CN201653962U - Carbon nano tube-electrode structure and temperature sensor chip based on the same - Google Patents
Carbon nano tube-electrode structure and temperature sensor chip based on the same Download PDFInfo
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- CN201653962U CN201653962U CN200920288330XU CN200920288330U CN201653962U CN 201653962 U CN201653962 U CN 201653962U CN 200920288330X U CN200920288330X U CN 200920288330XU CN 200920288330 U CN200920288330 U CN 200920288330U CN 201653962 U CN201653962 U CN 201653962U
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Abstract
The utility model discloses a carbon nano tube-electrode structure and a temperature sensor chip based on the same. The structure comprises a substrate, a carbon nano tube and electrodes, wherein the electrodes are arranged on the substrate in pairs, and the carbon nano tube is electrically connected with a pair of electrodes. The carbon nano tube has good thermal conductivity, and the resistivity of the metallic carbon nano tube can be changed along with the change of temperature. By utilizing the property that the resistivity of the carbon nano tube is changed along with the temperature, the utility model provides a temperature sensor chip structure which can take the carbon nano tube-electrode as a temperature sensing unit and has low energy consumption and high sensitivity. The sensor chip integrates eight independent temperature sensing units within 2mm*2mm area. In the temperature sensor chip structure, a dielectrophoresis technology can be utilized to realize assembly on a microelectrode array to form the temperature sensing unit of the carbon nano tube-metal electrode and finally form a carbon nano tube temperature sensor.
Description
Technical field
The utility model relates to field of nanometer devices, specifically designs a kind of nanotube sensor chip structure that utilizes carbon nano-tube as temperature sensing unit, realizes the temperature high-sensitivity detection.
Background technology
As novel nano materials, carbon nano-tube has excellent physicochemical property.Carbon nano-tube resistivity can change with variation of temperature, is a kind of nano material of desirable making temperature sensor.Carbon nano-tube as the prerequisite of temperature sensing unit is: carbon nano-tube at first is assemblied in forms carbon nano-tube-electrode structure between the microelectrode.Dielectrophoresis technology can realize that the parallel of carbon nano-tube control, and realizes that the physical condition of dielectrophoresis is to produce inhomogeneous field in the space, and guarantees the controllability of carbon nano-tube assembling process.In sum, the suitable nanotube sensor structure of design is one of core technology that realizes by the carbon nano-tube temperature sensor.
The utility model content
For addressing the above problem, the purpose of this utility model proposes a kind of nanotube sensor chip structure that utilizes carbon nano-tube as temperature sensing unit.Concrete scheme is as follows:
A kind of carbon nano-tube-electrode structure comprises substrate, carbon nano-tube, electrode, and described electrode is arranged in pairs in the substrate, is electrically connected between described carbon nano-tube and described pair of electrodes.
The utility model also discloses a kind of temperature sensor chip based on carbon nano-tube-electrode structure, comprises sensor chip, scribing mark, alignment mark, pressure welding point, identification marking that carbon nano-tube-electrode structure constitutes; Described pressure welding point is electrically connected with the electrode of described carbon nano-tube-electrode structure.
It is right that described each carbon nano-tube-electrode structure has 3 pairs of finger electrodes.
Spacing between every pair of electrode of described carbon nano-tube-electrode structure is 1 micron, and the width of finger electrode is 10 microns.
Described sensor chip is integrated 8 carbon nano-tube-electrode structures in the zone of 2mm * 2mm.
The utility model principle is:
Carbon nano-tube has good heat conductance, and the resistance of metallic carbon nanotubes can change with variation of temperature.Utilize the temperature variant character of carbon nano-tube resistivity, this patent proposed a kind of utilize carbon nano-tube as temperature sensing unit have low energy consumption, a highly sensitive sensor chip structure, and designed the job operation that realizes this chip structure.The sensor chip structure that the utility model proposed can utilize dielectrophoresis technology to realize the controlled assembling of carbon nano-tube on microelectrode, thereby finishes the structure of temperature sensing unit.
The utlity model has following advantage: this sensor chip is integrated 8 independent temperature sensing units in the zone of 2mm * 2mm, so have high temperature detection sensitivity and accuracy of detection.The temperature sensor chip structure that the utility model proposes can adopt dielectrophoresis technology to realize the quick assembling of carbon nano-tube on microelectrode array, thereby forms the temperature sensing unit of Nano carbon tube-metal electrode.
Description of drawings
Fig. 1 is carbon nano-tube-electrode structure synoptic diagram;
Fig. 2 is the temperature sensor chip structural drawing based on carbon nano-tube-electrode;
Fig. 3 is the sensor chip structural drawing;
Fig. 4 is the carbon nano-tube-electrode structure enlarged drawing in the sensor chip.
Embodiment
As shown in Figure 1, carbon nano-tube-electrode structure of the present utility model comprises substrate 1, carbon nano-tube 2, electrode 3, and described electrode 3 is arranged in pairs in the substrate 1, and described carbon nano-tube 2 is electrically connected with 3 of described pair of electrodes.
As shown in Figure 2, a kind of temperature sensor chip based on carbon nano-tube-electrode structure comprises sensor chip 8, scribing mark 4, alignment mark 5, pressure welding point 6, the identification marking 7 that carbon nano-tube-electrode structure constitutes; Described pressure welding point 6 is electrically connected with the electrode 3 of described carbon nano-tube-electrode structure.
As shown in Figure 4, it is right that described each carbon nano-tube-electrode structure has 3 pairs of finger electrodes, and the spacing (A) between every pair of electrode of described carbon nano-tube-electrode structure is 1 micron, and the width of finger electrode (B) is 10 microns.
As shown in Figure 3, described sensor chip is integrated 8 carbon nano-tube-electrode structures in the zone of 2mm * 2mm, is of a size of: (a) 0.75mm; (b) 2000 μ m; (c) 2mm; (d) 9mm; (e) 10mm.
The electrode processing method of carbon nano-tube-electrode structure of the present utility model comprises the following steps: (a) cleaning silicon chip; (b) the silicon chip surface oxidation forms the 100nm oxide layer; (c) oxide layer surface sputtering metal, the thickness of its metal material are Cr20nm/Au30nm; (d) resist coating, curing photoresist; (e) photoetching exposes and develops photoresist; (f) utilize the dry etching metal, form graphic structure, remove the photoresist of remained on surface; Utilize dielectrophoresis technology realization carbon nano-tube to assemble on electrode, adopting mass percent concentration is 0.01% carbon nano-tube solution (solvent is an ethanol/acetone), and the voltage magnitude that applies is 10V, and frequency is 1MHz.
Claims (5)
1. carbon nano-tube-electrode structure, it is characterized in that: comprise substrate, carbon nano-tube, electrode, described electrode is arranged in pairs in the substrate, is electrically connected between described carbon nano-tube and described pair of electrodes.
2. the temperature sensor chip based on carbon nano-tube-electrode structure as claimed in claim 1 is characterized in that: comprise sensor chip, scribing mark, alignment mark, pressure welding point, identification marking that carbon nano-tube-electrode structure constitutes; Described pressure welding point is electrically connected with the electrode of described carbon nano-tube-electrode structure.
3. according to the described temperature sensor chip of claim 2, it is characterized in that: it is right that described each carbon nano-tube-electrode structure has 3 pairs of finger electrodes.
4. according to the described temperature sensor chip of claim 2, it is characterized in that: the spacing between every pair of electrode of described carbon nano-tube-electrode structure is 1 micron, and the width of finger electrode is 10 microns.
5. according to the described temperature sensor chip of claim 2, it is characterized in that: described sensor chip is 8 integrated carbon nano-tube-electrode structures in the zone of 2mm * 2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920288330XU CN201653962U (en) | 2009-12-23 | 2009-12-23 | Carbon nano tube-electrode structure and temperature sensor chip based on the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920288330XU CN201653962U (en) | 2009-12-23 | 2009-12-23 | Carbon nano tube-electrode structure and temperature sensor chip based on the same |
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| Publication Number | Publication Date |
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| CN201653962U true CN201653962U (en) | 2010-11-24 |
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| CN200920288330XU Expired - Fee Related CN201653962U (en) | 2009-12-23 | 2009-12-23 | Carbon nano tube-electrode structure and temperature sensor chip based on the same |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072784A (en) * | 2011-02-16 | 2011-05-25 | 西安交通大学 | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof |
| CN102095792A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Online gas detection device based on carbon-nano-tube membrane micron-nano electrode |
| CN102095783A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas |
| CN102175755A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
| CN102175757A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film three-electrode sensor and manufacturing method thereof |
| CN102279220A (en) * | 2011-03-11 | 2011-12-14 | 潘元志 | Method for manufacturing chip, gas sensor assembly and method for plating carbon nano tube on chip |
| CN103308204A (en) * | 2013-05-20 | 2013-09-18 | 中国科学院半导体研究所 | Method for detecting temperature change of closed environment |
-
2009
- 2009-12-23 CN CN200920288330XU patent/CN201653962U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072784A (en) * | 2011-02-16 | 2011-05-25 | 西安交通大学 | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof |
| CN102095792A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Online gas detection device based on carbon-nano-tube membrane micron-nano electrode |
| CN102095783A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas |
| CN102175755A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
| CN102175757A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film three-electrode sensor and manufacturing method thereof |
| CN102072784B (en) * | 2011-02-16 | 2012-11-28 | 西安交通大学 | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof |
| CN102095783B (en) * | 2011-02-16 | 2012-11-28 | 西安交通大学 | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas |
| CN102175757B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Carbon nanotube film three-electrode sensor and manufacturing method thereof |
| CN102175755B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
| CN102279220A (en) * | 2011-03-11 | 2011-12-14 | 潘元志 | Method for manufacturing chip, gas sensor assembly and method for plating carbon nano tube on chip |
| CN103308204A (en) * | 2013-05-20 | 2013-09-18 | 中国科学院半导体研究所 | Method for detecting temperature change of closed environment |
| CN103308204B (en) * | 2013-05-20 | 2015-07-15 | 中国科学院半导体研究所 | Method for detecting temperature change of closed environment |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101124 Termination date: 20141223 |
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| EXPY | Termination of patent right or utility model |