CN201883149U - 废微蚀液再生与铜回收装置 - Google Patents
废微蚀液再生与铜回收装置 Download PDFInfo
- Publication number
- CN201883149U CN201883149U CN2010205661510U CN201020566151U CN201883149U CN 201883149 U CN201883149 U CN 201883149U CN 2010205661510 U CN2010205661510 U CN 2010205661510U CN 201020566151 U CN201020566151 U CN 201020566151U CN 201883149 U CN201883149 U CN 201883149U
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- CN
- China
- Prior art keywords
- micro
- hydrogen peroxide
- etching solution
- pipeline
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005530 etching Methods 0.000 title claims abstract description 149
- 239000010949 copper Substances 0.000 title claims abstract description 82
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 74
- 239000002699 waste material Substances 0.000 title claims abstract description 53
- 230000008929 regeneration Effects 0.000 title claims abstract description 38
- 238000011069 regeneration method Methods 0.000 title claims abstract description 38
- 238000011084 recovery Methods 0.000 title abstract description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 246
- 238000001802 infusion Methods 0.000 claims abstract description 48
- 238000002360 preparation method Methods 0.000 claims abstract description 30
- 238000003860 storage Methods 0.000 claims abstract description 24
- 239000007788 liquid Substances 0.000 claims description 82
- 238000000354 decomposition reaction Methods 0.000 claims description 61
- 238000004070 electrodeposition Methods 0.000 claims description 37
- 238000005520 cutting process Methods 0.000 claims description 32
- 239000012530 fluid Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 36
- 230000008569 process Effects 0.000 abstract description 27
- 238000004519 manufacturing process Methods 0.000 abstract description 17
- 230000001172 regenerating effect Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 188
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 54
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 44
- 229910001431 copper ion Inorganic materials 0.000 description 37
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 239000008367 deionised water Substances 0.000 description 11
- 229910021641 deionized water Inorganic materials 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 238000005070 sampling Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 229960004643 cupric oxide Drugs 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 230000006378 damage Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 238000003487 electrochemical reaction Methods 0.000 description 5
- 238000005868 electrolysis reaction Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000003203 everyday effect Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000012958 reprocessing Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000005749 Copper compound Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- -1 and after testing Chemical compound 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010349 cathodic reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001880 copper compounds Chemical class 0.000 description 2
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 2
- 230000005518 electrochemistry Effects 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910000457 iridium oxide Inorganic materials 0.000 description 2
- 239000002075 main ingredient Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000004065 wastewater treatment Methods 0.000 description 2
- 102000003992 Peroxidases Human genes 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011083 clear filtration Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000009422 external insulation Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012452 mother liquor Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 108040007629 peroxidase activity proteins Proteins 0.000 description 1
- 238000005502 peroxidation Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- ing And Chemical Polishing (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010205661510U CN201883149U (zh) | 2010-10-19 | 2010-10-19 | 废微蚀液再生与铜回收装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010205661510U CN201883149U (zh) | 2010-10-19 | 2010-10-19 | 废微蚀液再生与铜回收装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201883149U true CN201883149U (zh) | 2011-06-29 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010205661510U Expired - Fee Related CN201883149U (zh) | 2010-10-19 | 2010-10-19 | 废微蚀液再生与铜回收装置 |
Country Status (1)
Country | Link |
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CN (1) | CN201883149U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101974756A (zh) * | 2010-10-19 | 2011-02-16 | 罗忠凯 | 废微蚀液再生与铜回收装置 |
CN102653867A (zh) * | 2012-05-15 | 2012-09-05 | 金悦通电子(翁源)有限公司 | 一种微蚀液再生方法和*** |
CN104726864A (zh) * | 2013-12-24 | 2015-06-24 | 张逸 | 一种微蚀液回收再生装置 |
-
2010
- 2010-10-19 CN CN2010205661510U patent/CN201883149U/zh not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101974756A (zh) * | 2010-10-19 | 2011-02-16 | 罗忠凯 | 废微蚀液再生与铜回收装置 |
CN102653867A (zh) * | 2012-05-15 | 2012-09-05 | 金悦通电子(翁源)有限公司 | 一种微蚀液再生方法和*** |
CN102653867B (zh) * | 2012-05-15 | 2014-04-02 | 金悦通电子(翁源)有限公司 | 一种微蚀液再生方法和*** |
CN104726864A (zh) * | 2013-12-24 | 2015-06-24 | 张逸 | 一种微蚀液回收再生装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HUNAN BOYI ENVIRONMENTAL TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: LUO ZHONGKAI Effective date: 20150506 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 411104 XIANGTAN, HUNAN PROVINCE TO: 411101 XIANGTAN, HUNAN PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20150506 Address after: 411101, No. 1, 190106 Fortune Plaza, 77 Ji'an Road, Xiangtan hi tech Zone, Hunan, China Patentee after: Hunan Boyi Environmental Protection Technology Co., Ltd. Address before: 411104, No. 2, building 4, building 306, 201 North Road, Yuhu District, Hunan, Xiangtan Patentee before: Luo Zhongkai |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110629 Termination date: 20181019 |