CN201611653U - Semiconductor wafer clamping device - Google Patents
Semiconductor wafer clamping device Download PDFInfo
- Publication number
- CN201611653U CN201611653U CN2009202121715U CN200920212171U CN201611653U CN 201611653 U CN201611653 U CN 201611653U CN 2009202121715 U CN2009202121715 U CN 2009202121715U CN 200920212171 U CN200920212171 U CN 200920212171U CN 201611653 U CN201611653 U CN 201611653U
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- anchor clamps
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009202121715U CN201611653U (en) | 2009-11-10 | 2009-11-10 | Semiconductor wafer clamping device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202121715U CN201611653U (en) | 2009-11-10 | 2009-11-10 | Semiconductor wafer clamping device |
Publications (1)
Publication Number | Publication Date |
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CN201611653U true CN201611653U (en) | 2010-10-20 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2009202121715U Expired - Fee Related CN201611653U (en) | 2009-11-10 | 2009-11-10 | Semiconductor wafer clamping device |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102983095A (en) * | 2012-11-30 | 2013-03-20 | 芜湖通和汽车管路***有限公司 | Tool for taking chip from wafer and use method thereof |
CN103586246A (en) * | 2012-08-16 | 2014-02-19 | 沈阳芯源微电子设备有限公司 | Clamping mechanism of mask plate cleaning machine |
CN103730400A (en) * | 2012-10-16 | 2014-04-16 | 沈阳芯源微电子设备有限公司 | Centring device for wafers of various sizes |
CN104600018A (en) * | 2013-10-30 | 2015-05-06 | 沈阳芯源微电子设备有限公司 | Roasting supporting device for base plate |
CN105161469A (en) * | 2015-09-17 | 2015-12-16 | 沈阳拓荆科技有限公司 | 8-inch/12-inch substrate general platform structure |
CN105609463A (en) * | 2016-01-25 | 2016-05-25 | 中国电子科技集团公司第二十四研究所 | Integrated cleaning fixture capable of automatically fixing silicon wafer during rotation |
CN112002671A (en) * | 2020-08-24 | 2020-11-27 | 台州市老林装饰有限公司 | Wafer tray device suitable for different sizes |
CN112824560A (en) * | 2019-11-20 | 2021-05-21 | 中国科学院微电子研究所 | Sample stage and method for preparing thin-film material |
-
2009
- 2009-11-10 CN CN2009202121715U patent/CN201611653U/en not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103586246A (en) * | 2012-08-16 | 2014-02-19 | 沈阳芯源微电子设备有限公司 | Clamping mechanism of mask plate cleaning machine |
CN103730400A (en) * | 2012-10-16 | 2014-04-16 | 沈阳芯源微电子设备有限公司 | Centring device for wafers of various sizes |
CN102983095A (en) * | 2012-11-30 | 2013-03-20 | 芜湖通和汽车管路***有限公司 | Tool for taking chip from wafer and use method thereof |
CN104600018A (en) * | 2013-10-30 | 2015-05-06 | 沈阳芯源微电子设备有限公司 | Roasting supporting device for base plate |
CN104600018B (en) * | 2013-10-30 | 2017-06-30 | 沈阳芯源微电子设备有限公司 | A kind of substrate toasts supporting arrangement |
CN105161469A (en) * | 2015-09-17 | 2015-12-16 | 沈阳拓荆科技有限公司 | 8-inch/12-inch substrate general platform structure |
WO2017045241A1 (en) * | 2015-09-17 | 2017-03-23 | 沈阳拓荆科技有限公司 | General platform structure for 8-inch and 12-inch substrates |
CN105609463A (en) * | 2016-01-25 | 2016-05-25 | 中国电子科技集团公司第二十四研究所 | Integrated cleaning fixture capable of automatically fixing silicon wafer during rotation |
CN105609463B (en) * | 2016-01-25 | 2018-09-18 | 中国电子科技集团公司第二十四研究所 | The integrated cleaning jig of the automatic fixed silicon wafer of rotation |
CN112824560A (en) * | 2019-11-20 | 2021-05-21 | 中国科学院微电子研究所 | Sample stage and method for preparing thin-film material |
CN112002671A (en) * | 2020-08-24 | 2020-11-27 | 台州市老林装饰有限公司 | Wafer tray device suitable for different sizes |
CN112002671B (en) * | 2020-08-24 | 2024-06-11 | 武汉驿天诺科技有限公司 | Wafer tray device suitable for different sizes |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130222 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130222 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101020 Termination date: 20181110 |
|
CF01 | Termination of patent right due to non-payment of annual fee |