CN202049126U - Resistance type nitrogen dioxide sensor and instrument manufactured by same - Google Patents
Resistance type nitrogen dioxide sensor and instrument manufactured by same Download PDFInfo
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- CN202049126U CN202049126U CN201120107304XU CN201120107304U CN202049126U CN 202049126 U CN202049126 U CN 202049126U CN 201120107304X U CN201120107304X U CN 201120107304XU CN 201120107304 U CN201120107304 U CN 201120107304U CN 202049126 U CN202049126 U CN 202049126U
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- resistance
- nitrogen dioxide
- sensitive material
- material layer
- gas sensitive
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Abstract
The utility model discloses a resistance type nitrogen dioxide sensor and an instrument manufactured by the sensor. The sensor comprises a gas sensitive material layer and a gold conductive pole plate, wherein tungsten trioxide is used as the primary gas sensitive material of the gas sensitive material layer, and the gold-made conductive pole plate is contacted with the gas sensitive material layer and has an interlacing structure; the conductive pole plate is printed on an alumina planar medium substrate, and a platinum heating resistor is mounted at the back of the medium substrate. The sensor is arranged in a base with pores; a cover which is provided with pores at the middle for airflow to pass through is covered on the base; platinum leads are led out of the platinum heating resistor and the gold interlacing type electrode, respectively; the platinum lead led out of the platinum heating resistor is connected with a heating control circuit while the platinum lead led out of the gold interlacing type electrode is connected with a resistance counting circuit. The resistance type nitrogen dioxide sensor and instrument manufactured by the sensor have simple structure; by adopting novel gas sensitive material, the precision in detecting the volume concentration of nitrogen dioxide is improved to PPB stage; moreover, the resistance type nitrogen dioxide sensor and instrument manufactured by the sensor have desirable preferable gas selectivity and short reaction time.
Description
Technical field
The utility model relates to the temperature-controlled process of a kind of semiconductor type resistance-type nitrogen dioxide gas sensor, resistance-type nitrogen dioxide gas sensor instrument and resistance-type nitrogen dioxide gas sensor instrument.
Background technology
The measurement of concetration of nitrogen dioxide gas is to be subjected to paying close attention to widely at present, and Chinese scholars has been carried out a large amount of research in this respect.The part Study achievement has changed into commercial the application.But in general, the used Selectivity of Sensor of the measurement of nitrogen dioxide gas, sensitivity, this three technology index of consistance is undesirable.Intersect and select phenomenon serious, precision is lower.
As a kind of toxic gas, nitrogen dioxide is present in industrial gaseous waste in a large number, in the vehicle exhaust.According to The Law on Environmental Protection of the People's Republic of China and " The Law of the People's Republic of China on the Prevention and Control of Atmospheric Pollution "; for improving ambient air quality; prevent ecological disruption; create the cleaning adapt circumstance; protect health, clearly stipulated the concentration limits definite value of the nitrogen dioxide under the varying environment function division in the ambient air quality of being worked out.Under the grade III Standard, the concentration limits definite value of nitrogen dioxide is per day 0.12 milligram every cubic metre.Some domestic nitrogen dioxide gas checkout equipments also can't reach the accurate measurement to this lower concentration values at present.
The utility model content
Goal of the invention: in order to overcome the deficiencies in the prior art, the technical matters that the utility model solved provides a kind of simple in structure, easy to operate resistance-type nitrogen dioxide gas sensor, it only need less maintenance, can in big concentration range, realize linearity to nitrogen dioxide, the high selection, the high conforming measurement of high sensitivity.
Another problem that the utility model solved is the surveying instrument that utilizes above-mentioned resistance-type nitrogen dioxide gas sensor to make.
Technical scheme: for solving above-mentioned first technical matters, the technical solution adopted in the utility model is:
A kind of resistance-type nitrogen dioxide gas sensor, comprise sensor body, described body comprises gas sensitive material layer and aluminium oxide planar medium basic unit, is printed with golden interdigitated electrodes, is printed with platinum matter heating resistor at lower surface at the upper surface of described aluminium oxide planar medium basic unit; Described gas sensitive material layer sintering in aluminium oxide planar medium basic unit and with golden interdigitated electrodes Ohmic contact.
Described gas sensitive material layer is the heterogeneous metal oxide ceramic layer with porous structure, and its porosity is in the 30-60% scope, and thickness is less than 200 microns; The gas sensitive material layer is to be that the mass content of main gas sensitive and tungstic acid is not less than 95% with tungstic acid.
The thickness of described gas sensitive material layer is 60 microns.
Described golden interdigitated electrodes has a pair of, and the distance between two described golden interdigitated electrodes is in the 20-400 micrometer range.
Described platinum matter heating resistor electrical isolation respectively and between the aluminium oxide planar medium basic unit, gas sensitive material layer, and heat conduction between described platinum matter heating resistor and aluminium oxide planar medium basic unit, the gas sensitive material layer.
In order to solve above-mentioned second problem, the technical scheme that the utility model adopted is: a kind of surveying instrument that utilizes described resistance-type nitrogen dioxide gas sensor to make, comprise that there are aperture and base that can penetrating air-flow in described sensor body, centre, utilize the heating control circuit and the resistance calculations circuit of PID (proportion integration differentiation) principle, described resistance-type nitrogen dioxide sensor is installed in the aperture of base, aperture is arranged, lid that can penetrating air-flow in the middle of being stamped on base; Described platinum matter heating resistor and golden interdigitated electrodes are drawn platinum matter lead respectively, and the platinum matter lead that described platinum matter heating resistor is drawn links to each other with heating control circuit, and the platinum matter lead that described golden interdigitated electrodes is drawn links to each other with the resistance calculations circuit.
The platinum matter lead that described platinum matter heating resistor is drawn has the resistance that is not more than 5% platinum matter heating resistor.
The temperature-controlled process of above-mentioned surveying instrument, this method comprises the steps:
A) platinum matter heating resistor is subjected to accurate discrete a plurality of pulse power supplies, the heating before the gas sensitive material layer is measured,
B) after pulse is passed through, the temperature of gas sensitive material layer reaches working temperature, and keeps this temperature;
C) resistance of gas sensitive material layer is measured, measured and finish the preceding temperature of measurement that back refrigerating gas sensitive material layer reaches setting, carry out next one repeating step measuring period then a), b), c).
The working temperature of above-mentioned gas sensitive material layer is higher than environment temperature, and the degree of accuracy of working temperature reaches ± and 2 ℃, the temperature error scope of gas sensitive material layer integral body is at ± 10 ℃.
The working temperature of above-mentioned gas sensitive material layer is in 200 ℃ of-600 ℃ of scopes.
Beneficial effect: compared with prior art, the utility model has the advantages that: simple in structure, owing to adopt novel gas sensitive, the precision improvement of the volumetric concentration of feasible detection nitrogen dioxide is to the rank of PPB (parts per billion), and have better gas selectivity, reaction time fast.
Description of drawings
Fig. 1 is a resistance-type nitrogen dioxide gas sensor sectional view;
Fig. 2 is a resistance-type nitrogen dioxide gas sensor front view (FV);
Fig. 3 is a resistance-type nitrogen dioxide gas sensor back view;
Fig. 4 is a resistance-type nitrogen dioxide gas sensor scheme of installation;
Fig. 5 is the resistance variations figure of resistance-type nitrogen dioxide gas sensor when nitrogen dioxide gas concentration is 0-0.3ppm;
Fig. 6 is that humidity is to the influence of resistance-type nitrogen dioxide gas sensor under variable concentrations nitrogen dioxide gas environment.
Embodiment
Below in conjunction with accompanying drawing the utility model is described further.
Referring to Fig. 1,2,3,4, a kind of resistance-type nitrogen dioxide gas sensor, comprise body 1, this body 1 comprises gas sensitive material layer 11 and aluminium oxide planar medium basic unit 13, is printed with golden interdigitated electrodes 12, is printed with platinum matter heating resistor 14 at lower surface at the upper surface of aluminium oxide planar medium basic unit 13; Gas sensitive material layer 11 sintering in aluminium oxide planar medium basic unit 13 and with golden interdigitated electrodes 12 Ohmic contact.Wherein gas sensitive material layer 11 is for having the heterogeneous metal oxide ceramic layer of porous structure, and its porosity is in the 30-60% scope, and thickness is less than 200 microns, preferred 60 microns; Be main gas sensitive, add other metal oxide semiconductors again and mix and constitute gas sensitive material layers 11 and be printed in the extremely resistant to elevated temperatures aluminium oxide planar medium basic unit with tungstic acid, sintering under 1000 ℃ of high temperature, produce very open porous micromechanism, so have the larger area surface to contact with object gas.The mass content of tungstic acid is not less than 95% in the gas sensitive material layer 11, surplus is other metal oxide semiconductors.
Above-mentioned golden interdigitated electrodes 12 has a pair of, and the distance between two described golden interdigitated electrodes 12 is in the 20-400 micrometer range.
The platinum matter heating resistor 14 of aluminium oxide planar medium basic unit 13 lower surfaces is isolated with aluminium oxide planar medium basic unit 13 and gas sensitive material layer 11 on electric.Aspect heat transferred, platinum matter heating resistor 14, aluminium oxide planar medium basic unit 13 and gas sensitive material layer 11 are to have good conductive performance.
A kind of surveying instrument that utilizes above-mentioned resistance-type nitrogen dioxide gas sensor to make, comprise that there is base 2, heating control circuit and the resistance calculations circuit of aperture and the penetrating air-flow of energy above-mentioned resistance-type nitrogen dioxide sensor body 1, centre, the resistance-type nitrogen dioxide sensor is installed in the aperture of base 2, aperture is arranged, lid that can penetrating air-flow in the middle of being stamped on base 2; Platinum matter heating resistor and golden interdigitated electrodes are drawn platinum matter lead respectively, and the platinum matter lead that platinum matter heating resistor is drawn links to each other with heating control circuit, and the platinum matter lead that golden interdigitated electrodes is drawn links to each other with the resistance calculations circuit.The platinum matter lead that platinum matter heating resistor is drawn has the resistance that is not more than 5% platinum matter heating resistor.
The temperature-controlled process of above-mentioned surveying instrument, a) platinum matter heating resistor is subjected to accurate discrete a plurality of pulse power supplies, the heating before the gas sensitive material layer is measured; B) after pulse is passed through, the temperature of gas sensitive material layer reaches working temperature, and keeps this temperature; C) resistance of gas sensitive material layer is measured, measured and finish the preceding temperature of measurement that back refrigerating gas sensitive material layer reaches setting, carry out next one repeating step measuring period then a), b), c).
The working temperature of gas sensitive material layer is higher than environment temperature, and working temperature is in 200 ℃ of-600 ℃ of scopes, and the degree of accuracy of working temperature reaches ± 2 ℃, and the temperature error scope of gas sensitive material layer integral body is at ± 10 ℃.
Embodiment: above-mentioned surveying instrument is exposed in the object gas to be measured, measures a resistance value corresponding with object gas concentration by the reaction of resistance-type nitrogen dioxide gas sensor.
During use, the gas sensitive material layer 11 of resistance-type nitrogen dioxide gas sensor at first is heated to the working temperature of setting, and operating temperature range is 400 ℃ ± 20 ℃ here; The implementation method that its gas sensitive material layer 11 is heated to working temperature is to connect the pulse voltage of adjustable width and Cycle Length at the two ends of platinum matter heating resistor 14.Referring to resistance-type nitrogen dioxide gas sensor scheme of installation shown in Figure 4, wiring pin a is connected with heating control circuit.Because technological reason, the resistance that is printed on the platinum matter heating resistor 14 of aluminium oxide planar medium basic unit 13 lower surfaces has ± 5% variance, in order to compensate the heating-up temperature error that may cause thus, the resistance of platinum matter heating resistor 14 is measured in real time, and according to this resistance value calculate Cycle Length and pulse width the variable quantity that should regulate, be applied to the two ends of platinum matter heating resistor 14 in time.This feedback regulation process can reach error free tracking in theory and regulate owing to use PID (proportion integration differentiation) algorithm.
Referring to resistance-type nitrogen dioxide gas sensor scheme of installation shown in Figure 4, the wiring pin b that golden interdigitated electrodes 12 is drawn is connected with the sensor resistance counting circuit.Under different nitrogen dioxide gas concentration environment, the characteristic of semiconductor that gas sensitive material layer 11 is shown directly is reflected on the resistance variations at the wiring pin b two ends that golden interdigitated electrodes 12 drawn.Fig. 5 is the resistance variations characteristic pattern of resistance-type nitrogen dioxide gas sensor when nitrogen dioxide gas concentration is 0-0.3ppm.Demonstrate the increase along with nitrogen dioxide gas concentration among the figure, the resistance at the wiring pin b two ends that golden interdigitated electrodes 12 is drawn is also along with the increase of linearity, and typical change in resistance scope is between 20 kilohms to 80 kilohms.
Referring to resistance-type nitrogen dioxide gas sensor scheme of installation shown in Figure 4, four wiring pins of golden interdigitated electrodes 12 and platinum matter heating resistor 14 are distributed in four angles respectively.Its purpose just is a, b not only plays the connection effect on electric, structurally also play the weight of carrying sensor, it is suspended in the free space, like this, all high-temperature part of resistance-type nitrogen dioxide gas sensor directly do not contact with lid with the firm banking of sensor, and gas to be measured again can be by gas sensitive material layer 11 with being stopped simultaneously.
Different types of and nitrogen dioxide do not had intersect the gas of chemical reaction and nitrogen dioxide gas, find that the resistance-type nitrogen dioxide gas sensor has good selectivity simultaneously by the resistance-type nitrogen dioxide gas sensor.Data presentation nitrogen dioxide respectively with sulphuric dioxide, carbon monoxide, sulfuretted hydrogen, methane simultaneously when the resistance-type nitrogen dioxide gas sensor, the resistance variations of resistance-type nitrogen dioxide gas sensor.The resistance that has about 10% except sulphuric dioxide increases the variation, and the influence of other three kinds of gases is negligible.
Humidity be one to the influential key factor of gas sensor.Chemical reaction can take place on the surface of gas sensitive material layer with portion gas in aqueous vapor.This chemical reaction has changed the concentration of gas sensitive material laminar surface and body charge carrier, thereby directly is reflected on the resistance value of gas sensitive material layer.Even if chemical reaction does not take place, aqueous vapor still can change the surface state of gas sensitive material layer.Fig. 6 is under variable concentrations nitrogen dioxide gas environment, and humidity is to the influence of resistance-type nitrogen dioxide gas sensor, wherein reference resistance R0=20 kilo-ohm.Curve map from Fig. 6 as can be seen, the caused resistance variations to the resistance-type nitrogen dioxide gas sensor of humidity will be higher than under higher nitrogen dioxide gas concentration environment (being higher than 0.25ppm) in (being lower than 0.05ppm) under the very low nitrogen dioxide gas concentration environment.Even the curve map among Fig. 6 it can also be seen that under very low nitrogen dioxide gas concentration environment (being lower than 0.05ppm) the caused resistance variations to the resistance-type nitrogen dioxide gas sensor of humidity still is lower than 10%.This shows that the utility model resistance-type nitrogen dioxide gas sensor has great moisture-resistant degree interference performance.
Claims (7)
1. resistance-type nitrogen dioxide gas sensor, it is characterized in that, comprise sensor body (1), described body (1) comprises gas sensitive material layer (11) and aluminium oxide planar medium basic unit (13), is printed with golden interdigitated electrodes (12), is printed with platinum matter heating resistor (14) at lower surface at the upper surface of described aluminium oxide planar medium basic unit (13); Described gas sensitive material layer (11) sintering aluminium oxide planar medium basic unit (13) go up and with golden interdigitated electrodes (12) Ohmic contact.
2. resistance-type nitrogen dioxide gas sensor according to claim 1 is characterized in that, described gas sensitive material layer (11) is for having the heterogeneous metal oxide ceramic layer of porous structure, and its porosity is in the 30-60% scope, and thickness is less than 200 microns; Gas sensitive material layer (11) is to be that the mass content of main gas sensitive and tungstic acid is not less than 95% with tungstic acid.
3. resistance-type nitrogen dioxide gas sensor according to claim 2 is characterized in that, the thickness of described gas sensitive material layer (11) is 60 microns.
4. resistance-type nitrogen dioxide gas sensor according to claim 1 is characterized in that, described golden interdigitated electrodes (12) has a pair of, and the distance between two described golden interdigitated electrodes (12) is in the 20-400 micrometer range.
5. resistance-type nitrogen dioxide gas sensor according to claim 1, it is characterized in that, described platinum matter heating resistor (14) electrical isolation respectively and between the aluminium oxide planar medium basic unit (13), gas sensitive material layer (11), and heat conduction between described platinum matter heating resistor (14) and aluminium oxide planar medium basic unit (13), the gas sensitive material layer (11).
6. surveying instrument that utilizes the described resistance-type nitrogen dioxide gas sensor of claim 1 to make, it is characterized in that, comprise that there is base (2), the heating control circuit that utilizes the PID principle and the resistance calculations circuit of aperture and the penetrating air-flow of energy described sensor body (1), centre, described resistance-type nitrogen dioxide sensor is installed in the aperture of base (2), aperture is arranged, lid that can penetrating air-flow in the middle of being stamped on base (2); Described platinum matter heating resistor (14) and golden interdigitated electrodes (12) are drawn platinum matter lead respectively, the platinum matter lead that described platinum matter heating resistor (14) is drawn links to each other with heating control circuit, and the platinum matter lead that described golden interdigitated electrodes (12) is drawn links to each other with the resistance calculations circuit.
7. surveying instrument according to claim 6 is characterized in that, the platinum matter lead that described platinum matter heating resistor (14) is drawn has the resistance that is not more than 5% platinum matter heating resistor (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120107304XU CN202049126U (en) | 2011-04-13 | 2011-04-13 | Resistance type nitrogen dioxide sensor and instrument manufactured by same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120107304XU CN202049126U (en) | 2011-04-13 | 2011-04-13 | Resistance type nitrogen dioxide sensor and instrument manufactured by same |
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| CN202049126U true CN202049126U (en) | 2011-11-23 |
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| CN201120107304XU Expired - Fee Related CN202049126U (en) | 2011-04-13 | 2011-04-13 | Resistance type nitrogen dioxide sensor and instrument manufactured by same |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243195A (en) * | 2011-04-13 | 2011-11-16 | 刘震国 | A resistance-type nitrogen dioxide gas sensor, and an apparatus manufactured with the sensor |
| CN103926210A (en) * | 2014-04-23 | 2014-07-16 | 南车二七车辆有限公司 | Device for detecting species of gases |
| CN108318541A (en) * | 2017-01-16 | 2018-07-24 | 华邦电子股份有限公司 | Gas measuring device |
-
2011
- 2011-04-13 CN CN201120107304XU patent/CN202049126U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243195A (en) * | 2011-04-13 | 2011-11-16 | 刘震国 | A resistance-type nitrogen dioxide gas sensor, and an apparatus manufactured with the sensor |
| CN103926210A (en) * | 2014-04-23 | 2014-07-16 | 南车二七车辆有限公司 | Device for detecting species of gases |
| CN103926210B (en) * | 2014-04-23 | 2017-01-11 | 南车二七车辆有限公司 | Device for detecting species of gases |
| CN108318541A (en) * | 2017-01-16 | 2018-07-24 | 华邦电子股份有限公司 | Gas measuring device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111123 Termination date: 20120413 |