CN202021707U - Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system - Google Patents

Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system Download PDF

Info

Publication number
CN202021707U
CN202021707U CN2011201311315U CN201120131131U CN202021707U CN 202021707 U CN202021707 U CN 202021707U CN 2011201311315 U CN2011201311315 U CN 2011201311315U CN 201120131131 U CN201120131131 U CN 201120131131U CN 202021707 U CN202021707 U CN 202021707U
Authority
CN
China
Prior art keywords
main shaft
axle sleeve
double
grease chamber
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2011201311315U
Other languages
Chinese (zh)
Inventor
梁迎春
张飞虎
孙雅洲
刘海涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN2011201311315U priority Critical patent/CN202021707U/en
Application granted granted Critical
Publication of CN202021707U publication Critical patent/CN202021707U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)

Abstract

The utility model discloses a double-cutter head horizontal ultra-precision liquid static pressure electric spindle system and relates to a liquid static pressure electric spindle system. The double-cutter head horizontal ultra-precision liquid static pressure electric spindle system aims at solving the problems of low rigidity and low machining efficiency of the existing spindle system of a KDP (potassium dihydrogen phosphate) ultra-precision machining machine tool. A first shaft system support is positioned at one end of an inner cavity of a housing, the first shaft system support is fixedly connected with the housing through a first fixed baffle plate, a second shaft system support is positioned at the other end of the inner cavity of the housing, a first output shaft of a direct current double-output shaft motor is fixedly connected with one end of a first main shaft through a first thrust plate, the other end of the first main shaft is fixedly connected with a first cutter head, a first shaft sleeve is sheathed on the first main shaft, and the first shaft sleeve is fixedly arranged on the first shaft system support; and a second output shaft of the direct current double-output shaft motor is fixedly connected with one end of a second main shaft through a second thrust plate, the other end of the second main shaft is fixedly connected with a second cutter head, a second shaft sleeve is sheathed on the second main shaft and the second shaft sleeve is fixedly arranged on the second shaft system support. The double-cutter head horizontal ultra-precision liquid static pressure electric spindle system is used for machining KDP crystal optical parts.

Description

The horizontal ultraprecise fluid pressure of double-pole dish electric chief axis system
Technical field
The utility model relates to a kind of fluid pressure electric chief axis system, is specifically related to the horizontal ultraprecise fluid pressure of a kind of double-pole dish electric chief axis system.
Background technology
Under the traction of technical needs such as laser fusion and light laser weapon, many countries have successively built many large scale laser instruments, need to adopt a large amount of optical elements, the KDP crystal is widely used in laser and non-linear optical field because of having higher non-linearity and laser damage threshold.KDP crystal optics part requires to have high-precision shape quality and surface of good roughness, but the KDP crystal has the matter optics machining characteristics that is unfavorable for such as soft, frangible, traditional grinding and finishing method are not suitable for processing KDP crystal, must adopt Ultraprecision Machining processing KDP crystal, the processing of KDP crystal must be adopted special-purpose KDP super-precision machine tools, KDP super-precision machine tools axis system will directly have influence on the machining accuracy of part to be processed, so axis system should have higher rigidity.The axis system of existing KDP super-precision machine tools adopts the supporting way of gas-static main shaft, and the rigidity of axis system is low; The axis system of existing KDP super-precision machine tools adopts the hilted broadsword dish to cut, and working (machining) efficiency is low.
The utility model content
The utility model is for the problem that rigidity is low, working (machining) efficiency is low of the axis system that solves existing KDP super-precision machine tools, and then the horizontal ultraprecise fluid pressure of a kind of double-pole dish axis system is provided.
The utility model is to solve the problems of the technologies described above the technical scheme of taking to be: the horizontal ultraprecise fluid pressure of double-pole dish of the present utility model electric chief axis system comprises that first fixed dam, first main shaft, electric machine support, first thrust plate, first cutterhead, first axle sleeve, first are support, first grease chamber's cover, housing and direct current double output shaft motor, and described axis system comprises that also second fixed dam, second main shaft, second thrust plate, second cutterhead, second axle sleeve, second grease chamber cover and second are support; Described first is the end that support is positioned at the housing inner chamber, described first be support pass through first fixed dam and housing affixed, described second is the other end that support is positioned at the housing inner chamber, described second be support pass through second fixed dam and housing affixed, described direct current double output shaft motor is positioned at housing and is packed in first by electric machine support is on the support, first output shaft of described direct current double output shaft motor is affixed by an end of first thrust plate and first main shaft, the other end of described first main shaft and first cutterhead are affixed, leave first gap between described first axle sleeve and first thrust plate, leave second gap between described first axle sleeve and first cutterhead, described first axle sleeve is sleeved on first main shaft, leave third space between described first axle sleeve and first main shaft, it is on the support that described first axle sleeve is packed in first, along the circumferential direction be processed with annular groove on the outer wall of described first axle sleeve, be processed with a plurality of first axially extending bores and a plurality of first radial direction through hole on described first axle sleeve, described first grease chamber cover is made of two first semi-rings, described two first semi-rings are sleeved on first axle sleeve relatively and are positioned at annular groove, described two first semi-rings install and form first grease chamber cover, form first grease chamber between described first main shaft and first grease chamber cover, described a plurality of first axially extending bores all are communicated with first grease chamber with described a plurality of first radial direction through hole;
Second output shaft of described direct current double output shaft motor is affixed by an end of second thrust plate and second main shaft, the other end of described second main shaft and second cutterhead are affixed, leave the 4th gap between described second axle sleeve and second thrust plate, leave the 5th gap between described second axle sleeve and second cutterhead, described second axle sleeve is sleeved on second main shaft, leave the 6th gap between described second axle sleeve and second main shaft, it is on the support that described second axle sleeve is packed in second, along the circumferential direction be processed with second annular groove on the outer wall of described second axle sleeve, be processed with a plurality of second axially extending bores and a plurality of second radial direction through hole on described second axle sleeve, described second grease chamber cover is made of two second semi-rings, described two second semi-rings are sleeved on second axle sleeve relatively and are positioned at second annular groove, described two second semi-rings install and form second grease chamber cover, form second grease chamber between described second main shaft and second grease chamber cover, described a plurality of second axially extending bores and described a plurality of second radial direction through hole all are communicated with second grease chamber.
The beneficial effects of the utility model are:
Leave first gap between first axle sleeve of the present utility model and first thrust plate, leave second gap between first axle sleeve and first cutterhead, leave third space between first axle sleeve and first main shaft, leave the 4th gap between second main shaft and second thrust plate, leave the 5th gap between second main shaft and second cutterhead, leave the 6th gap between second axle sleeve and second main shaft, oil in first grease chamber by a plurality of first axially extending bores and a plurality of first radial direction through hole in first gap, form oil film in second gap and the third space, oil in second grease chamber by a plurality of second axially extending bores and a plurality of second radial direction through hole in the 4th gap, form oil film in the 5th gap and the 6th gap, adopt hydrodynamic journal liquid polymers to do axially and radial support, the high rigidity and the ultra-precise revolving of main shaft have been realized, its axial rigidity can reach 4000N/ μ m, because hydrodynamic journal liquid polymers have the effect of homogenizing axle and the precision of axle sleeve own, rotating accuracy can reach 0.02 μ m;
The utility model adopts the double output shaft direct current generator also to adopt the mode that directly drives as driving element, it is good to have dynamic effect, the advantage that transmission efficiency is high, fasten at two axles of same main shaft and to have realized high rigidity and high-precision ultraprecise revolution simultaneously and directly drive, driving two main shafts simultaneously by a drive source rotates, realized the processing work simultaneously of the cutterhead on the diaxon, adopt the hilted broadsword dish to compare with the axis system of existing KDP super-precision machine tools, working (machining) efficiency is doubled.
Description of drawings
Fig. 1 is the integrally-built main cutaway view of the horizontal ultraprecise fluid pressure of double-pole dish of the present utility model electric chief axis system, Fig. 2 is the front view of first thrust plate, Fig. 3 is the front view of second thrust plate, Fig. 4 is the partial enlarged drawing of Fig. 1 at the C place, Fig. 5 is the partial enlarged drawing of Fig. 1 at the I place, Fig. 6 is the cross sectional representation of first grease chamber cover, and Fig. 7 is the cross sectional representation of second grease chamber cover.
The specific embodiment
The specific embodiment one: shown in Fig. 1~7, the horizontal ultraprecise fluid pressure of the double-pole dish electric chief axis system of present embodiment comprise first fixed dam 3, first main shaft 10, electric machine support 18, first thrust plate 4, first cutterhead 11, first axle sleeve 8, first be support 15, first grease chamber cover 16, housing 37 and direct current double output shaft motor 38, described axis system comprises that also second fixed dam 34, second main shaft 28, second thrust plate 22, second cutterhead 29, second axle sleeve 26,33 and second in second grease chamber cover are support 35; Described first is the end that support 15 is positioned at housing 37 inner chambers, described first is that support 15 is affixed with housing 37 by first fixed dam 3, described second is the other end that support 35 is positioned at housing 37 inner chambers, described second is that support 35 is affixed with housing 37 by second fixed dam 34, described direct current double output shaft motor 38 is positioned at housing 37 and is packed in first by electric machine support 18 is on the support 15, first output shaft 19 of described direct current double output shaft motor 38 is affixed by an end of first thrust plate 4 and first main shaft 10, the other end of described first main shaft 10 and first cutterhead 11 are affixed, leave first clearance D between described first axle sleeve 8 and first thrust plate 4, leave the second gap E between described first axle sleeve 8 and first cutterhead 11, described first axle sleeve 8 is sleeved on first main shaft 10, leave third space F between described first axle sleeve 8 and first main shaft 10, it is on the support 15 that described first axle sleeve 8 is packed in first, along the circumferential direction be processed with annular groove 8-1 on the outer wall of described first axle sleeve 8, be processed with a plurality of first axially extending bores 13 and a plurality of first radial direction through hole 14 on described first axle sleeve 8, described first grease chamber cover 16 is made of two first semi-ring 16-1, described two first semi-ring 16-1 are sleeved on first axle sleeve 8 relatively and are positioned at annular groove 8-1, described two first semi-ring 16-1 install and form first grease chamber cover 16, form first grease chamber 6 between described first main shaft 10 and first grease chamber cover 16, described a plurality of first axially extending bores 13 all are communicated with first grease chamber 6 with described a plurality of first radial direction through hole 14;
Second output shaft 20 of described direct current double output shaft motor 38 is affixed by an end of second thrust plate 22 and second main shaft 28, the other end of described second main shaft 28 and second cutterhead 29 are affixed, leave the 4th gap M between described second axle sleeve 26 and second thrust plate 22, leave the 5th gap N between described second axle sleeve 26 and second cutterhead 29, described second axle sleeve 26 is sleeved on second main shaft 28, leave the 6th gap H between described second axle sleeve 26 and second main shaft 28, it is on the support 35 that described second axle sleeve 26 is packed in second, along the circumferential direction be processed with the second annular groove 26-1 on the outer wall of described second axle sleeve 26, be processed with a plurality of second axially extending bores 25 and a plurality of second radial direction through hole 23 on described second axle sleeve 26, described second grease chamber cover 33 is made of two second semi-ring 33-1, described two second semi-ring 33-1 are sleeved on second axle sleeve 26 relatively and are positioned at the second annular groove 26-1, described two second semi-ring 33-1 install and form second grease chamber cover 33, form second grease chamber 24 between described second main shaft 28 and second grease chamber cover 33, described a plurality of second axially extending bores 25 and described a plurality of second radial direction through hole 23 all are communicated with second grease chamber 24.
The utility model in use, first grease chamber 6 and second grease chamber 24 all are communicated with fueller, the interior formation of first clearance D forms radially oil film 9 of the second thrust oil film 12, the interior formation first of third space F in the first thrust oil film 17, the second gap E, realized the ultra-precise revolving of first main shaft 10; The interior formation of the 4th gap M forms radially oil film 27 of the 4th thrust oil film 31, the interior formation second of the 6th gap H in the 3rd thrust oil film 36, the 5th gap N, realized the ultra-precise revolving of second main shaft 28.
The specific embodiment two: as shown in Figure 1, the described direct current double output shaft of present embodiment motor 38 does not have brush drive motor for the direct current double output shaft.So design drives effective.Other composition and annexation are identical with the specific embodiment one.
The direct current double output shaft motor 38 of present embodiment is made of stator 1 and rotor 2, the rotor 2 of brush DC drive motors system 38 is simultaneously affixed with first motor shaft 19 and second motor shaft 20, adopt no brush drive motor as driving element, owing to there is not brush, therefore do not have moment of friction between the stator 1 of this motor and the rotor 2, directly can produce rotation torque and drive first main shaft 10 and second main shaft 28 and rotate simultaneously and cut.
The specific embodiment three: as shown in Figure 4, the scope of described first clearance D of present embodiment, the second gap E and third space F all is 4~6 μ m.So design, effectively raise the rigidity of fluid pressure oil film, realized the ultra-precise revolving of first main shaft 10.Other composition and annexation are identical with the specific embodiment one or two.
The specific embodiment four: as shown in Figure 4, the scope of described the 4th gap M of present embodiment, the 5th gap N and the 6th gap H all is 4~6 μ m.So design, effectively raise the rigidity of fluid pressure oil film, realized the ultra-precise revolving of second main shaft 28.Other composition and annexation are identical with the specific embodiment one or two.
The specific embodiment five: as shown in Figure 1, described first main shaft 10 of present embodiment and second main shaft 28 are hollow spindle.So design reduces weight, and inertia is little, is convenient to the fast rotational of electric main shaft.
Other composition and annexation are identical with the specific embodiment three.
The specific embodiment six: as shown in Figure 1, described first main shaft 10 of present embodiment and second main shaft 28 are hollow spindle.So design reduces weight, and inertia is little, is convenient to the fast rotational of electric main shaft.
Other composition and annexation are identical with the specific embodiment four.
The specific embodiment seven: as shown in Figures 2 and 3, the diameter d 1 of described first thrust plate 4 of present embodiment is Φ 400mm~Φ 500mm with the diameter d of second thrust plate 22 2 consistent settings, diameter d 2 scopes of the diameter d 1 of first thrust plate 4 and second thrust plate 22.So design is convenient to realize big thrust plane.Other composition and annexation are identical with the specific embodiment five or six.
Specifically be embodiment eight: as shown in Figure 2, the described axis system of present embodiment also comprises a plurality of first reinforcements 39, and described a plurality of first reinforcements 39 are along the circumferential direction uniform to be packed on the outer face of first thrust plate 4.So design, improved first thrust plate 4 rigidity, alleviate the weight of first thrust plate 4, effectively raise the restriction effect of first main shaft 10, improve the rigidity of first main shaft 10.Other composition and annexation are identical with the specific embodiment seven.
Specifically be embodiment nine: as shown in Figure 3, the described axis system of present embodiment also comprises a plurality of second reinforcements 40, and described a plurality of second reinforcements 40 are along the circumferential direction uniform to be packed on the outer face of second thrust plate 22.So design, improved second thrust plate 22 rigidity, alleviate the weight of second thrust plate 22, effectively raise the restriction effect of second main shaft 28, improve the rigidity of second main shaft 28.Other composition and annexation are identical with the specific embodiment one, two, five, six or eight.
Operation principle:
With reference to Fig. 1~7, during work, housing 37 is packed on the upper surface of machine slide 21, drive direct current double output shaft motor 38, first output shaft 19 on the direct current double output shaft motor 38 rotates and drives 10 rotations of first main shaft, first main shaft 10 rotates and drives 11 rotations of first cutterhead, and second output shaft 20 rotates drive second main shaft 28 and rotates, and second main shaft 28 rotates drive second cutterhead 29 and rotates; Hydraulic oil in the fueller is imported first grease chamber 6 and second grease chamber 24, hydraulic oil in first grease chamber 6 flows into first clearance D, the second gap E and third space F by a plurality of first axially extending bores 13 and a plurality of first radial direction through hole 14, in first clearance D, form the first thrust oil film 17, form the second thrust oil film 12 in the second gap E, the interior formation first of third space F is oil film 9 radially; Hydraulic oil in second grease chamber 24 flows into the 4th gap M, the 5th gap N and the 6th gap H by a plurality of second axially extending bores 25 and a plurality of second radial direction through hole 23, in the 4th gap M, form the 3rd thrust oil film 36, in the 5th gap N, form the 4th thrust oil film 31, form second oil film 27 radially in the 6th gap H, the fluid pressure film of formation is used for supports main shaft and axial load thereof; Because the fluid pressure film that axially and radially all has of main shaft supports, win main shaft 10, first thrust plate 4 and first cutterhead 11 are not all directly contacted with first the radial and axial of axle sleeve 8, make second main shaft 28, second thrust plate 22 and second cutterhead 29 all directly not contact with second the radial and axial of axle sleeve 26, form the leveling effect of part geometry error, can improve the rigidity and the rotating accuracy of main shaft significantly.

Claims (9)

1. the horizontal ultraprecise fluid pressure of double-pole dish electric chief axis system, described axis system comprises first fixed dam (3), first main shaft (10), electric machine support (18), first thrust plate (4), first cutterhead (11), first axle sleeve (8), first is support (15), first grease chamber cover (16), housing (37) and direct current double output shaft motor (38) is characterized in that: described axis system also comprises second fixed dam (34), second main shaft (28), second thrust plate (22), second cutterhead (29), second axle sleeve (26), second grease chamber cover (33) and second are support (35); Described first is the end that support (15) is positioned at housing (37) inner chamber, described first is that support (15) is affixed by first fixed dam (3) and housing (37), described second is the other end that support (35) is positioned at housing (37) inner chamber, described second is that support (35) is affixed by second fixed dam (34) and housing (37), described direct current double output shaft motor (38) is positioned at housing (37) and is packed in first by electric machine support (18) is on the support (15), first output shaft (19) of described direct current double output shaft motor (38) is affixed with an end of first main shaft (10) by first thrust plate (4), the other end of described first main shaft (10) and first cutterhead (11) are affixed, leave first gap (D) between described first axle sleeve (8) and first thrust plate (4), leave second gap (E) between described first axle sleeve (8) and first cutterhead (11), described first axle sleeve (8) is sleeved on first main shaft (10), leave third space (F) between described first axle sleeve (8) and first main shaft (10), it is on the support (15) that described first axle sleeve (8) is packed in first, along the circumferential direction be processed with annular groove (8-1) on the outer wall of described first axle sleeve (8), be processed with a plurality of first axially extending bores (13) and a plurality of first radial direction through hole (14) on described first axle sleeve (8), described first grease chamber cover (16) is made of two first semi-rings (16-1), described two first semi-rings (16-1) are sleeved on first axle sleeve (8) relatively and are positioned at annular groove (8-1), described two first semi-rings (16-1) install and form first grease chamber cover (16), form first grease chamber (6) between described first main shaft (10) and first grease chamber cover (16), described a plurality of first axially extending bores (13) all are communicated with first grease chamber (6) with described a plurality of first radial direction through hole (14);
Second output shaft (20) of described direct current double output shaft motor (38) is affixed with an end of second main shaft (28) by second thrust plate (22), the other end of described second main shaft (28) and second cutterhead (29) are affixed, leave the 4th gap (M) between described second axle sleeve (26) and second thrust plate (22), leave the 5th gap (N) between described second axle sleeve (26) and second cutterhead (29), described second axle sleeve (26) is sleeved on second main shaft (28), leave the 6th gap (H) between described second axle sleeve (26) and second main shaft (28), it is on the support (35) that described second axle sleeve (26) is packed in second, along the circumferential direction be processed with second annular groove (26-1) on the outer wall of described second axle sleeve (26), be processed with a plurality of second axially extending bores (25) and a plurality of second radial direction through hole (23) on described second axle sleeve (26), described second grease chamber cover (33) is made of two second semi-rings (33-1), described two second semi-rings (33-1) are sleeved on second axle sleeve (26) relatively and are positioned at second annular groove (26-1), described two second semi-rings (33-1) install and form second grease chamber cover (33), form second grease chamber (24) between described second main shaft (28) and second grease chamber cover (33), described a plurality of second axially extending bores (25) and described a plurality of second radial direction through hole (23) all are communicated with second grease chamber (24).
2. the horizontal ultraprecise fluid pressure of double-pole dish according to claim 1 electric chief axis system, it is characterized in that: described direct current double output shaft motor (38) does not have brush drive motor for the direct current double output shaft.
3. the horizontal ultraprecise fluid pressure of double-pole dish according to claim 1 and 2 electric chief axis system is characterized in that: the scope of described first gap (D), second gap (E) and third space (F) all is 4~6 μ m.
4. the horizontal ultraprecise fluid pressure of double-pole dish according to claim 1 and 2 electric chief axis system is characterized in that: the scope of described the 4th gap (M), the 5th gap (N) and the 6th gap (H) all is 4~6 μ m.
5. the horizontal ultraprecise fluid pressure of double-pole dish according to claim 3 electric chief axis system is characterized in that: described first main shaft (10) and second main shaft (28) are hollow spindle.
6. the horizontal ultraprecise fluid pressure of double-pole dish according to claim 4 electric chief axis system is characterized in that: described first main shaft (10) and second main shaft (28) are hollow spindle.
7. according to claim 5 or the horizontal ultraprecise fluid pressure of 6 described double-pole dishes electric chief axis system, it is characterized in that: the scope of the diameter (d1) of described first thrust plate (4) and the diameter (d2) of second thrust plate (22) is Φ 400mm~Φ 500mm.
8. the horizontal ultraprecise fluid pressure of double-pole dish according to claim 7 electric chief axis system, it is characterized in that: described axis system also comprises a plurality of first reinforcements (39), and described a plurality of first reinforcements (39) are along the circumferential direction uniform to be packed on the outer face of first thrust plate (4).
9. according to claim 1,2,5, the horizontal ultraprecise fluid pressure of 6 or 8 described double-pole dishes electric chief axis system, it is characterized in that: described axis system also comprises a plurality of second reinforcements (40), and described a plurality of second reinforcements (40) are along the circumferential direction uniform to be packed on the outer face of second thrust plate (22).
CN2011201311315U 2011-04-28 2011-04-28 Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system Expired - Lifetime CN202021707U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011201311315U CN202021707U (en) 2011-04-28 2011-04-28 Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011201311315U CN202021707U (en) 2011-04-28 2011-04-28 Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system

Publications (1)

Publication Number Publication Date
CN202021707U true CN202021707U (en) 2011-11-02

Family

ID=44846675

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011201311315U Expired - Lifetime CN202021707U (en) 2011-04-28 2011-04-28 Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system

Country Status (1)

Country Link
CN (1) CN202021707U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102241084A (en) * 2011-04-28 2011-11-16 哈尔滨工业大学 Double-cutterhead horizontal ultra-precision hydrostatic motorized spindle system
CN102862238A (en) * 2012-09-18 2013-01-09 哈尔滨工业大学 Accuracy design method based on frequency domain error distribution for ultraprecise fly cutting machine tool
CN103056397A (en) * 2012-12-31 2013-04-24 哈尔滨工业大学 Large-diameter ultra-precise air static pressure rotating shafting
CN103692561A (en) * 2013-12-30 2014-04-02 哈尔滨工业大学 Surface microdefect fast search and micro-milling repair device for large-diameter KDP crystal elements

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102241084A (en) * 2011-04-28 2011-11-16 哈尔滨工业大学 Double-cutterhead horizontal ultra-precision hydrostatic motorized spindle system
CN102241084B (en) * 2011-04-28 2013-11-13 哈尔滨工业大学 Double-cutterhead horizontal ultra-precision hydrostatic motorized spindle system
CN102862238A (en) * 2012-09-18 2013-01-09 哈尔滨工业大学 Accuracy design method based on frequency domain error distribution for ultraprecise fly cutting machine tool
CN102862238B (en) * 2012-09-18 2014-12-03 哈尔滨工业大学 Accuracy design method based on frequency domain error distribution for ultraprecise fly cutting machine tool
CN103056397A (en) * 2012-12-31 2013-04-24 哈尔滨工业大学 Large-diameter ultra-precise air static pressure rotating shafting
CN103692561A (en) * 2013-12-30 2014-04-02 哈尔滨工业大学 Surface microdefect fast search and micro-milling repair device for large-diameter KDP crystal elements
CN103692561B (en) * 2013-12-30 2015-12-02 哈尔滨工业大学 Large-aperture KDP crystal element surface microdefect fast searching and micro-milling prosthetic device

Similar Documents

Publication Publication Date Title
CN100528475C (en) Bevel-gear right-angle milling head
CN202021707U (en) Double-cutter head horizontal ultra-precision liquid static pressure electric spindle system
CN201862784U (en) Rear-mounted direct-driven high-speed hydrostatic main shaft structure of numerical control machine tool
CN101480778A (en) Direct driving type accurate turn plate
CN101229590A (en) Ultra-sophisticated aerostatic motorized spindle system
CN101554709A (en) Motor built-in polishing machine turntable
CN110732887A (en) ultra-precision hydrostatic pressure turntable
CN203636504U (en) Precise rotary working table
CN202200044U (en) Direct-driven static pressure rotary worktable
CN110594379B (en) Nut driving type hydrostatic lead screw transmission pair and machine tool
CN102241084B (en) Double-cutterhead horizontal ultra-precision hydrostatic motorized spindle system
CN102335755A (en) Large-sized precise direct-driving main shaft structure
CN102266952B (en) High-precision high-rigidity large-torque hydrostatic piezoelectric spindle
EP3073133B1 (en) Output shaft of cycloid hydraulic motor and shaft valve flow-distribution cycloid hydraulic motor
CN203426456U (en) Large-size precise direct-driven main shaft structure of NC (Numerical Control) lathe
CN103394711B (en) Large-size precise direct-drive spindle structure of numerical-control lathe
CN103692290A (en) Precise rotating table
CN103480880A (en) Tool rest structure outputting power in radial direction and machine tool
CN203556965U (en) Workpiece box of numerically-controlled gear milling machine for spiral bevel gear
CN202317040U (en) Gear shaving machine tool spindle
CN110578780A (en) Dual-drive sliding screw transmission pair and micro-feeding device formed by same
CN202224662U (en) Hydrostatic-pressure electric main shaft with high precision, high rigidity and large torque
CN102371364A (en) Tooling spindle of gear grinding machine
CN102151853A (en) Vertical ultra-precise hydrostatic pressure electric main shaft system
CN202621940U (en) High-speed accurate external plane throttling hybrid bearing electric spindle

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20111102

Effective date of abandoning: 20131113

RGAV Abandon patent right to avoid regrant