CN202057829U - Array waveguide grating insensitive to temperature and polarization - Google Patents

Array waveguide grating insensitive to temperature and polarization Download PDF

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CN202057829U
CN202057829U CN2011200427757U CN201120042775U CN202057829U CN 202057829 U CN202057829 U CN 202057829U CN 2011200427757 U CN2011200427757 U CN 2011200427757U CN 201120042775 U CN201120042775 U CN 201120042775U CN 202057829 U CN202057829 U CN 202057829U
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array
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temperature
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郎婷婷
何建军
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China Jiliang University
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Abstract

The utility model discloses an array waveguide grating insensitive to temperature and polarization. Compared with the traditional array waveguide grating, the array waveguide grating is characterized in that the total optical path difference of the arrayed waveguide grating is composed of the optical path difference in an array waveguide area and the optical path difference of at least one area of an input planar waveguide area and an output planar waveguide area, and at least one arbitrary area of the three waveguide areas is divided into at least two temperature compensation areas with different thermo-optical coefficients; the geometric shape of the three waveguide areas and at least two temperature compensation areas and the optical path difference of the corresponding adjacent array waveguide determined by the geometric shape are codetermined by a relation that two total optical paths with different polarization states passed by optical propagation are equal and a relation that the total optical paths before and after the set temperature change passed by optical propagation are equal; and the requirement that the channel wavelength of the array waveguide grating is insensitive to the temperature and the polarization is met. The array waveguide grating insensitive to the temperature and the polarization solves the problem that the device performance becomes poor due to the traditional technology and the like and is suitable for array waveguide gratings of various waveguide materials and waveguide structures.

Description

The equal insensitive array wave-guide grating of a kind of temperature and polarization
Technical field
The utility model relates to a kind of array waveguide grating, relates in particular to the equal insensitive array wave-guide grating of a kind of temperature and polarization.
Background technology
The wavelength-division multiplex function can realize with a lot of modes in the optical communication technique field, comprises toroidal resonator (Ring resonator), etched diffraction grating (EDG) etc.But consider the reflection,many long channel and with the silicon base CMOS processing compatibility, (arrayed waveguide grating AWG) is still one of optimal selection to array waveguide grating.Numerous advantages such as AWG has compact conformation, it is integrated to be easy to, function admirable and reliability height.
Polarization sensitivity and temperature sensitivity are problems quite crucial during AWG uses.Since after the ordinary optic fibre transmission, flashlight polarization state generation random variation, the minor shifts of transmission wavelength all can cause appreciable impact to system, and the deterioration transmission signals increases the optical communication system bit error rate.Yet, because the transmission difference of transverse electric (TE), horizontal magnetic (TM) mould in the waveguide causes that the light of TE mould and TM mould is offset in the picture point of imaging surface, thereby the spectral response of passage is drifted about that this is so-called polarization sensitivity.Therefore for the optical device on the fibre circuit, polarized non-sensitive is extremely important.On the other hand, owing to the optical waveguide material refractive index along with temperature variation changes (this is a thermo-optic effect), the centre wavelength of AWG also can cause adverse effect to optical communication system along with temperature variation.Generally require in the practical application in 80 ℃ of range of temperature, the wavelength change amount can think that less than 10% of channel width AWG is insensitive to temperature variation., just need development temperature-insensitive technology in order to prevent that thereby centre wavelength from temperature drift taking place and increasing the bit error rate.
At present, the polarization dispersion compensation technique of the AWG that has reported both at home and abroad mainly contains: half-wave plate method, free of birefringence waveguide method, order of diffraction matching method and polarization beam splitting (polarization diversity) technology etc.National inventing patent (ZL 03118878.8) " folded waveguide grating array of polarization irrelevant " is by settle Faraday rotator before the catoptron of folded waveguide grating array, make original TE(transverse electric mode) become the TM(transverse magnetic wave), original TE becomes TM, thereby realizes polarization irrelevant.National inventing patent (application number 200810059046.5) " a kind of polarization insensitive array wave-guide grating " is by the polarization beam apparatus in the input planar waveguide with two polarization modes separately, through two groups of parameters Waveguide array independently, by the polarization beam combiner in the output planar waveguide two polarization modes are merged at last respectively.National inventing patent (application number 200810059045.0) " polarization insensitive array wave-guide grating " is that the end in each strip array waveguide connects polarization beam apparatus and catoptron successively, and the connection waveguide that realizes the polarization dispersion compensation is arranged between polarization beam apparatus and the catoptron.
For the influence that the centre wavelength that makes AWG is not changed by ambient temperature, the simplest method is to add radiator valve, but radiator valve is expensive mostly burdensome, and power consumption is bigger, does not also meet the passive requirement of EPON.Therefore better method is to adopt the temperature-insensitive design.Have at present the temperature-insensitive design of report can be divided into two big classes both at home and abroad: a kind of is the hot optical characteristics of utilizing material, and another is the thermo-mechanical property that utilizes material.
Adopt optical mode, can or insert the structure that special material changes waveguide by the insensitive optical waveguide of design temperature.People such as Keil (Neil, Et alAthermal all-polymer arrayed-waveguide grating multiplexer, Electron. Lett., 37 (9): 579-580,2001.) suitably adjust the thermal expansivity of polymeric substrates and to the dependence of temperature and polarization, make the optical waveguide temperature-insensitive, the temperature drift of the AWG that is made in 25-65 ℃ of scope is less than ± 0.05nm.People such as Zhu Daqing (Zhu Daqing, Xu Zhene, a kind of research of temperature insensitive arrayed waveguide grating, the optics journal, 24 (7): 907-911,2004.) top covering with array waveguide grating changes polymeric material into, and the wavelength of the AWG of making significantly reduces with the coefficient of deviation of temperature.At document A. Kaneko, Et alAthermal silica-based arrayed-waveguide grating (AWG) multi/demultiplexers with new low loss groove design. Electon. Lett., 36:318-319,2000. in the method mentioned be in AWG Waveguide array zone cutting based on earth silicon material, fill silicones then with negative thermo-optical coeffecient.
Adopting mechanical system, is an end that the AWG input side is fixed on the mechanical arm of being made by metal or alloy.The input that the thermal expansion of mechanical arm can make AWG is moved along the edge of planar optical waveguide chip.Exemplary is exactly Ignis Photonyx hot insensitive AWG(M. Boulanger design, that have mobile input optical fibre, AWG passive thermal compensation techniques for WDM-PON, 2008, http://www.lightwaveonline.com).
Clearly, the compensation method of the polarization dispersion of above AWG and temperature chromatic dispersion mostly needs to increase additional devices, or increases additional technical steps, the element manufacturing complexity, and reliability is low, cost is high.In addition, up to now, the Shang Weiyou report does not increase additional devices and can realize all insensitive AWG of temperature and polarization simultaneously.
Summary of the invention
At the deficiencies in the prior art, the purpose of this utility model is to provide a kind of temperature and the equal insensitive array wave-guide grating of polarization, solved the device performance variation that traditional array waveguide optical grating polarization dispersion and temperature dispersion compensation method cause, complex structure and other problems.
The purpose of this utility model is achieved through the following technical solutions:
The utility model comprises at least one input waveguide, input waveguide zone, Waveguide array district, output waveguide zone and at least one output waveguide, light when input waveguide is transmitted to output waveguide by input waveguide zone, Waveguide array district and output waveguide zone successively through the pairing total optical path difference of adjacent two waveguides the Waveguide array district by the optical path difference in the Waveguide array district and in input waveguide zone and output waveguide zone the optical path difference at least one district form jointly; It is characterized in that: at least a portion of input waveguide zone and output waveguide zone has different birefringences with at least a portion in Waveguide array district, imports waveguide zone, Waveguide array district and export in the waveguide zone at least that any one district is divided at least two temperature compensation zones with different thermo-optical coeffecients; The Waveguide array district, in the geometric configuration of input waveguide zone, output waveguide zone and described at least two deblocking temperature compensatory zones and the corresponding Waveguide array district optical path difference of light path in these geometric configuratioies of adjacent array waveguide be according to the light of two different polarization states propagate the total optical path of process equate and the light of design temperature before and after changing propagate the relational expression that equates of the total optical path of process determine jointly, thereby the channel wavelength that reaches array waveguide grating is to temperature and all insensitive requirement of polarization.
Described input waveguide zone with output waveguide zone at least any one district be divided at least two temperature compensation zones with different thermo-optical coeffecients; The optical path difference of two deblocking temperature compensatory zones is respectively
Figure DEST_PATH_IMAGE002
With
Figure DEST_PATH_IMAGE004
, wherein
Figure DEST_PATH_IMAGE006
With
Figure DEST_PATH_IMAGE008
Be the effective refractive index of two deblocking temperature compensatory zones, With
Figure DEST_PATH_IMAGE012
The length difference of light path in two deblocking temperature compensatory zones for adjacent array waveguide in the corresponding Waveguide array district; The length difference of adjacent array waveguide in the Waveguide array district
Figure DEST_PATH_IMAGE014
,
Figure 465355DEST_PATH_IMAGE010
,
Figure DEST_PATH_IMAGE016
The three satisfies simultaneously
Figure DEST_PATH_IMAGE018
With
Figure DEST_PATH_IMAGE020
, constant in the formula Value be 1,2, represent in the input waveguide zone respectively or output is cut apart in the waveguide zone and all cut apart in input waveguide zone and output waveguide zone;
Figure DEST_PATH_IMAGE024
Be the effective refractive index in Waveguide array district,
Figure DEST_PATH_IMAGE026
With The effective refractive index that is the transverse electric mode TE of two deblocking temperature compensatory zones and transverse magnetic wave TM is poor, promptly
Figure DEST_PATH_IMAGE030
,
Figure DEST_PATH_IMAGE032
For the effective refractive index of the transverse electric mode TE in Waveguide array district and transverse magnetic wave TM poor, promptly
Figure DEST_PATH_IMAGE036
Figure DEST_PATH_IMAGE038
With Change the effective refractive index difference of front and back two deblocking temperature compensatory zones for design temperature;
Figure DEST_PATH_IMAGE042
Change the effective refractive index difference in Waveguide array district, front and back for design temperature.
Described Waveguide array district is divided at least two temperature compensation zones with different thermo-optical coeffecients; The length difference in the light path of adjacent array waveguide at least one district in input waveguide zone and output waveguide zone in the corresponding Waveguide array district
Figure DEST_PATH_IMAGE044
, at the length difference of two deblocking temperature compensatory zones
Figure 214437DEST_PATH_IMAGE010
,
Figure 504604DEST_PATH_IMAGE016
The three satisfies simultaneously With , constant in the formula
Figure 260202DEST_PATH_IMAGE022
Value be 1,2, represent respectively in input waveguide zone or output waveguide zone and introduce length difference and in input waveguide zone and output waveguide zone, all introduce length difference;
Figure DEST_PATH_IMAGE050
For the effective refractive index of the transverse electric mode TE of planar waveguide and transverse magnetic wave TM poor, promptly
Figure DEST_PATH_IMAGE052
Figure DEST_PATH_IMAGE054
Change the effective refractive index difference of front and back planar waveguide for design temperature.
The angle of the optical axis of the tangent line of the boundary center of curve at least one district and Waveguide array district and this waveguide zone is greater than the angle of 0o less than the non-90o of 180o in described input waveguide zone and the output waveguide zone, and described angle is according to the optical path difference requirement of this waveguide zone
Figure DEST_PATH_IMAGE056
Decision.
The effective refractive index of described two deblocking temperature compensatory zones has different thermo-optical coeffecients.
It is to realize by the waveguide top covering material that use has different thermo-optical coeffecients that the effective refractive index of described two deblocking temperature compensatory zones has different thermo-optical coeffecients.
The beneficial effect that the utlity model has is:
1. a kind of temperature disclosed in the utility model and the equal insensitive array wave-guide grating of polarization can full remuneration because ambient temperature changes and the channel wavelength skew of the array waveguide grating that the flashlight polarization state causes, when not increasing additional devices and change AWG essential part, reach temperature and all insensitive purpose of polarization.
2. a kind of temperature disclosed in the utility model and the equal insensitive array wave-guide grating of polarization and traditional array waveguide optical grating manufacture craft are compatible fully, do not need to add additional element, and principle of work is simple, does not influence the original performance of traditional array waveguide optical grating.
3. a kind of temperature disclosed in the utility model and the equal insensitive array wave-guide grating of polarization can be applicable to the array grating device of different materials, different waveguide structure, and have and make simple, low cost and other advantages.
Description of drawings
Fig. 1 is the structural representation of first kind of embodiment of a kind of temperature of the present utility model and the equal insensitive array wave-guide grating of polarization, and the input waveguide zone all is divided into two temperature compensation zones with different thermo-optical coeffecients with the output waveguide zone.
Fig. 2 is the enlarged drawing of input waveguide zone among Fig. 1.
Fig. 3 is near the waveguide tomograph in separatrix of two deblocking temperature compensatory zones among Fig. 1, the waveguide top covering material difference of two deblocking temperature compensatory zones.
Fig. 4 is the structural representation of second kind of embodiment of a kind of temperature of the present utility model and the equal insensitive array wave-guide grating of polarization, and the Waveguide array district is split into two temperature compensation zones with different thermo-optical coeffecients.
Among the figure: 1, input waveguide, 2, the input waveguide zone, 3, the Waveguide array district, 4, output waveguide zone, 5, output waveguide, 6 and 7, the input waveguide zone cut apart the two deblocking temperature compensatory zones that the back forms, 8, the Rowland circle at the terminal place of input waveguide, diameter is R; 9, the grating circle at the terminal place of Waveguide array, radius is R; 10, the optical axis of input waveguide zone, 11, the tangent line of the boundary center of curve in input waveguide zone and Waveguide array district, 12, the optical axis of output waveguide zone, 13, the tangent line of the boundary center of curve in output waveguide zone and Waveguide array district, 14 and 15, the output waveguide zone is cut apart the two deblocking temperature compensatory zones that the back forms, and 16, the waveguide top covering, 17, waveguide core layer, 18, waveguide under-clad layer, 19 and 20, the Waveguide array district cut apart the two deblocking temperature compensatory zones that the back forms.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
As Fig. 1, shown in Figure 4, light of the present utility model when input waveguide 1 is transmitted to output waveguide 5 by input waveguide zone 2, Waveguide array district 3 and output waveguide zone 4 successively through the pairing total optical path difference of adjacent two waveguides the Waveguide array district 3 by the optical path difference in Waveguide array district 3
Figure DEST_PATH_IMAGE058
With at least one optical path difference in input waveguide zone 2 and output waveguide zone 4
Figure DEST_PATH_IMAGE060
The common composition, wherein
Figure DEST_PATH_IMAGE062
Be the effective refractive index of this waveguide zone, Be the length difference of the light path of corresponding adjacent array waveguide in this waveguide zone; At least a portion of input waveguide zone 2 and output waveguide zone 4 has different birefringences with at least a portion in Waveguide array district 3, Waveguide array district 3, imports waveguide zone 2 and export in the waveguide zone 4 at least that any one district is divided at least two temperature compensation zones with different thermo-optical coeffecients; Waveguide array district 3, in the geometric configuration of input waveguide zone 2, output waveguide zone 4 and at least two deblocking temperature compensatory zones and the corresponding Waveguide array district 3 optical path difference of light path in these geometric configuratioies of adjacent array waveguide be according to the light of two different polarization states propagate the total optical path of process equate and the light of design temperature before and after changing propagate the total optical path of process equate and common decision, thereby the channel wavelength that reaches array waveguide grating is to temperature and all insensitive requirement of polarization.
As shown in Figure 1, according to first kind of embodiment of the present utility model: input waveguide zone 2 is divided into two deblocking temperature compensatory zones 6 and 7, output waveguide zone 4 is divided into two deblocking temperature compensatory zones 14 and 15, and the central channel wavelength diffraction equation of array waveguide grating is
Figure DEST_PATH_IMAGE064
(equation 1), wherein constant
Figure 560831DEST_PATH_IMAGE022
Value be 1,2, represent in input waveguide zone 2 respectively or output waveguide zone 4 is cut apart and all cut apart in input waveguide zone 2 and output waveguide zone 4,
Figure DEST_PATH_IMAGE066
Be the order of diffraction time,
Figure DEST_PATH_IMAGE068
Be the central channel wavelength of array waveguide grating, the optical path difference of two deblocking temperature compensatory zones is respectively
Figure 843520DEST_PATH_IMAGE002
With , wherein
Figure 6834DEST_PATH_IMAGE006
Be the effective refractive index in temperature compensation zone 6 and 14,
Figure 168825DEST_PATH_IMAGE010
Be the length difference of light path in temperature compensation zone 6 and 14 of adjacent array waveguide in the corresponding Waveguide array district 3, Be the effective refractive index in temperature compensation zone 7 and 15,
Figure 140772DEST_PATH_IMAGE012
The length difference of light path in temperature compensation zone 7 and 15 for adjacent array waveguide in the corresponding Waveguide array district 3.
Equation below the spectral response peak value of corresponding TE mould and TM mould satisfies respectively:
Figure DEST_PATH_IMAGE070
The polarization insensitive condition of array waveguide grating:
Figure DEST_PATH_IMAGE072
, just become
(equation 2)
Wherein,
Figure 318679DEST_PATH_IMAGE026
For the effective refractive index of the transverse electric mode TE in temperature compensation zone 6 and 14 and transverse magnetic wave TM poor, promptly
Figure DEST_PATH_IMAGE075
For the effective refractive index of the transverse electric mode TE in temperature compensation zone 7 and 15 and transverse magnetic wave TM poor, promptly
Figure DEST_PATH_IMAGE080
For the effective refractive index of the transverse electric mode TE in Waveguide array district 3 and transverse magnetic wave TM poor, promptly
Figure DEST_PATH_IMAGE081
Because the thermo-optic effect of material, the effective refractive index of Waveguide array and planar waveguide can change along with variation of temperature.Effective refractive index changes and can be write as , wherein
Figure DEST_PATH_IMAGE085
Be the thermo-optical coeffecient of this waveguide,
Figure DEST_PATH_IMAGE087
Be temperature variation.Equation below spectral response peak value before and after therefore corresponding design temperature changes satisfies:
Figure DEST_PATH_IMAGE089
The temperature-insensitive condition of array waveguide grating:
Figure DEST_PATH_IMAGE091
, just become
Figure DEST_PATH_IMAGE093
(equation 3)
Wherein, For the design temperature in temperature compensation zone 6 and 14 effective refractive index before and after changing poor, promptly
Figure DEST_PATH_IMAGE096
Figure DEST_PATH_IMAGE097
For the design temperature in temperature compensation zone 7 and 15 effective refractive index before and after changing poor, promptly
Figure DEST_PATH_IMAGE100
For the design temperature in Waveguide array district 3 effective refractive index before and after changing poor, promptly
Figure DEST_PATH_IMAGE102
Just can be according to equation 1,2 and 3 in the hope of the length difference in corresponding Waveguide array district 3 and temperature compensation zone 6,7,14,15
Figure DEST_PATH_IMAGE104
,
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With
Figure DEST_PATH_IMAGE105
, require to have determined the geometric configuration that each is regional according to length difference.For 6,7 introducing length differences in the temperature compensation zone, with input waveguide zone 2 is example, the diameter of the Rowland circle 8 at the terminal place of input waveguide is R, the radius of the grating circle 9 at the terminal place of Waveguide array is R, and Rowland circle 8 and grating circle 9 are 3 tangent with the central point of input waveguide zone 2 boundary curves in the Waveguide array district.The tangent line 11 of the boundary center of curve in input waveguide zone 2 and Waveguide array district 3 is greater than the angle of 0o less than the non-90o of 180o with optical axis 10 angles of input waveguide zone 2 θWith output waveguide zone 4 is example, and the tangent line 13 of the boundary center of curve in output waveguide zone 4 and Waveguide array district 3 is greater than the angle of 0o less than the non-90o of 180o with optical axis 12 angles of output waveguide zone 4 θAs shown in Figure 2, provide the enlarged drawing of input waveguide zone 2 among Fig. 1, the dotted line among the figure is the light path of adjacent array waveguide in the corresponding Waveguide array district 3, and the length difference of two dotted lines is
Figure DEST_PATH_IMAGE106
, two dotted lines corresponding length difference of difference in two deblocking temperature compensatory zones 6 and 7 With
Figure 596229DEST_PATH_IMAGE105
The establishment of equation 3 requires the thermo-optical coeffecient difference of the effective refractive index of two deblocking temperature compensatory zones 6,7, a kind of embodiment, as shown in Figure 3.Fig. 3 provides near the waveguide tomograph the separatrix of two deblocking temperature compensatory zones 6 among Fig. 1 and 7,18 are the waveguide under-clad layer, 17 is waveguide core layer, the boundary of two deblocking temperature compensatory zones is that waveguide top covering 16 materials have different thermo-optical coeffecients, and the waveguide top covering in temperature compensation zone 7 is an air in the legend.Because the thermo-optical coeffecient difference of waveguide top covering, therefore the thermo-optical coeffecient difference of the effective refractive index of two deblocking temperature compensatory zones 6,7.
As shown in Figure 4, provide the structural representation of second kind of embodiment of the present utility model.Different with first kind of embodiment is that Waveguide array district 3 is split into two temperature compensations zones 19 and 20 with different thermo-optical coeffecients.
According to second kind of embodiment of the present utility model: the central channel wavelength diffraction equation of array waveguide grating is
Figure DEST_PATH_IMAGE108
(equation 1), wherein constant
Figure 181538DEST_PATH_IMAGE022
Value be 1,2, represent respectively in input waveguide zone 2 or output waveguide zone 4 and introduce length differences
Figure 685332DEST_PATH_IMAGE106
With all produce length difference in input waveguide zone 2 and output waveguide zone 4
Figure 173951DEST_PATH_IMAGE106
,
Figure 472208DEST_PATH_IMAGE066
Be the order of diffraction time,
Figure 547743DEST_PATH_IMAGE068
Be the central channel wavelength.
The polarization insensitive condition of array waveguide grating:
Figure 855227DEST_PATH_IMAGE072
, just become
Figure DEST_PATH_IMAGE110
(equation 2)
Wherein,
Figure 870457DEST_PATH_IMAGE026
For the effective refractive index of the transverse electric mode TE in temperature compensation zone 19 and transverse magnetic wave TM poor, promptly
Figure 347138DEST_PATH_IMAGE075
Figure 893657DEST_PATH_IMAGE076
For the effective refractive index of the transverse electric mode TE in temperature compensation zone 20 and transverse magnetic wave TM poor, promptly
Figure 254100DEST_PATH_IMAGE078
Figure DEST_PATH_IMAGE111
Poor for the effective refractive index of the transverse electric mode TE of I/O waveguide zone and transverse magnetic wave TM, promptly the effective refractive index of planar waveguide is poor
Figure DEST_PATH_IMAGE113
The temperature-insensitive condition of array waveguide grating:
Figure 890880DEST_PATH_IMAGE091
, just become
Figure DEST_PATH_IMAGE115
(equation 3)
Wherein, For the design temperature in temperature compensation zone 19 effective refractive index before and after changing poor, promptly
Figure 17285DEST_PATH_IMAGE096
Figure 414375DEST_PATH_IMAGE097
For the design temperature in temperature compensation zone 20 effective refractive index before and after changing poor, promptly
Figure 217246DEST_PATH_IMAGE099
Figure DEST_PATH_IMAGE116
For the design temperature of the I/O waveguide zone effective refractive index before and after changing poor, promptly
Figure DEST_PATH_IMAGE118
Just can be according to equation 1,2 and 3 in the hope of the length difference in corresponding input waveguide zone 2, output waveguide zone 4 and temperature compensation zone 19,20
Figure 480737DEST_PATH_IMAGE106
,
Figure 752580DEST_PATH_IMAGE010
With
Figure 939979DEST_PATH_IMAGE105
, and the corresponding geometric configuration of determining them, realize temperature and the equal insensitive array wave-guide grating of polarization.
The foregoing description is used for the utility model of explaining; rather than the utility model limited; in the protection domain of spirit of the present utility model and claim, any modification and change to the utility model is made all fall into protection domain of the present utility model.

Claims (6)

1. temperature and the equal insensitive array wave-guide grating of polarization, comprise at least one input waveguide (1), input waveguide zone (2), Waveguide array district (3), output waveguide zone (4) and at least one output waveguide (5), light passes through input waveguide zone (2) successively from input waveguide (1), Waveguide array district (3) and output waveguide zone (4) are formed by the optical path difference in Waveguide array district (3) with in input waveguide zone (2) and the optical path difference of exporting at least one district in the waveguide zone (4) jointly through the pairing total optical path difference of adjacent two waveguides in Waveguide array district (3) when being transmitted to output waveguide (5); It is characterized in that: at least a portion of input waveguide zone (2) and output waveguide zone (4) has different birefringences with at least a portion of Waveguide array district (3), imports waveguide zone (2), Waveguide array district (3) and export in the waveguide zone (4) at least that any one district is divided at least two temperature compensation zones with different thermo-optical coeffecients; Waveguide array district (3), in the geometric configuration of input waveguide zone (2), output waveguide zone (4) and described at least two deblocking temperature compensatory zones and the corresponding Waveguide array district (3) optical path difference of light path in these geometric configuratioies of adjacent array waveguide be according to the light of two different polarization states propagate the total optical path of process equate and the light of design temperature before and after changing propagate the equal relational expression of total optical path of process determine jointly, thereby the channel wavelength that reaches array waveguide grating is to temperature and all insensitive requirement of polarization.
2. a kind of temperature according to claim 1 and the equal insensitive array wave-guide grating of polarization is characterized in that: in described input waveguide zone (2) and output waveguide zone (4) at least any one district be divided at least two temperature compensation zones with different thermo-optical coeffecients; The optical path difference of two deblocking temperature compensatory zones is respectively n 1Δ L 1And n 2Δ L 2, n wherein 1And n 2Be the effective refractive index of two deblocking temperature compensatory zones, Δ L 1With Δ L 2The length difference of light path in two deblocking temperature compensatory zones for adjacent array waveguide in the corresponding Waveguide array district (3); Length difference Δ L, the Δ L of adjacent array waveguide in the Waveguide array district (3) 1, Δ L 2The three satisfies c* Δ n simultaneously 1Δ L 1+ c* Δ n 2Δ L 2+ Δ n aΔ L=0 and c* Δ n ' 1Δ L 1+ c* Δ n ' 2Δ L 2+ Δ n ' aΔ L=0, the value of constant c is 1,2 in the formula, represents respectively to cut apart in input waveguide zone (2) or output waveguide zone (4) and all cut apart in input waveguide zone (2) and output waveguide zone (4); n aBe the effective refractive index of Waveguide array district (3), Δ n 1With Δ n 2The effective refractive index that is the transverse electric mode TE of two deblocking temperature compensatory zones and transverse magnetic wave TM is poor, i.e. Δ n 1=n 1(TE)-n 1(TM), Δ n 2=n 2(TE)-n 2(TM); Δ n aFor the effective refractive index of the transverse electric mode TE of Waveguide array district (3) and transverse magnetic wave TM poor, i.e. Δ n a=n a(TE)-n a(TM); Δ n 1' and Δ n 2' for design temperature change before and after the effective refractive index difference of two deblocking temperature compensatory zones; Δ n a' for design temperature change before and after the effective refractive index difference in Waveguide array districts (3).
3. a kind of temperature according to claim 1 and the equal insensitive array wave-guide grating of polarization is characterized in that: described Waveguide array district (3) is divided at least two temperature compensation zones with different thermo-optical coeffecients; The length difference Δ L in the light path of adjacent array waveguide at least one district in input waveguide zone (2) and output waveguide zone (4) in the corresponding Waveguide array district (3) s, at the length difference Δ L of two deblocking temperature compensatory zones 1, Δ L 2The three satisfies c* Δ n simultaneously sΔ L s+ Δ n 1Δ L 1+ Δ n 2Δ L 2=0 and c* Δ n ' sΔ L s+ Δ n 1' Δ L 1+ Δ n ' 1Δ L 1=0, the value of constant c is 1,2 in the formula, represents respectively in input waveguide zone (2) or output waveguide zone (4) and introduces length difference and all introduce length difference in input waveguide zone (2) and output waveguide zone (4); Δ n sFor the effective refractive index of the transverse electric mode TE of planar waveguide and transverse magnetic wave TM poor, i.e. Δ n s=n s(TE)-n s(TM); Δ n s' for design temperature change before and after the effective refractive index difference of planar waveguide.
4. a kind of temperature according to claim 1 and the equal insensitive array wave-guide grating of polarization, it is characterized in that: in described input waveguide zone (2) and output waveguide zone (4) angle of the optical axis of the tangent line of the boundary center of curve of at least one district and Waveguide array district (3) and this waveguide zone be greater than 0 ° less than 180 ° of non-angles of 90 °, and described angle is according to the optical path difference requirement n of this waveguide zone sΔ L sDecision.
5. a kind of temperature according to claim 1 and the equal insensitive array wave-guide grating of polarization, it is characterized in that: the effective refractive index of described two deblocking temperature compensatory zones has different thermo-optical coeffecients.
6. a kind of temperature according to claim 5 and the equal insensitive array wave-guide grating of polarization is characterized in that: it is to realize by the waveguide top covering material that use has different thermo-optical coeffecients that the effective refractive index of described two deblocking temperature compensatory zones has different thermo-optical coeffecients.
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CN102103229A (en) * 2011-02-21 2011-06-22 中国计量学院 Array waveguide grating insensitive to temperature and polarization
CN105849364A (en) * 2013-11-27 2016-08-10 哈里伯顿能源服务公司 Bottom hole assembly fiber optic shape sensing
CN110673265A (en) * 2019-09-30 2020-01-10 西安交通大学 Design method of polarization-wavelength hybrid multiplexer
CN117555168A (en) * 2024-01-09 2024-02-13 之江实验室 On-chip integrated magneto-optical isolator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102103229A (en) * 2011-02-21 2011-06-22 中国计量学院 Array waveguide grating insensitive to temperature and polarization
CN105849364A (en) * 2013-11-27 2016-08-10 哈里伯顿能源服务公司 Bottom hole assembly fiber optic shape sensing
CN110673265A (en) * 2019-09-30 2020-01-10 西安交通大学 Design method of polarization-wavelength hybrid multiplexer
CN117555168A (en) * 2024-01-09 2024-02-13 之江实验室 On-chip integrated magneto-optical isolator
CN117555168B (en) * 2024-01-09 2024-04-19 之江实验室 On-chip integrated magneto-optical isolator

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