Buddha's warrior attendant line shear with single storage silk cylinder
Technical field
The utility model relates to a kind of line cutting technology, particularly relates to a kind of Buddha's warrior attendant line shear that adopts single storage silk cylinder.
Background technology
Line cutting technology is present more advanced in the world silicon chip process technology, and its principle is that the steel wire by a high-speed motion drives and attached to the cutting blade material on the steel wire hard brittle materials such as semiconductor rubbed, thereby reaches the cutting purpose.Line cutting technology has been compared with traditional knife saw sheet, grinding wheel and interior circle cutting has the efficient height, production capacity height, precision advantages of higher.
In cutting process to workpiece, steel wire is by the guiding of tens guide rollers, on the main line roller, form a bracing cable net, and workpiece to be processed is realized the feeding of workpiece by the rise and fall of workbench, and compression pump effect under, be assemblied in grinding agent automatic spraying device on the equipment and grinding agent be sprayed to the cutting position of steel wire and workpiece, driving grinding agent by steel wire moves back and forth, utilize abrasive sand that workpiece is produced cutting, so that hard brittle materials such as semiconductor once are cut into hundreds of simultaneously, in above-mentioned operation, the effect of steel wire is very important, even if but best steel wire, its ductility and abrasion resistance also are limited, that is to say that steel wire can be tapered in driving the grinding agent reciprocating motion, until finally being broken.
In the prior art, common linear cutting equipment (lathe) all can design steel wire tension compensating mechanism, for remedying the ductility of steel wire in going and back running, the extraction of steel wire and to batch all are drive is promptly extracted steel wire, batch out in the left and right motion of steel wire.Therefore a steel wire will overcome all suffered resistances of steel wire in its hot strength limit, just can batch steel wire.But, two storage silks of the configuration cylinder in the wire-moving system of equipment of just having to thus, promptly one is used for unwrapping wire, and another is used for take-up, and correspondingly, each storage silk cylinder all needs to assemble separately a drive motors.Because linear cutting equipment (lathe) has two drive storage silk cylinders, in operation and maintenance process, the adjusting of discrete component is very inconvenient, operating procedure is also quite loaded down with trivial details, increased the technical difficulty of regulating, moreover each storage silk cylinder all needs to assemble separately the cost that a drive motors has also increased equipment greatly.
In addition, the steel wire that uses in the prior art often needs to cooperate grinding agent just can carry out cutting operation, not only increased the materials cost, also can cause follow-up cleaning very inconvenient to equipment and workpiece, and the recovery difficult of lapping liquid is very big, also relatively more serious to workpiece pollution, a real big problem for can not be ignored.
So, how a kind of linear cutting equipment is provided, to avoid above-described shortcoming, real is the present problem demanding prompt solution of dealer of association area.
Summary of the invention
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of Buddha's warrior attendant line shear with single storage silk cylinder, the problem of the equipment cost costliness that causes to dispose a plurality of storage silk cylinders and drive motors in the solution prior art in equipment.
Another purpose of the present utility model is to provide a kind of Buddha's warrior attendant line shear with single storage silk cylinder, and is big with cost, solution workpiece cleaning inconvenience, the lapping liquid recovery difficult that reduces materials, and the problem serious to workpiece contamination.
Reach other relevant purposes for achieving the above object, the utility model provides a kind of Buddha's warrior attendant line shear with single storage silk cylinder, it comprises wire storage tube at least, be used to drive described wire storage tube in the motor of forward or counter-rotating, equably be wrapped in cutting silk on the described wire storage tube, be used for first godet roller and second godet roller and a cutting roller that described cutting silk is led, it is characterized in that: the quantity of described wire storage tube and motor is one, and the cutting silk that is wrapped on the described wire storage tube is one deck; Be provided with tension compensating mechanism between described first godet roller and second godet roller, described tension compensating mechanism has in order to adjusting the adjustment wheel of described cutting thread tension, and is used to spur described adjustment and takes turns pneumatic extensible member in horizontal motion.
In the Buddha's warrior attendant line shear with single storage silk cylinder of the utility model, described cutting silk has the Buddha's warrior attendant line of diamond dust for the top layer, and the cutting silk that is wrapped on the described wire storage tube is individual layer, and then has avoided multilayer cutting silk easily to interlock and the problem of tangling.
In the Buddha's warrior attendant line shear with single storage silk cylinder of the utility model, described tension compensating mechanism also has a slide block, described slide block one end connects described adjustment wheel, the other end connects described pneumatic extensible member, particularly, described slide block slides and is arranged on the slide rail, and is provided with a plurality of balls between described slide block and the slide rail.Described pneumatic extensible member has a cylinder and can change the expansion link of doing stretching motion according to described cylinder internal gas pressure, and described cylinder has an air inlet, is used for carrying air pressure in described cylinder.
As mentioned above, Buddha's warrior attendant line shear with single storage silk cylinder of the present utility model, single wire storage tube and motor have been adopted, and be combined with tension compensating mechanism, and then solved the purpose that need in the wire-moving system of equipment, dispose a plurality of storage silk cylinders arrival compensation tension force in the prior art, and the problem of the cost costliness that causes; Moreover, in the Buddha's warrior attendant line shear with single storage silk cylinder of the utility model, described cutting silk has the Buddha's warrior attendant line of diamond dust for the top layer, avoided the waste materials, solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination, and then improve the operational efficiency that product percent of pass has also improved equipment, promptly effectively overcome various shortcoming of the prior art.
Description of drawings
Fig. 1 shows the wire schematic diagram with Buddha's warrior attendant line shear of single storage silk cylinder of the present utility model.
Fig. 2 is the tension compensating mechanism structural representation with Buddha's warrior attendant line shear of single storage silk cylinder of the present utility model.
The simple declaration of element numbers:
11 wire storage tubes
12 motors
13 cutting silks
14 first godet rollers
15 second godet rollers
16 cutting rollers
17 tension compensating mechanisms
171 adjust wheel
172 pneumatic extensible members
1721 cylinders
1722 expansion links
1723 air inlets
173 slide blocks
18 slide rails
19 balls
2 workpiece
The specific embodiment
Below by specific instantiation embodiment of the present utility model is described, those skilled in the art can understand other advantages of the present utility model and effect easily by the content that this specification disclosed.The utility model can also be implemented or be used by other different concrete real mode, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications or change under the spirit of the present utility model not deviating from.
See also Fig. 1 and Fig. 2, it is shown as the embodiment schematic diagram with Buddha's warrior attendant line shear of single storage silk cylinder of the present utility model.As shown in the figure, the utility model provides a kind of Buddha's warrior attendant line shear with single storage silk cylinder, be used for workpiece 2 such as for example crystalline silicon are cut or block operation, in the present embodiment, described Buddha's warrior attendant line shear with single storage silk cylinder comprises wire storage tube 11, motor 12, cutting silk 13, first godet roller 14, second godet roller 15, cutting roller 16 and tension compensating mechanism 17 at least.So, be not limited in this, for the signal of simplifying graphic, and basic conception of the present utility model only is described in a schematic way, satisfy and only show the assembly relevant in graphic but not component count, shape and size drafting when implementing according to reality with the Buddha's warrior attendant line shear with single storage silk cylinder of the present utility model, kenel, quantity and the ratio of each assembly can be a kind of random change during its actual enforcement, and its assembly layout kenel also may be more complicated.
Described cutting silk 13 is wrapped on the described wire storage tube 11 equably, described cutting silk 13 drives by described motor 12, in concrete running, described motor 12 is in alternately rotation forward or backwards, so that described cutting silk 13 moves back and forth to reach the operation of blocking to described workpiece 2.The utility model emphasis is pointed out that the wire storage tube 11 of described Buddha's warrior attendant line shear and the quantity of motor 12 are one, compare in equipment of the prior art, have then reached the purpose that reduces cost.
What the utility model also it is important to point out that is, the cutting silk 13 that the Buddha's warrior attendant line shear with single storage silk cylinder of the utility model is adopted has the Buddha's warrior attendant line of diamond dust for the top layer, select for use this kind Buddha's warrior attendant line in process, to avoid using lapping liquid with abrasive sand, not only reduced the materials cost, also solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination.
What the present invention it is important to point out that again is, the cutting silk 13 that the present invention's Buddha's warrior attendant line shear is wrapped on the described wire storage tube 11 is individual layer, and then has avoided the easily staggered and problem of tangling of the cutting silk of available technology adopting multilayer storage silk.
Described first godet roller 14 and second godet roller 15 are used for described cutting silk 13 is led or changes the path of described cutting silk 13, described cutting roller 16 has one and promptly uses cutting groove (not shown) and a plurality of standby cutting groove (not shown), described cutting silk 13 is via described godet roller 14 or 15 guiding and be wrapped in promptly the using in the cutting groove of described cutting roller 16, in service repeatedly a phenomenon does not take place to jump to guarantee described cutting silk 13.
Buddha's warrior attendant line shear of the present utility model has adopted single wire storage tube 11 and motor 12, and is combined with tension compensating mechanism 17 to arrive the described cutting silk 13 of compensation because of moving the purpose that produces tension force repeatedly.In present embodiment, described tension compensating mechanism 17 comprises: adjust wheel 171, pneumatic extensible member 172 and slide block 173.
Described adjustment wheel 171 is between described first godet roller 14 and second godet roller 15, particularly, described cutting silk 13 is taken turns 171, second godet roller 15, cutting roller 16 with this through described first godet roller 14, adjustment from described wire storage tube 11, returns described wire storage tube 11 at last.
On the described adjustment wheel 171 fixing described slide blocks 173, described slide block 173 slides and is arranged on the slide rail 18, and is provided with a plurality of balls 19 between described slide block 173 and the slide rail 18, so that described slide block 173 easily slides on slide rail 18.
Described pneumatic extensible member 172 has a cylinder 1721 and can change the expansion link 1722 of doing stretching motion according to described cylinder 1721 internal gas pressures, promptly, described expansion link 1722 can be done the piston motion in described cylinder 1721, described cylinder 1721 has an air inlet 1723, is used for carrying in described cylinder 1721 air pressure.
In concrete embodiment, the far-end of described expansion link 1722 is fixed on the described slide block 173, be used to spur the adjustment wheel 171 of described slide block 173 in horizontal motion, described air inlet 1723 is communicated with a pressue device (not shown) by an airway (not shown), in order to described cylinder 1721 is pressurizeed.In more detail, described pressue device can be provided with a constant air pressure, so that the expansion link 1722 in the described cylinder 1721 also is subjected to a steady state value, can make described pneumatic extensible member 172 drive described adjustment wheel 171 like this and keep a stable state, when compensation is wound in tension force that the cutting silk 13 on the described adjustment wheel 171 produces when changing, the expansion link 1722 of described pneumatic extensible member 172 can spur the adjustment wheel 171 of described slide block 173 in horizontal motion, and then reach the effect of adjusting, to have compensated the variation of this tension force.
In sum, the utility model mainly is to adopt single wire storage tube and motor, and be combined with tension compensating mechanism, and then solved the purpose that need in the wire-moving system of equipment, dispose a plurality of storage silk cylinders arrival compensation tension force in the prior art, and the problem of the cost costliness that causes; Moreover, in the Buddha's warrior attendant line shear with single storage silk cylinder of the utility model, described cutting silk has the Buddha's warrior attendant line of diamond dust for the top layer, avoided the waste materials, solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination, and then improve the operational efficiency that product percent of pass has also improved equipment, promptly effectively overcome various shortcoming of the prior art and the tool high industrial utilization.
The foregoing description is illustrative principle of the present utility model and effect thereof only, but not is used to limit the utility model.Any personage who has the knack of this technology all can be under spirit of the present utility model and category, and the foregoing description is modified or changed.Therefore, have in the technical field under such as and know that usually the knowledgeable modifies or changes not breaking away from all equivalences of being finished under spirit that the utility model discloses and the technological thought, must be contained by claim described later.