CN201615335U - 一种硅烷气体转移装置 - Google Patents
一种硅烷气体转移装置 Download PDFInfo
- Publication number
- CN201615335U CN201615335U CN2010201292521U CN201020129252U CN201615335U CN 201615335 U CN201615335 U CN 201615335U CN 2010201292521 U CN2010201292521 U CN 2010201292521U CN 201020129252 U CN201020129252 U CN 201020129252U CN 201615335 U CN201615335 U CN 201615335U
- Authority
- CN
- China
- Prior art keywords
- gas
- silicane
- cylinder
- bottle
- leakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 238000012546 transfer Methods 0.000 title claims abstract description 17
- 239000007789 gas Substances 0.000 claims abstract description 71
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 43
- 229910000077 silane Inorganic materials 0.000 claims description 67
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 229910000831 Steel Inorganic materials 0.000 abstract description 14
- 239000010959 steel Substances 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 8
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000013461 design Methods 0.000 abstract description 2
- 239000002912 waste gas Substances 0.000 abstract description 2
- 239000002699 waste material Substances 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000003860 storage Methods 0.000 description 10
- 238000010926 purge Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 206010053615 Thermal burn Diseases 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000013475 authorization Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000009970 fire resistant effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 230000000391 smoking effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- GOLXNESZZPUPJE-UHFFFAOYSA-N spiromesifen Chemical compound CC1=CC(C)=CC(C)=C1C(C(O1)=O)=C(OC(=O)CC(C)(C)C)C11CCCC1 GOLXNESZZPUPJE-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010201292521U CN201615335U (zh) | 2010-03-11 | 2010-03-11 | 一种硅烷气体转移装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010201292521U CN201615335U (zh) | 2010-03-11 | 2010-03-11 | 一种硅烷气体转移装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201615335U true CN201615335U (zh) | 2010-10-27 |
Family
ID=43001704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010201292521U Expired - Fee Related CN201615335U (zh) | 2010-03-11 | 2010-03-11 | 一种硅烷气体转移装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201615335U (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102588730A (zh) * | 2012-02-24 | 2012-07-18 | 南京亚格泰新能源材料有限公司 | 外盘管冷却硅烷中间储罐 |
CN102628546A (zh) * | 2012-04-17 | 2012-08-08 | 南京特种气体厂有限公司 | 硅烷纯化与灌装用冷阱*** |
CN102635784A (zh) * | 2012-04-17 | 2012-08-15 | 南京特种气体厂有限公司 | 硅烷灌装***的气瓶快速置换处理装置 |
CN104075106A (zh) * | 2014-06-24 | 2014-10-01 | 江苏天舒电器有限公司 | 一种充氮保压抽真空设备的控制方法及其控制装置 |
CN112409122A (zh) * | 2020-11-29 | 2021-02-26 | 山东高端化工研究院有限公司 | 一种醚后碳四原料预处理装置 |
-
2010
- 2010-03-11 CN CN2010201292521U patent/CN201615335U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102588730A (zh) * | 2012-02-24 | 2012-07-18 | 南京亚格泰新能源材料有限公司 | 外盘管冷却硅烷中间储罐 |
CN102628546A (zh) * | 2012-04-17 | 2012-08-08 | 南京特种气体厂有限公司 | 硅烷纯化与灌装用冷阱*** |
CN102635784A (zh) * | 2012-04-17 | 2012-08-15 | 南京特种气体厂有限公司 | 硅烷灌装***的气瓶快速置换处理装置 |
CN104075106A (zh) * | 2014-06-24 | 2014-10-01 | 江苏天舒电器有限公司 | 一种充氮保压抽真空设备的控制方法及其控制装置 |
CN104075106B (zh) * | 2014-06-24 | 2016-02-10 | 江苏天舒电器有限公司 | 一种充氮保压抽真空设备的控制方法及其控制装置 |
CN112409122A (zh) * | 2020-11-29 | 2021-02-26 | 山东高端化工研究院有限公司 | 一种醚后碳四原料预处理装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN201615335U (zh) | 一种硅烷气体转移装置 | |
CN104110582B (zh) | 一种煤层气安全输送*** | |
CN104111677A (zh) | 用于安全试验舱***的温度湿度调节装置 | |
CN106628011B (zh) | 一种码头船岸界面安全装置 | |
WO2015181575A1 (en) | Installed fire fighting apparatus for flammable objects | |
CN210979351U (zh) | 一种用于特殊气体输送的集装格供应*** | |
KR20130002307U (ko) | 불소 공급을 위한 퍼지 박스 | |
CN203489006U (zh) | 一种煤层气安全输送*** | |
CN207096777U (zh) | 一种气体泄漏应急处理*** | |
CN206552213U (zh) | 一种码头船岸界面安全装置 | |
CN104950072A (zh) | 用于化学品火灾***安全试验舱***的安全试验舱 | |
CN209540510U (zh) | 一种防泄漏的燃气放散装置 | |
CN114233366A (zh) | 一种利用氮气干粉抑制煤尘二次***的装置 | |
CN212016542U (zh) | 一种气体消防*** | |
RU2778458C1 (ru) | Способ обеспечения безопасности обращения с газогенерирующими устройствами, содержащими химически активные материалы | |
RU115772U1 (ru) | Система приема, хранения и отпуска нефти и нефтепродуктов | |
CN101482222A (zh) | 高纯二乙基锌的安全输送装置 | |
CN103955248A (zh) | 用于安全试验舱***的温度湿度调节装置 | |
Lee et al. | Hazard identification for gaseous hydrogen in storage, transportation, and use | |
CN204237052U (zh) | 一种用于石油储罐的主动安全防护*** | |
Zalosh et al. | Comparative analysis of hydrogen fire and explosion incidents: quarterly report No. 2, December 1, 1977--February 28, 1978 | |
CN201348138Y (zh) | 一种高纯二乙基锌的安全输送装置 | |
CN218281217U (zh) | 一种用于发电厂卸氨区的水喷淋*** | |
CN103920542A (zh) | 用于化学品火灾***安全试验舱的快开门装置 | |
CN218565136U (zh) | 一种高压可燃易爆性实验气体的安全输运装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI YIXIN ELECTRONICS TECHNOLOGY CO., LTD. SH Free format text: FORMER OWNER: SHANGHAI YIXIN ELECTRONICS TECHNOLOGY CO., LTD. SHANGHAI XINTONG SEMICONDUCTOR EQUIPMENT CO., LTD. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20110608 Address after: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Co-patentee after: Shanghai Yixin Electronic Technology Co., Ltd. Patentee after: Shanghai Zhengfan Technology Co., Ltd. Co-patentee after: Shanghai Zhengfan Semiconductor Equipment Co., Ltd. Address before: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Co-patentee before: Shanghai Yixin Electronic Technology Co., Ltd. Patentee before: Shanghai Zhengfan Technology Co., Ltd. Co-patentee before: Shanghai Xintong Semiconductor Equipment Co., Ltd. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121015 Address after: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Patentee after: Shanghai Zhengfan Technology Co., Ltd. Patentee after: Shanghai Zhengfan Semiconductor Equipment Co., Ltd. Address before: 201108 No. 56 middle spring road, Xhenzhuang Industrial Zone, Shanghai Patentee before: Shanghai Zhengfan Technology Co., Ltd. Patentee before: Shanghai Yixin Electronic Technology Co., Ltd. Patentee before: Shanghai Zhengfan Semiconductor Equipment Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101027 Termination date: 20190311 |