CN201698239U - MEMS spectrometer constant temperature control device - Google Patents
MEMS spectrometer constant temperature control device Download PDFInfo
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- CN201698239U CN201698239U CN2010201368111U CN201020136811U CN201698239U CN 201698239 U CN201698239 U CN 201698239U CN 2010201368111 U CN2010201368111 U CN 2010201368111U CN 201020136811 U CN201020136811 U CN 201020136811U CN 201698239 U CN201698239 U CN 201698239U
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Abstract
The utility model discloses an MEMS spectrometer constant temperature control device which comprises an MEMS optical component and a first microprocessor, wherein the MEMS optical component processes optical signals and transmits the optical signals to the first microprocessor for spectral measurement. The MEMS spectrometer constant temperature control device also comprises a temperature sensor, a second microprocessor, a resistance wire, an AD converter, a DA converter and a heating current control circuit, wherein the temperature sensor measures the temperature in the machine, and is connected with the input end of the AD converter, the output end of the AD converter is connected with the signal input end of the second microprocessor, the signal output end of the second microprocessor is connected with the input end of the DA converter, the output end of the DA converter is connected with the input end of the heating current control circuit, and the output end of the heating current control circuit is connected with the resistance wire. In the utility model, the temperature in the MEMS spectrometer can be adjusted by heating the resistance wire, thus solving the problem that motion amplitude of the optical component changes along with the change of environment temperature.
Description
Technical field
The utility model relates to a kind of temperature control equipment, relates in particular to a kind of MEMS spectrometer thermostatically-controlled equipment, belongs to technical field of analytical instruments.
Background technology
Spectroscopy is to measure a kind of technology of ultraviolet, visible, near infrared and infrared band light intensity, is widely used in multiple field, detects or electromagnetic radiation analysis etc. as the concentration of color measuring, chemical analysis.The tradition optical spectrum instrumentation is become by discrete set of devices such as numerous optics, electricity and machineries, need extremely complicated light path system and accurate machine construction, reduced the reliability of whole instrument, instrument work, storage environment have also been had strict requirement, limited it is used more widely.Particularly at the application demand of online (scene) spectral measurement, the unable solution of conventional spectrometers, developing microminiaturized spectrometer has become when last big research focus.
Along with the progress of science and technology, microelectromechanical systems (MEMS) technology and Micrometer-Nanometer Processing Technology have obtained swift and violent development.Numerous new devices based on the MEMS technology are also shown up prominently, and it is compared with traditional devices has many advantages,, good reproducibility little, low in energy consumption, highly sensitive as volume, easily produce in batches, cost is low, stable processing technology etc.Adopt MEMS fabrication techniques spectrometer to become one of mainstream technology of spectrometer exploitation.
The MEMS spectrometer adopts MEMS optical device and novel light channel structure, designs the micro spectrometer with good applicability, and light channel structure is simple, can be suitable for each spectral band, has tangible technical advantage.This spectrometer is made up of the joints of optical fibre, entrance slit, reflection micro mirror, blazed grating, focus lamp and detector; The optical signals joints of optical fibre to be measured insert spectrometer, entrance slit is positioned at joints of optical fibre rear portion, light signal incides on the reflection micro mirror via entrance slit, reflection micro mirror reflected light signal is to blazed grating, blazed grating resolves into the monochromatic light of different wave length with incident optical signal, and monochromatic light incides on the focus lamp, can be reflexed on the detector by coalescence by focus lamp, detector is positioned over focus lamp meeting focal spot, the monochromatic intensity that detector measurement is accepted; The reflection micro mirror is done cyclical movement, make the monochromatic spatial disposition position in the incident angle of incident optical signal on blazed grating and each incident optical signal be cyclical variation, after the monochromatic light line focus mirror of various wavelength is assembled, enter in the detector successively, realize the scanning of full spectrum, wherein said reflection micro mirror is used micro-electronic mechanical system technique (MEMS) manufacturing and is formed, it is a kind of MEMS optical device, it is a kind of device with temperature characterisitic, promptly use constant signal to drive, the motional amplitude of MEMS micro mirror also can change along with variation of ambient temperature, and the consequence of bringing to spectrometer is that the wavelength stability of spectrogram is destroyed.This specific character of MEMS optical device is brought technology barrier to actual product exploitation, if can not solve, the MEMS spectrometer is the work under not competent field or other rugged surroundings, makes that it is low in energy consumption, highly sensitive, low cost and other advantages can't obtain performance.
The utility model content
The purpose of this utility model is to provide a kind of MEMS spectrometer thermostatically-controlled equipment, solves the problem of MEMS optical device temperature stability in the MEMS spectrometer, makes the MEMS spectrometer have good adaptability and application prospect.
The purpose of this utility model is achieved by the following technical programs:
A kind of MEMS spectrometer thermostatically-controlled equipment, comprise MEMS optical device 1, first microprocessor 2,1 pair of light path of described MEMS optical device is handled, do the electric signal that obtains after light-to-current inversion is handled and deliver to first microprocessor 2, carry out spectral measurement, it also comprises temperature sensor 3, second microprocessor 4, resistance wire 5, AD converter 6, DA converter 7, heating current control circuit 8, described temperature sensor 3 is measured MEMS optical device 1 place built-in temperature, temperature sensor 3 is connected with AD converter 6 input ends, AD converter 6 output terminals are connected with the signal input port of second microprocessor 4, temperature signal is delivered to second microprocessor 4, the signal output port of second microprocessor 4 is connected with DA converter 7 input ends, the output terminal of DA converter 7 is connected with heating current control circuit 8 input ends, the output terminal of heating current control circuit 8 is connected with resistance wire 5, and built-in temperature is regulated in resistance wire 5 heatings.
The purpose of this utility model can also further realize by following technical measures:
Aforesaid MEMS spectrometer thermostatically-controlled equipment, also comprise a commutation circuit 10, wherein resistance wire 5 is in series by the multistage resistance wire, the output terminal of described heating current control circuit 8 is connected with the input end of commutation circuit 10, the output terminal of commutation circuit 10 is connected respectively with each section of resistance wire 5, another signal output port of second microprocessor 4 is connected with the control end of commutation circuit 10, switch-over control signal is delivered to commutation circuit 10, and commutation circuit 10 requires the connected mode of each section resistance wire of convert resistance silk 5 and heating current control circuit 8 to be connected on the number of the resistance wire of working in the heater circuit with change according to control.
Aforesaid MEMS spectrometer thermostatically-controlled equipment also comprises an airtight constant temperature box 9, and described MEMS optical device 1, temperature sensor 3, resistance wire 5 are positioned at constant temperature box 9.
Compared with prior art, the beneficial effects of the utility model are: the built-in temperature of the heat regulation MEMS spectrometer that the heating of utilization resistance wire is distributed, make the spectrometer built-in temperature keep constant, solved the technical matters that the motional amplitude of MEMS optical device changes with variation of ambient temperature.
Description of drawings
Fig. 1 is a circuit structure diagram of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
As shown in Figure 1, the utility model comprises MEMS optical device 1, first microprocessor 2, temperature sensor 3, second microprocessor 4, resistance wire 5, AD converter 6, DA converter 7, heating current control circuit 8, constant temperature box 9, commutation circuit 10, and wherein resistance wire 5 is in series by the multistage resistance wire.1 pair of light path of described MEMS optical device is handled, and does the electric signal that obtains after light-to-current inversion is handled and delivers to first microprocessor 2, carries out spectral measurement.Described constant temperature box 9 is airtight, and MEMS optical device 1, temperature sensor 3, resistance wire 5 are positioned at constant temperature box 9.Use the constant temperature box that MEMS optical device 1 and external environment is isolated, help to keep the constant of temperature.Described temperature sensor 3 is measured temperature in the MEMS optical device 1 place constant temperature box, temperature sensor 3 is connected with AD converter 6 input ends, AD converter 6 output terminals are connected with the signal input port of second microprocessor 4, and the temperature signal that measures is delivered to second microprocessor 4 after the AD conversion.Because resistance wire of the present utility model adopts unidirectional heat regulation method of temperature, therefore the constant temperature box steady temperature that will keep must be higher than the temperature of spectrometer place environment, the actual temperature value that the temperature sensor 3 of 4 pairs of inputs of second microprocessor measures and the steady temperature value of setting compare, carry out computing then, obtain temperature control signals, be used to control the size of the heating current that flows through resistance wire.The signal output port of second microprocessor 4 is connected with DA converter 7 input ends, the output terminal of DA converter 7 is connected with heating current control circuit 8 input ends, temperature control signals is carried out delivering to heating current control circuit 8 after the DA conversion, and heating current control circuit 8 produces heating current according to this signal.The output terminal of heating current control circuit 8 is connected with the input end of commutation circuit 10, the output terminal of commutation circuit 10 is connected respectively with each section of resistance wire 5, another signal output port of second microprocessor 4 is connected with the control end of commutation circuit 10, switch-over control signal is delivered to commutation circuit 10, commutation circuit 10 requires the connected mode of each section resistance wire of convert resistance silk 5 and heating current control circuit 8 to be connected on the number of the resistance wire of working in the heater circuit with change according to control, for example can be by the on off operating mode of the switch that is connected with each section resistance wire in the commutation circuit 10 is set, 2 sections resistance wire series connection are inserted heater circuit work, also 3 sections resistance wire series connection can be inserted heater circuit work.Because in the utility model, the heating current size can be regulated as required, and resistance wire 5 is in series by the multistage resistance wire, therefore both can regulate the temperature of constant temperature box by the method for regulating electric current, also can regulate thermal value to regulate the temperature of constant temperature box by the number that change is connected on the resistance wire of working in the heater circuit, perhaps use above-mentioned two kinds of methods to reach temperature control effect preferably simultaneously, the temperature maintenance that makes the constant temperature box is a steady temperature value that is higher than environment temperature, the problem of avoiding the motional amplitude of MEMS optical device to fluctuate with variation of ambient temperature.
In addition to the implementation, the utility model can also have other embodiments, and all employings are equal to the technical scheme of replacement or equivalent transformation formation, all drop in the protection domain of the utility model requirement.
Claims (3)
1. MEMS spectrometer thermostatically-controlled equipment, comprise MEMS optical device (1), first microprocessor (2), described MEMS optical device (1) is handled light path, do the electric signal that obtains after light-to-current inversion is handled and deliver to first microprocessor (2), carry out spectral measurement, it is characterized in that, also comprise temperature sensor (3), second microprocessor (4), resistance wire (5), AD converter (6), DA converter (7), heating current control circuit (8), described temperature sensor (3) is measured MEMS optical device (1) place built-in temperature, temperature sensor (3) is connected with AD converter (6) input end, AD converter (6) output terminal is connected with the signal input port of second microprocessor (4), temperature signal is delivered to second microprocessor (4), the signal output port of second microprocessor (4) is connected with DA converter (7) input end, the output terminal of DA converter (7) is connected with heating current control circuit (8) input end, the output terminal of heating current control circuit (8) is connected with resistance wire (5), and built-in temperature is regulated in resistance wire (5) heating.
2. MEMS spectrometer thermostatically-controlled equipment as claimed in claim 1, it is characterized in that, also comprise a commutation circuit (10), described resistance wire (5) is in series by the multistage resistance wire, the output terminal of described heating current control circuit (8) is connected with the input end of commutation circuit (10), the output terminal of commutation circuit (10) is connected respectively with each section of resistance wire (5), another signal output port of second microprocessor (4) is connected with the control end of commutation circuit (10), switch-over control signal is delivered to commutation circuit (10), and commutation circuit (10) requires the connected mode of each section resistance wire of convert resistance silk (5) and heating current control circuit (8) to be connected on the number of the resistance wire of working in the heater circuit with change according to control.
3. MEMS spectrometer thermostatically-controlled equipment as claimed in claim 1 or 2 is characterized in that, also comprises an airtight constant temperature box (9), and described MEMS optical device (1), temperature sensor (3), resistance wire (5) are positioned at constant temperature box (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201368111U CN201698239U (en) | 2010-03-22 | 2010-03-22 | MEMS spectrometer constant temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201368111U CN201698239U (en) | 2010-03-22 | 2010-03-22 | MEMS spectrometer constant temperature control device |
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| Publication Number | Publication Date |
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| CN201698239U true CN201698239U (en) | 2011-01-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201368111U Expired - Fee Related CN201698239U (en) | 2010-03-22 | 2010-03-22 | MEMS spectrometer constant temperature control device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393769A (en) * | 2011-12-06 | 2012-03-28 | 广西科学院 | Sample temperature adjusting device applied to spectral analysis experiment |
| CN104229721A (en) * | 2013-06-05 | 2014-12-24 | 硅谷实验室公司 | Suspended passive element for mems devices |
-
2010
- 2010-03-22 CN CN2010201368111U patent/CN201698239U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393769A (en) * | 2011-12-06 | 2012-03-28 | 广西科学院 | Sample temperature adjusting device applied to spectral analysis experiment |
| CN102393769B (en) * | 2011-12-06 | 2013-09-18 | 广西科学院 | Sample temperature adjusting device applied to spectral analysis experiment |
| CN104229721A (en) * | 2013-06-05 | 2014-12-24 | 硅谷实验室公司 | Suspended passive element for mems devices |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110105 Termination date: 20160322 |