CN201801574U - Grating valve control device of vacuum film coating machine - Google Patents
Grating valve control device of vacuum film coating machine Download PDFInfo
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- CN201801574U CN201801574U CN2010205254092U CN201020525409U CN201801574U CN 201801574 U CN201801574 U CN 201801574U CN 2010205254092 U CN2010205254092 U CN 2010205254092U CN 201020525409 U CN201020525409 U CN 201020525409U CN 201801574 U CN201801574 U CN 201801574U
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Abstract
A grating valve control device of a vacuum film coating machine comprises an electric control system, a stepping motor and a photoelectric limiting mechanism. The stepping motor and the photoelectric limiting mechanism are both electrically connected with the electric control system, actions of the stepping motor and the photoelectric limiting mechanism are controlled by the electric control system, a motor shaft of the stepping motor is connected with a spindle of a grating valve via a connecting shaft, the photoelectric limiting mechanism consists of two photoelectric sensors and a blanking disc fixedly mounted on the connecting shaft, the blanking disc is provided with a light transmitting slit and capable of rotating along with the connecting shaft, and the two photoelectric sensors are mounted perpendicularly and respectively correspond to open state and close state of the grating valve. The grating valve control device is high in control precision, capable of repeating technological parameters of the vacuum film coating machine accurately so as to guarantee film coating quality, and realizing automatic control of opening angle of the grating valve.
Description
Technical field
The utility model relates to a kind of valve control device, more particularly, relates to a kind of grating control valve device of vacuum plating unit.
Background technology
When coating chamber bleed reach the base vacuum degree after, charging into working gas (as argon) and reactant gases (as nitrogen, oxygen and acetylene etc.) when carrying out plated film, in order to guarantee the coating process parameter stability, to guarantee that particularly the plated film internal ambience is stable, the vacuum plating chamber and the extraction pipe interface of ion film coating machine generally all are provided with light Gate valve, relation with the confined equilibrium gas supply flow and the speed of evacuation is stabilized in the predetermined furnace pressure scope plating chamber, the grating valve that uses adopts the valve board structure or the rotating baffle forms of window shutter form more at present, its function is controlled the switching degree of pump-line with the opening angle of regulating valve plate or rotatable baffle plate, realize the control pumping speed, stable plating indoor gas pressure.The device of the valve plate of existing adjusting light Gate valve or the opening angle of rotatable baffle plate, generally be that rotation axis by valve extends to outdoor, connect swing handle or crank again--mechanisms such as pull bar or cam and limit switch combination, with manually, traction drive such as electronic or pneumatic is controlled grating opening of valves angle.Manually peripheral hardware corner scale cards are adopted in control more, and the hand rotation handle forwards respective angles to and sentences pin-location, hole; Electric device is to mix up travel switch in advance on corresponding angle position, drives the rotating shaft of grating valve by motor-Minus speed case system and rotates, and its axle is provided with cam, turns to preset location, travel switch place; Pneumatics promotes cylinder piston with pressurized air, and drawing pull bar-crank mechanism removes to rotate light Gate valve main shaft again.Screw thread, nut are arranged on its pull bar, can adjust pull bar working portion length, realize the location thereby change the crank rotational angle.More than these in fact all are to adopt mechanical location or stop means, very coarse, back and forth the room is big, error is big.Simultaneously because factor affecting such as mechanical wear or cylinder pressure deficiencies, valve corner location is inaccurate, and poor repeatability, thereby cause that processing parameter can not accurately reproduce between the stove of stove causes quality of coating inconsistent or color is variant.
The utility model content
The purpose of this utility model is to provide a kind of control accuracy height, can accurately repeat the coating process parameter, guaranteeing coating quality, and can realize the grating control valve device of the vacuum plating unit of automatization control grating opening of valves angle.
Above-mentioned purpose of the present utility model is realized by following technique means: a kind of grating control valve device of vacuum plating unit, it is characterized in that: it comprises electric control system, stepper-motor and photoelectricity position-limit mechanism, stepper-motor and photoelectricity position-limit mechanism all are electrically connected with electric control system, by electric control system control step motor and the action of photoelectricity position-limit mechanism, the motor shaft of described stepper-motor is connected by the main shaft of coupling shaft with the grating valve, described photoelectricity position-limit mechanism is made of two photoelectric sensors and the blanking disc that is fixedly mounted on the described coupling shaft, have the printing opacity narrow slit on the described blanking disc, described two photoelectric sensors are fixedly mounted on the vacuum apparatus respectively with mutual vertical mode, two photoelectric sensors are U type inductor block, U type opening is contained the disk body that blanking disc has the printing opacity narrow slit, wherein, a photoelectric sensor is in horizontal installation site, the state that it is opened fully corresponding to the grating valve, another inductor block is in vertical installation site, it is corresponding to the complete closing state of grating valve, the built-in infrared source of described photoelectric sensor is installed in the side in the face of blanking disc, induction pieces is installed in the opposite side in the face of blanking disc, and relative with described light source position.Stepper-motor could rotate and drive the grating valve under the signal control of electric control system valve plate rotates, and the photoelectricity stop means can be limited the extreme angles that step motor shaft rotates, thereby the rotational limitation angle of valve plate is limited.
Described electric control system comprises signal input apparatus, direct supply, upper computer, lower computer and micro-stepping driving of stepping motor device, described lower computer is PLC, wherein be provided with the step motor control module, described signal input apparatus and upper computer or lower computer are electrically connected, between described direct supply and the micro-stepping driving of stepping motor device, between upper computer and the lower computer, between lower computer and the micro-stepping driving of stepping motor device, between lower computer and the described photoelectric sensor, be electrically connected respectively between micro-stepping driving of stepping motor device and the described stepper-motor.The signal input apparatus input signal is given upper computer or lower computer, sends a signal to the micro-stepping driving of stepping motor device after upper computer or lower computer calculation process, drives stepper-motor by the micro-stepping driving of stepping motor device and rotates specified angle.
Described signal input apparatus is the manual operation panel that can numeral shows corner, and described manual operation panel and described lower computer are electrically connected.Operator can need the valve plate angle of rotation by the input of manual operation panel, send a signal to the micro-stepping driving of stepping motor device then after the lower computer calculation process.
Described signal input apparatus is a touch-screen, and described touch-screen and described upper computer are electrically connected.Operator can give upper computer by the touch-screen input order, send downgoing signal then to lower computer after the upper computer calculation process, have lower computer to send a signal to the micro-stepping driving of stepping motor device again.
Described signal input apparatus comprises touch-screen, mass rate controller, vacuum measurement instrument, mass flow controller and vacuum sensing controler, is electrically connected respectively between described touch-screen and upper computer, lower computer and mass rate controller, lower computer and vacuum measurement instrument, mass rate controller and mass flow controller, vacuum measurement instrument and the vacuum sensing controler.Under this operator scheme, the switching angle of light Gate valve does not preset.Start computer control system earlier, the coating equipment operation enters the computer control system sequence of control.Except that grating valve drive system connected the step motor control module, airing system all was connected lower computer control corresponding module with the vacuum measurement system.Preset sequential and input gaseous species and flux values in touch-screen coating process parameter hurdle, reinitialize vacuum tightness in sequential and the stove, light Gate valve is set automatically.The coating equipment operation is by computer controlled automatic, in stove, import predetermined gas and flow chronologically, actual is to move under the condition of constant gas supply flow, and the interior vacuum tightness of stove is subjected to the variation of the speed of evacuation and changes, and the switching degree of grating valve is the method for bleeding regulating speed.When if the vacuum measuring gauge that vacuum measurement control module receives is measured numerical value variant with prevalue, the notice computer is given an order to the step motor control module, export corresponding pulse and count to driving mechanism, revise the switching angle of grating valve, take out joint speed with adjusting, finally allow the stove internal gas pressure be returned to prevalue.This process is that full-automatic operation realizes.
Usefulness of the present utility model is: (1) valve subtended angle locating mechanism adopts stepper-motor and the spacing combined mechanism of photoelectricity, because this locating mechanism is contactless to the measurement of motor shaft rotational angle with the location, there are not factor affecting such as room and wearing and tearing, so very accurate and good reproducibility; (2) can be manually or touch screen type control the opening angle of grating valve automatically, with bleeding regulating speed; (3) by programming, preset air feed kind and flow ， And and set stove internal gas pressure value, can come bleeding regulating speed by the opening angle that computer system is controlled light Gate valve automatically, realize that the stove internal gas pressure keeps in the scope that presets.
Description of drawings
Below in conjunction with description of drawings and specific embodiment the utility model is described further.
Fig. 1 is that the utility model grating control valve device is used in the structural representation in the vacuum apparatus;
Fig. 2 is the block diagram of electric control system in the utility model grating control valve device;
Fig. 3 is the block diagram of a structure of electric control system of the utility model grating control valve device, and this electric control system is a signal input apparatus with the manual operation panel;
Fig. 4 is the block diagram of another structure of electric control system of the utility model grating control valve device, and this electric control system is signal input apparatus with the touch-screen;
Fig. 5 is the block diagram of the another structure of electric control system of the utility model grating control valve device, and this electric control system can realize full automatic control.
Embodiment
Grating valve as shown in Figure 1 is installed on the vacuum apparatus, the grating valve is the throttling valve of the venetian blind type structure that is made of a plurality of parallel valve plates that are interconnected with one another by movable rod, it comprises grating main shaft 4, driven spindle 7, active valve plate 5, connecting rod 6 and driven valve plate 8, grating valve main shaft 4 is located on the sidewall 16 of vacuum chamber 15 by sealing socket assembly 14 transverse strands, the end is supported by bearing 9, initiatively valve plate 5 is fixedly mounted on the grating valve main shaft 4, and in grating valve main shaft 4 rotation processes, rotate synchronously, described driven spindle 7 also transverse strands is located on the sidewall 16 of vacuum chamber 15, and be positioned at the below (or top) of grating valve main shaft 4, described driven valve plate 8 is sleeved on the driven spindle 7, driven valve plate 8 rotates and rotates with driven spindle 7, described connecting rod 6 vertically is arranged on initiatively valve plate 5, and between the driven valve plate 8, its two ends are fixedly linked with active valve plate 5 and driven valve plate 8 respectively.
The switching process of grating valve is as follows: grating valve main shaft 4 rotates under external force, all be horizontal as active valve plate 5 among Fig. 1 and driven valve plate 8, corresponding grating valve is in full open mode, when grating valve main shaft 4 rotates counterclockwise, initiatively upwards upset of valve plate 5, drive the also upwards upset of driven valve plate 8 by connecting rod 6, block bleeding point gradually, when grating valve main shaft 4 goes to an angle of 90 degrees counterclockwise, initiatively valve plate 5 and driven valve plate 8 turn over to the vertical position on all, and this moment, the grating valve was in full closing state.After this only need clockwise rotate grating valve main shaft 4 and get final product if will open the grating valve.
Specific embodiment of the utility model one as shown in Figure 1 to Figure 3, the grating valve is the throttling valve of the venetian blind type structure that is made of a plurality of parallel valve plates that are interconnected with one another by movable rod 6, the grating control valve device of described vacuum plating unit, comprise active rotating shaft 4 and driven shaft 7, active rotating shaft 4 is fixedlyed connected with the active valve plate 5 of grating valve and can be driven initiatively valve plate 5 rotations, and driven shaft 7 is fixedlyed connected, can be rotated with valve plate 8 with all the other valve plates 8 of grating valve; Described grating control valve device also comprises electric control system, stepper-motor 1 and photoelectricity position-limit mechanism, stepper-motor 1 and photoelectricity position-limit mechanism all are electrically connected with electric control system, the motor shaft 2 of stepper-motor 1 is connected with grating valve main shaft 4 by coupling shaft 3, described photoelectricity position-limit mechanism is by photoelectric sensor 11, photoelectric sensor 13 and the blanking disc 10 that is fixedly mounted on the coupling shaft 3 constitute, be carved with printing opacity narrow slit 12 on the blanking disc 10, two photoelectric sensors all are fixedly mounted on the grating valve body mounting plate, wherein photoelectric sensor 11 is installed in the grating valve and opens fully when promptly initiatively valve plate 5 is in horizontality on the corresponding position, it is fully closed promptly when initiatively valve plate 5 is in plumbness on the corresponding position that another photoelectric sensor 13 is installed in the grating valve, the built-in infrared source of two photoelectric sensors is placed in the side in the face of blanking disc, and its induction pieces is placed in the opposite side in the face of blanking disc relative with light source position.Described electric control system comprises the manual operation panel 21 as signal input apparatus, direct supply 22, upper computer 23, lower computer 24 and micro-stepping driving of stepping motor device 25, lower computer 24 is PLC, wherein be provided with the step motor control module, manual operation panel 21 is electrically connected with lower computer, between direct supply 22 and the micro-stepping driving of stepping motor device 25, between upper computer 23 and the lower computer 24, between lower computer 24 and the micro-stepping driving of stepping motor device 25, between lower computer 24 and photoelectric sensor 12 and the photoelectric sensor 13, be electrically connected respectively between micro-stepping driving of stepping motor device 25 and the stepper-motor.
" advancing " button and " moving back " button and a digital indicator are arranged on the manual operation panel 21.They are connected with lower computer 24 respectively, in the PLC of lower computer 24, carried out corresponding programming, when operator whenever click " advancing " button, the step motor control module output respective numbers pulse of lower computer 24 is to micro-stepping driving of stepping motor device 25, driving stepper-motor makes the grating valve rotate counterclockwise 5 degree angles, indicating meter demonstrates the real-time closing angle of corresponding light Gate valve, whenever click " moving back " button, the pulse of control module output respective numbers is to driving mechanism, just can make the grating valve clockwise rotate 5 degree angles, indicating meter also shows real-time grating valve Zhang Kei angle simultaneously.
When the active valve plate 5 among Fig. 1 and valve plate 8 all are horizontal, the full open mode of corresponding light Gate valve, this moment, the printing opacity narrow slit 12 of blanking disc 10 was positioned at level attitude, it is the zero degree position, the infrared rays of the built-in infrared light sources emission of photoelectric sensor 11 passes the opposite side that printing opacity narrow slit 12 is mapped to blanking disc 10, is received by the induction receiving element of photoelectric sensor 11.Photoelectric sensor 11 sends the step motor control module that signal is sent to computer, only allows motor 1 to rotate counterclockwise.When stepper-motor 1 rotated counterclockwise, initiatively upwards upset of valve plate 5 drove also upwards upset of valve plate 8 by movable rod 6, blocks bleeding point gradually; When affecting active rotating shaft 4, stepper-motor 1 turn 90 degrees the angle counterclockwise, initiatively turn over to the vertical position on valve plate 5 and the valve plate 8, corresponding grating valve full closing state, this moment, blanking disc 10 also rotated counterclockwise an angle of 90 degrees, then printing opacity narrow slit 12 enters photoelectric sensor 13 breach induction zones, the infrared rays of the built-in infrared light sources emission of photoelectric sensor 13 passes printing opacity narrow slit 12 and is mapped to blanking disc 10 opposite sides, received by the induction receiving element of photoelectric sensor 13, photoelectric sensor 13 passes the signal to the step motor control module of computer, only allows motor to clockwise rotate; When the grating valve is in full closing state,, will open gradually by stepper-motor 1 if clockwise rotating then the grating valve.
Because printing opacity narrow slit and infrared beam are all very thin, it is again contactless measuring, and does not have factor affecting such as room and wearing and tearing, the very accurate and good reproducibility of this optoelectronic induction stop means.And by PLC and segmentation control, the corner of stepper-motor is very accurate, so can realize the accurate adjusting to grating opening of valves and closing angle.
As shown in Figure 4, specific embodiment two is that with the difference of embodiment one its signal input apparatus is a touch-screen 26, and touch-screen 26 is electrically connected with upper computer 23.Start computer control system during operation earlier, the coating equipment operation enters the computer control system sequence of control.Block in the light Gate of touch-screen coating process valve controlled variable and to preset sequential and light Gate opening of valves angle parameter, upper computer 23 is according to the instruction of importing on the touch-screen, to send down order, 24 of lower computers are carried out chronologically item by item, the i.e. step of order chronologically dynamo-electric machine control module output pulse is automatically pressed presetting angle to the driver drives motor and is rotated, and opens and closes the grating valve.
As shown in Figure 5, specific embodiment three is that with the difference of specific embodiment two its signal input apparatus comprises touch-screen 26, mass rate controller 27, vacuum measurement instrument 29, mass flow controller 28 and vacuum sensing controler 30, is electrically connected respectively between described touch-screen 26 and upper computer 23, lower computer 24 and mass rate controller 27, lower computer 24 and vacuum measurement instrument 27, mass rate controller 27 and mass flow controller 28, vacuum measurement instrument 29 and the vacuum sensing controler 30.Under this operator scheme, the switching angle of light Gate valve does not preset.Start computer control system earlier, the coating equipment operation enters the computer control system sequence of control.Except that grating valve drive system connected the step motor control module, airing system all was connected lower computer control corresponding module with the vacuum measurement system.Preset sequential and input gaseous species and flux values in touch-screen coating process parameter hurdle, reinitialize vacuum tightness in sequential and the stove, light Gate valve is set at automatically.The coating equipment operation is by computer controlled automatic, in stove, import predetermined gas and flow chronologically, actual is to move under the condition of constant gas supply flow, and the interior vacuum tightness of stove is subjected to the variation of the speed of evacuation and changes, and the switching degree of grating valve is the method for bleeding regulating speed.When if the vacuum measuring gauge that vacuum measurement control module receives is measured numerical value variant with prevalue, the notice computer is given an order to the step motor control module, export corresponding pulse and count to driving mechanism, revise the switching angle of grating valve, to regulate pumping speed, finally allow the stove internal gas pressure be returned to prevalue.This process is that full-automatic operation realizes.
Above embodiment is for the usefulness of understanding the utility model; be not to be to restriction of the present utility model; the those of ordinary skill in relevant field; on the basis of the described technical scheme of claim; can also make multiple variation or modification, these variations or modification should be understood to still belong to protection domain of the present utility model.
Claims (5)
1. the grating control valve device of a vacuum plating unit, it is characterized in that: it comprises electric control system, stepper-motor and photoelectricity position-limit mechanism, stepper-motor and photoelectricity position-limit mechanism all are electrically connected with electric control system, by electric control system control step motor and the action of photoelectricity position-limit mechanism, the motor shaft of described stepper-motor is connected by the main shaft of coupling shaft with the grating valve, described photoelectricity position-limit mechanism is made of two photoelectric sensors and the blanking disc that is fixedly mounted on the described coupling shaft, have the printing opacity narrow slit on the described blanking disc, it rotates with coupling shaft, described two photoelectric sensors are installed with mutual vertical mode, corresponding grating valve standard-sized sheet of difference and full-shut position, two photoelectric sensors are U type inductor block, U type opening is contained the disk body that blanking disc has the printing opacity narrow slit, wherein, a photoelectric sensor is in horizontal installation site, the state that it is opened fully corresponding to the grating valve, another inductor block is in vertical installation site, it is corresponding to the complete closing state of grating valve, the built-in infrared light sources of described photoelectric sensor is placed in the side in the face of blanking disc, induction pieces is placed in the opposite side in the face of blanking disc, and relative with described light source position.
2. grating control valve device according to claim 1, it is characterized in that: described electric control system comprises signal input apparatus, direct supply, upper computer, lower computer and micro-stepping driving of stepping motor device, described lower computer is PLC, wherein be provided with the step motor control module, described signal input apparatus and upper computer or lower computer are electrically connected, between described direct supply and the micro-stepping driving of stepping motor device, between upper computer and the lower computer, between lower computer and the micro-stepping driving of stepping motor device, between lower computer and the described photoelectric sensor, be electrically connected respectively between micro-stepping driving of stepping motor device and the described stepper-motor.
3. grating control valve device according to claim 2 is characterized in that: described signal input apparatus is for can numeral showing the manual operation panel of corner, and described manual operation panel and described lower computer are electrically connected.
4. grating control valve device according to claim 2 is characterized in that: described signal input apparatus is a touch-screen, and described touch-screen and described upper computer are electrically connected.
5. grating control valve device according to claim 2, it is characterized in that: described signal input apparatus comprises touch-screen, mass rate controller, vacuum measurement instrument, mass flow controller and vacuum sensing controler, is electrically connected respectively between described touch-screen and upper computer, lower computer and mass rate controller, lower computer and vacuum measurement instrument, mass rate controller and mass flow controller, vacuum measurement instrument and the vacuum sensing controler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205254092U CN201801574U (en) | 2010-09-09 | 2010-09-09 | Grating valve control device of vacuum film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205254092U CN201801574U (en) | 2010-09-09 | 2010-09-09 | Grating valve control device of vacuum film coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201801574U true CN201801574U (en) | 2011-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205254092U Expired - Lifetime CN201801574U (en) | 2010-09-09 | 2010-09-09 | Grating valve control device of vacuum film coating machine |
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| Country | Link |
|---|---|
| CN (1) | CN201801574U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104962914A (en) * | 2015-07-03 | 2015-10-07 | 成都工具研究所有限公司 | Industrial automatic vapor deposition equipment used for preparing DLC (diamond like carbon) film |
-
2010
- 2010-09-09 CN CN2010205254092U patent/CN201801574U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104962914A (en) * | 2015-07-03 | 2015-10-07 | 成都工具研究所有限公司 | Industrial automatic vapor deposition equipment used for preparing DLC (diamond like carbon) film |
| CN104962914B (en) * | 2015-07-03 | 2018-01-05 | 成都工具研究所有限公司 | Prepare the industrial automation vapor deposition apparatus of DLC film |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: 523820 Guangdong Province, Dongguan City Dalingshan Town Village fourth industrial zone. Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110420 |