CN202080973U - Device for preparing electronic grade ultrapure water - Google Patents
Device for preparing electronic grade ultrapure water Download PDFInfo
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- CN202080973U CN202080973U CN2011201466570U CN201120146657U CN202080973U CN 202080973 U CN202080973 U CN 202080973U CN 2011201466570 U CN2011201466570 U CN 2011201466570U CN 201120146657 U CN201120146657 U CN 201120146657U CN 202080973 U CN202080973 U CN 202080973U
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Abstract
The utility model discloses a device for preparing electronic grade ultrapure water. The system comprises a raw water tank connected with tap water, and behind the raw water tank, a pretreatment filtration system, an anti-osmosis system, a CDI system and a PLC (Programmable Logic Controller) control system are connected in sequence through pipelines, wherein the PLC control system is electrically connected with the systems and controls the systems. The system of electronic grade ultrapure water adopts a PLC to automatically control water treatment and system cleaning, improves system stability and control accuracy and ensures quality of produced water. When the quality of produced water reaches the standard of electronic grade ultrapure water, the operation is simple, the cost is lower, the operation is stable and the manufacturing cost is only 40% of foreign systems.
Description
Technical field
The utility model relates to electron trade production technique water field, is specifically related to a kind of equipment for preparing the electronic-grade ultrapure water.
Background technology
The production of unicircuit, almost the per pass operation needs ultrapure water to clean, and workpiece directly contacts with water, and the trace of chip in the course of processing stained and obtained cleaning on the one hand, and the trace impurity in the pure water may make the chip recontaminate on the other hand, undoubtedly product is had great influence.Along with the further raising of unicircuit degree, require also more strict to water pollutant.
At present domestic most of used in electronic industry ultrapure water system is provided by offshore company, and can't reach electronic-grade water quality standard by the system that domestic corporation provides, simultaneously, because unclear domestic each regional raw water quality situation of offshore company, so system design is very numerous and diverse, both uneconomical, inconvenient again operation and maintenance is unfavorable for the control of running cost.
The utility model content
At above-mentioned the deficiencies in the prior art, technical problem to be solved in the utility model is to provide a kind of and reach under the condition of electronic-grade ultrapure water standard the equipment of preparation electronic-grade ultrapure water simple to operate, that cost is lower, stable in product water water quality.
In order to solve the problems of the technologies described above, the utility model adopts following technical scheme:
A kind of equipment for preparing the electronic-grade ultrapure water comprises the raw water box that connects tap water, behind the raw water box by pipeline connect successively pretreated filtering system, reverse osmosis system, CDI system and and said system be electrically connected and control the PLC Controlling System of said system;
Described pretreated filtering system comprises more medium filter, activated charcoal filter and the security personnel's strainer that connects successively by pipeline, be provided with the Scale inhibitors medicine-chest between described activated charcoal filter and the security personnel's strainer, this Scale inhibitors medicine-chest outlet is connected with security personnel's strainer water-in by pipeline, and this Scale inhibitors medicine-chest pipeline is provided with volume pump;
Described reverse osmosis system comprises one-level high-pressure pump, first-stage reverse osmosis film group, first-stage reverse osmosis water tank, secondary high-pressure pump, two-pass reverse osmosis film group and the two-pass reverse osmosis water tank that connects successively by pipeline, be provided with the NaOH adding set between described first-stage reverse osmosis water tank and the secondary high-pressure pump, this NaOH adding set outlet is connected with secondary high-pressure pump water-in by pipeline, and the pipeline between described NaOH adding set and the secondary high-pressure pump is provided with volume pump, PH detector;
Described CDI system comprises CDI membrane stack and the CDI water tank that connects successively by pipeline; The CDI water tank is by pipe connection terminal micro-strainer.
With respect to prior art, the utlity model has following advantage:
1, the equipment of this preparation electronic-grade ultrapure water adopts PLC to control water treatment and system's cleaning automatically, has improved the stability of system and the accuracy of control, has guaranteed product water water quality.
2, more medium filter and activated charcoal filter adopt and enterprisingly to go out water flow mode down, and good filtration effect and Maintenance and Repair make things convenient for.
3, adopt the two steps ro film to handle, do not need to add a large amount of chemical agents and acid-alkali regeneration and handle, no chemical waste fluid and spent acid, alkali discharging, the neutralizing treatment process of no spent acid, alkali can not cause environmental pollution.
4, the reverse osmosis water tank is provided with vacuum pressure valves, has guaranteed that pure water is not subjected to outside contamination; The first-stage reverse osmosis water tank is provided with ocean current apolegamy function, makes the automatic ocean current of the unnecessary water yield of water tank, has guaranteed that first-stage reverse osmosis film group does not need frequent starting.
Description of drawings
Fig. 1 is the utility model system construction drawing;
Wherein, 1 is that raw water box 1,2 is a more medium filter, 3 is that activated charcoal filter 3,4 is security personnel's strainer, and 5 is the one-level high-pressure pump, 6 is first-stage reverse osmosis film group, and 7 is the first-stage reverse osmosis water tank, and 8 is the secondary high-pressure pump, 9 is two-pass reverse osmosis film group, and 10 is the CDI membrane stack, and 11 is the CDI water quality monitoring system, 12 is the NaOH adding set, 13 is the pure water transferpump, and 14 is the two-pass reverse osmosis water tank, and 15 is the CDI intake pump, 16 is the ultrapure water transferpump, 17 is the terminal micro-strainer, and 18 is the CDI water tank, and 19 is volume pump, 20 is the Scale inhibitors medicine-chest, 21 is the PH detector, and 22 is water quality testing meter, and 23 is raw water pump.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments
Referring to Fig. 1: 1, raw water box 1 back connects the PLC Controlling System that pretreated filtering system, reverse osmosis system, CDI system and said system are electrically connected and control said system successively by pipeline.
Pretreated filtering system comprises more medium filter 2, activated charcoal filter 3 and the security personnel's strainer 4 that connects successively by pipeline.More medium filter 2 adopts three layers of particle diameter to filter at a slow speed, to guarantee flow rate control at 13m/h, can effectively remove impurity such as iron rust in the water, silt, colloid, algae, and turbidity is dropped to below 5.Activated charcoal filter 3 is used for removing impurity such as water chlorine residue, inferior valency iron, organism, agricultural chemicals, guarantees turbidity is dropped to below 3, satisfies reverse osmosis membrane and goes into water condition.Convenient in order to guarantee system filtration effect and Maintenance and Repair, more medium filter 2 and activated charcoal filter 3 do not adopt the pipe core pattern, go out the current direction mode but adopt under enterprising, for property easy to maintenance, system filtration device tank body is provided with dress spigot discharge, maintenance hand-hole and observation window.The filter core of security personnel's strainer 4 can be held back the particle greater than 5um that former water brings, and enters reverse osmosis system to prevent it; This particle may puncture reverse osmosis membrane assembly after high-pressure pump is quickened, cause the situation of a large amount of leakage salt, scratches the impeller of high-pressure pump simultaneously; The filter element of security personnel in the strainer 4 is replaceable cassette filter core, when security personnel's strainer 4 inlet outlet pressure differentials during greater than the value (being generally 0.07-0.1MPa) set, is convenient for changing; The shell of security personnel's strainer 4 is corrosion resistant stainless steel, and housing design clamping hoop type connects, the change more convenient and quicker.
Between raw water box 1 and more medium filter 2, be provided with raw water pump 23, to guarantee to satisfy hydraulic pressure, the water yield at former water tap water supply pipe network, perhaps has stable the system water supply water yield and hydraulic pressure under the unsettled situation of the water supply pressure water yield, raw water pump 23 can be provided with a cover or two covers, present embodiment is provided with the raw water pump 23 of two cover 12T/H, when more medium filter 2 carries out positive backwash, starts two cover raw water pumps 23 to guarantee positive backwash intensity, reach positive backwash effect rapidly, water saving.
Be provided with Scale inhibitors medicine-chest 20 between activated charcoal filter 3 and the security personnel's strainer 4, these Scale inhibitors medicine-chest 20 outlets are connected with security personnel's strainer 4 water-ins by pipeline, and these Scale inhibitors medicine-chest 20 pipelines are provided with 19, stable interpolation by 19 control Scale inhibitorss, be provided with transmitter in scale inhibition meter medicine-chest, system can report to the police automatically when Scale inhibitors lacked medicine.
Reverse osmosis system comprises one-level high-pressure pump 5, first-stage reverse osmosis film group 6, first-stage reverse osmosis water tank 7, secondary high-pressure pump 8, two-pass reverse osmosis film group 9 and the two-pass reverse osmosis water tank 14 that connects successively by pipeline.High-pressure pump adopts lattice south pump, and one-level high-pressure pump 5 and secondary high-pressure pump 8 are provided with into water low-voltage protective switch and water outlet high voltage protective switch, causes damage to avoid high-pressure pump water inlet negative pressure or water outlet superpressure.The reverse osmosis membrane group is made up of by the mode of series, parallel or series and parallel combination 4-8 platform reverse osmosis unit, and present embodiment first-stage reverse osmosis film group 6 adopts 6 LG-DOW reverse osmosis units, and two-pass reverse osmosis film group adopts 4 LG-DOW reverse osmosis units.The LG-DOW reverse osmosis unit has the high yield water yield, high resistant to pollution advantage, can guarantee also to satisfy the system water water yield when hanging down water temperature, removes most inorganic salt, organism, microorganism and bacterium, and ratio of desalinization is 98.5%.First-stage reverse osmosis water tank 7 is intake as two-pass reverse osmosis simultaneously; Water tank is provided with vacuum pressure valves, guarantees that pure water is not subjected to outside contamination; Water tank is provided with overflow apolegamy function, and system can select one-level film system not shut down operation, and the unnecessary water yield automatic overflow of water tank does not need frequent starting to guarantee pre-treatment and one-level module.
Be provided with NaOH adding set 12 between first-stage reverse osmosis water tank 7 and the secondary high-pressure pump 8, these NaOH adding set 12 outlets are connected with secondary high-pressure pump 8 water-ins by pipeline, and the pipeline between NaOH adding set 12 and the secondary high-pressure pump 8 is provided with volume pump 19, PH detector 21; NaOH adding set 12 is used to add NaOH solution, first-stage reverse osmosis is gone out water ph value regulate, and for guaranteeing medicament energy thorough mixing, adds NaOH solution before 8 water inlets of secondary high-pressure pump.Because it is acid that the first-stage reverse osmosis water outlet shows, bicarbonate radical is instability when PH is low, easily resolves into CO
2Gas exists, and reverse osmosis membrane is 0 to the clearance of gas, if enter back level pure water case, can cause electrical conductivity of water to rise, and corrodibility increases.
The CDI system comprises CDI membrane stack 10 and the CDI water tank 18 that connects successively by pipeline; CDI water tank 18 is by pipe connection terminal micro-strainer 17.CDI membrane stack 10 is selected the American I NPURE CDI of company membrane stack, and is stable and reliable for performance; CDI water tank 18 is selected to adopt economic and practical FRP liner PP material, guarantees that the water tank stripping can not influence water quality.Be provided with CDI intake pump 15 between two-pass reverse osmosis water tank 14 and CDI membrane stack 10, CDI water tank 18 flows to terminal micro-strainer 17 by ultrapure water transferpump 16 with water.Ultrapure water transferpump 16 adopts southern pump, and pump housing material is 316L, and flow Q=5m3/h according to the variation of user's water consumption, adopts converter plant to regulate the invariablenes turning speed of water pump, and supplying not, pressure remains on 0.25Mpa.Terminal micro-strainer 17 adopts microfiltration membrane to filter, and main isolated viral, bacterium, colloid, suspended substance and minuteness particle adopt the 0.22um microfiltration membrane, guarantee.Polishing is set between ultrapure water transferpump 16 and terminal micro-strainer 17 mixes the bench grafting mouth, when the highly purified water quality of needs, can set up the mixed bed of polishing and make electronic-grade polishing purifying producing water.
Be provided with level switch on raw water box 1, be provided with control valve on the tap water inlet channel, automatic water supplement when water level is low stops moisturizing automatically when water level is high, guarantees that raw water pump 23 starts at non-low level.Be respectively equipped with control valve in raw water pump 23 front and back, this control valve adopts U.S. fleck control valve, and positive backwash cycle and time can be set, and positive backwash time and merit position are selected by record and the control automatically of the time controller in the control valve.
Between first-stage reverse osmosis film group 6 and the first-stage reverse osmosis water tank 7, be provided with water quality testing meter 22 between two-pass reverse osmosis film group and the two-pass reverse osmosis water tank 14, to detect effluent quality, the water yield and pressure drop.Between CDI membrane stack 10 and CDI water tank 18, be provided with CDI water quality monitoring system 11.On more medium filter 2, activated charcoal filter 3, Scale inhibitors medicine-chest 20, first-stage reverse osmosis water tank 7, NaOH adding set 12, two-pass reverse osmosis water tank 14 and CDI water tank 18, be respectively equipped with water level sensor.
On first-stage reverse osmosis water tank 7, two-pass reverse osmosis water tank 14 and CDI water tank 18, be respectively equipped with vacuum pressure valves; Between security personnel strainer 4 and the one-level high-pressure pump 5, on the first-stage reverse osmosis film group 6 concentrated water discharge outlet conduits, between first-stage reverse osmosis water tank 7 and the PH detector, on the two-pass reverse osmosis film group concentrated water discharge outlet conduit, on the defective water exhaust outlet of the two-pass reverse osmosis device pipeline, be respectively equipped with magnetic valve between CDI intake pump 15 and the CDI membrane stack 10; The outlet of two-pass reverse osmosis film group concentrated water discharge is connected with raw water box 1 water-in by pipeline.
Security personnel's strainer 4 passes through pipe connection with first-stage reverse osmosis water tank 7, and is provided with controller on its connecting tube; Between raw water pump 23 and the fleck control valve, between more medium filter 2 and the activated charcoal filter 3, between Scale inhibitors medicine-chest 20 and the security personnel's strainer 4, between one-level high-pressure pump 5 and the first-stage reverse osmosis film group 6, on the first-stage reverse osmosis film group 6 concentrated water discharge outlet conduits, between secondary high-pressure pump 8 and the two-pass reverse osmosis film group, on the two-pass reverse osmosis film group concentrated water discharge outlet conduit, be respectively equipped with tensimeter between CDI intake pump 15 and CDI membrane stack 10 and the ultrapure water tank of CDI.
Total system adopts totally-enclosed design, guarantees to avoid bringing into of secondary pollution; Transmission pipeline network adopts import PP-H tubing, guarantees that product water conveying stripping is low as far as possible.Native system is simple to operate, cost of use is cheap, stable, producing water water quality can reach international standards, cost only is 40% of a foreign system.
Claims (6)
1. the equipment for preparing the electronic-grade ultrapure water, it is characterized in that, described equipment comprises the raw water box that connects tap water, behind the raw water box by pipeline connect successively pretreated filtering system, reverse osmosis system, CDI system and and said system be electrically connected and control the PLC Controlling System of said system;
Described pretreated filtering system comprises more medium filter, activated charcoal filter and the security personnel's strainer that connects successively by pipeline, be provided with the Scale inhibitors medicine-chest between described activated charcoal filter and the security personnel's strainer, this Scale inhibitors medicine-chest outlet is connected with security personnel's strainer water-in by pipeline, and this Scale inhibitors medicine-chest pipeline is provided with volume pump;
Described reverse osmosis system comprises one-level high-pressure pump, first-stage reverse osmosis film group, first-stage reverse osmosis water tank, secondary high-pressure pump, two-pass reverse osmosis film group and the two-pass reverse osmosis water tank that connects successively by pipeline, be provided with the NaOH adding set between described first-stage reverse osmosis water tank and the secondary high-pressure pump, this NaOH adding set outlet is connected with secondary high-pressure pump water-in by pipeline, and the pipeline between described NaOH adding set and the secondary high-pressure pump is provided with volume pump, PH detector;
Described CDI system comprises CDI membrane stack and the CDI water tank that connects successively by pipeline; The CDI water tank is by pipe connection terminal micro-strainer.
2. according to the equipment of the described preparation electronic-grade of claim 1 ultrapure water, it is characterized in that described first-stage reverse osmosis film group and two-pass reverse osmosis membrane component are not made up of by the mode of series, parallel or series and parallel combination 4-8 group reverse osmosis unit; Between first-stage reverse osmosis film group and the first-stage reverse osmosis water tank, be provided with water quality testing meter between two-pass reverse osmosis film group and the two-pass reverse osmosis water tank; First-stage reverse osmosis film group and two-pass reverse osmosis membrane component are not provided with the concentrated water discharge outlet, and the outlet of two-pass reverse osmosis film group concentrated water discharge is connected with the raw water box water-in by pipeline; Between CDI membrane stack and CDI water tank, be provided with the CDI water quality monitoring system.
3. according to the equipment of the described preparation electronic-grade of claim 2 ultrapure water, it is characterized in that, be provided with a cover or two cover raw water pumps between described raw water box and the more medium filter, on the two-pass reverse osmosis water tank, be provided with the pure water water transfer pump, between two-pass reverse osmosis water tank and CDI membrane stack, be provided with the CDI intake pump, between CDI water tank and terminal micro-strainer, be provided with the ultrapure water transferpump.
4. according to the equipment of the described preparation electronic-grade of claim 3 ultrapure water, it is characterized in that, be respectively equipped with water level sensor on described more medium filter, activated charcoal filter, Scale inhibitors medicine-chest, first-stage reverse osmosis water tank, NaOH adding set, two-pass reverse osmosis water tank and the CDI water tank; Security personnel's strainer and first-stage reverse osmosis water tank pass through pipe connection, and are provided with control valve on its connecting tube; Between raw water pump and the more medium filter, between more medium filter and the activated charcoal filter, between Scale inhibitors medicine-chest and the security personnel's strainer, between one-level high-pressure pump and the first-stage reverse osmosis film group, on the first-stage reverse osmosis film group concentrated water discharge outlet conduit, between secondary high-pressure pump and the two-pass reverse osmosis film group, on the two-pass reverse osmosis film group concentrated water discharge outlet conduit, be respectively equipped with tensimeter between CDI intake pump and CDI membrane stack and the ultrapure water tank of CDI.
5. according to the equipment of the described preparation electronic-grade of claim 4 ultrapure water, it is characterized in that, be respectively equipped with vacuum pressure valves on described first-stage reverse osmosis water tank, two-pass reverse osmosis water tank and the CDI water tank; Between security personnel strainer and the one-level high-pressure pump, on the first-stage reverse osmosis film group concentrated water discharge outlet conduit, between first-stage reverse osmosis water tank and the PH detector, on the two-pass reverse osmosis film group concentrated water discharge outlet conduit, on the defective water exhaust outlet of the two-pass reverse osmosis device pipeline, be respectively equipped with magnetic valve between CDI intake pump and the CDI membrane stack.
6. according to the equipment of each described preparation electronic-grade ultrapure water among the claim 1-5, it is characterized in that, described raw water pump, more medium filter, activated charcoal filter, security personnel's strainer, tensimeter, magnetic valve, water level sensor, one-level high-pressure pump, secondary high-pressure pump, water quality testing meter, PH detector, volume pump, pure water transferpump, CDI intake pump, ultrapure water transferpump are electrically connected with the PLC Controlling System respectively, and control its action by the PLC Controlling System.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201466570U CN202080973U (en) | 2011-05-10 | 2011-05-10 | Device for preparing electronic grade ultrapure water |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011201466570U CN202080973U (en) | 2011-05-10 | 2011-05-10 | Device for preparing electronic grade ultrapure water |
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| CN202080973U true CN202080973U (en) | 2011-12-21 |
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| CN2011201466570U Expired - Fee Related CN202080973U (en) | 2011-05-10 | 2011-05-10 | Device for preparing electronic grade ultrapure water |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105668723A (en) * | 2016-03-10 | 2016-06-15 | 宁夏大学 | Capacitor deionization device, system and method |
| CN106517609A (en) * | 2016-12-21 | 2017-03-22 | 成都乾威科技有限公司 | Production device for ultrapure water |
| CN106746049A (en) * | 2016-12-21 | 2017-05-31 | 成都乾威科技有限公司 | A kind of ultrapure water production system and its production method |
| CN107445259A (en) * | 2017-09-20 | 2017-12-08 | 江苏科技大学 | A kind of small-sized household capacitive deionization water purifier |
| CN112079495A (en) * | 2020-08-31 | 2020-12-15 | 华北电力科学研究院有限责任公司 | Automatic control system and method for combining reverse osmosis equipment and EDI device |
-
2011
- 2011-05-10 CN CN2011201466570U patent/CN202080973U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105668723A (en) * | 2016-03-10 | 2016-06-15 | 宁夏大学 | Capacitor deionization device, system and method |
| CN105668723B (en) * | 2016-03-10 | 2019-03-05 | 宁夏大学 | Capacitor deionizing instrument, system and capacitive deionization method |
| CN106517609A (en) * | 2016-12-21 | 2017-03-22 | 成都乾威科技有限公司 | Production device for ultrapure water |
| CN106746049A (en) * | 2016-12-21 | 2017-05-31 | 成都乾威科技有限公司 | A kind of ultrapure water production system and its production method |
| CN107445259A (en) * | 2017-09-20 | 2017-12-08 | 江苏科技大学 | A kind of small-sized household capacitive deionization water purifier |
| CN112079495A (en) * | 2020-08-31 | 2020-12-15 | 华北电力科学研究院有限责任公司 | Automatic control system and method for combining reverse osmosis equipment and EDI device |
| CN112079495B (en) * | 2020-08-31 | 2023-01-06 | 华北电力科学研究院有限责任公司 | Automatic control system and method for combining reverse osmosis equipment and EDI device |
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Granted publication date: 20111221 Termination date: 20150510 |
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