Gold-plated heat insulation single crystal growing furnace form
Technical field
The utility model relates to the single crystal growing furnace field, relates in particular to a kind of single crystal growing furnace form.
Background technology
Single crystal growing furnace is that polysilicon is converted into the indispensable equipment in the silicon single crystal technological process, and silicon single crystal is the basic material in photovoltaic generation and the semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computer and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
In the silicon single-crystal process, need observe the process of growth of single crystal silicon by viewing window, be convenient to ordering parameter, obtain the high single crystal silicon of precision.Existing single crystal growing furnace form, all be by double-deck silica glass, middle logical water coolant constitutes, its cooling water passage structure is complicated and need be equipped with cooling water recirculation system, easily produce the ripples line simultaneously in the flow of cooling water process, influence observing effect, and because the single crystal growing furnace internal temperature reaches 1400 degree, the silica glass of internal layer is easy to fragmentation because of both sides are uneven in temperature, causes security incident.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of gold-plated heat insulation single crystal growing furnace form, this single crystal growing furnace form utilizes the thermal radiation and the infrared reflection ability of gold-plated glass excellence, guarantee that the hyperthermia radiation in the single crystal growing furnace can not transmit porthole, guarantees operator's generation safety.
The utility model is achieved in that a kind of gold-plated heat insulation single crystal growing furnace form, comprise bell, silica glass and gold-plated glass, fixing seal is equipped with flange on the viewing window of described upward bell, described silica glass and gold-plated glass are installed on the flange, position towards viewing window, silica glass is arranged on the internal layer near viewing window, is provided with sealing-ring between silica glass and the flange, and gold-plated glass is arranged on the skin away from viewing window; In the space between described internal layer silica glass and the outer gold-plated glass is air.
Described silica glass, flange and gold-plated glass all are rectangle.
The glass outer of the gold-plated heat insulation single crystal growing furnace form of the utility model adopts gold-plated glass, and gold-plated glass is strong to thermal radiation and ultrared reflection potential, guarantees that the high temperature in the single crystal growing furnace can not produce infringement to the observer; And viewing window seals with the silica glass fitted seal circle of internal layer in the utility model, it between the internal and external layers of glass air, the internal layer silica glass has a narrow range of temperature the Peril Incident of having avoided double-deck water-cooling structure to cause the fragmentation of internal layer silica glass to be produced near the medial surface of single crystal growing furnace and the outer side of close gold-plated glass.
Description of drawings
Fig. 1 is the gold-plated heat insulation single crystal growing furnace window structure synoptic diagram of the utility model;
Fig. 2 is the gold-plated heat insulation single crystal growing furnace window structure cross-sectional schematic of the utility model.
Among the figure: bell, 2 silica glasss, 3 flanges, 4 gold-plated glass, 5 sealing-rings on 1.
Embodiment
Below in conjunction with specific embodiment, further set forth the utility model.Should be understood that these embodiment only to be used to the utility model is described and be not used in the restriction scope of the present utility model.Should be understood that in addition those skilled in the art can make various changes or modifications the utility model after the content of having read the utility model statement, these equivalent form of values fall within the application's appended claims institute restricted portion equally.
As shown in Figure 1, 2, a kind of gold-plated heat insulation single crystal growing furnace form, comprise bell 1, silica glass 2 and gold-plated glass 4, fixing seal is equipped with flange 3 on the viewing window of described upward bell 1, described silica glass 2 and gold-plated glass 4 are installed on the flange 3, and towards the position of viewing window, silica glass 2 is arranged on the internal layer near viewing window, be provided with sealing-ring 5 between silica glass 2 and the flange 3, gold-plated glass 4 is arranged on the skin away from viewing window; For the shape with last bell 1 viewing window matches, described in the present embodiment silica glass 2, flange 3 and gold-plated glass 4 all are rectangle.
In the present embodiment, because not sealing between outer gold-plated glass 4 and the flange 3, so be air in the space between described internal layer silica glass 2 and the outer gold-plated glass 4, atmospheric pressure is identical with external pressure.Thermal radiation and ultrared reflection potential in 4 pairs of single crystal growing furnaces of gold-plated glass are strong, guarantee that the high temperature in the single crystal growing furnace can not produce infringement to the observer, need not the cooling of water flowing again.