CN201778144U - Feeder of mono-crystal furnace - Google Patents
Feeder of mono-crystal furnace Download PDFInfo
- Publication number
- CN201778144U CN201778144U CN2010205206559U CN201020520655U CN201778144U CN 201778144 U CN201778144 U CN 201778144U CN 2010205206559 U CN2010205206559 U CN 2010205206559U CN 201020520655 U CN201020520655 U CN 201020520655U CN 201778144 U CN201778144 U CN 201778144U
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- China
- Prior art keywords
- feeder
- quartz
- hammer
- quartzy
- cylindrical shell
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a feeder of a mono-crystal furnace; the center axis made of molybdenum of the device is arranged in a quartz cylinder, and is movably fixed in the cylinder through a radial carriage; the tail of the center axis made of molybdenum is connected with a conical quartz hammer; and the maximum conical diameter of the quartz hammer is more than the diameter of the quartz cylinder. The feeder of the mono-crystal furnace can slowly open the conical quartz hammer, so that the silicone material is slowly fed into silicone fluid and is not splashed; and all the parts of the feeder are manufactured from quartz and molybdenum, so that pollution is not produced at high temperature.
Description
Technical field
The utility model relates to a kind of material feeder for single crystal furnace.
Background technology
At present, in the process of single crystal growing furnace high temperature material, need to give to add the silicon material among the Dan Changlu, common feeder is in reinforced process, not only adopt bayonet type because of the feeder bottom, open back silicon material and pour in the stove rapidly and all, can form silicon feed liquid splash phenomena, simultaneously, because the feeder shell adopts stainless material to make, in high temperature, produce heavy metal easily, pollute the high purity silicon material, cause the quality of silicon materials to descend.
Summary of the invention
The purpose of this utility model provides and can prevent that the silicon feed liquid from splashing, and can not pollute a kind of material feeder for single crystal furnace of silicon materials.
The technical scheme that the utility model is taked is: a kind of material feeder for single crystal furnace, comprise quartzy cylindrical shell, molybdenum system axis, molybdenum system axis is positioned at quartzy cylindrical shell, and molybdenum system axis is fixed in the quartzy cylindrical shell by the activity of radial support frame, it is characterized in that the afterbody at molybdenum system axis is connected with the quartz hammer of taper, and the auger footpath of quartzy hammer is greater than the barrel dliameter of quartzy cylindrical shell.
Adopt the utility model, the quartz hammer of taper slowly can be opened, allow the silicon material slowly join in the silicon liquid, just can not form splash phenomena, and adopt quartz and Mo to make each parts of feeder, in high temperature, can not form pollution.
Description of drawings
Fig. 1 is a synoptic diagram of the present utility model.
Sequence number is represented among the figure: quartzy hammer 1, quartzy cylindrical shell 2, molybdenum system axis 3, radial support frame 4.
Embodiment
The utility model is described in further detail below in conjunction with specific embodiment.
With reference to Fig. 1, this material feeder for single crystal furnace comprises quartzy hammer 1, quartzy cylindrical shell 2, molybdenum system axis 3, radial support frame 4, molybdenum system axis 3 is positioned at quartzy cylindrical shell 2, and molybdenum system axis 3 is fixed in the quartzy cylindrical shell 2 by 4 activities of radial support frame, be connected with the quartz hammer 1 of taper at the afterbody of molybdenum system axis 3, the auger footpath of quartzy hammer 1 is greater than the barrel dliameter of quartzy cylindrical shell 2.
During use, earlier molybdenum system axis 3 is tightened up, make of the nozzle sealing of quartzy hammer 1, add the silicon material then quartzy cylindrical shell 2; Afterwards, feeder is put into single crystal growing furnace, slowly make the nozzle of the quartzy cylindrical shell 2 of quartz hammer 1 disengaging of taper, the silicon material can slowly join in the silicon liquid, just can not form splash phenomena, simultaneously, adopt quartzy and each parts of Mo making feeder, because of quartzy and molybdenum have more resistance to elevated temperatures, therefore can not form pollution.
Claims (1)
1. material feeder for single crystal furnace, comprise quartzy cylindrical shell, molybdenum system axis, molybdenum system axis is positioned at quartzy cylindrical shell, and molybdenum system axis is fixed in the quartzy cylindrical shell by the activity of radial support frame, it is characterized in that the afterbody at molybdenum system axis is connected with the quartz hammer of taper, and the auger footpath of quartzy hammer is greater than the barrel dliameter of quartzy cylindrical shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205206559U CN201778144U (en) | 2010-09-03 | 2010-09-03 | Feeder of mono-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205206559U CN201778144U (en) | 2010-09-03 | 2010-09-03 | Feeder of mono-crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201778144U true CN201778144U (en) | 2011-03-30 |
Family
ID=43791363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205206559U Expired - Fee Related CN201778144U (en) | 2010-09-03 | 2010-09-03 | Feeder of mono-crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201778144U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106012010A (en) * | 2016-08-15 | 2016-10-12 | 江苏协鑫硅材料科技发展有限公司 | Method and apparatus for secondary addition of doping agent |
| CN112725880A (en) * | 2020-12-21 | 2021-04-30 | 宁晋晶兴电子材料有限公司 | Feeding device |
-
2010
- 2010-09-03 CN CN2010205206559U patent/CN201778144U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106012010A (en) * | 2016-08-15 | 2016-10-12 | 江苏协鑫硅材料科技发展有限公司 | Method and apparatus for secondary addition of doping agent |
| CN112725880A (en) * | 2020-12-21 | 2021-04-30 | 宁晋晶兴电子材料有限公司 | Feeding device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110330 Termination date: 20130903 |