CN201677232U - Grinding sheet - Google Patents
Grinding sheet Download PDFInfo
- Publication number
- CN201677232U CN201677232U CN2010202009417U CN201020200941U CN201677232U CN 201677232 U CN201677232 U CN 201677232U CN 2010202009417 U CN2010202009417 U CN 2010202009417U CN 201020200941 U CN201020200941 U CN 201020200941U CN 201677232 U CN201677232 U CN 201677232U
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- abrasive sheet
- abrasive
- sheet
- different
- grinding
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Abstract
The utility model discloses a grinding sheet. Grinding granules are attached to the surface of the grinding sheet. The surface of the grinding sheet is divided into a plurality of areas. The grinding granules attached to the same area have the same size and the grinding granules attached to the different areas have the different sizes. Compared with the prior art, the utility model has the areas of different roughness degrees, can complete the polishing of different roughness degrees on one grinding sheet without replacing the grinding sheets of different degrees on a grinder, greatly saves time, improves work efficiency and consequently reduces manufacture expenses.
Description
Technical field
The utility model relates to a kind of abrasive sheet, specifically, relates to the abrasive sheet that is used for hard thing surface grinding.
Background technology
Grinding technique has in technical field of semiconductors widely to be used, and by the relative motion between the rubbing head on silicon chip and the polishing machine, and exerts pressure simultaneously, realizes the silicon chip surface leveling, removes surface mass etc.The rubbing head that is used for the polished silicon slice surface is provided with abrasive sheet, abrasive sheet is diamond abrasive sheet (diamond lapping film) more widely, abrasive sheet generally by meticulous diamond grains attached to constituting on the flat board, big or small degree according to diamond grains, be divided into different grades, thereby form the abrasive sheet of different roughness grade, represent different grades with different colors usually, be convenient to select and identification.
When removing the segment thickness of polished surface in order to obtain more superior surface smoothness or needs, need adopt the abrasive sheet of multiple different brackets to polish successively, for example not the encapsulation chip cross section, TEM (transmission electron microscopy, transmission electron microscope) detect print, for post-order process carry out planarization chip surface, adopt cross section that ion beam focusing (FIB:focused ion beam) obtains etc., all need very smooth and smooth surface.In the prior art, the polishing machine last time can only be installed a kind of abrasive sheet, thereby, when needs use the abrasive sheet of different brackets to finish one polishing process, just need repeatedly installation, dismounting and change abrasive sheet, not only increased workload, and increased manufacturing cost.
The utility model content
Technical problem to be solved in the utility model provides a kind of abrasive sheet, and the surface of different roughness grade can be provided simultaneously, to reduce the workload of changing polished silicon wafer, reduces manufacturing cost.
For solving above technical problem, a kind of abrasive sheet that the utility model provides is attached with abrasive grains on its surface, and the surface of described abrasive sheet is divided into several regions, the abrasive grains size of adhering in the same area is identical, and the abrasive grains that zones of different is adhered to varies in size.
Further, the surface of described abrasive sheet radially is divided into several regions.
Further, the surface of described abrasive sheet is circular, and it is border circular areas and several donut zones in the center of circle that described several regions is respectively with the center on abrasive sheet surface.
Further, the surface of described abrasive sheet is divided into several regions along clockwise.
Further, the surface of described abrasive sheet is circular, and described surface is divided into some sector regions.
Further, increase gradually attached to the size of the abrasive grains on each zone or reduce.
Further, the magnitude range of described abrasive grains is 0.1um～30um.
Further, described abrasive grains is diamond or silicon-carbide particle.
Compared with prior art, the abrasive sheet that the utility model proposes, zone with different roughness, need not can on an abrasive sheet, finish the polishing of different coarse grades at the abrasive sheet of changing different brackets on the grinder, save time, increase work efficiency, thereby reduced the expense of making accordingly.
Description of drawings
Fig. 1 is the abrasive sheet schematic diagram of the utility model first embodiment;
Fig. 2 is the application schematic diagram of abrasive sheet among the utility model first embodiment;
Fig. 3 is the abrasive sheet schematic diagram of the utility model second embodiment.
The specific embodiment
For technical characterictic of the present utility model is become apparent,, the utility model is further described below in conjunction with accompanying drawing and embodiment.
See also Fig. 1, abrasive sheet schematic diagram for the utility model first embodiment, this abrasive sheet 2 is circular, be attached with abrasive grains (not indicating) on its surface, the surface of described abrasive sheet 2 is divided into a plurality of zones along radial direction, as example, five zones (20,21,22,23,24) of drawing among the figure, being respectively with the center on abrasive sheet 2 surfaces is a border circular areas and four donut zones in the center of circle.The abrasive grains size of adhering in the same area is identical, the abrasive grains that different zones is adhered to varies in size, because abrasive grains is not of uniform size, the surface roughness difference between the border circular areas of formation and each circle ring area forms different rough surface zones on abrasive sheet 2 surfaces.
In the process of lapping of reality, usually generally all be to roughly grind earlier, wait to grind the thickness of thing in order to quick removal, carry out fine gtinding then, carry out polishing at last, therefore, above-mentioned abrasive sheet 2 can be designed to the abrasive grains maximum of outermost regions 24, the roughness maximum that forms, and the abrasive grains size on each zone (23,22,21,20) is reduced gradually.Also can be as required, the mode that adopts the abrasive grains size to increase gradually designs.
Described abrasive grains can be chosen as the bigger abrasive grains of hardness ratio such as diamond or silicon-carbide particle.The magnitude range of abrasive grains is 0.1um～30um.Thus, can in these 5 zones, select different abrasive grains to be combined to form the different zone of kinds of surface roughness arbitrarily respectively as required.
Be convenient to identification for convenience when in use, each zone adopts a kind of color to indicate, thereby form zones of different and present different colors, such as according to its surface roughness incremental order from small to large, adopt color to be indicated by the shallow method that deepens gradually, the grinding personnel can conveniently select corresponding zone to grind according to the grinding grade of grinding charge.
See also Fig. 2, Fig. 2 is the schematic diagram that abrasive sheet is used among the utility model embodiment.During use, the grinding personnel are fixed on abrasive sheet 2 on the rotating disk 1 of grinder, for example chip or TEM detection print etc. are fixed on the sucker 4 will to wait to grind object 3, start grinder, rotating disk 1 carries out counterclockwise or the clockwise direction rotation, under hand-held or machinery control, sucker 4 moves downward, contact with the zone of a certain roughness grade number on the abrasive sheet 2, and applying certain pressure, nozzle 5 sprays lapping liquid or deionized water simultaneously, at abrasive sheet 2 and wait to grind and do not stop between the object 3 to rub, realization waits to grind object 3 surfacingizations, perhaps removes the purpose of segment thickness.
When beginning to roughly grind, can select the bigger zone of roughness ratio to roughly grind, reach the purpose of grinding fast, when being ground to certain thickness, select the less zone of roughness ratio to carry out fine gtinding again, at last select the littler zone of roughness to grind again, reach the purpose of meticulous polishing.Because the zone that has different roughness on the abrasive sheet of present embodiment, need not can on an abrasive sheet, finish the polishing of different coarse grades at the abrasive sheet of changing different brackets on the grinder, big time saver is increased work efficiency, thereby has reduced the expense of making accordingly.
And, owing to have different roughness zones on the abrasive sheet among the utility model embodiment, therefore, can allow the different zone of several grinding personnel on same abrasive sheet to work simultaneously on the same grinder, thereby can fully effectively utilize grinder.
Certainly, the utility model is not limited to the abrasive sheet that above-mentioned concentric circles is arranged, see also Fig. 3, Fig. 3 is the abrasive sheet schematic diagram of another embodiment of the present utility model, be divided into several regions on the surface of described abrasive sheet 2, the abrasive grains size of adhering in the same area is identical, and the abrasive grains that zones of different is adhered to varies in size.5 zones of present embodiment meta (20,21,22,23,24), these five zones are the center of circle with the center on described abrasive sheet 2 surfaces, be divided into several regions clockwise or counterclockwise along clock, distribute such as being divided into some fan shapes, in these 5 zones, select different abrasive grains to be combined to form the different zone of kinds of surface roughness arbitrarily respectively.
More than show and described basic principle of the present utility model, principal character and advantage of the present utility model.The technical staff of the industry should understand; the utility model is not restricted to the described embodiments; that describes in the foregoing description and the specification just illustrates principle of the present utility model; the utility model also has various changes and modifications under the prerequisite that does not break away from the utility model spirit and scope, and these changes and improvements all fall in claimed the utility model scope.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (8)
1. an abrasive sheet is attached with abrasive grains on its surface, it is characterized in that: the surface of described abrasive sheet is divided into several regions, and the abrasive grains size of adhering in the same area is identical, and the abrasive grains that zones of different is adhered to varies in size.
2. abrasive sheet as claimed in claim 1 is characterized in that: the surface of described abrasive sheet radially is divided into several regions.
3. abrasive sheet as claimed in claim 2 is characterized in that: the surface of described abrasive sheet is for circular, and it is border circular areas and several donut zones in the center of circle that described several regions is respectively with the center on abrasive sheet surface.
4. abrasive sheet as claimed in claim 1 is characterized in that: the surface of described abrasive sheet is divided into several regions along clockwise.
5. abrasive sheet as claimed in claim 4 is characterized in that: the surface of described abrasive sheet is for circular, and described surface is divided into some sector regions.
6. abrasive sheet as claimed in claim 1 is characterized in that: increase gradually or reduce attached to the size of the abrasive grains on each zone.
7. as claim 1 or 6 described abrasive sheets, it is characterized in that: the magnitude range of described abrasive grains is 0.1um～30um.
8. abrasive sheet as claimed in claim 1 is characterized in that: described abrasive grains is diamond or silicon-carbide particle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202009417U CN201677232U (en) | 2010-05-21 | 2010-05-21 | Grinding sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202009417U CN201677232U (en) | 2010-05-21 | 2010-05-21 | Grinding sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201677232U true CN201677232U (en) | 2010-12-22 |
Family
ID=43342292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202009417U Expired - Fee Related CN201677232U (en) | 2010-05-21 | 2010-05-21 | Grinding sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201677232U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105397617A (en) * | 2015-10-26 | 2016-03-16 | 上海华力微电子有限公司 | Grinding pad and replacing method thereof |
| CN105500225A (en) * | 2015-12-25 | 2016-04-20 | 江苏锋芒复合材料科技集团有限公司 | High comprehensive performance composite grinding piece and manufacturing method thereof |
-
2010
- 2010-05-21 CN CN2010202009417U patent/CN201677232U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105397617A (en) * | 2015-10-26 | 2016-03-16 | 上海华力微电子有限公司 | Grinding pad and replacing method thereof |
| CN105500225A (en) * | 2015-12-25 | 2016-04-20 | 江苏锋芒复合材料科技集团有限公司 | High comprehensive performance composite grinding piece and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101222 Termination date: 20170521 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |