CN201764937U - Height gauge for measuring verticality of end surfaces of silicon single crystal rods - Google Patents
Height gauge for measuring verticality of end surfaces of silicon single crystal rods Download PDFInfo
- Publication number
- CN201764937U CN201764937U CN2010202433885U CN201020243388U CN201764937U CN 201764937 U CN201764937 U CN 201764937U CN 2010202433885 U CN2010202433885 U CN 2010202433885U CN 201020243388 U CN201020243388 U CN 201020243388U CN 201764937 U CN201764937 U CN 201764937U
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- single crystal
- silicon single
- crystal rod
- height gauge
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Abstract
The utility model discloses a height gauge for measuring verticality of end surfaces of silicon single crystal rods, which comprises a base, a graduated scale, a vernier and a measuring claw. The graduated scale is perpendicularly fixed on the base, the vernier is mounted on the graduated scale, the measuring claw is located on the side of the vernier, and ribs matching with a slide way of a machine tool of a cut-off machine are arranged below the base. The height gauge for measuring verticality of end surfaces of silicon single crystal rod is simple in structure and convenient in operation, and can be used for accurately controlling verticality of end surfaces of silicon single crystal rods.
Description
Technical field
The utility model relates to a kind of height gauge, relates in particular to a kind of height gauge that is used to measure the silicon single crystal rod end face squareness when cutting silicon single crystal rod.
Background technology
The silicon single crystal rod of producing will could be employed as the substrate of semiconductor devices through being cut into monocrystalline silicon piece, therefore need block the silicon single crystal rod that grows out to satisfy the requirement of following process.Because diameter is to change in certain scope in the silicon single crystal rod growth course, diameter range as 6 cun silicon rods is 153mm～158mm, the diameter range of 8 cun silicon rods is 203mm～208mm, and this just causes two end faces of silicon single crystal rod to have deviation, brings difficulty to cutting operation.After silicon single crystal rod blocked, the size of end face squareness deviation directly had influence on follow-up a plurality of operation, comprises the crudy of butt, hairbrush, section etc.
Because silicon single crystal rod diameter thickness inequality, cause silicon single crystal rod to be placed on that the back produces certain inclination on the charging track of stapling machine, its center line and track are not parallel, so the end face after silicon single crystal rod blocks and the angle of center line are not 90 °, there is very big deviation in end face squareness, this greatly reduces the quality of following process, has also increased the rejection rate of product simultaneously.
The utility model content
The technical problems to be solved in the utility model provides a kind of simple in structure, easy to operate, accurate height gauge of control survey silicon single crystal rod end face squareness.
For solving the problems of the technologies described above, technical solution adopted in the utility model is: a kind of height gauge of measuring the silicon single crystal rod end face squareness, comprise: base, vertical fixing are in the rule on the base, the measuring claw that is installed in the vernier on the rule and is positioned at the vernier sidepiece, and described base below is provided with and the suitable raised line of the lathe slideway of stapling machine.
Adopt the beneficial effect that technique scheme produced to be: the height gauge of the measurement silicon single crystal rod end face squareness that the utility model provides with end face squareness by block the back check change into cut before control, guarantee to eliminate in advance in the deviation that cutter down just will objectively exist before cutting off.In practical operation, a silicon single crystal rod can be cut into about 5 sections, all can check leveling once silicon single crystal rod before blocking at every turn, has guaranteed to block the verticality of the every section silicon single crystal rod end face in back.Through test statistics, the end face squareness deviation after silicon single crystal rod blocks can effectively be controlled in the 0.5mm, has reduced 1.5mm than former 2mm, and error has reduced by 75%.Reduced simultaneously the probability that waste product occurs to a great extent and produce in the probability of wire jumper appears, reduced accident rate, can save kilogram surplus the monocrystalline 4000 every year, improve 4,800,000 yuan of incomes.
Description of drawings
Fig. 1 is the structural representation that the utility model is measured the height gauge of silicon single crystal rod end face squareness;
Among the figure: 1-base, 2-rule, 3-vernier, 4-measuring claw, 5-raised line, 6-trip bolt, 7-baffle plate.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail.
Referring to Fig. 1, a kind of height gauge of measuring the silicon single crystal rod end face squareness, comprise: base 1, vertical fixing are in the rule on the base 12, the measuring claw 4 that is installed in the vernier 3 on the rule 2 and is positioned at vernier 3 sidepieces, and described base 1 below is provided with the raised line 5 suitable with the lathe slideway of stapling machine.Can be after height gauge being installed on the lathe of stapling machine along the slideway move left and right, to realize measurement to silicon single crystal rod each point height.Base 1 is a rectangular structure, and thickness and width are all less to alleviate the quality of base.A lateral edges in the base 1 is provided with baffle plate 7, can conveniently promote the height gauge move left and right.
The height gauge of the measurement silicon single crystal rod end face squareness that the utility model provides is that whole silicon single crystal rod is placed on a detection levelling device before the cut-out of back on the stapling machine charging track.The pulled crystal silicon rod is because its natural quality has four crest lines that are evenly distributed on the silicon single crystal rod barred body, wherein a crest line goes to peak, so just have two crest line symmetry horizontal distribution in the both sides of barred body, the plane at these two crest line places just in time overlaps with the surface level at silicon single crystal rod center line place.The height gauge of the measurement silicon single crystal rod end face squareness that the utility model is provided is installed on the lathe of stapling machine, measure the height of silicon single crystal rod one end earlier, tighten trip bolt 6, fixedly vernier 3, make measuring claw 4 be positioned at sustained height all the time, slip is measured the height gauge of silicon single crystal rod end face squareness to the another location then, the level height of silicon single crystal rod makes the crest line of silicon single crystal rod both sides consistent with the height of measuring claw 4 by regulating herein, the height of duplicate measurements silicon single crystal rod side crest line each point, with the cephalocaudal vertical height furnishing of crest line unanimity, promptly reach the center line of silicon single crystal rod this moment with track is parallel to each other and with the perpendicular purpose of cutter, guaranteed to block the verticality of silicon single crystal rod end face afterwards.
Claims (2)
1. height gauge of measuring the silicon single crystal rod end face squareness, comprise: base (1), vertical fixing are in the rule (2) on the base (1), the measuring claw (4) that is installed in the vernier (3) on the rule (2) and is positioned at vernier (3) sidepiece, and it is characterized in that: described base (1) below is provided with the raised line (5) suitable with the lathe slideway of stapling machine.
2. the height gauge of measurement silicon single crystal rod end face squareness according to claim 1 is characterized in that a lateral edges in the described base (1) is provided with baffle plate (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202433885U CN201764937U (en) | 2010-07-01 | 2010-07-01 | Height gauge for measuring verticality of end surfaces of silicon single crystal rods |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202433885U CN201764937U (en) | 2010-07-01 | 2010-07-01 | Height gauge for measuring verticality of end surfaces of silicon single crystal rods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201764937U true CN201764937U (en) | 2011-03-16 |
Family
ID=43717545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202433885U Expired - Fee Related CN201764937U (en) | 2010-07-01 | 2010-07-01 | Height gauge for measuring verticality of end surfaces of silicon single crystal rods |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201764937U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944159A (en) * | 2012-10-31 | 2013-02-27 | 长城汽车股份有限公司 | Detection device for variable section intake manifold control valve plate |
| CN103389028A (en) * | 2012-05-09 | 2013-11-13 | 上海紫江企业集团股份有限公司 | Tool for detecting perpendicularity of bottle blanks |
| CN104776781A (en) * | 2015-04-28 | 2015-07-15 | 苏州泰欧阔仪器科技有限公司 | Measuring instrument for measuring height and perpendicularity of workpieces |
| CN110542367A (en) * | 2019-09-03 | 2019-12-06 | 安阳豫德机械有限公司 | Method for simply, conveniently and rapidly detecting verticality of part profile |
-
2010
- 2010-07-01 CN CN2010202433885U patent/CN201764937U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389028A (en) * | 2012-05-09 | 2013-11-13 | 上海紫江企业集团股份有限公司 | Tool for detecting perpendicularity of bottle blanks |
| CN102944159A (en) * | 2012-10-31 | 2013-02-27 | 长城汽车股份有限公司 | Detection device for variable section intake manifold control valve plate |
| CN102944159B (en) * | 2012-10-31 | 2015-05-27 | 长城汽车股份有限公司 | Detection device for variable section intake manifold control valve plate |
| CN104776781A (en) * | 2015-04-28 | 2015-07-15 | 苏州泰欧阔仪器科技有限公司 | Measuring instrument for measuring height and perpendicularity of workpieces |
| CN110542367A (en) * | 2019-09-03 | 2019-12-06 | 安阳豫德机械有限公司 | Method for simply, conveniently and rapidly detecting verticality of part profile |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110316 Termination date: 20160701 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |