CN201590410U

CN201590410U - Wafer box

Info

Publication number: CN201590410U
Application number: CN2009202131613U
Authority: CN
Inventors: 黄晓君; 刘明; 彭小艳; 陈宇涵
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2009-12-15
Filing date: 2009-12-15
Publication date: 2010-09-22
Anticipated expiration: 2019-12-15

Abstract

A wafer box comprises a chassis and a cover cap; two opposite sides of the cover cap are provided with handles; the wafer box also comprises a lock catch structure disposed on the inner surface of one sidewall of the cover cap. The lock catch structure comprises: a rack, with the upper part wider than the lower part, disposed on the inner surface of the cover cap sidewall; a first support sliding bar and a second support sliding bar respectively movably disposed on the top and bottom end of the rack, wherein the first support sliding bar is longer than the second support sliding bar; and sliding/locking members movably disposed on the first and the second support sliding bar capable of moving up and down. Thereby, the wafer box of the utility model can fix the wafer rack carrying wafers in the box firmly, reduces wafer damages, reduces wafer disability rate, and saves production cost.

Description

Wafer case

Technical field

The utility model relates to field of semiconductor manufacture, relates in particular to the wafer case of loaded with wafers.

Background technology

In the technology of integrated chip, the wafer that is used for making chip all is being stored at transportation in the wafer case (Pod) between the different process and in the transportation of each technology.The use of wafer case can be wafer and provides than the high-cleanness, high environment, avoids wafer to be subjected to the pollution of atelier's presence of pollution sources that will be low in the relative wafer case of cleanliness factor.For improving the wafer case utilance, can store a plurality of wafers in the common wafer case.Traditional wafer case please refer to Fig. 1 and Fig. 2, and wafer case 1 comprises chassis 10 and cover cap 12, and described wafer case 1 also comprises at least: be arranged on and be available for users to the handle 14 of controlling on cover cap 12 two lateral walls 121,123 respectively; Be arranged on one of them sidewall 122, the intelligent label 16 of wafer information in the described wafer case is provided; And be arranged on one of them sidewall 124 (described sidewall 124 faces with that sidewall 122 that is provided with described intelligent label 16) inner surface, be used for to wafer rack (not in graphic demonstration) and carry out spacing buckle structure 18, described buckle structure 18 comprises the support 180 of the inner surface of the sidewall 124 that is arranged on cover cap 12, the movable latch fitting 184 that is arranged on the support slide bar 182 on the described support 180 and is arranged on support slide bar 182 centre.

Please continue with reference to figure 1 and Fig. 2, described intelligent label 16 only is to be screw-coupled on the cover cap 12 by the installation screw that is arranged on its base, other parts at intelligent label 16 then are not provided with corresponding mounting points, in use can make the described relatively cover cap 12 of described intelligent label 16 produce upset, and the tie point to the place of being spirally connected cause damage even fracture occur in switching process.In addition, in described buckle structure 18, because described support 180 is designed to wide structure up and down, and width wherein is less, make to support slide bar 182 and on movable latch fitting 184 move dumbly, not steady, blocking can occur or beat, can not carry out spacing to wafer rack well, even the damage of wafer on can in spacing process, causing wafer rack, in the useful life of reducing wafer, increase production cost.

The utility model content

The problem that the utility model solves provides a kind of wafer case, avoids being mounted with in the wafer case the unstable problem of wafer rack locking of wafer.

For addressing the above problem, the utility model provides a kind of wafer case, comprising: be suitable for the chassis of loaded with wafers and engage, be suitable for forming the cover cap of confined space with described chassis, relative two sidewalls of described cover cap are provided with handle; Be located at the buckle structure of one of them inside surface of side wall of described cover cap; Wherein, described buckle structure comprises: be located at the support of the inside surface of side wall of described cover cap, described support is wide at the top and narrow at the bottom; The movable respectively first support slide bar and second of being located at two ends up and down of described support supports slide bar, and it is long that the described first support slide bar supports slide bar than described second; Activity is located at described first and is supported the slide bar and the second slip latch fitting that supports slide bar, moves up and down, and is mounted with the wafer rack of wafer in the described wafer case that is suitable for locking.

Alternatively, described handle comprises: the mounting rod that is connected with the sidewall of described cover cap; Arch card hand groove from described mounting rod sidewall extension; The holder wing from described arch card hand trench bottom extension.

Alternatively, the lug of described support for extending internally and form by the sidewall of described cover cap.

Alternatively, the described first support slide bar and second supports slide bar and is arranged in described support.

Alternatively, described first length that supports slide bar is at least described second two times of length that support slide bar.

Alternatively, the described slip latch fitting platy structure that is curved cross section.

Alternatively, described wafer case comprises also and is suitable for the latching structure that described chassis engages with described cover cap that described latching structure comprises: the notch of being located at relative two sidewalls on described chassis; Be located at the movable block in the described chassis, the end of described movable block is provided with the latch of corresponding described notch, and described latch is and is bent downwardly; Be located at relative two sidewalls of described cover cap, corresponding to the groove of notch.

Alternatively, described wafer case also comprises intelligent label, and described intelligent label utilizes clamping structure to be fastened in the sidewall of described cover cap.

Alternatively, described clamping structure comprises: the draw-in groove of being located at the sidewall of described cover cap; Corresponding described draw-in groove and be fastened in the accessory mounting plate of the sidewall of described cover cap, relative two sides of described accessory mounting plate are provided with spacing block set and draw-in groove; Be connected in the fin of described intelligent label, described fin is provided with respectively spacing block set and corresponding hole clipping and the edge of draw-in groove with described accessory mounting plate.

Alternatively, described chassis and cover cap are the plastic shaping member.

Compared to prior art, the utility model provides the wafer case of the buckle structure with architecture advances, described buckle structure has the support that is wide at the top and narrow at the bottom, make the first support slide bar of being located at described support upper end will be longer than the second support slide bar of being located at described support lower end, being located at the first slip latch fitting that supports on the slide bar and the second support slide bar like this moves more flexible, smooth and easy, be mounted with the wafer rack of wafer in the described wafer case that can firmly lock, reduce the damage of wafer, reduce the scrappage of wafer, save production cost.

Description of drawings

Fig. 1 and Fig. 2 are the structural representation of wafer case under different visual angles in the prior art, and wherein Fig. 1 shows the stereogram of intelligent label for wafer case, and Fig. 2 shows the stereogram of buckle structure for wafer case;

Fig. 3 and Fig. 4 for the utility model in one embodiment the structural representation of the wafer case that provides under different visual angles, wherein Fig. 3 shows the stereogram of intelligent label for wafer case, Fig. 4 shows the stereogram of buckle structure for wafer case;

Fig. 5 provides the structural representation of the latch of latching structure in the wafer case in one embodiment for the utility model;

The utility model combination schematic diagram of the wafer case that provides in one embodiment is provided Fig. 6.

Embodiment

Inventor of the present utility model finds in existing wafer case, the support Design of the buckle structure of wafer rack in the wafer case of being used to lock is wide structure up and down, and width wherein is less, make to support slide bar and on movable latch fitting move dumb, not steady, blocking can occur or beat, can not carry out spacingly well to wafer rack, even undermine wafer on the wafer rack.

Inventor of the present utility model creatively improves existing wafer case, a kind of novel wafer case is provided, comprise chassis that is suitable for loaded with wafers and the cover cap that engages, is suitable for forming confined space with described chassis, relative two sidewalls of described cover cap are provided with handle; Be located at the buckle structure of one of them inside surface of side wall of described cover cap; Wherein, described buckle structure comprises: be located at the support of the inside surface of side wall of described cover cap, described support is wide at the top and narrow at the bottom; The movable respectively first support slide bar and second of being located at two ends up and down of described support supports slide bar, and it is long that the described first support slide bar supports slide bar than described second; Activity is located at described first and is supported the slide bar and the second slip latch fitting that supports slide bar, moves up and down, and is mounted with the wafer rack of wafer in the described wafer case that is suitable for locking.The wafer case that the utility model provides has been carried out architecture advances to buckle structure, make its can be flexibly, move swimmingly, be mounted with the wafer rack of wafer in the described wafer case that firmly locks, reduce the damage of wafer.

Below in conjunction with accompanying drawing content of the present utility model is elaborated.

Fig. 3 and Fig. 4 are wafer case provided by the utility model (Pod) structural representation under different visual angles in one embodiment.As shown in Figure 3, wafer case 2 comprise the chassis 20 and the enclosure in the chassis 20 cover cap 22.Chassis 20 panel construction that roughly is square is suitable for loaded with wafers, and described wafer can have a plurality of, and each wafer can pass through wafer rack (Cassette), and the space is stacked with realizing no grazing.In addition, a plurality of air-vents (indicate) can be set on the chassis 20 in graphic, with cover cap 22 enclosures during in chassis 20 the inside and outside atmosphere of control enclosure space on temperature and humidity, be consistent.Have, chassis 20 has the antistatic design again, and itself rubs and does not produce static and have static eliminating function when external static is arranged.Cover cap 22 is the hexahedron structure of bottom end opening, the size (area) at described bottom end opening place is larger than the size (area) of the upper end of cover cap 22, and, the size at described bottom end opening place (area and height) size (area and height) lucky and chassis 20 adapts, but with the enclosure in the chassis 20, form confined space, for the wafer that is loaded provides environment than high-cleanness, high.

In the present embodiment, chassis 20 and cover cap 22 are the plastic shaping member, and especially, cover cap 22 more can be transparent design, so that observe the internal state of cover cap 22.

Desire to reach the fastness that cover cap 22 engages with chassis 20, generally need design corresponding coupling device.Therefore, in the utility model, wafer case 2 also comprises and is suitable for the latching structure that chassis 20 engages with cover cap 22.Fig. 5 shows the structural representation of the latch of latching structure in the utility model wafer case, in conjunction with Fig. 3, Fig. 4 and Fig. 5, described latching structure comprises the notch 200 of relative two sidewalls that are opened in chassis 20 respectively, and the quantity of the notch 200 of each sidewall is two, and the space is provided with; In chassis 20, be symmetrically arranged with two movable blocks 210, extend to form the latch 212 of corresponding notch 200 at the end of each movable block 210; And be located at chassis 20 relative two sidewalls of cover cap 22, corresponding to the groove (not shown in the diagram) of the notch 200 on chassis 20.When using described latching structure, with cover cap 22 enclosures in the chassis 20, make the chassis 20 of cover cap 22 wrap up chassis 20, applying certain movable block of trying hard to recommend in the moving chassis 20 210 moves towards sidewall, make the latch 212 of end of movable block 210 penetrate and the notch 200 of evagination sidewall of 20 and take advantage of a situation and snap in the groove of cover cap 22, realize engage (as shown in Figure 6) on cover cap 22 and chassis 20 in the chassis.

Especially, in a preferred embodiment, each latch 212 in the described latching structure all is and is bent downwardly, like this when latch 212 snaps in the groove of cover cap 22, two latches 212 of each side-walls can be simultaneously stressed, can effectively increase the holding capacity on chassis 20, make that chassis 20 is difficult for breaking away from cover cap 22 under the gravity that loads a plurality of wafers.

For ease of controlling of user, wafer case 2 also comprises the handle 24 of relative two sidewalls 221,223 that are arranged on cover cap 22.Each handle 24 wherein includes the mounting rod 240 that is connected with the sidewall of cover cap 22; The arch card hand groove 242 that extends to form from mounting rod 240 sidewalls; The holder wing 244 that extends to form from arch card hand groove 242 bottoms.In a preferred embodiment, mounting rod 240 can by for example welding, bonding, fix or utilize locking instruments such as screw to be mounted on the sidewall of cover cap 22.In use, the user can prop up the holder wing 244 with palm, and finger is put into card hand groove 242 and controlled handle 24, can avoid or be reduced in the carrying wafer case process situation that wafer case comes off occurring from hand.

Wafer case 2 also comprises the buckle structure 26 of the inner surface of one of them sidewall 224 of being located at described cover cap 22, is mounted with the wafer rack (showing in graphic) of wafer in the wafer case 2 that is suitable for locking.It should be noted that, in the present embodiment, because cover cap 22 is a transparent design, so the architectural feature of buckle structure 26 is to get with the sidewall 224 directly inside observation post from cover cap 22.Buckle structure 26 comprises the support 260 of the inner surface of the sidewall 224 of being located at cover cap 22; The movable respectively first support slide bar 261 and second of being located at two ends up and down of support 260 supports slide bar 263; Activity is located at described first and is supported the slip latch fitting 264 that slide bar 261 and second supports slide bar 263.Especially, in a preferred embodiment, the installation sheet that support 260 extends to form for the inner surface by the sidewall 224 of cover cap 22, and its integral body is wide at the top and narrow at the bottom, specifically, be arranged at width between the installation sheet of upper end of cover cap 22 than the width between the installation sheet of the bottom that is arranged at cover cap 22 much longer (at least more than or equal to two times).First supports support 260 parts that slide bar 261 is arranged in the upper end of cover cap 22, second supports support 260 parts that slide bar 263 is arranged in the bottom of cover cap 22, first supports slide bar 261 to the second supports slide bar 263 much longer (at least more than or equal to two times), and the first support slide bar 261 and second supports slide bar 263 and can rotate by relative support 260.Slip latch fitting 264 is the platy structure in curved cross section, and described arc section and wafer rack adapt.Slip latch fitting 264 moves up and down as the relative cover cap 22 of fulcrum with the first support slide bar 261 and the second support slide bar 263 in the buckle structure 26, because it is much longer that the first support slide bar 261 to the second supports slide bars 263, therefore, first supports slide bar 261 as bearing the main fulcrum of most of weight of buckle structure 26, second supports the then auxiliary fulcrum of conduct of slide bar 263, so arrange, can two support slide bars be isometric or more flexible, smooth and easy near moving under the isometric situation in the prior art so that slide lock part 264 is compared.By moving up and down of slip latch fitting 264 in the buckle structure 26, but the wafer rack that is mounted with wafer in the ejection wafer case is until with its firm locking, in transmitting the wafer case process, built-in wafer rack can not produce and rock, and wafer is difficult for departing from original position and produces damage.

Have, wafer case 2 also comprises the intelligent label 27 that is arranged on one of them sidewall 222, wafer information in the described wafer case is provided again.Intelligent label 27 includes display screen and is positioned at the control button of described display screen periphery.Store the information of the wafer that is loaded in relevant wafer case 2, the wafer case 2 in the intelligent label 27, the for example specification of wafer, quantity, completed technology, parameter etc. in pending technology and each technology thereof, the user is by controlling described control button, can on described display screen, inquire relevant information, thereby control and optimize each step of manufacturing process automatically.In a preferred embodiment, intelligent label 27 utilizes clamping structure to be fastened in the installation region of the sidewall 222 of cover cap 22.Clamping structure comprises the draw-in groove 280 of the sidewall 222 of being located at cover cap 22, draw-in groove 280 can be separately positioned on described sidewall 222 the installation region the bottom and about two sides; Corresponding draw-in groove 280 and be fastened in the accessory mounting plate 282 of the sidewall 222 of cover cap 22, relative two sides of accessory mounting plate 282 are provided with spacing block set 281 and draw-in groove 283; Be connected in the fin 286 of intelligent label 27, described fin 286 is provided with respectively hole clipping 285 and the edge 287 corresponding with the spacing block set 281 of accessory mounting plate 282 and draw-in groove 283.When utilizing clamping structure assembling intelligent label 27, accessory mounting plate 282 correspondences snap in the draw-in groove 280 of sidewall 222 of cover cap 22, after being connected in the spacing block set 281 of the hole clipping 285 nested accessory mounting plates 282 in the fin 286 of intelligent label 27, edge 287 in the fin 286 snaps in the draw-in groove 283 of accessory mounting plate 282, so just intelligent label 27 firmly can be arranged at the sidewall 222 of cover cap 22, than the prior art that is screw-coupled to cover cap by the installation screw that is arranged on intelligent label 27 bases, the steadiness of simple installation and installation is higher.

The wafer case that the utility model provides, buckle structure with architecture advances is provided, described buckle structure has the support that is wide at the top and narrow at the bottom, make the first support slide bar of being located at described support upper end will be longer than the second support slide bar of being located at described support lower end, being located at the first slip latch fitting that supports on the slide bar and the second support slide bar like this moves more flexible, smooth and easy, be mounted with the wafer rack of wafer in the described wafer case that can firmly lock, reduce the damage of wafer, reduce the scrappage of wafer, save production cost.

In addition, the wafer case that the utility model provides, by clamping structure simple in structure is provided, make relative at least two sides of intelligent label can be fastened on the sidewall of cover cap, in the prior art that locks than instruments of locking such as only utilizing screw on the intelligent label base, the steadiness of simple installation and installation is higher, can avoid in use described intelligent label to produce upset, and the tie point to the place of being spirally connected causes damage even fracture occurs in switching process.

Though the utility model with preferred embodiment openly as above; but it is not to be used for limiting the utility model; any those skilled in the art are not in breaking away from spirit and scope of the present utility model; can make possible change and modification, therefore protection range of the present utility model should be as the criterion with the scope that the utility model claim is defined.

Claims

1. wafer case comprises:

Be suitable for the chassis of loaded with wafers and engage, be suitable for forming the cover cap of confined space with described chassis, relative two sidewalls of described cover cap are provided with handle; It is characterized in that described wafer case also comprises the buckle structure of one of them inside surface of side wall of being located at described cover cap;

Described buckle structure comprises:

Be located at the support of the inside surface of side wall of described cover cap, described support is wide at the top and narrow at the bottom;

The movable respectively first support slide bar and second of being located at two ends up and down of described support supports slide bar, and it is long that the described first support slide bar supports slide bar than described second;

Activity is located at described first and is supported the slide bar and the second slip latch fitting that supports slide bar, moves up and down, and is mounted with the wafer rack of wafer in the described wafer case that is suitable for locking.

2. wafer case according to claim 1 is characterized in that, described handle comprises: the mounting rod that is connected with the sidewall of described cover cap; Arch card hand groove from described mounting rod sidewall extension; The holder wing from described arch card hand trench bottom extension.

3. wafer case according to claim 1 is characterized in that, the lug that described support extends internally and forms for the sidewall by described cover cap.

4. wafer case according to claim 1 is characterized in that, the described first support slide bar and second supports slide bar and is arranged in described support.

5. wafer case according to claim 1 is characterized in that, described first length that supports slide bar is at least described second two times of length that support slide bar.

6. wafer case according to claim 1 is characterized in that, described slip latch fitting is the platy structure in curved cross section.

7. wafer case according to claim 1 is characterized in that, also comprises being suitable for the latching structure that described chassis engages with described cover cap, and described latching structure comprises: the notch of being located at relative two sidewalls on described chassis; Be located at the movable block in the described chassis, the end of described movable block is provided with the latch of corresponding described notch, and described latch is and is bent downwardly; Be located at relative two sidewalls of described cover cap, corresponding to the groove of notch.

8. wafer case according to claim 1 is characterized in that, also comprises intelligent label, and described intelligent label utilizes clamping structure to be fastened in the sidewall of described cover cap.

9. wafer case according to claim 8 is characterized in that, described clamping structure comprises: the draw-in groove of being located at the sidewall of described cover cap; Corresponding described draw-in groove and be fastened in the accessory mounting plate of the sidewall of described cover cap, relative two sides of described accessory mounting plate are provided with spacing block set and draw-in groove; Be connected in the fin of described intelligent label, described fin is provided with respectively spacing block set and corresponding hole clipping and the edge of draw-in groove with described accessory mounting plate.

10. wafer case according to claim 1 is characterized in that, described chassis and cover cap are the plastic shaping member.