CN201914617U - Chemical solution storage equipment - Google Patents
Chemical solution storage equipment Download PDFInfo
- Publication number
- CN201914617U CN201914617U CN2010206573875U CN201020657387U CN201914617U CN 201914617 U CN201914617 U CN 201914617U CN 2010206573875 U CN2010206573875 U CN 2010206573875U CN 201020657387 U CN201020657387 U CN 201020657387U CN 201914617 U CN201914617 U CN 201914617U
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- chemical liquids
- pipeline
- storage equipment
- chemical solution
- memory devices
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- Jet Pumps And Other Pumps (AREA)
Abstract
The utility model discloses chemical solution storage equipment, comprising a plurality of chemical solution storages, a chemical solution protection device and a controller, wherein the chemical solution protection device comprises a gas conveying pipeline, a chemical solution conveying pipeline, a chemical solution distribution pipeline, a plurality of liquid level sensors, and a controller; the gas conveying pipeline, the chemical solution conveying pipeline, and the chemical solution distribution pipeline are connected with the chemical solution storages respectively; the liquid level sensors are arranged at different altitudes on the side wall of each chemical solution storage; and the controller is connected with each pipeline and the liquid level sensors to control the on/off of the pipelines and detect the liquid level of the chemical solution. Through the chemical solution storage equipment, the liquid in the chemical solution storages can be dynamically protected; the air above the chemical solution in the storages can be kept to be dynamically balanced along with the ascending and descending of the liquid level in the using process of the chemical solution, and the chemical solution storage equipment has a simple structure and is easy to operate.
Description
Technical field
The utility model relates to quartz conductor cleaning technique field, relates in particular to a kind of chemical liquids storage equipment.
Background technology
At semicon industry, need carry out various cleanings to silicon chip, in the process of cleaning, can use various chemical liquids.Generally speaking, chemical liquids all needs to be placed in the chemical vessel, as groove or jar the inside, it is deposited and the process used is: the chemical liquids of at first irritating a constant volume in container, in use the liquid level of chemical liquids can constantly descend in the container, when dropping to certain liquid level, need to replenish chemical liquids again, so repeatedly.At present, in the prior art, usually not to any safety method of taking of chemical liquids, in use fluctuation of pressure is bigger can to cause chemical liquids like this, is not easy to the distribution of later stage to chemical liquids.
In the patent No. is 5383574 US Patent, mention a kind of chemical liquids storage means of gas shield, used N
2With the method for vacuum the chemical liquids in the groove is protected, when carrying chemical liquids, used vacuum and take part N in the groove away
2, can replenish N to groove when the chemical liquids in the groove is assigned to the PROCESS FOR TREATMENT unit
2But this device more complicated, control corresponding are also complicated.
The utility model content
(1) technical matters that will solve
Technical problem to be solved in the utility model is: the chemical liquids storage equipment that a kind of simple in structure, processing ease is provided.
(2) technical scheme
For addressing the above problem, the utility model provides a kind of chemical liquids storage equipment, this equipment comprises some chemical liquids memory devices, chemical liquids fender guard and controller, described chemical liquids fender guard comprises: gas transfer pipeline, be connected with described some chemical liquids memory devices, deliver a gas in described some chemical liquids memory devices, and unnecessary gas is discharged from exhaust gear; The chemical liquids transfer line is connected with described some chemical liquids memory devices, carries chemical liquids to described some chemical liquids memory devices; The chemical liquids distribution circuit is connected with described some chemical liquids memory devices, the chemical liquids of memory allocated in described some chemical liquids memory devices; The differing heights place is provided with some level sensors on the sidewall of each described chemical liquids memory device; Controller all links to each other with described gas transfer pipeline, chemical liquids transfer line, chemical liquids distribution circuit and each level sensor, controls the break-make of each pipeline, and the liquid level signal that receives each level sensor.
Wherein, this equipment also comprises:
Chemical liquids dump pipeline links to each other with described some chemical liquids memory devices, is used for the chemical liquids that is stored in described chemical liquids memory device is discharged by chemical liquids dump pipeline.
Wherein, described gas transfer pipeline comprises:
Be connected to pressure regulating valve, differential pressure valve, flow counter, first check valve and gas reservoir between gas access and the described exhaust gear in turn, described gas reservoir all links to each other with described some chemical liquids memory devices, and be provided with liquid sensor on every section connecting tube, described liquid sensor all links to each other with described controller.
Wherein, and be provided with the pipeline on-off system that links to each other with described controller on every section described chemical liquids transfer line of each described chemical liquids memory device bonded assembly, described pipeline on-off system is pneumatic valve or electromagnetic valve.
Wherein, with on every section described chemical liquids distribution circuit of each described chemical liquids memory device bonded assembly be provided with engine installation.
Wherein, described engine installation is a pump.
Wherein, described chemical liquids dump pipeline is provided with second check valve.
Wherein, the differing heights place is provided with three level sensors on the sidewall of described each described chemical liquids memory device.
Wherein, described gas is nitrogen.
(3) beneficial effect
Equipment of the present utility model can carry out dynamic protection to the liquid in a plurality of chemical liquids memory devices, along with the rising and the decline of liquid level in the chemical liquids use, can keep the gas in the chemical liquids sky in the memory device to be in dynamical equilibrium, and simple in structure, processing ease.
Description of drawings
Fig. 1 is the chemical liquids storage equipment structural representation according to a kind of embodiment of the utility model;
Fig. 2 is according to based on the chemical liquids storage of the chemical liquids storage equipment of a kind of embodiment of the utility model and divide the distribution controlling method diagram of circuit.
The specific embodiment
The chemical liquids storage equipment that the utility model proposes is described as follows in conjunction with the accompanying drawings and embodiments.
As shown in Figure 1, comprise some chemical liquids memory devices, chemical liquids fender guard and controller according to the chemical liquids storage equipment of one embodiment of the present invention, wherein, the chemical liquids fender guard comprises:
Gas transfer pipeline is connected with some chemical liquids memory devices, is used for delivering a gas to some chemical liquids memory devices, and unnecessary gas is discharged from exhaust gear;
The chemical liquids transfer line is connected with some chemical liquids memory devices, is used for carrying as for dry chemical liquid memory device of chemical liquids;
The chemical liquids distribution circuit is connected with some chemical liquids memory devices, is used for the chemical liquids of memory allocated in some chemical liquids memory devices;
The differing heights place is provided with some level sensors on the sidewall of each chemical liquids memory device, and three level sensors preferably are set at the differing heights place in the present embodiment;
Controller all links to each other with gas transfer pipeline, chemical liquids transfer line, chemical liquids distribution circuit and each level sensor, is used to control the break-make of each pipeline, and detects the chemical liquids liquid level.
This equipment also comprises: chemical liquids dump pipeline, link to each other with some chemical liquids memory devices, and when being used for level sensor and breaking down, the chemical liquids that is stored in the chemical liquids memory device is discharged by chemical liquids dump pipeline.
As shown in FIG., used two chemical liquids memory devices in the chemical liquids storage equipment of present embodiment, be respectively chemical liquids memory device 19 and chemical liquids memory device 20, the level sensor on it is respectively 11,12,13 and 14,15,16.Gas transfer pipeline comprises: be connected to pressure regulating valve 1, differential pressure valve 2, flow counter 3, first check valve 4 and gas reservoir 5 between gas access and the exhaust gear in turn, gas reservoir all links to each other with two chemical liquids memory devices, and be provided with liquid sensor on every section connecting tube, being respectively 7, two liquid sensors of level sensor 6 and level sensor all links to each other with controller 21.Be provided with on every section chemical liquids transfer line of each chemical liquids memory device bonded assembly and controller 21 bonded assembly pipeline on-off systems, can be electromagnetic valve or pneumatic valve, be preferably pneumatic valve 9 and pneumatic valve 10 among the figure, at this moment, controller comprises electromagnetic valve and programmable logic controller (PLC) PLC, the switching of PLC control electromagnetic valve, and the switching of electromagnetic valve will cause the switching of pneumatic valve, thus the break-make of control chemical liquids pipeline.Be provided with engine installation on every section chemical liquids distribution circuit of each chemical liquids memory device bonded assembly, be preferably pump 17 and pump 18.Chemical liquids dump pipeline is provided with second check valve 8.
As shown in Figure 2, the invention allows for a kind of chemical liquids storage and branch distribution controlling method based on above-mentioned chemical liquids storage equipment, this method comprises:
S1. utilize gas discharging apparatus that the chemical liquids memory device is become vacuum, open gas transfer pipeline, in equipment, feed nitrogen.
This step specific implementation process is: at first with gas discharging apparatus the chemical liquids memory device is evacuated, opens supplying nitrogen in the air shooter road direction equipment then.Before opening gas transfer pipeline, pressure regulating valve 1 and flow counter 3 are set, preferably, pressure regulating valve 1 can be set to 10psi (pound/sq in), flow counter 3 is set to 10L/min, and simultaneously, the pressure reduction of differential pressure valve 2 is 3psi.The capacity of gas reservoir 5 is 2.5L in the present embodiment, and the capacity of chemical liquids memory device is 10L, adds the nitrogen in each pipeline, needs the time of delivery of the general 2.5min of setting.If the flow set of flow counter 3 is bigger, corresponding required time will be less.The time of gas delivery can be greater than first setting-up time that sets, and unnecessary nitrogen can flow in the gas discharging apparatus.
S2. behind first setting-up time,, open the chemical liquids transfer line, in some chemical liquids memory devices, carry chemical liquids by controller 21 control pneumatic valves 9,10.
S3. along with the continuous conveying of chemical liquids, the chemical liquids liquid level in the memory device constantly rises, if first level sensor 12,15 detects chemical liquids, then closes the chemical liquids transfer line, stops to carry chemical liquids in the chemical liquids memory device.The bubble that produces in the chemical liquids course of conveying can run up, and gathers the sky of chemical liquids, is constantly carrying N again simultaneously
2, in this case, more gas will be discharged from gas discharging apparatus, has both comprised the part N that is carried
2, comprise a small amount of gas that overflows in the chemical liquids again.
S4. in the chemical liquids memory device 19,20 enough chemical liquids have been arranged, use chemical liquids if desired, open pump 17,18, open the chemical liquids distribution circuit, use in the middle of chemical liquids is dispensed to technology, detect less than chemical liquids until second level sensor 13,16, then controller 21 is opened the chemical liquids transfer line once more, and repeating step S3-S4.
Generally, can't use chemical liquids dump pipeline, employed here is check valve 8, but if unexpected situation, such as after step S2, the 3rd level sensor 11,14 of any vessel or middle level sensor 12,15 all break down, and liquid level rises always, and this situation is comparison danger.If there is not the dump device, the chemical liquids container explodes possibly, thereby injures life, so be provided with this pipeline for security consideration.When chemical liquids was promptly discharged, chemical liquids also can flow through from gas transfer pipeline, and this moment, liquid sensor 6 and 7 can perceive the existence of chemical liquids, reported to the police thereby notification controller 21 produces.
Above embodiment only is used to illustrate the utility model; and be not to restriction of the present utility model; the those of ordinary skill in relevant technologies field; under the situation that does not break away from spirit and scope of the present utility model; can also make various variations and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (9)
1. chemical liquids storage equipment, this equipment comprises some chemical liquids memory devices, chemical liquids fender guard and controller, it is characterized in that, described chemical liquids fender guard comprises:
Gas transfer pipeline is connected with described some chemical liquids memory devices, deliver a gas in described some chemical liquids memory devices, and unnecessary gas is discharged from exhaust gear;
The chemical liquids transfer line is connected with described some chemical liquids memory devices, carries chemical liquids to described some chemical liquids memory devices;
The chemical liquids distribution circuit is connected with described some chemical liquids memory devices, the chemical liquids of memory allocated in described some chemical liquids memory devices;
The differing heights place is provided with some level sensors on the sidewall of each described chemical liquids memory device;
Controller all links to each other with described gas transfer pipeline, chemical liquids transfer line, chemical liquids distribution circuit and each level sensor, controls the break-make of each pipeline, and the liquid level signal that receives each level sensor.
2. chemical liquids storage equipment as claimed in claim 1 is characterized in that, this equipment also comprises:
Chemical liquids dump pipeline with described some chemical liquids memory devices, is used for the chemical liquids that is stored in described chemical liquids memory device is discharged by chemical liquids dump pipeline.
3. chemical liquids storage equipment as claimed in claim 1 is characterized in that, described gas transfer pipeline comprises:
Be connected to pressure regulating valve, differential pressure valve, flow counter, first check valve and gas reservoir between gas access and the described exhaust gear in turn, described gas reservoir all links to each other with described some chemical liquids memory devices, and be provided with liquid sensor on every section connecting tube, described liquid sensor all links to each other with described controller.
4. chemical liquids storage equipment as claimed in claim 1, it is characterized in that, with be provided with the pipeline on-off system that links to each other with described controller on every section described chemical liquids transfer line of each described chemical liquids memory device bonded assembly, described pipeline on-off system is pneumatic valve or electromagnetic valve.
5. chemical liquids storage equipment as claimed in claim 1 is characterized in that, and is provided with engine installation on every section described chemical liquids distribution circuit of each described chemical liquids memory device bonded assembly.
6. chemical liquids storage equipment as claimed in claim 5 is characterized in that, described engine installation is a pump.
7. chemical liquids storage equipment as claimed in claim 2 is characterized in that, described chemical liquids dump pipeline is provided with second check valve.
8. chemical liquids storage equipment as claimed in claim 2 is characterized in that, the differing heights place is provided with three level sensors on the sidewall of described each described chemical liquids memory device.
9. as each described chemical liquids storage equipment of claim 1-8, it is characterized in that described gas is nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206573875U CN201914617U (en) | 2010-12-08 | 2010-12-08 | Chemical solution storage equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206573875U CN201914617U (en) | 2010-12-08 | 2010-12-08 | Chemical solution storage equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201914617U true CN201914617U (en) | 2011-08-03 |
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ID=44414425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206573875U Expired - Lifetime CN201914617U (en) | 2010-12-08 | 2010-12-08 | Chemical solution storage equipment |
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| Country | Link |
|---|---|
| CN (1) | CN201914617U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102092540A (en) * | 2010-12-08 | 2011-06-15 | 北京七星华创电子股份有限公司 | Chemical liquid storage equipment and chemical liquid storage and distribution control method |
| CN103939739A (en) * | 2014-04-18 | 2014-07-23 | 无锡尚德太阳能电力有限公司 | Concentrated strong acid feeding system |
-
2010
- 2010-12-08 CN CN2010206573875U patent/CN201914617U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102092540A (en) * | 2010-12-08 | 2011-06-15 | 北京七星华创电子股份有限公司 | Chemical liquid storage equipment and chemical liquid storage and distribution control method |
| CN103939739A (en) * | 2014-04-18 | 2014-07-23 | 无锡尚德太阳能电力有限公司 | Concentrated strong acid feeding system |
| CN103939739B (en) * | 2014-04-18 | 2017-01-11 | 无锡尚德太阳能电力有限公司 | Concentrated strong acid feeding system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110803 |