CN202070189U - Gas trap in vacuum chamber of film plating machine - Google Patents
Gas trap in vacuum chamber of film plating machine Download PDFInfo
- Publication number
- CN202070189U CN202070189U CN2011201485514U CN201120148551U CN202070189U CN 202070189 U CN202070189 U CN 202070189U CN 2011201485514 U CN2011201485514 U CN 2011201485514U CN 201120148551 U CN201120148551 U CN 201120148551U CN 202070189 U CN202070189 U CN 202070189U
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- China
- Prior art keywords
- vacuum chamber
- gas trap
- baffle plate
- coating machine
- vacuum
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The utility model discloses a gas trap in a vacuum chamber of a film plating machine, which comprises a refrigerating tube, a frame and a plurality of baffle plates. The frame is vertically fixed at the position of a vacuum chamber extract opening between the vacuum chamber and a vacuum pump, the refrigerating tube comprises straight tube sections and bent tube sections which are arranged at intervals, and a baffle plate is obliquely fixed on each straight tube section. Due to the technical scheme, oil gas molecules and water molecules are sufficiently adsorbed on the surfaces of the baffle plates via ultra-low-temperature temperature difference convection principle and sufficient light seal, and the quality and the adhesion force of a gold film of a workpiece are increased. Pumping speed and vacuum degree are greatly increased, production time is shortened due to increase of the pumping speed, and electricity consumption is reduced.
Description
Technical field
The utility model relates to the gas trap in a kind of vacuum coating equipment vacuum chamber.
Background technology
The primary structure of the oil diffusion pump of vacuum coating equipment is made up of pump case, pump core, silicone oil, electric furnace.Its principle is to utilize electric furnace to be heated to 270 ℃ in the bottom of pump to make the silicone oil boiling, produces oil vapour and upwards injection.Form injection oil film at a high speed through one, two, three nozzle ejection.Utilize aerodynamic principle that air molecule is adsorbed on the oil film surface and extracted out by oil-sealed rotary pump after three grades of compressions this moment.
In the whole pumping process of vacuum coating equipment vacuum chamber, can produce the volatilization of oil gas molecule inevitably, if to the residual gas of pernicious gas and ultramicron can not be very seizure, the residual gas of pernicious gas and ultramicron evaporates into the surface of the work in the vacuum chamber, will directly influence the quality and the adhesive force of plated film.
Original gas trap is after adopting the some circles of copper pipe coiling, be positioned over vacuum chamber below, and be not placed on the centre of bleeding point.The oil gas molecule that will have influence on like this in the oil diffusion pump can directly be dissipated into the surface of workpiece, thereby has influence on the firmness of full film.
The utility model content
Technical problem to be solved in the utility model provides gas trap in a kind of coating machine vacuum chamber, efficiently adsorbs the interior vapour molecule of vacuum chamber to improve pumping speed and vacuum.
For solving the problems of the technologies described above, the utility model adopts following technical scheme: gas trap in the coating machine vacuum chamber, comprise refrigerator pipes, framework and some baffle plates, described frame vertical straight is fixed in the vacuum chamber bleeding point position between vacuum chamber and the vavuum pump, described refrigerator pipes comprises straight length and the bend loss that is provided with at interval, and the straight-run of pipe section tilts and is fixed with a baffle plate.
As preferably, the floor projection of adjacent screen has an overlay region, to realize the light sealing.
As preferably, the middle part of described baffle plate is welded on the described straight length, so that obtain low temperature quickly.
As preferably, described baffle plate tilts towards described vavuum pump.
The utility model utilizes the temperature difference convective principles of ultralow temperature and light sealing fully that oil gas molecule, hydrone fully are adsorbed on baffle surface, thereby the golden film quality and the adhesive force of workpiece is improved owing to adopted technique scheme.Increase substantially pumping speed and vacuum, thereby, reduced power consumption because the production time has been shortened in the raising of pumping speed.
Description of drawings
Fig. 1 is the front view of gas trap in the utility model coating machine vacuum chamber
Fig. 2 is the side view of gas trap in the utility model coating machine vacuum chamber
Fig. 3 is the structural representation that has the vacuum coating equipment of this device
The specific embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present utility model is further described.
Illustrated in figures 1 and 2 is gas trap in the utility model coating machine vacuum chamber, comprise refrigerator pipes 1, framework 3 and some baffle plates 2, as shown in Figure 3, described framework 3 vertically is fixed in the vacuum chamber bleeding point position between vacuum chamber 4 and the vavuum pump 5, described refrigerator pipes 1 comprises straight length 11 and the bend loss 12 that is provided with at interval, and straight-run of pipe section 11 tilts and is fixed with a baffle plate 2.The floor projection of adjacent screen 2 has an overlay region 21.The middle part of described baffle plate 2 is welded on the described straight length 11.Described baffle plate 2 tilts towards described vavuum pump 5.
As shown in Figure 3, during use, the air molecule in the vacuum chamber 4 is extracted out by vavuum pump 5 after three grades of compressions of oil diffusion pump 6.In vacuum chamber 4, be provided with in the utility model coating machine vacuum chamber behind the gas trap, in the refrigerator pipes 1 of this gas trap, pass to-120 ℃ refrigerant, the baffle plate 2 that is welded on the refrigerator pipes 1 is also reduced to relevant temperature, utilize the temperature difference convective principles of ultralow temperature and light sealing fully that oil gas molecule, hydrone fully are adsorbed on baffle surface, thereby guarantee in the vacuum coating process coating quality of workpiece on the umbrella stand 7.
Gas trap makes the ultralow temperature evaporimeter of multi-turn coiling into the gas trap of shutter form in the utility model coating machine vacuum chamber, and it is positioned in the main bleeding point of vacuum chamber, reduced the pernicious gas amount significantly, increased substantially pumping speed and vacuum, only 30 minutes vacuum can reach 2.0x10 under the cold-draw state
-4Mbar.
Claims (4)
1. gas trap in the coating machine vacuum chamber, it is characterized in that: comprise refrigerator pipes (1), framework (3) and some baffle plates (2), described framework (3) vertically is fixed in the vacuum chamber bleeding point position between vacuum chamber (4) and the vavuum pump (5), described refrigerator pipes (1) comprises straight length (11) and the bend loss (12) that is provided with at interval, and straight-run of pipe section (11) tilts and is fixed with a baffle plate (2).
2. according to gas trap in the described coating machine vacuum chamber of claim 1, it is characterized in that: the floor projection of adjacent screen (2) has an overlay region (21).
3. according to gas trap in the described coating machine vacuum chamber of claim 1, it is characterized in that: the middle part of described baffle plate (2) is welded on the described straight length (11).
4. according to gas trap in the described coating machine vacuum chamber of claim 1, it is characterized in that: described baffle plate (2) tilts towards described vavuum pump (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201485514U CN202070189U (en) | 2011-05-11 | 2011-05-11 | Gas trap in vacuum chamber of film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201485514U CN202070189U (en) | 2011-05-11 | 2011-05-11 | Gas trap in vacuum chamber of film plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202070189U true CN202070189U (en) | 2011-12-14 |
Family
ID=45108305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201485514U Expired - Fee Related CN202070189U (en) | 2011-05-11 | 2011-05-11 | Gas trap in vacuum chamber of film plating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202070189U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526038A (en) * | 2016-11-03 | 2017-03-22 | 内蒙古包钢钢联股份有限公司 | Complete set of device for detecting and sampling components of raw coke-oven gas |
| CN108579310A (en) * | 2018-07-09 | 2018-09-28 | 宁波恒普真空技术有限公司 | A kind of binder wet trap and its system |
| CN110402301A (en) * | 2016-11-10 | 2019-11-01 | 康宁公司 | Particle during sputter deposits is reduced |
-
2011
- 2011-05-11 CN CN2011201485514U patent/CN202070189U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526038A (en) * | 2016-11-03 | 2017-03-22 | 内蒙古包钢钢联股份有限公司 | Complete set of device for detecting and sampling components of raw coke-oven gas |
| CN106526038B (en) * | 2016-11-03 | 2023-08-25 | 内蒙古包钢钢联股份有限公司 | Complete device for sampling raw gas component detection sample |
| CN110402301A (en) * | 2016-11-10 | 2019-11-01 | 康宁公司 | Particle during sputter deposits is reduced |
| US11053583B2 (en) | 2016-11-10 | 2021-07-06 | Corning Incorporated | Particle reduction during sputtering deposition |
| CN108579310A (en) * | 2018-07-09 | 2018-09-28 | 宁波恒普真空技术有限公司 | A kind of binder wet trap and its system |
| CN108579310B (en) * | 2018-07-09 | 2023-12-19 | 宁波恒普技术股份有限公司 | Adhesive wet-type catcher and system thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111214 Termination date: 20140511 |