CN201514936U - Substrate box transfer platform - Google Patents
Substrate box transfer platform Download PDFInfo
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- CN201514936U CN201514936U CN2009201939967U CN200920193996U CN201514936U CN 201514936 U CN201514936 U CN 201514936U CN 2009201939967 U CN2009201939967 U CN 2009201939967U CN 200920193996 U CN200920193996 U CN 200920193996U CN 201514936 U CN201514936 U CN 201514936U
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- substrate box
- plate
- supporting bracket
- sensor
- microscope carrier
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Abstract
The utility model discloses a substrate box transfer platform which comprises a detection unit; the detection unit comprises a photoelectric sensor, a sensor bracket, a sensor reflecting plate, a sensor baffle plate, a suspension shaft and a control device; the sensor bracket is installed on a second supporting plate; the sensor reflecting plate is installed on the second supporting plate; the photoelectric sensor is arranged below the sensor reflecting plate and electrically connected with the control device; a through groove is formed on the second supporting plate; the sensor baffle plate is provided with a first bending part and a second bending part which can extend in the opposite direction and obliquely penetrates the through groove; the bending point of the first bending part is lapped on the suspension shaft; the suspension shaft is connected with the second supporting plate; the first bending part obliquely and upwardly protrudes from the upper end of the through groove; and the second bending part obliquely and downwardly protrudes from the lower end of the through groove and is adjacent to an optical channel formed by the photoelectric sensor and the sensor reflecting plate. The substrate box transfer platform can effectively prevent the substrates from falling off from the substrate box and greatly improve the substrate transfer efficiency and the substrate transfer quality.
Description
Technical field
The utility model relates to a kind of microscope carrier of carrying and locating of being used to, and relates more specifically to a kind of substrate box transmission microscope carrier that the substrate box that loads substrate is carried and locatees of being used for.
Background technology
Along with the continuous maturation of flat panel display, the size of flat panel display is done bigger and bigger, and the effect of flat panel display is caught up with cathode-ray tube display day by day.The reform of technology then can spur the activity in market, and increasing on the market consumer has selected the panel TV that energy consumption is lower, occupation of land is littler.Consumption demand has then further promoted production, therefore requires the producer of production flat panel display constantly to improve the efficient of production to satisfy the needs in market.
Usually, such as the display panel that uses on PDP (Plasmia indicating panel), TFT-LCD (Thin Film Transistor-LCD) or the OLED flat display apparatus such as (organic light emitting display), this display panel is to use glass or the quartzy substrate of making.
On manufacturing process, glass substrate need pass through a lot of processing steps, corresponding glass substrate just needs storage and carrying, says that further substrate needs a kind of described substrate box finish storage and carrying, also needs the microscope carrier of a kind of support, fixing and mobile substrate box simultaneously.
The carrying that is used for of prior art is transmitted microscope carrier with the described substrate box in location, mainly be to finish by locating and carrying two steps, at first be that described substrate box is put on the microscope carrier, utilize positioner to withstand described substrate box again, force described substrate box to contact with corresponding locating piece, thus carrying, the location of on microscope carrier, finishing described substrate box.Board is measured as 3D in the existing position that also has the complicated testing agency of utilization to judge described substrate box.
At present, the production firm of most of flat-panel monitor all adopts the arm of manipulator to carry out substrate loading and unloading, and it is inaccurate in the location of substrate box described in this process, supporting instability will cause manipulator can't accurately judge the position of substrate, the mistake that further causes manipulator to be carried out, substrate is written into and goes wrong.Unsettled workbench also very easily causes substrate to come off from described substrate box.
Because whether accurately and reliably whether the support of described substrate box, location, will directly influence substrate and can fall in described substrate box, also can influence the efficiency of transmission and the quality of substrate and described substrate box.
Therefore, be badly in need of a kind of simple in structure, operate steadily the substrate box is carried and the substrate box of locating transmission microscope carrier, make it can prevent effectively that substrate from falling in the substrate box, and can significantly improve substrate efficiency of transmission and quality.
The utility model content
The purpose of this utility model is to provide a kind of simple in structure, substrate box transmission microscope carrier that the substrate box is carried and locatees of operating steadily, described substrate box transmission microscope carrier can prevent effectively that substrate from falling in the substrate box, and can significantly improve substrate efficiency of transmission and quality.
To achieve these goals, the technical solution of the utility model is: a kind of substrate box transmission microscope carrier is provided, described substrate box transmission microscope carrier is applicable to the substrate box is carried and locatees, described substrate box transmission microscope carrier comprises holder, described holder is used for the supporting substrate box, described holder comprises base plate, first side plate, second side plate, first supporting bracket and second supporting bracket, described base plate is horizontal positioned, the lower surface of described first side plate and described second side plate is connected with described base plate respectively, and described first side plate and described second side plate are parallel to each other, the lower surface of described first supporting bracket is connected with the upper surface of described first side plate, the lower surface of described second supporting bracket is connected with the upper surface of described second side plate, described first supporting bracket is positioned at same plane and parallel with described base plate respectively with described second supporting bracket, wherein, also comprise detecting unit, described detecting unit comprises photoelectric sensor, sensor stand, the transducer reflecting plate, sensor bezel, suspended axle and control device, described sensor stand is installed on the lower surface of described second supporting bracket, described transducer reflecting plate is installed on described second supporting bracket, described photoelectric sensor is arranged under the described transducer reflecting plate and with described control device and is electrically connected, offer groove on described second supporting bracket, described sensor bezel has first kink and second kink that extends in opposite direction, sensor bezel is and runs through described groove obliquely, the bending place of described first kink is equipped on the described suspended axle, described suspended axle is connected on described second supporting bracket, described first kink is given prominence to the upper end of described groove obliquely, and described second kink is tiltedly down given prominence to the lower end of described groove and the light path of contiguous described photoelectric sensor and the formation of described transducer reflecting plate.
Preferably, offer deep gouge at the center of the described groove in the upper surface upper edge of described second supporting bracket, described suspended axle is connected in the described deep gouge.Particularly, also comprise two fixed blocks, described fixed block has groove, and being installed in the described deep gouge of described fixed block symmetry is in the groove that is fixed in described fixed block of the two ends correspondence of described suspended axle.It is for described fixed block better is installed that described deep gouge is set, being installed in the described deep gouge of described fixed block symmetry, and described fixed block has groove, in the groove that is fixed in described fixed block of the two ends correspondence of described suspended axle, and is free to angle of rotation in described groove.
Preferably, described substrate box transmission microscope carrier also comprises lowering or hoisting gear, described lowering or hoisting gear comprises vertical lifting mechanism, base, nothing oil lining and guide rod, offer through hole respectively on described first supporting bracket and described second supporting bracket, described no oily lining is installed in the described through hole, described guide rod passes described no oily lining slidably and fixedlys connected with described base, described vertical lifting mechanism is fixedly connected with described base and be electrically connected with described control device, and the output shaft of described vertical lifting mechanism is fixedlyed connected with described holder.By described vertical lifting mechanism and described guide rod are set, make the utility model substrate box transmit the elevating movement of microscope carrier in the vertical direction, fixed on the vertical direction by fixed limit, swing on the horizontal direction can not appear, and that described no oily lining has is not yielding, can keep pliability and the strong characteristics of opposing repeated friction ability for a long time, self lubricity is arranged, have the advantages that to help cutting down the consumption of energy but also have, play the effect of energy savings, can also absorb noisy sound in addition, avoid as much as possible bringing noisy sound pollution to operational environment.
Preferably, described substrate box transmission microscope carrier is also embraced spring, and an end of described spring and second kink of described sensor bezel are conflicted, and the other end of described spring and described second side plate are conflicted.Described spring is set to make when not having the carrying substrates box on described first supporting bracket and described second supporting bracket, guaranteed that described first kink of described sensor bezel can give prominence to the upper end of described groove obliquely, described second kink can be tiltedly the light path of the lower end of outstanding described groove and contiguous described photoelectric sensor and the formation of described transducer reflecting plate down.
Preferably, described sensor bezel is zigzag, and described sensor bezel comprises upper plate, middle plate and lower plate, and the upper end and the described upper plate of described middle plate are connected to form first kink, and the lower end and the described lower plate of described middle plate are connected to form second kink.Described sensor bezel design is zigzag, simple in structure, when on described first supporting bracket and described second supporting bracket, not having the carrying substrates box, make described second kink can tiltedly down give prominence to the lower end of described groove and the light path of contiguous described photoelectric sensor and the formation of described transducer reflecting plate easily; When on described first supporting bracket and described second supporting bracket, carrying the substrate box, described second kink can be tiltedly down angle of rotation of the lower end of outstanding described groove and inverse clock cover the light path of described photoelectric sensor and the formation of described transducer reflecting plate.
Preferably, the weight of described lower plate is greater than the weight of described upper plate.So the purpose that is provided with has been to guarantee that described first kink of described sensor bezel can give prominence to the upper end of described groove obliquely, described second kink can be tiltedly the light path of the lower end of outstanding described groove and contiguous described photoelectric sensor and the formation of described transducer reflecting plate down.
Preferably, described substrate box transmission microscope carrier also comprises locating piece, and described locating piece has orthogonal first locating piece and second locating piece, on the upper surface that is installed on described first supporting bracket and second supporting bracket of described locating piece level and form rectangular enclosure.Described rectangular enclosure is used for the positioning substrate box, and particularly, described locating piece is also offered the slot to make way that is circular-arc, and described slot to make way is positioned at described first locating piece and the second locating piece junction.The corner that described slot to make way helps the protecting group film magazine is set is not collided with; particularly; the medial surface of described first locating piece has first locating surface and first overmoving surface; described first locating surface is vertical with described base plate; described first overmoving surface is positioned on described first locating surface; described first overmoving surface and described first locating surface in obtuse angle and the junction be fillet; the medial surface of described second locating piece has second locating surface and second overmoving surface; described second locating surface is vertical with described base plate; described second overmoving surface is positioned on described second locating surface, described second overmoving surface and described second locating surface in obtuse angle and the junction be fillet.Be provided with overmoving surface then ensured the substrate box insert described holder carry with location process in, can not collide described locating piece, cause infringement to the substrate box, accelerated the efficient of operation and improved fail safe.
Compared with prior art, the utility model substrate box transmission microscope carrier is drawn together detecting unit, described detecting unit comprises photoelectric sensor, sensor stand, the transducer reflecting plate, sensor bezel, suspended axle and control device, described sensor stand is installed on the lower surface of described second supporting bracket, described transducer reflecting plate is installed on described second supporting bracket, described photoelectric sensor is arranged under the described transducer reflecting plate and with described control device and is electrically connected, offer groove on described second supporting bracket, described sensor bezel has first kink and second kink that extends in opposite direction, sensor bezel is and runs through described groove obliquely, the bending place of described first kink is equipped on the described suspended axle, described suspended axle is connected on described second supporting bracket, described first kink is given prominence to the upper end of described groove obliquely, the light path of the lower end of the oblique down outstanding described groove of described second kink and the formation of contiguous described photoelectric sensor and described transducer reflecting plate.In inserting the rectangular enclosure that the fixed block that is installed on the described holder forms, the substrate box carries and when locating, the substrate box is then to described first kink that presses down described sensor bezel, described sensor bezel can be rotated counterclockwise certain angle around described suspended axle, described groove then carries out spacing to described sensor bezel, make it can not break away from described suspended axle around described suspended axle rotation, described second kink of described sensor bezel then blocks the light that is penetrated by the described photoelectric sensor that is arranged at the described second supporting bracket lower surface, the light that therefore described photoelectric sensor penetrates can not be mapped on the described transducer reflecting plate, is judged that by described control device the carrying substrates box is arranged on the described holder.After unloading in the rectangular enclosure that described substrate box forms from described fixed block, described sensor bezel certain angle that turns clockwise, described second kink of described sensor senses device baffle plate is then avoided by the light that is arranged at the described photoelectric sensor ejaculation on the described second supporting bracket lower surface, light can be mapped to described transducer reflecting plate, is judged there is not the carrying substrates box on the described holder by described control device.
By following description also in conjunction with the accompanying drawings, it is more clear that the utility model will become, and these accompanying drawings are used to explain embodiment of the present utility model.
Description of drawings
Fig. 1 is the structural representation of the utility model substrate box transmission microscope carrier.
Fig. 2 is the structural representation that the utility model substrate box transmission microscope carrier is removed lowering or hoisting gear.
Fig. 3 is that the utility model substrate box transmission microscope carrier is removed the structural representation of another angle of lowering or hoisting gear.
Fig. 4 is the decomposing schematic representation of the detecting unit of the utility model substrate box transmission microscope carrier.
Fig. 5 is the structural representation of the locating piece of the utility model substrate box transmission microscope carrier.
Fig. 6 is the schematic diagram of an embodiment of the sensor bezel of the utility model substrate box transmission microscope carrier.
Fig. 7 is the schematic diagram of another embodiment of the sensor bezel of the utility model substrate box transmission microscope carrier.
Fig. 8 is the schematic diagram of another embodiment of the sensor bezel of the utility model substrate box transmission microscope carrier.
Fig. 9 is the not theory structure schematic diagram of the photoelectric sensor during the carrying substrates box and the light path of transducer reflecting plate formation of the utility model substrate box transmission microscope carrier.
Figure 10 is the photoelectric sensor of the utility model substrate box transmission microscope carrier when carrying the substrate box of also not inserting fully and the theory structure schematic diagram of the light path of transducer reflecting plate formation.
The theory structure schematic diagram of the light path of the photoelectric sensor when Figure 11 is the carrying of the utility model substrate box transmission microscope carrier to the substrate box of inserting fully and the formation of transducer reflecting plate.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.As mentioned above, as shown in Figures 1 and 2, the substrate box transmission microscope carrier 100 that the utility model provides, be used for substrate box 5 is carried and locatees, described substrate box transmission microscope carrier 100 comprises holder 100a, described holder 100a is used to support described substrate 5, described holder 100a comprises base plate 13, first side plate 12, the second side plate 12a, first supporting bracket 1 and the second supporting bracket 1a, described base plate 13 is horizontal positioned, the lower surface of described first side plate 12 and the described second side plate 12a is connected with described base plate 13 respectively, and described first side plate 12 and the described second side plate 12a are parallel to each other, the lower surface of described first supporting bracket 1 is connected with the upper surface of described first side plate 12, the lower surface of the described second supporting bracket 1a is connected with the upper surface of the described second side plate 12a, described first supporting bracket 1 and the described second supporting bracket 1a are positioned at same plane and parallel with described base plate 13 respectively, wherein, as Fig. 3, Fig. 4 and shown in Figure 9, also comprise detecting unit 100b, described detecting unit 100b comprises photoelectric sensor 41, sensor stand 34, transducer reflecting plate 35, sensor bezel 33, suspended axle 32 and control device (not shown), described sensor stand 34 is installed on the lower surface of the described second supporting bracket 12a, described transducer reflecting plate 35 is installed on 1a on described second supporting bracket, described photoelectric sensor 41 is arranged under the described transducer reflecting plate 35 and with described control device and is electrically connected, offer groove 39 on the described second supporting bracket 12a, described sensor bezel 33 has the first kink 33a and the second kink 33b that extends in opposite direction, sensor bezel 33 is and runs through described groove 39 obliquely, the bending place 33c of the described first kink 33a is equipped on the described suspended axle 32, described suspended axle 32 is connected on the described second supporting bracket 1a, the upper end that the described first kink 33a gives prominence to described groove 39 obliquely, the described second kink 33b tiltedly down gives prominence to the also contiguous described photoelectric sensor 41 in lower end of described groove 39 and the light path of the formation of described transducer reflecting plate 35.Particularly, offer deep gouge 38 at the center of the described groove 39 in the upper surface upper edge of the described second supporting bracket 1a, described suspended axle 32 is connected in the described deep gouge 38.Particularly, also comprise two fixed blocks 31, described fixed block 31 has groove 31a, and being installed in the described deep gouge 38 of described fixed block 31 symmetries is in the groove 31a that is fixed in described fixed block 31 of the two ends correspondence of described suspended axle 32.It is for described fixed block 32 better is installed that described deep gouge 38 is set, being installed in the described deep gouge 38 of described fixed block 31 symmetries, and described fixed block 31 has groove 31a, in the groove 31a that is fixed in described fixed block 31 of the two ends correspondence of described suspended axle 32, and be free to angle of rotation in described groove 31.
The preferably, as Fig. 1, shown in Figure 2, also comprise the lowering or hoisting gear (not shown), described lowering or hoisting gear comprises the vertical lifting mechanism (not shown), base 18, there are not oily lining 15 and guide rod 16, offer through hole 20 respectively on described first supporting bracket 1 and the described second supporting bracket 1a, described no oily lining 15 is installed in the described through hole 20, described guide rod 16 passes described no oily lining 15 slidably and fixedlys connected with described base 18, described vertical lifting mechanism and described base 18 are fixedly connected and be electrically connected with described control device, and the output shaft 17 of described vertical lifting mechanism is fixedlyed connected with described holder 100a.By described vertical lifting mechanism and described guide rod 16 are set, make the utility model substrate box transmit the elevating movement of microscope carrier 100 in the vertical directions, fixed on the vertical direction by fixed limit, swing on the horizontal direction can not appear, and that described no oily lining 15 has is not yielding, can keep pliability and the strong characteristics of opposing repeated friction ability for a long time, self lubricity is arranged, have the advantages that to help cutting down the consumption of energy but also have, play the effect of energy savings, can also absorb noisy sound in addition, avoid as much as possible bringing noisy sound pollution to operational environment.
The preferably as shown in Figure 4, also embraces spring 36, and the second kink 33b of an end of described spring 36 and described sensor bezel 33 conflicts, and the other end of described spring 36 and the described second side plate 12a conflict.Described spring 36 is set to make when not carrying described substrate 5 on described first supporting bracket 1 and the described second supporting bracket 1a, guaranteed the upper end that the described first kink 33a of described sensor bezel 33 can give prominence to described groove 39 obliquely, the described second kink 33b can be tiltedly the light path that forms of the lower end of outstanding described groove 39 and contiguous described photoelectric sensor 41 and described transducer reflecting plate 35 down.
The preferably, described sensor bezel 33 is zigzag, described sensor bezel 33 comprises upper plate, middle plate and lower plate, and the upper end and the described upper plate of described middle plate are connected to form the first kink 33a, and the lower end and the described lower plate of described middle plate are connected to form the second kink 33b.Described sensor bezel 33 designs are zigzag, simple in structure, when on described first supporting bracket 1 and the described second supporting bracket 1a, not carrying described substrate 5, make easily described second kink, 33 b can be tiltedly the light path that forms of the lower end of outstanding described groove 39 and contiguous described photoelectric sensor 41 and described transducer reflecting plate 35 down; When on described first supporting bracket 1 and the described second supporting bracket 1a, carrying described substrate 5, the described second kink 33b can be tiltedly down angle of rotation of the lower end of outstanding described groove 39 and inverse clock cover the light path that described photoelectric sensor 41 and described transducer reflecting plate 35 form.
As shown in Figure 6, showed an embodiment of the utility model sensor bezel 33 as 6.In the present embodiment, described sensor bezel 33 comprises upper plate 331a, middle plate 331b and lower plate 331c, and described upper plate 331a, described middle plate 331b and described lower plate 331c are one-body molded.Described lower plate 331c is a rectangle, has hole 3310 and 3311 on the described middle plate 331b.Also comprise spring 36 as shown in Figure 4, described spring 36 is used to control the rotation of described transducer shape baffle plate 33, and in the hole 3310 and 3311 of plate 331b, the other end contacted on the described second side plate 12a during the one end contacted at.Described substrate 5 is inserted on the described holder 100a, particularly, described substrate 5 is positioned on the upper surface of described first supporting bracket 1 and the described second supporting bracket 1a, described substrate box 5 in the vertical directions be to position, support by described first supporting bracket 1 and the described second supporting bracket 1a, and in the horizontal direction, then position by four described locating pieces 4, when described substrate box 5 is positioned on the described holder 100a fully, because described substrate box 5 is to pressing down described sensor bezel 33, therefore described spring 36 is stretched to maximum position.Simultaneously the lower plate 331c of described transducer shape baffle plate 33 blocks the light that the described photoelectric sensor 41 that is arranged at described holder 100a bottom is launched fully.Described control device is crossed the signal of analyzing and processing photoelectric sensor 41, and then judges that described substrate box 5 is placed on the microscope carrier fully, finishes the detection of inserting of described substrate box 5.Particularly, described substrate box 5 touches described sensor bezel 33 in a flash, described transducer shape baffle plate 33 is just done along with moving both vertically of described substrate box 5 and is rotated counterclockwise motion, and described lower plate 331c also is the light of shading light electric transducer 41 emissions gradually simultaneously.When described substrate box 5 during by complete discharge, described transducer shape baffle plate 33 will be rotated a certain angle around suspended axle 32 by the pulling force of spring 36, and simultaneously the described lower plate 331c of described sensor bezel 33 can avoid being arranged at the light that the photoelectric sensor 41 of the positive bottom of described holder 100a is launched fully.Described control device is crossed the signal of analyzing and processing photoelectric sensor 41, and then judges that described substrate box 5 has unloaded from microscope carrier fully, and the unloading of finishing described substrate box 5 detects.
As shown in Figure 7, showed another embodiment of the utility model sensor bezel as 7.In the present embodiment, described sensor bezel 33 comprises upper plate 332a, middle plate 332b and lower plate 332c, and described upper plate 332a, described middle plate 332b and described lower plate 332c are one-body molded.Present embodiment and embodiment difference shown in Figure 6 are that described lower plate 332c is a wedge shape non-rectangle; Do not have perforate on the described sensor bezel 33, spring 36 be not set, but too realization the rotation of Z-shaped baffle plate 33.When described substrate box 5 was inserted described holder 100a, the pressure that described sensor bezel 33 is subjected to described substrate box 5 was rotated counterclockwise, and blocked the light of described photoelectric sensor 41 emissions, did not have the pulling force of spring 36 in this process; When described substrate box 5 unloaded, described sensor bezel 33 was subjected to the bigger gravity of lower plate 332c and rotates to an angle around described suspended axle 32 automatically.The remaining part operation principle does not repeat them here with embodiment illustrated in fig. 6 identical.
As shown in Figure 8, showed another embodiment of the utility model sensor bezel as 8.In the present embodiment, described sensor bezel 33 comprise upper plate 333a, middle plate 333b and lower plate 333c, described upper plate 333a, described middle plate 333b and described lower plate 333C are one-body molded, present embodiment has increased pouring weight 334, it also can be a plurality of that described pouring weight 334 can be one, and best is one or two.Described pouring weight 334 is connected with lower plate 333c by welding or screw.When described substrate box 5 was inserted described holder 100a, the pressure that described sensor bezel 33 is subjected to described substrate box 5 was rotated counterclockwise, and blocks the light of described sensor emission; When 5 unloadings of described substrate box, described sensor bezel 33 is subjected to described lower plate 333c and described pouring weight 334 bigger gravity and rotates to an angle around axle 32 automatically.The remaining part operation principle does not repeat them here with embodiment illustrated in fig. 6 identical.
As shown in Figure 9, the theory structure schematic diagram of having showed the light path that photoelectric sensor 41 and transducer reflecting plate 35 when substrate box described in the utility model transmission microscope carrier 100a does not carry described substrate 5 form.In the present embodiment, described substrate 5 is not positioned on the upper surface of described first supporting bracket 1 and the described second supporting bracket 1a, light 40 on described photoelectric sensor 41 edges is just tangent and just can be transmitted into described sensor emission plate 35 with the described lower plate 33b of described sensor bezel 33, so the light that described photoelectric sensor 41 emits all can be mapped to described sensor emission plate 35, the signal strength signal intensity of described control device by analyzing and processing photoelectric sensor 41 is very strong and be in stable state, and then judges that not inserting described substrate 5 inserts described holder 100a.
As shown in figure 10, the theory structure schematic diagram of having showed the light path that photoelectric sensor 41 and transducer reflecting plate 35 when substrate box described in the utility model transmission microscope carrier 100a is carrying the described substrate box 5 of also not inserting fully form.In the present embodiment, substrate box 5 is being inserted on the upper surface of described first supporting bracket 1 and the described second supporting bracket 1a, the described lower plate 33b of described sensor bezel 33 is rotated counterclockwise, blocked the light 40 that part is launched from described photoelectric sensor 41, and the light 40 of remainder still can be transmitted into described sensor emission plate 35, tangent and just can be transmitted into described sensor emission plate 35, described control device is more weak by the signal strength signal intensity of analyzing and processing photoelectric sensor 41, and be in the state that is constantly dying down, and then judge having substrate box 5 to insert on the described holder 100a.
The photoelectric sensor 41 when as shown in figure 11, having showed substrate box described in the utility model transmission microscope carrier 100a carrying and the theory structure schematic diagram of the light path of the formation of transducer reflecting plate 35 to the substrate box 5 of inserting fully.In the present embodiment, substrate box 5 has been inserted on the upper surface of described first supporting bracket 1 and the described second supporting bracket 1a fully, the described lower plate 33b of described sensor bezel 33 has blocked the light 40 that sends from described photoelectric sensor 41 fully, described control device is zero by the signal strength signal intensity of analyzing and processing photoelectric sensor 41, and then judgement substrate box 5 has been inserted on the described holder 100a.
The preferably, as shown in Figure 5, also comprise locating piece 4, described locating piece 4 has orthogonal first locating piece 423 and second locating piece 443, on the upper surface that is installed on described first supporting bracket 1 and the second supporting bracket 1a of described locating piece 4 levels and form rectangular enclosure.Described rectangular enclosure is used for positioning substrate box 5, and particularly, described locating piece 4 is also offered the slot to make way 430 that is circular-arc, and described slot to make way 430 is positioned at described first locating piece 423 and second locating piece, 443 junctions.The corner that described slot to make way 430 helps protecting group film magazine 5 is set is not collided with; particularly; the medial surface of described first locating piece 423 has first locating surface 422 and first overmoving surface 421; described first locating surface 422 is vertical with described base plate 13; described first overmoving surface 421 is positioned on described first locating surface 422; described first overmoving surface 421 and described first locating surface 422 in obtuse angle and junction 421a be fillet; the medial surface of described second locating piece 443 has second locating surface 442 and second overmoving surface 441; described second locating surface 442 is vertical with described base plate 13; described second overmoving surface 441 is positioned on described second locating surface 442, described second overmoving surface 441 and described second locating surface 442 in obtuse angle and junction 441a be fillet.On described first locating piece 423 and described second locating piece 443, be provided with the first overmoving surface 421a and the described second overmoving surface 441a then ensured substrate box 5 inserting described holder 100a carry with location process in, can not collide described locating piece 4, cause infringement, accelerated the efficient of operation and improved fail safe substrate box 5.
Compared with prior art, substrate box transmission microscope carrier 100 described in the utility model comprises detecting unit 100b, described detecting unit 100b comprises photoelectric sensor 41, sensor stand 34, transducer reflecting plate 35, sensor bezel 33, suspended axle 32 and control device, described sensor stand 34 is installed on the lower surface of the described second supporting bracket 12a, described transducer reflecting plate 35 is installed on 1a on described second supporting bracket, described photoelectric sensor 41 is arranged under the described transducer reflecting plate 35 and with described control device and is electrically connected, offer groove 39 on the described second supporting bracket 12a, described sensor bezel 33 has the first kink 33a and the second kink 33b that extends in opposite direction, sensor bezel 33 is and runs through described groove 39 obliquely, the bending place 33c of described first kink, 33 a is equipped on the described suspended axle 32, described suspended axle 32 is connected on the described second supporting bracket 1a, the upper end that the described first kink 33a gives prominence to described groove 39 obliquely, the described second kink 33b tiltedly down gives prominence to the also contiguous described photoelectric sensor 41 in lower end of described groove 39 and the light path of the formation of described transducer reflecting plate 35.In inserting the rectangular enclosure that the fixed block that is installed on the described holder 13 4 forms, substrate box 5 carries and when locating, 5 in substrate box is to the described first kink 33a that presses down described sensor bezel 33, described sensor bezel 33a is rotated counterclockwise certain angle around described suspended axle 32,39 of described grooves carry out spacing to described sensor bezel 33, make it can not break away from described suspended axle 32 around described suspended axle 32 rotations, the described second kink 33b of described sensor bezel 33 then blocks the light that is penetrated by the described photoelectric sensor 41 that is arranged at the described second supporting bracket 1a lower surface, the light that therefore described photoelectric sensor 41 penetrates can not be mapped on the described transducer reflecting plate 35, is judged on the described holder 100a that by described control device carrying substrates box 5 is arranged.After unloading in the rectangular enclosure that substrate box 5 forms from described fixed block 4, described sensor bezel 33 certain angle that turns clockwise, the described second kink 33b of described sensor senses device baffle plate 33 then avoids by the light that is arranged at described photoelectric sensor 41 ejaculations on the described second supporting bracket 1a lower surface, light can be mapped on the described transducer reflecting plate 35, is judged on the described holder 100a there is not carrying substrates box 5 by described control device.
Abovely the utility model is described, but the utility model is not limited to the embodiment of above announcement, and should contains various modification, equivalent combinations of carrying out according to essence of the present utility model in conjunction with most preferred embodiment.
Claims (10)
1. a substrate box transmits microscope carrier, be applicable to the substrate box is carried and locatees, described substrate box transmission microscope carrier comprises holder, described holder is used for the supporting substrate box, described holder comprises base plate, first side plate, second side plate, first supporting bracket and second supporting bracket, described base plate is horizontal positioned, the lower surface of described first side plate and described second side plate is connected with described base plate respectively, and described first side plate and described second side plate are parallel to each other, the lower surface of described first supporting bracket is connected with the upper surface of described first side plate, the lower surface of described second supporting bracket is connected with the upper surface of described second side plate, described first supporting bracket is positioned at same plane and parallel with described base plate respectively with described second supporting bracket, it is characterized in that: also comprise detecting unit, described detecting unit comprises photoelectric sensor, sensor stand, the transducer reflecting plate, sensor bezel, suspended axle and control device, described sensor stand is installed on the lower surface of described second supporting bracket, described transducer reflecting plate is installed on described second supporting bracket, described photoelectric sensor is arranged under the described transducer reflecting plate and with described control device and is electrically connected, offer groove on described second supporting bracket, described sensor bezel has first kink and second kink that extends in opposite direction, sensor bezel is and runs through described groove obliquely, the bending place of described first kink is equipped on the described suspended axle, described suspended axle is connected on described second supporting bracket, described first kink is given prominence to the upper end of described groove obliquely, and described second kink is tiltedly down given prominence to the lower end of described groove and the light path of contiguous described photoelectric sensor and the formation of described transducer reflecting plate.
2. substrate box transmission microscope carrier as claimed in claim 1, it is characterized in that: deep gouge is offered at the center at the described groove in the upper surface upper edge of described second supporting bracket, and described suspended axle is connected in the described deep gouge.
3. substrate box transmission microscope carrier as claimed in claim 2, it is characterized in that: also comprise two fixed blocks, described fixed block has groove, and being installed in the described deep gouge of described fixed block symmetry is in the groove that is fixed in described fixed block of the two ends correspondence of described suspended axle.
4. substrate box transmission microscope carrier as claimed in claim 1, it is characterized in that: also comprise lowering or hoisting gear, described lowering or hoisting gear comprises vertical lifting mechanism, base, nothing oil lining and guide rod, offer through hole respectively on described first supporting bracket and described second supporting bracket, described no oily lining is installed in the described through hole, described guide rod passes described no oily lining slidably and fixedlys connected with described base, described vertical lifting mechanism is fixedly connected with described base and be electrically connected with described control device, and the output shaft of described vertical lifting mechanism is fixedlyed connected with described holder.
5. substrate box transmission microscope carrier as claimed in claim 1, it is characterized in that: also embrace spring, an end of described spring and second kink of described sensor bezel are conflicted, and the other end of described spring and described second side plate are conflicted.
6. substrate box transmission microscope carrier as claimed in claim 1, it is characterized in that: described sensor bezel is zigzag, described sensor bezel comprises upper plate, middle plate and lower plate, the upper end and the described upper plate of plate are connected to form first kink in described, and the lower end and the described lower plate of described middle plate are connected to form second kink.
7. substrate box transmission microscope carrier as claimed in claim 6, it is characterized in that: the weight of described lower plate is greater than the weight of described upper plate.
8. substrate box transmission microscope carrier as claimed in claim 1, it is characterized in that: also comprise locating piece, described locating piece has orthogonal first locating piece and second locating piece, on the upper surface that is installed on described first supporting bracket and second supporting bracket of described locating piece level and form rectangular enclosure.
9. substrate box transmission microscope carrier as claimed in claim 8, it is characterized in that: described locating piece is also offered the slot to make way that is circular-arc, and described slot to make way is positioned at described first locating piece and the second locating piece junction.
10. substrate box transmission microscope carrier as claimed in claim 9, it is characterized in that: the medial surface of described first locating piece has first locating surface and first overmoving surface, described first locating surface is vertical with described base plate, described first overmoving surface is positioned on described first locating surface, described first overmoving surface and described first locating surface in obtuse angle and the junction be fillet, the medial surface of described second locating piece has second locating surface and second overmoving surface, described second locating surface is vertical with described base plate, described second overmoving surface is positioned on described second locating surface, described second overmoving surface and described second locating surface in obtuse angle and the junction be fillet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201939967U CN201514936U (en) | 2009-09-03 | 2009-09-03 | Substrate box transfer platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201939967U CN201514936U (en) | 2009-09-03 | 2009-09-03 | Substrate box transfer platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201514936U true CN201514936U (en) | 2010-06-23 |
Family
ID=42486347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201939967U Expired - Fee Related CN201514936U (en) | 2009-09-03 | 2009-09-03 | Substrate box transfer platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201514936U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185117A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Substrate alignment transmission equipment |
| CN102185116A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Substrate basket transmission equipment |
| CN102967887A (en) * | 2012-11-13 | 2013-03-13 | 深圳市华星光电技术有限公司 | Detection device for detecting empty cartridge |
-
2009
- 2009-09-03 CN CN2009201939967U patent/CN201514936U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185117A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Substrate alignment transmission equipment |
| CN102185116A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Substrate basket transmission equipment |
| CN102185117B (en) * | 2011-04-02 | 2012-09-05 | 东莞宏威数码机械有限公司 | Substrate alignment transmission equipment |
| CN102185116B (en) * | 2011-04-02 | 2012-09-05 | 东莞宏威数码机械有限公司 | Substrate basket transmission equipment |
| CN102967887A (en) * | 2012-11-13 | 2013-03-13 | 深圳市华星光电技术有限公司 | Detection device for detecting empty cartridge |
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