CN201959582U - Condensation device and acid tank system - Google Patents
Condensation device and acid tank system Download PDFInfo
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- CN201959582U CN201959582U CN2010206792764U CN201020679276U CN201959582U CN 201959582 U CN201959582 U CN 201959582U CN 2010206792764 U CN2010206792764 U CN 2010206792764U CN 201020679276 U CN201020679276 U CN 201020679276U CN 201959582 U CN201959582 U CN 201959582U
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- Prior art keywords
- layer sleeve
- airduct
- acid
- condensing unit
- acid tank
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Abstract
The utility model provides a condensation device which is fixed on the outer wall of an air pipe. The condensation device comprises an inner sleeve pipe and an outer sleeve pipe, wherein the inner sleeve pipe is tightly clung to the outer wall of the air pipe; the outer sleeve pipe is sleeved outside the inner sleeve pipe; and a refrigerating matter is arranged between the outer sleeve pipe and the inner sleeve pipe. The utility model further provides an acid tank system which can extremely separate water vapor in acid mist from acid gas when the acid mist passes through the air pipe and discharge the acid gas from a drainage pipeline in the form of liquid acid, thereby preventing the acid mist from condensing in the air pipe and greatly enhancing the capability of the air pipe for exhausting the acid mist.
Description
Technical field
The utility model relates to semiconductor technology, the acid tank system that relates in particular to a kind of condensing unit and comprise described condensing unit.
Background technology
When crystal column surface is carried out wet-etching technology, need use acid tank, wafer is put into the one specific period of acid tank submergence that fills etching liquid, acid tank can be heated to the temperature that needs.When utilizing acid tank to carry out wet etching, difference according to etching technics requires needs to use various chemical solutions, some chemical solution has very big volatility, it is special when acid tank is heated to higher temperature, acid mist is very big in the acid tank environment, process conditions are impacted, and corrode other parts easily.
In order to solve the influence that produces acid mist by the solution in the acid tank, acid mist need be discharged to outside the acid tank environment.Fig. 1 is existing acid mist system architecture schematic diagram.With reference to Fig. 1, be provided with draught hood 12 in acid tank 11 upper ends, one end of draught hood 12 is aimed at acid tank 11, the other end of draught hood 12 is connected with an end of airduct 13, acid mist 17 is discharged from the other end of airduct 13, the other end from an end of draught hood 12 to airduct 13 forms air pipeline 14, is provided with blower fan 15 in the other end port of airduct 13, and described blower fan 15 is used for producing negative pressure acid mist 17 is detached acid tank equipment.The higher acid mist 17 of temperature runs into cold airduct 13 in the process yet detach at acid mist 17, can be condensed into drop and accumulate acid solution 16 gradually at airduct 13 inwalls, and acid solution 16 gathers the bent angle and the lower position place of airduct 13 at last.Along with being on the increase of acid solution 16, the blast at air pipeline 14 places of acid solution 16 gatherings is diminished, and then cause acid mist 17 in time not discharge from the other end of airduct 13, prolonged the time that acid mist 17 retains in airduct 13, finally cause acid mist 17 in time not discharge, process conditions are produced harmful effect, and can corrode the parts of acid tank equipment.
In order to solve the above-mentioned blast problem that the acid mist 17 that caused can not in time discharge that diminishes, at present, industry attempts at airduct 13 bent angles or lower position place ACID being installed, the acid solution that accumulates after the condensation is discharged by ACID, the blast of air pipeline 14 is recovered to some extent, for example, 40KP when blast is accumulated by initial acid solution brings up to 120KP, even surpass 120KP, and because the recovery of blast makes acid solution diminish at the bent angle of airduct 13 or the probability of lower position place accumulation again.Yet the pump drainage ability that ACID can only recover airduct 13 is installed at bent angle or lower position place at airduct 13 for whole acid mist system, but can not strengthen the pump drainage ability of airduct 13.
The utility model content
The purpose of this utility model is to provide the acid tank system of a kind of condensing unit and use condensing unit, to solve the problem that how to strengthen airduct pump drainage ability.
For addressing the above problem, the utility model proposes a kind of condensing unit, be fixed on the outer wall of airduct, described condensing unit comprises: inner layer sleeve and outer layer sleeve, described inner layer sleeve is close to the outer wall of described airduct, described outer layer sleeve is set in outside the described inner layer sleeve, is provided with cooling substance between described outer layer sleeve and the inner layer sleeve.
Preferably, in described condensing unit, described condensing unit also comprises inlet pipe and goes out pipe, and described inlet pipe is connected with an end of outer layer sleeve, described go out to manage be connected with the other end of outer layer sleeve.
Preferably, in described condensing unit, described inner layer sleeve and outer layer sleeve be shape in the shape of a spiral all.
Preferably, in described condensing unit, described inner layer sleeve and outer layer sleeve all are " U " shape.
Preferably, in described condensing unit, described cooling substance is water or cold air.
The utility model has also proposed a kind of acid tank system that uses condensing unit, comprise acid tank, draught hood, airduct and condensing unit, one end of described draught hood is aimed at acid tank, the other end of described draught hood is connected with described airduct, described condensing unit comprises: inner layer sleeve and outer layer sleeve, described inner layer sleeve is close to the outer wall of described airduct, and described outer layer sleeve is set in outside the described inner layer sleeve, is provided with cooling substance between described outer layer sleeve and the inner layer sleeve.
Preferably, in the acid tank system of described use condensing unit, described acid tank system also comprises the Drainage pipe that is connected with described airduct.
Preferably, in the acid tank system of described use condensing unit, described acid tank system also comprises the tapping valve that is arranged on the described Drainage pipe.
Preferably, in the acid tank system of described use condensing unit, described acid tank system also comprises the blower fan that is connected with described airduct.
Compared with prior art, the condensing unit that the utility model provides comprises inner layer sleeve and outer layer sleeve, by being provided with cooling substance between described outer layer sleeve and the inner layer sleeve, reduce the temperature of wind pipe wall, rely on the temperature of the cooling substance control wind pipe wall in the condensing unit, further control the environment temperature in the airduct path.The acid tank system that the utility model provides, just the steam in the acid mist is separated with acid gas to greatest extent during at acid mist by airduct, form with acid solution is discharged from Drainage pipe, avoids acid mist to condense in airduct, strengthens the problem of airduct pump drainage acid mist ability greatly.
Description of drawings
Fig. 1 is existing acid mist system architecture schematic diagram;
Fig. 2 is the structural representation of the condensing unit of the utility model embodiment;
Fig. 3 is the structural representation of the acid tank system of the utility model embodiment.
The specific embodiment
Below in conjunction with the drawings and specific embodiments to the condensing unit that the utility model proposes and use the acid tank system of condensing unit to be described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only be used for conveniently, the purpose of aid illustration the utility model embodiment lucidly.
Core concept of the present utility model is, a kind of condensing unit is provided, described condensing unit comprises inner layer sleeve and outer layer sleeve, by being provided with cooling substance between described outer layer sleeve and the inner layer sleeve, reduce the temperature of wind pipe wall, rely on the temperature of the cooling substance control wind pipe wall in the condensing unit, further control the environment temperature in the airduct path.The acid tank system that the utility model provides, just the steam in the acid mist is separated with acid gas to greatest extent during at acid mist by airduct, form with acid solution is discharged from Drainage pipe, avoids acid mist to condense in airduct, strengthens the problem of airduct pump drainage acid mist ability greatly.
Fig. 2 is the structural representation of the condensing unit of the utility model embodiment.With reference to figure 2, condensing unit is fixed on the outer wall of airduct 211, described condensing unit comprises: inner layer sleeve 212 and outer layer sleeve 213, described inner layer sleeve 212 is close to the outer wall of described airduct 211, described outer layer sleeve 213 is set in outside the described inner layer sleeve 212, is provided with cooling substance between described outer layer sleeve 213 and the inner layer sleeve 212.
Preferably, described condensing unit also comprises inlet pipe 214 and goes out pipe 215, and described inlet pipe 214 is connected with an end of outer layer sleeve 213, describedly goes out to manage 215 and is connected with the other end of outer layer sleeve 213.The cooling substance that is provided with between outer layer sleeve 213 and the inner layer sleeve 212 enters from inlet pipe 214 constantly, and discharges from going out pipe 215, makes between outer layer sleeve 213 and the inner layer sleeve 212 to keep stationary temperature.
Further, inner layer sleeve 212 and outer layer sleeve 213 all are " U " shape, will be understood by those skilled in the art that described inner layer sleeve 212 and outer layer sleeve 213 not only are limited as all and are " U " shape, can also be twist or other similar forms.
In the present embodiment, described cooling substance is a water, and water flow into an end of the outer layer sleeve 213 that is connected with inlet pipe 214 from inlet pipe 214, and the pipe 215 that goes out that is connected from the other end with outer layer sleeve 213 flows out again, forms one and keeps the water of uniform temperature to circulate.By the water that is filled with between described outer layer sleeve 213 and the inner layer sleeve 212, reduce the temperature of wind pipe wall, rely on the temperature of the cooling substance control wind pipe wall in the condensing unit, further control the environment temperature in the airduct path.Will be understood by those skilled in the art that, described cooling substance not only is confined to water, it can also be cold air, cold air fills into an end of the outer layer sleeve 213 that is connected with inlet pipe 214 from inlet pipe 214, the pipe 215 that goes out that is connected from the other end with outer layer sleeve 213 sprays again, form a cold air circulation that keeps uniform temperature, wherein refrigerating plant for example is the refrigeration machine (not shown), is used for making the cold air that condensing unit needs.
Preferably, airduct 211 also is connected with Drainage pipe 216, just the steam in the acid mist is separated with acid gas to greatest extent during by airduct 211 at acid mist, discharges from Drainage pipe 211 with the form of acid solution 218.Described Drainage pipe 216 is provided with tapping valve 217, needs intraductal operation when overhauling or make regular check on, and closes tapping valve 217 to guarantee job safety.
Fig. 3 is the structural representation of the acid tank system of the utility model embodiment.With reference to Fig. 3, acid tank system 30 comprises acid tank 31, draught hood 32, airduct 211 and condensing unit, one end of described draught hood 32 is aimed at acid tank 31, the other end of described draught hood 32 is connected with described airduct 211, described condensing unit comprises: inner layer sleeve 212 and outer layer sleeve 213, described inner layer sleeve 212 is close to the outer wall of described airduct 211, and described outer layer sleeve 213 is set in outside the described inner layer sleeve 212, is provided with cooling substance between described outer layer sleeve 213 and the inner layer sleeve 212.
Further, described acid tank system 30 also comprises the blower fan 35 that is connected with described airduct, and the negative pressure that described blower fan 35 is used to produce is so that detach acid tank 31 surperficial environment with acid mist.
In the present embodiment, used chemical substance mainly is H in the acid tank 31
2SO
4And H
2O
2, the temperature in the acid tank 31 reaches 125 ℃, H
2O
2Under hot conditions, very easily resolve into water and produce a large amount of steam, and H
2SO
4Under heating condition, also can produce acid gas, with H
2O
2The steam that produces is in conjunction with producing a large amount of acid mist 37, at this moment, open blower fan 35, one end of draught hood 32 is aimed at acid tank 31, the negative pressure that produces by blower fan 35 detaches acid tank 31 surperficial environment with acid mist 37, acid mist 37 enters airduct 211, by the condensing unit that is arranged on airduct 211 outer walls the steam in the acid mist 37 is separated with acid gas to greatest extent, be filled with the water of the low temperature of continual renovation between the inner layer sleeve 212 of condensing unit and the outer layer sleeve 213, make airduct 211 outer walls that contact with inner layer sleeve 212 maintain lower temperature, further make the environment temperature step-down of airduct 211 paths, acid mist 37 condensation rapidly under the low temperature environment of airduct 211 paths by airduct 211, steam in the acid mist 37 separates with acid gas to greatest extent, discharges from the Drainage pipe 216 of airduct 211 with the form of acid solution 218.Remove to greatest extent by the steam in 211 pairs of acid mists 37 of described airduct, make the water vapour content that contains in the acid mist 37 by airduct 211 seldom, the gathering that is not easy to condense at airduct 211 places has strengthened the ability of system's pump drainage acid mist 37.
Obviously, those skilled in the art can carry out various changes and modification to utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (9)
1. condensing unit, be fixed on the outer wall of airduct, it is characterized in that, described condensing unit comprises: inner layer sleeve and outer layer sleeve, described inner layer sleeve is close to the outer wall of described airduct, described outer layer sleeve is set in outside the described inner layer sleeve, is provided with cooling substance between described outer layer sleeve and the inner layer sleeve.
2. condensing unit as claimed in claim 1 is characterized in that, described condensing unit also comprises inlet pipe and go out pipe, and described inlet pipe is connected with an end of outer layer sleeve, described go out to manage be connected with the other end of outer layer sleeve.
3. condensing unit as claimed in claim 1 is characterized in that, described inner layer sleeve and outer layer sleeve be shape in the shape of a spiral all.
4. condensing unit as claimed in claim 1 is characterized in that, described inner layer sleeve and outer layer sleeve all are " U " shape.
5. as each described condensing unit in the claim 1 to 4, it is characterized in that described cooling substance is water or cold air.
6. acid tank system, comprise acid tank, draught hood, airduct and condensing unit, one end of described draught hood is aimed at acid tank, the other end of described draught hood is connected with described airduct, it is characterized in that described condensing unit comprises: inner layer sleeve and outer layer sleeve, described inner layer sleeve is close to the outer wall of described airduct, described outer layer sleeve is set in outside the described inner layer sleeve, is provided with cooling substance between described outer layer sleeve and the inner layer sleeve.
7. acid tank as claimed in claim 6 system is characterized in that, described acid tank system also comprises the Drainage pipe that is connected with described airduct.
8. acid tank as claimed in claim 7 system is characterized in that, described acid tank system also comprises the tapping valve that is arranged on the described Drainage pipe.
9. acid tank as claimed in claim 6 system is characterized in that, described acid tank system also comprises the blower fan that is connected with described airduct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206792764U CN201959582U (en) | 2010-12-24 | 2010-12-24 | Condensation device and acid tank system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206792764U CN201959582U (en) | 2010-12-24 | 2010-12-24 | Condensation device and acid tank system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201959582U true CN201959582U (en) | 2011-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206792764U Expired - Fee Related CN201959582U (en) | 2010-12-24 | 2010-12-24 | Condensation device and acid tank system |
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|---|---|
| CN (1) | CN201959582U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109876488A (en) * | 2018-12-28 | 2019-06-14 | 河北工程大学 | A kind of automatic water-removal device of mine pressure ventilation system |
-
2010
- 2010-12-24 CN CN2010206792764U patent/CN201959582U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109876488A (en) * | 2018-12-28 | 2019-06-14 | 河北工程大学 | A kind of automatic water-removal device of mine pressure ventilation system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130325 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130325 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110907 Termination date: 20181224 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |