CN202085045U - Halbach permanent magnetic array linear motor - Google Patents
Halbach permanent magnetic array linear motor Download PDFInfo
- Publication number
- CN202085045U CN202085045U CN2011201905421U CN201120190542U CN202085045U CN 202085045 U CN202085045 U CN 202085045U CN 2011201905421 U CN2011201905421 U CN 2011201905421U CN 201120190542 U CN201120190542 U CN 201120190542U CN 202085045 U CN202085045 U CN 202085045U
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- permanent magnet
- haier
- magnet array
- mover
- parallel
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Abstract
A halbach permanent magnetic array linear motor comprises a base. Two parallel vertical plate supports are arranged on the base, two parallel stators are arranged between the two vertical plate supports, a rotor is fixed between the two stators, and an air gap is reserved between each stator and the rotor. Each stator comprises a base plate and horizontal supports disposed on two sides of the base plate, the other end of each horizontal support is fixedly connected into fixing grooves on the vertical plate supports, and a halbach permanent magnetic array arranged on the base is parallel to the horizontal directions of the vertical plate supports. The rotor comprises a secondary coreless winding, and slides are connected to two ends of the secondary coreless winding and fittingly connected with guide rails on the vertical plate supports. The permanent magnetic linear motor in the halbach array structure is low in magnetic field harmonic, high and stable in electromagnetic force, high in control precision, and efficiency and bearing capacity of the linear motor are improved.
Description
Technical field
The utility model relates to a kind of permanent-magnetism linear motor that is applied to high-precision fixed bit platform and semiconductor equipment.
Background technology
Conventional motors such as direct current machine, synchronous machine, induction machine, variable reluctance motor can be used as electromagnetic actuator, but as actuator pros and cons are arranged with electric rotating machine, DC MOTOR CONTROL is simple, but the existence of brush makes direct current machine need periodic maintenance and is not suitable for the vacuum operation environment; Control of Induction Motors is difficulty; The teeth groove power that the teeth groove of variable reluctance motor causes can be brought difficulty to precision positioning.
Synchronous machine is fit to the photoetching operation, for avoiding reluctance force and teeth groove power, can adopt the structure of iron-free, no teeth groove, winding mounted on surface.
Traditional plane positioning system is converted into rectilinear motion to rotatablely moving of electric rotating machine by transmission mechanisms such as gear, ball-screws, because there are problems such as backlash, friction, uncertain ball motion in transmission mechanism, so be difficult to carry out high-precision location, the consequence that causes is, the technical staff is forced in and the moving workbench of an essence is set on the workbench again carries out micro-displacement and proofread and correct, this many movers structure locating platform system is huge, and response slowly.In the high precision plane Electric Machine Control, the electric rotating machine of comparing drives, and permanent-magnetism linear motor directly drives the advantage that possesses to be had: do not have mechanicalness noise and additional driving error; The additional mass that does not have leading screw etc. can obtain bigger acceleration and response faster; Linear electric motors can not only produce monolateral power, also can produce vertical force, can be used as the two degrees of freedom actuator and use.
Common permanent-magnet linear motor only uses the individual layer primary magnets, provide is big and the fundametal compoment amplitude is little along the magnetic field harmonic component in space, can not produce big electromagnetic force, common permanent-magnet linear motor adopts three-phase control, winding is arranged complicated, the winding overhang effect is big, and radiating condition is poor, influences the runnability of linear electric motors.
The magnetic field of Haier's Bake permanent magnet array (being the Halbach permanent magnet) presents tangible monolateral characteristic, and a side magnetic field significantly strengthens, and opposite side significantly weakens, and strong side magnetic field has good Sine distribution characteristic, and high order harmonic component is little.The linear electric motors of employing Halbach permanent magnet array can improve some shortcomings of common permanent-magnet linear motor.
Summary of the invention
Technical problem:The utility model provides a kind of electromagnetic force fluctuation little, and the control precision height operates steadily, and the winding overhang effect is low, Haier's Bake permanent magnet array linear electric motors of perfect heat-dissipating.
Technical scheme:Haier's Bake permanent magnet array linear electric motors are provided with pedestal, described pedestal is provided with two riser supports that are parallel to each other, be provided with two stators that are parallel to each other between the described two riser supports, be provided with mover in parallel between described two stators, between described mover and the stator air gap is arranged; Described stator comprises substrate and is arranged on the horizontal stand of described substrate both sides, and an end of described horizontal stand is connected with substrate, and the other end is fastened in the holddown groove on the riser support; Described pedestal is provided with Haier's Bake permanent magnet array, and arrange with the horizontal direction parallel on the riser support on described Haier Bake permanent magnet array edge; Mover top substrate in the magnetizing direction of Haier's Bake permanent magnet array put in order for: in its orientation from left to right successively dextrorotation turn 90 degrees, the magnetizing direction of the Haier's Bake permanent magnet array in the substrate of mover below put in order for: in its orientation, be rotated counterclockwise 90 degree from left to right successively; Described mover is provided with time utmost point does not have the iron core winding, and described the utmost point do not have iron core winding two ends and be connected with slide block, and the guide rail sliding fit that is provided with on described slide block and the riser support is connected.
In the utility model, it is two phase windings that described the utmost point do not have the iron core winding.
Permanent-magnetism linear motor of the present utility model adopts double-deck Halbach permanent magnet array to make stator, and in the middle of double-deck Halbach permanent magnet, be provided with secondary no iron core winding, secondary no iron core winding is done mover and is divided into A, the cross arrangement of B two-phase, constitute binary system, when passing to the two-phase alternating current of controlling well for secondary no iron core winding, in air gap, produce delegation's ripple, effect produces an electromagnetic force down between this row ripple and the double-deck Halbach permanent magnet array, steel ball on mover under the electromagnetic force effect begins to move along spherical line slideway, thereby drives no this rectilinear motion of iron core winding.
Beneficial effect:Permanent-magnetism linear motor of the present utility model has the following advantages with respect to prior art:
Permanent-magnetism linear motor of the present utility model adopts the Halbach array structure, can be easy to obtain in the space can weaken the slot effect moment of motor greatly by the magnetic field of comparatively ideal Sine distribution; One side magnetic field of Halbach permanent magnet array is very strong, and opposite side magnetic field is very weak, and the magnetic that this characteristic helps to improve in the motor gas-gap is close; The Halbach permanent magnet array can reduce the electromagnetic torque pulsation of motor, is suitable for high-precision servo system, and can reduces the requirement to motor bearings.Halbach array structure magnetic field harmonic wave is little, and the electromagnetic force fluctuation is little, makes the electromagnetic force of linear electric motors big and steady, control precision height, and the efficient and the bearing capacity of raising linear electric motors; The edge effect of Halbach magnet array is very little, has improved the operating efficiency of motor.
Do not add iron core in the middle of the secondary no iron core winding that the utility model adopts, directly utilize the air magnetic conduction, not only can lower the end effect of winding, and avoid non-linear; Secondary no iron core winding winding mode is a Circular Winding, can reduce the winding overhang effect.
Winding of the present utility model is divided into A, B two-phase, constitutes binary system, and winding is arranged simple, and radiating condition is good, and electric current is controlled easily.
Description of drawings
Fig. 1 is the structural representation of the utility model permanent-magnetism linear motor.
Fig. 2 is the side structure schematic diagram of the utility model permanent-magnetism linear motor.
Fig. 3 is that the magnetizing direction of mover top Halbach permanent magnet in the utility model is arranged
Fig. 4 is that the magnetizing direction of mover below Halbach permanent magnet in the utility model is arranged
Fig. 5 is secondary no iron core developed winding diagram.
Have among the above figure: Halbach permanent magnet 1, secondary no iron core winding 2, riser support 3, substrate 4, pedestal 5, horizontal stand 6, slide block 7, guide rail 9, holddown groove 11, stator 12, mover 13.
Embodiment
Haier's Bake permanent magnet array linear electric motors, it is characterized in that, these linear electric motors are provided with pedestal 5, described pedestal 5 is provided with two riser supports 3 that are parallel to each other, be provided with two stators that are parallel to each other 12 between the described two riser supports, be provided with mover in parallel 13 between described two stators, between described mover 13 and the stator 12 air gap arranged; Described stator 12 comprises substrate 4 and is arranged on the horizontal stand 6 of described substrate 4 both sides, and an end of described horizontal stand 6 is connected with substrate 4, and the other end is fastened in the holddown groove 11 on the riser support 3; Described pedestal 4 is provided with Haier's Bake permanent magnet array 1, and arrange with the horizontal direction parallel on the riser support on described Haier Bake permanent magnet array edge; The magnetizing direction of the Haier's Bake permanent magnet array in the substrate 4 of mover 13 tops put in order for: in its orientation from left to right successively dextrorotation turn 90 degrees, the magnetizing direction of the Haier's Bake permanent magnet array in the substrate 4 of mover 13 belows put in order for: in its orientation, be rotated counterclockwise successively from left to right 90 the degree, left and right directions wherein is that benchmark is determined with the observer towards permanent magnet array section in its orientation; Described mover 13 is provided with time utmost point does not have iron core winding 2, and described the utmost point do not have iron core winding 2 two ends and be connected with slide block 7, and guide rail 9 sliding fits of setting are connected on described slide block 7 and the riser support 3.
The Halbach permanent magnet array presents tangible monolateral characteristic, and a side magnetic field significantly strengthens, and opposite side significantly weakens, and strong side magnetic field has good Sine distribution characteristic, and high order harmonic component is little, makes the simple but high control precision height of precision of control system.Secondary winding adopts two-phase to discharge side by side, and transverse width is greater than permanent magnet, and it is complicated to have avoided in the three-phase system winding to arrange, and the winding overhang effect is big, and radiating condition is poor, influences the runnability problems of linear electric motors.These linear electric motors can suspend when secondary winding is not switched on, and when secondary winding led to two-phase alternating current, linear electric motors can moving linearly.
Claims (2)
1. Haier's Bake permanent magnet array linear electric motors, it is characterized in that, these linear electric motors are provided with pedestal (5), described pedestal (5) is provided with two riser supports (3) that are parallel to each other, be provided with two stators that are parallel to each other (12) between the described two riser supports, be provided with mover in parallel (13) between described two stators, between described mover (13) and the stator (12) air gap arranged;
Described each stator (12) comprises substrate (4) and is arranged on the horizontal stand (6) of described substrate (4) both sides, one end of described horizontal stand (6) is connected with substrate (4), and the other end is fastened in the holddown groove (11) on the riser support (3); Described pedestal (4) is provided with Haier's Bake permanent magnet array (1), and the horizontal direction parallel on described Haier Bake permanent magnet array and the riser support is arranged; The magnetizing direction of the Haier's Bake permanent magnet array in the substrate (4) of mover (13) top put in order for: in its orientation from left to right successively dextrorotation turn 90 degrees, the magnetizing direction of the Haier's Bake permanent magnet array in the substrate (4) of mover (13) below put in order for: in its orientation, be rotated counterclockwise 90 degree from left to right successively;
Described mover (13) is provided with time utmost point does not have iron core winding (2), and described the utmost point do not have iron core winding (2) two ends and be connected with slide block (7), and described slide block (7) is gone up guide rail (9) sliding fit that is provided with riser support (3) and is connected.
2. Haier according to claim 1 Bake permanent magnet array linear electric motors is characterized in that, it is two phase windings that described the utmost point do not have iron core winding (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201905421U CN202085045U (en) | 2011-06-08 | 2011-06-08 | Halbach permanent magnetic array linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201905421U CN202085045U (en) | 2011-06-08 | 2011-06-08 | Halbach permanent magnetic array linear motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202085045U true CN202085045U (en) | 2011-12-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201905421U Expired - Fee Related CN202085045U (en) | 2011-06-08 | 2011-06-08 | Halbach permanent magnetic array linear motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202085045U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103795204A (en) * | 2014-01-23 | 2014-05-14 | 鲁东大学 | Novel magnet-gathering type transverse flux permanent magnet linear motor |
| CN109474160A (en) * | 2018-12-30 | 2019-03-15 | 中国科学院沈阳自动化研究所 | A kind of in-orbit emitter |
-
2011
- 2011-06-08 CN CN2011201905421U patent/CN202085045U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103795204A (en) * | 2014-01-23 | 2014-05-14 | 鲁东大学 | Novel magnet-gathering type transverse flux permanent magnet linear motor |
| CN103795204B (en) * | 2014-01-23 | 2016-02-24 | 鲁东大学 | A kind of magneticfocusing horizontal magnetic pass permanent magnetic line electromotor |
| CN109474160A (en) * | 2018-12-30 | 2019-03-15 | 中国科学院沈阳自动化研究所 | A kind of in-orbit emitter |
| CN109474160B (en) * | 2018-12-30 | 2023-08-22 | 中国科学院沈阳自动化研究所 | On-orbit transmitting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20140608 |