CN201752818U - Laser splitting device - Google Patents
Laser splitting device Download PDFInfo
- Publication number
- CN201752818U CN201752818U CN2010202355725U CN201020235572U CN201752818U CN 201752818 U CN201752818 U CN 201752818U CN 2010202355725 U CN2010202355725 U CN 2010202355725U CN 201020235572 U CN201020235572 U CN 201020235572U CN 201752818 U CN201752818 U CN 201752818U
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- Prior art keywords
- laser
- light path
- eyeglass
- beam split
- dividing device
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Abstract
The utility model relates to processing via laser beams, in particular to a laser splitting device using laser beams for processing, which comprises an input mechanism and an output mechanism. The input mechanism comprises a laser emitting laser input beams, and a first splitting lens splitting the laser input beams in the input mechanism to a first splitting path and a second splitting path. The laser splitting device has the advantages that the laser splitting device forms at least two laser beams by splitting laser emitted by the laser, can greatly increase laser processing speed and reduce cost, is especially applicable to processing with higher requirements on velocity and lower requirements on laser energy, such as IC processing.
Description
[technical field]
The utility model relates to laser beam processing, relates in particular to a kind of laser light-dividing device in the laser beam processing.
[background technology]
Fast development along with industry, laser processing technology is more urgent to requiring at a high speed, cheaply, and the used laser process equipment great majority of conventional laser processing are the corresponding laser Machining heads of a laser instrument, this pattern cost is higher, or be with the optical fiber beam split that is coupled, though this pattern has improved speed,, the cost of optical fiber coupling is high, and the laser energy loss is also very big.
[utility model content]
In order to solve laser process equipment defect of high cost in the prior art, the utility model provides a kind of low cost, high-speed laser light-dividing device.
The utility model provides a kind of laser light-dividing device, comprise input mechanism and output mechanism, described input mechanism comprises the laser instrument of launching laser input light, also comprises the first beam split eyeglass of the input of the laser in described input mechanism light to first fen light path and light path beam split in second fen.
As further improvement of the utility model, described output mechanism comprises first total reflection eyeglass that reflects to first laser beam of described first minute light path by the described first beam split eyeglass branch and the second total reflection eyeglass to reflecting to second laser beam of described second minute light path by the described first beam split eyeglass branch.
As further improvement of the utility model, described laser light-dividing device also comprises the primary importance adjusting device, and the described first beam split eyeglass is arranged on described first adjusting device, and the distance of described first minute light path equals the distance of described second minute light path.
As further improvement of the utility model, described laser light-dividing device also comprise with by the described first beam split eyeglass branch to first laser beam of described first minute light path the second beam split eyeglass to the 3rd fen light path and light path beam split in the 4th fen.
As further improvement of the utility model, described output mechanism comprises the 3rd total reflection eyeglass that reflects to the 3rd laser beam of described the 3rd minute light path by the described second beam split eyeglass branch and the 4th total reflection eyeglass to reflecting to the 4th laser beam of described the 4th minute light path by the described second beam split eyeglass branch.
As further improvement of the utility model, described laser light-dividing device also comprises second place adjusting device, the described second beam split eyeglass is arranged on described second adjusting device, the distance of described first minute light path equals the distance of described second minute light path, and the distance of described the 3rd minute light path equals the distance of described the 4th minute light path.
As further improvement of the utility model, described laser light-dividing device also comprise with by the described first beam split eyeglass branch to second laser beam of described second minute light path the 3rd beam split eyeglass to the 5th fen light path and light path beam split in the 6th fen.
As further improvement of the utility model, described output mechanism comprises the 5th total reflection eyeglass that reflects to the 5th laser beam of described the 5th minute light path by described the 3rd beam split eyeglass branch and the 6th total reflection eyeglass to reflecting to the 6th laser beam of described the 6th minute light path by described the 3rd beam split eyeglass branch.
As further improvement of the utility model, described laser light-dividing device also comprises the 3rd apparatus for adjusting position, described the 3rd beam split eyeglass is arranged on described the 3rd apparatus for adjusting position, the distance of described first minute light path equals the distance of described second minute light path, and the distance of described the 5th minute light path equals the distance of described the 6th minute light path.
As further improvement of the utility model, described input mechanism comprises that the laser input light that described laser instrument is launched reflexes to the input total reflection eyeglass of the described first beam split eyeglass.
The beneficial effects of the utility model are: described laser light-dividing device carries out beam split by the laser that described laser instrument is sent, form at least two bundle laser, can significantly improve the process velocity of laser, reduce cost, particularly suitable is higher to rate request, laser energy is required lower processing, as processing to IC.
[description of drawings]
Fig. 1 is the schematic diagram of a kind of embodiment of a kind of laser light-dividing device of the utility model;
Fig. 2 is the schematic diagram of the another kind of embodiment of laser light-dividing device described in the utility model.
[specific embodiment]
Below in conjunction with the description of drawings and the specific embodiment the utility model is further specified.
As shown in Figure 1, be the embodiment that laser beam is divided into two by described laser light-dividing device, the laser beam of a laser instrument can be divided into two, being input to two laser Machining heads respectively processes, described laser light-dividing device comprises input mechanism and output mechanism, wherein, described input mechanism is the input path of laser, described output mechanism is the outgoing route of laser, described input mechanism comprises the laser instrument 1 of launching laser input light and the input total reflection eyeglass 4 that the laser input light that described laser instrument 1 is launched is reflected, and also comprises the first beam split eyeglass 21 that laser input light that described input total reflection eyeglass 4 is reflected carries out beam split to first fen light path and second fen light path.Wherein, the transmitance of the described first beam split eyeglass 21 and reflectivity all are that gradual change is adjustable, (its accuracy can be 50% ± 1%) exactly can be divided into two laser energy, also can be the T=50% that fixes, the plated film of the described first beam split eyeglass 21 to s light and p optical transmission rate (| Rs-Rp|) and reflection differences (| Ts-Tp|) certain requirement is arranged, the difference that generally requires both is less than 10%.
Described output mechanism comprises first total reflection eyeglass 31 that reflects by 21 fens first laser beams to described first minute light path of the described first beam split eyeglass and the second total reflection eyeglass 32 to reflecting by 21 fens second laser beams to described second minute light path of the described first beam split eyeglass.The plated film of the wherein said first total reflection eyeglass 31 and the second total reflection eyeglass 32 all to s light and p optical transmission rate (| Rs-Rp|) and reflection differences (| Ts-Tp|) certain requirement is arranged, the difference that generally requires both is less than 10%.
Described laser light-dividing device also comprises the primary importance adjusting device, the described first beam split eyeglass 21 is arranged on described first adjusting device, the distance of described first minute light path equals the distance of described second minute light path, because the laser input light of laser instrument 1 output has certain angle of divergence, equate by the distance of controlling described first minute light path and second fen light path, guarantee that the distance that two laser beams that laser Machining head received are walked from described laser instrument 1 beginning equates, controls the uniformity of two laser Machining head processing effects.Wherein, described primary importance adjusting device comprise microscope base, the fixing described first beam split eyeglass 21 adjustment seat, described adjustment seat is fixed on two guide rails on the described microscope base and described adjustment seat is locked at two latch segments on the described guide rail, unclamp described latch segment, described adjustment seat drives the described first beam split eyeglass 21 front and back on described guide rail and moves.
As can be seen from Figure 1, above-mentioned laser light-dividing device to the branch light path of laser beam is: laser instrument 1 is launched laser input light, input total reflection eyeglass 4 reflexes to the first beam split eyeglass 21 with this laser input light, laser energy part on the laser input light sees through the first beam split eyeglass 21 and enters first fen light path, form first laser beam and biography to the first total reflection eyeglass 31, and then first laser beam is reflexed to the input of laser Machining head by the first total reflection eyeglass 31; Laser energy another part on the laser input light is entered second fen light path by 21 reflections of the first beam split eyeglass, form second laser beam and biography to the second total reflection eyeglass 32, and then second laser beam is reflexed to the input of another laser Machining head by the second total reflection eyeglass 32, realize corresponding two laser Machining heads of a laser instrument.
As shown in Figure 2, be laser beam one to be divided into four embodiment by described laser light-dividing device, the laser beam one of a laser instrument can be divided into four, being input to four laser Machining heads respectively processes, described laser light-dividing device comprises input mechanism and output mechanism, described input mechanism comprises the laser instrument 1 of launching laser input light and the input total reflection eyeglass 4 that the laser input light that described laser instrument 1 is launched is reflected, and also comprises the first beam split eyeglass 21 that laser input light that described input total reflection eyeglass 4 is reflected carries out beam split to first fen light path and second fen light path.Described laser light-dividing device also comprise with by the described first beam split eyeglass 21 minutes to first laser beam of described first minute light path to the second beam split eyeglass 22 of the 3rd fen light path and light path beam split in the 4th fen and will be by the described first beam split eyeglass 21 minutes to second laser beam of described second minute light path the 3rd beam split eyeglass 23 to the 5th fen light path and light path beam split in the 6th fen.Wherein, the transmitance and the reflectivity of the described first beam split eyeglass 21, the second beam split eyeglass 22 and the 3rd beam split eyeglass 23 all are that gradual change is adjustable, (its accuracy can be 50% ± 1%) exactly can be divided into two laser energy, also can be the T=50% that fixes, the plated film of the described first beam split eyeglass 21, the second beam split eyeglass 22 and the 3rd beam split eyeglass 23 to s light and p optical transmission rate (| Rs-Rp|) and reflection differences (| Ts-Tp|) certain requirement is arranged, the difference that generally requires both is less than 10%.
Described output mechanism comprises the 3rd total reflection eyeglass 33 that reflected to the 3rd laser beam of described the 3rd minute light path in 22 minutes by the described second beam split eyeglass, to the 4th total reflection eyeglass 34 that reflected to the 4th laser beam of described the 4th minute light path in 22 minutes by the described second beam split eyeglass, to the 5th total reflection eyeglass 35 and the 6th total reflection eyeglass 36 that reflected to the 5th laser beam of described the 5th minute light path in 23 minutes by described the 3rd beam split eyeglass to reflecting to the 6th laser beam of described the 6th minute light path in 23 minutes by described the 3rd beam split eyeglass.The plated film of wherein said the 3rd total reflection eyeglass 33, the 4th total reflection eyeglass 34, the 5th total reflection eyeglass 35 and the 6th total reflection eyeglass 36 all to s light and p optical transmission rate (| Rs-Rp|) and reflection differences (| Ts-Tp|) certain requirement is arranged, the difference that generally requires both is less than 10%.
Described laser light-dividing device also comprises the primary importance adjusting device, second place adjusting device and the 3rd apparatus for adjusting position, the described first beam split eyeglass 21 is arranged on the described primary importance adjusting device, the described second beam split eyeglass 22 is arranged on described second adjusting device, described the 3rd beam split eyeglass 23 is arranged on described the 3rd apparatus for adjusting position, the distance of described first minute light path equals the distance of described second minute light path, the distance of described the 3rd minute light path equals the distance of described the 4th minute light path, and the distance of described the 5th minute light path equals the distance of described the 6th minute light path.Because the laser input light of laser instrument 1 output has certain angle of divergence, equate by the distance of controlling described first minute light path and second fen light path, the distance of controlling described the 3rd minute light path and the 4th fen light path equates, the distance of controlling described the 5th minute light path and the 6th fen light path equates, guarantee that four laser beams that laser Machining head received equate from the distance that described laser instrument begins to be walked, and control the uniformity of two laser Machining head processing effects.Wherein, described second place adjusting device, the 3rd apparatus for adjusting position are identical with the structure of described primary importance adjusting device, can regulate the position of the described second beam split eyeglass, described the 3rd beam split eyeglass respectively.
As can be seen from Figure 2, above-mentioned laser light-dividing device to the branch light path of laser beam is: laser instrument 1 is launched laser input light, input total reflection eyeglass 4 reflexes to the first beam split eyeglass 21 with this laser input light, laser energy part on the laser input light sees through the first beam split eyeglass 21 and enters first fen light path, form first laser beam and the directive second beam split eyeglass, laser energy another part on the laser input light is entered second fen light path by 21 reflections of the first beam split eyeglass, forms second laser beam and directive the 3rd beam split eyeglass 23; Laser energy part on first laser beam sees through the second beam split eyeglass 22 and enters the 3rd fen light path, form the 3rd laser beam and directive the 3rd total reflection eyeglass 33, and then the 3rd laser beam is reflexed to the input of first laser Machining head by the 3rd total reflection eyeglass 33, laser energy another part on first laser beam is entered the 4th fen light path by 22 reflections of the second beam split eyeglass, form the 4th laser beam and directive the 4th total reflection eyeglass 34, and then the 4th laser beam is reflexed to the input of second laser Machining head by the 4th total reflection eyeglass 34; Laser energy part on second laser beam sees through the 3rd beam split eyeglass 23 and enters the 6th fen light path, form the 6th laser beam and directive the 6th total reflection eyeglass 36, and then the 6th laser beam is reflexed to the input of the 4th laser Machining head by the 6th total reflection eyeglass 36, laser energy another part on second laser beam is entered the 5th fen light path by 23 reflections of the 3rd beam split eyeglass, form the 5th laser beam and directive the 5th total reflection eyeglass 35, and then the 5th laser beam is reflexed to the input of the 3rd laser Machining head by the 5th total reflection eyeglass 35, realize corresponding four laser Machining heads of a laser instrument.
Above content be in conjunction with concrete preferred implementation to further describing that the utility model is done, can not assert that concrete enforcement of the present utility model is confined to these explanations.For the utility model person of an ordinary skill in the technical field, under the prerequisite that does not break away from the utility model design, can also make some simple deduction or replace, all should be considered as belonging to protection domain of the present utility model.
Claims (10)
1. laser light-dividing device, comprise input mechanism and output mechanism, described input mechanism comprises the laser instrument (1) of launching laser input light, it is characterized in that: also comprise the first beam split eyeglass (21) of the input of the laser in described input mechanism light to first fen light path and light path beam split in second fen.
2. laser light-dividing device according to claim 1 is characterized in that: described output mechanism comprises the first total reflection eyeglass (31) that first laser beam that divides by the described first beam split eyeglass (21) to described first minute light path is reflected and the second total reflection eyeglass (32) to reflecting to second laser beam of described second minute light path by the described first beam split eyeglass (21) branch.
3. laser light-dividing device according to claim 2, it is characterized in that: described laser light-dividing device also comprises the primary importance adjusting device, the described first beam split eyeglass (21) is arranged on described first adjusting device, and the distance of described first minute light path equals the distance of described second minute light path.
4. laser light-dividing device according to claim 1 is characterized in that: described laser light-dividing device also comprises and will divide by the described first beam split eyeglass (21) to first laser beam of described first minute light path, the second beam split eyeglass (22) to the 3rd fen light path and light path beam split in the 4th fen.
5. laser light-dividing device according to claim 4 is characterized in that: described output mechanism comprises the 3rd total reflection eyeglass (33) that the 3rd laser beam that divides by the described second beam split eyeglass (22) to described the 3rd minute light path is reflected and the 4th total reflection eyeglass (34) to reflecting to the 4th laser beam of described the 4th minute light path by the described second beam split eyeglass (22) branch.
6. laser light-dividing device according to claim 5, it is characterized in that: described laser light-dividing device also comprises second place adjusting device, the described second beam split eyeglass (22) is arranged on described second adjusting device, the distance of described first minute light path equals the distance of described second minute light path, and the distance of described the 3rd minute light path equals the distance of described the 4th minute light path.
7. laser light-dividing device according to claim 1 is characterized in that: described laser light-dividing device also comprises and will divide by the described first beam split eyeglass (21) to second laser beam of described second minute light path the 3rd beam split eyeglass (23) to the 5th fen light path and light path beam split in the 6th fen.
8. laser light-dividing device according to claim 7 is characterized in that: described output mechanism comprises the 5th total reflection eyeglass (35) that the 5th laser beam that divides by described the 3rd beam split eyeglass (23) to described the 5th minute light path is reflected and the 6th total reflection eyeglass (36) to reflecting to the 6th laser beam of described the 6th minute light path by described the 3rd beam split eyeglass (23) branch.
9. laser light-dividing device according to claim 8, it is characterized in that: described laser light-dividing device also comprises the 3rd apparatus for adjusting position, described the 3rd beam split eyeglass (23) is arranged on described the 3rd apparatus for adjusting position, the distance of described first minute light path equals the distance of described second minute light path, and the distance of described the 5th minute light path equals the distance of described the 6th minute light path.
10. laser light-dividing device according to claim 1 is characterized in that: described input mechanism comprises that the laser input light that described laser instrument (1) is launched reflexes to the input total reflection eyeglass (4) of the described first beam split eyeglass (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202355725U CN201752818U (en) | 2010-06-22 | 2010-06-22 | Laser splitting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202355725U CN201752818U (en) | 2010-06-22 | 2010-06-22 | Laser splitting device |
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| Publication Number | Publication Date |
|---|---|
| CN201752818U true CN201752818U (en) | 2011-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010202355725U Expired - Lifetime CN201752818U (en) | 2010-06-22 | 2010-06-22 | Laser splitting device |
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| CN (1) | CN201752818U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520525A (en) * | 2011-11-14 | 2012-06-27 | 镭射谷科技(深圳)有限公司 | Light beam converting device and laser processing equipment using the same |
| CN103182605A (en) * | 2013-03-21 | 2013-07-03 | 常州镭赛科技有限公司 | Laser welding machine |
| CN108213966A (en) * | 2016-12-14 | 2018-06-29 | 东台精机股份有限公司 | The processing machine and its laser splitting device of Compound Machining |
| CN109719387A (en) * | 2017-10-31 | 2019-05-07 | 上海微电子装备（集团）股份有限公司 | Laser processing device and method, laser package method, laser anneal method |
| CN112705859A (en) * | 2020-12-14 | 2021-04-27 | 华虹半导体(无锡)有限公司 | Laser cutting ring-removing method for wafer |
-
2010
- 2010-06-22 CN CN2010202355725U patent/CN201752818U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520525A (en) * | 2011-11-14 | 2012-06-27 | 镭射谷科技(深圳)有限公司 | Light beam converting device and laser processing equipment using the same |
| CN102520525B (en) * | 2011-11-14 | 2015-05-13 | 镭射谷科技(深圳)有限公司 | Light beam converting device and laser processing equipment using the same |
| CN103182605A (en) * | 2013-03-21 | 2013-07-03 | 常州镭赛科技有限公司 | Laser welding machine |
| CN108213966A (en) * | 2016-12-14 | 2018-06-29 | 东台精机股份有限公司 | The processing machine and its laser splitting device of Compound Machining |
| CN109719387A (en) * | 2017-10-31 | 2019-05-07 | 上海微电子装备（集团）股份有限公司 | Laser processing device and method, laser package method, laser anneal method |
| CN112705859A (en) * | 2020-12-14 | 2021-04-27 | 华虹半导体(无锡)有限公司 | Laser cutting ring-removing method for wafer |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110302 |