treated diamond particles.Said cationic surfactant is not limited thereto, and can also be selected from softex kw, OTAC, DTAC, the tetradecyl trimethyl ammonium chloride one or more.
Following with reference to the diamond fretsaw of figure 2b～2d description according to the utility model second embodiment.
Shown in Fig. 2 b, according to the diamond fretsaw of the utility model second embodiment, comprise core body 100, plant layer of sand 200, Ni-based layer 300 and diamond particles 400.
The diameter of the core body 100 that wherein, after wire drawing processing, is formed by heart yearn is 0.11mm.
The thickness of soft copper layer 201 after hot candied processing is 0.003mm, and the thickness that hard layer 202 forms after hot candied processing is 0.012mm, is 0.015mm by soft copper layer 201 with the thickness of planting layer of sand 200 that hard layer 202 forms after hot candied processing promptly.
In hot candied process; Because copper has good ductility; Therefore the copper that carries out along with wire drawing extends equably and is covered in core body (being steel wire) surface; Prevent thus to corrode under the environment of humidity as the steel wire of core body, it is inner also to stop face crack in hot candied process, to import core body into simultaneously.
And because the ductility of zinc or pltine much smaller than copper, therefore adds man-hour carrying out wire drawing, except being formed with groove 210, wherein hard layer produces tortoise plastron shape crackle 220 under the stress effect on the surface of planting layer of sand 200.Need to prove; Fig. 2 b has just schematically provided the cross section of diamond fretsaw; Owing to groove 210 is that the processing sword that moves through that in wire drawing processing, is accompanied by metal wire rod pushes metal wire material surface and forms; Therefore the total inner surface of groove 220 also all is coated with hard layer, also promptly is coated with tortoise plastron shape crackle 220.In addition, owing in the through hole of the said metal wire rod of traction, make said processing mould rotation through said processing mould, thus planting layer of sand 200 surperficial spirals extensions by the groove 210 that said processing sword is processed to form.
Tortoise plastron shape crackle 220; Can promote in hot candied process that on the one hand lubricating fluid gets into the factory interface of mould and steel wire; Strengthen lubricating, improve hot candied precision and hot candied yield rate, on the other hand; Also can similar groove 210 in electroplating process and embedding contains diamond particles, thus help further improving the processing speed of diamond fretsaw and the service life of diamond fretsaw.
The thickness of Ni-based layer 300 is 0.008mm.Wherein, diamond particles 400 covers and plants the surperficial of layer of sand 200 and be fixed on the surface of planting layer of sand 200 by Ni-based layer 300.Shown in Fig. 2 b, at groove 210 and the tortoise plastron shape crackle 220 embedded diamond particles 400 that contain.As stated, because the existence of groove 210 can further improve the process velocity when electroplating, and service life that can the significant prolongation diamond fretsaw.
In addition, shown in Fig. 2 c, spiral extends (that is after wire drawing, planting layer of sand 200 surperficial spirals extensions) to groove 210 on the diamond fretsaw surface.And shown in Fig. 2 c, after electroplating, the surface of planting layer of sand 200 almost all is coated with Ni-based layer 300, also is that groove 210 all is coated with Ni-based layer 300 with tortoise plastron shape crackle 220.Thus diamond particles 400 is fixed in the scroll saw surface.
Need to prove that though the diamond particles that uses in the above-mentioned example all passes through surface treatment, this is the preferred implementation of the utility model, the utility model is not limited to this.The utility model goes for the surface equally and does not pass through the diamond particles of any processing, for example combines etc. with traditional sand method of burying.
In the description of this specification, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained among at least one embodiment or example of the utility model.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.
Claims (4)
1. a diamond fretsaw is characterized in that, by the metal base body with contain the diamond particles that is embedded in said metal base surface and constitute, said metal base body comprises:
Core body, said core body are made up of carbon steel and diameter is 0.1～0.4mm;
Plant layer of sand, said to plant surface and the thickness that layer of sand is covered in said core body be 0.001～0.04mm; And
Ni-based layer, it is 0.001～0.05mm that said Ni-based layer is covered in said surface and thickness of planting layer of sand, said Ni-based layer is made up of the nickel or first nickel alloy,
The wherein said layer of sand surface of planting is formed with groove, and said groove includes and is embedded with said diamond particles.
2. diamond fretsaw according to claim 1 is characterized in that, said groove extends along the said layer of sand surface spiral of planting.
3. diamond fretsaw according to claim 1 is characterized in that, the particle diameter of said diamond particles is 1～60 μ m.
4. according to each described diamond fretsaw in the claim 1 to 3, it is characterized in that the said layer of sand of planting is made up of soft copper layer and hard layer,
Wherein said soft copper layer is formed at said core surface and thickness is 0.0005～0.01mm,
Surface and thickness that said hard layer is formed at said soft copper laminar surface are 0.0005～0.03mm, and wherein said hard layer surface is formed with said groove and tortoise plastron shape crackle and said hard layer and is made up of zinc, kirsite, nickel or second nickel alloy.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011200292957U CN202114645U (en) | 2011-01-27 | 2011-01-27 | Diamond wire saw |
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| CN2011200292957U CN202114645U (en) | 2011-01-27 | 2011-01-27 | Diamond wire saw |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103448153A (en) * | 2013-08-23 | 2013-12-18 | 蓝思科技股份有限公司 | Cutting technique and machining fixture for sapphire ingot |
| CN112775857A (en) * | 2020-12-30 | 2021-05-11 | 佛山市三水日邦化工有限公司 | Preparation method of crystallized ceramic bond grinding tool |
-
2011
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103448153A (en) * | 2013-08-23 | 2013-12-18 | 蓝思科技股份有限公司 | Cutting technique and machining fixture for sapphire ingot |
| CN103448153B (en) * | 2013-08-23 | 2016-02-03 | 蓝思科技股份有限公司 | A kind of cutting technique of sapphire ingot and processing jig thereof |
| CN112775857A (en) * | 2020-12-30 | 2021-05-11 | 佛山市三水日邦化工有限公司 | Preparation method of crystallized ceramic bond grinding tool |
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