CN201464389U - X fluorescence spectrometer with double flat crystal fixed element road optical splitter - Google Patents
X fluorescence spectrometer with double flat crystal fixed element road optical splitter Download PDFInfo
- Publication number
- CN201464389U CN201464389U CN200920110572XU CN200920110572U CN201464389U CN 201464389 U CN201464389 U CN 201464389U CN 200920110572X U CN200920110572X U CN 200920110572XU CN 200920110572 U CN200920110572 U CN 200920110572U CN 201464389 U CN201464389 U CN 201464389U
- Authority
- CN
- China
- Prior art keywords
- incident
- optical
- optical flat
- assembly
- fluorescence spectrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model discloses an X fluorescence spectrometer with double flat double-crystal fixed element road optical splitters, which comprises an X-ray tube, an X-ray generator, a plurality of fixed element road optical splitters, a vacuum measurement chamber, a vacuum pumping system, an automatic control system, a detector, an element characteristic X-ray spectral peak detecting device and an upper PC, wherein two flat crystal diffraction optical paths are arranged in each fixed element road optical splitter, so the size of the optical splitter is not changed and all the optical splitters can determine two elements simultaneously, so that the types of elements that an instrument can determine simultaneously are doubled without increasing the diameter of the vacuum measurement chamber and the number of optical splitters, so as to expand the scope of application of the instrument; and when the type of the element to be determined is fixed, the number of the optical splitter and the diameter of the vacuum measurement chamber can be doubly reduced, so as to greatly simplify the structure of the instrument, and reduce the manufacturing cost.
Description
Technical field
The utility model relates to the measuring equipment field, is specifically related to the X fluorescence spectrum analyzer, particularly relates to a kind of X fluorescence spectrum analyzer with two optical flat fixed element light splitters.
Background technology
In the existing wavelength dispersion multielement simultaneous determination type X fluorescence spectrum analyzer (being called for short co-shaping WDXRFS), in general the vacuum measurement chamber around a plurality of fixed elements road (be called for short element road) is installed, the characteristic X-ray in each element road is detected by detector after the optical splitter beam split, the pulse signal that produces is after amplifier amplifies, pulse height will distribute according to a peak-shaped curve, promptly be called the characteristic X-ray spectrum peak (being called for short the element spectral peak) of this element.Must carefully regulate spectrum peak-to-peak position during instrument testing, and make spectrum peak resolution reach best, set region of interest then, calculate the spectrum peak area (pulsimeter digit rate) in the district, promptly represent the intensity of this elemental characteristic X ray, be directly proportional with this constituent content, promptly can carry out quantitative test whereby constituent content.
Existing co-shaping WDXRFS, periphery has been installed several fixed element light splitters in the vacuum measurement chamber.Each adopts the element light splitter of curved crystals (hereinafter to be referred as the bent crystal), is made up of entrance slit pipe assembly, the light-splitting box assembly that is connected with entrance slit pipe assembly afterbody, the exit slit pipe assembly that is connected with the light-splitting box assembly.Sent separately characteristic X-ray by the different elements in the sample after the x-ray bombardment of X-ray pipe, its wavelength is different.Slit and the pipe internal channel of these X ray by incident ray slit tube end projects on the analyzing crystal surface in the light-splitting box assembly with the θ angle, wherein have only wavelength X to meet the Bragg formula: (n is the diffraction number of times to n λ=2dSin θ, be generally 1, d is an interplanar distance) the elemental characteristic X ray could be reflected by analyzing crystal and focus on same θ angle, and the slit by exit slit pipe assembly end to enter detector detected.Get final product the content of this element in the calculation sample according to the intensity of detected this kind elemental characteristic X ray.The characteristic X-ray of other element is not absorbed by analyzing crystal and exit slit tube wall because of its wavelength meets the Bragg formula.
A bent crystal can only be installed in the known fixed element light splitter, and have only a single channel light path, can only measure a certain fixing element.Therefore, the element kind that can measure simultaneously of co-shaping WDXRFS is identical with the optical splitter quantity of being installed.Because the restriction of installing space, the optical splitter limited amount that can install at the certain vacuum measurement chamber periphery of diameter, so the element kind that instrument can be measured simultaneously is restricted.Up to the present, 12 known single optical flat element optical splitters can be installed at most in the small-sized multiple tracks WDXRFS instrument of existing power≤200W, promptly can measure 12 kinds of elements simultaneously at most.In order to increase the kind that to measure element, have to strengthen the diameter of vacuum measurement chamber, cause sample to the optical path length of crystal to increase, because detected X ray intensity and optical path length are inversely proportional to, therefore in order to guarantee the analysis precision of element, must strengthen the power of instrument.Nonetheless, in the large-scale multiple tracks WDXRFS instrument of power 〉=2000W, about 30 known single optical flat optical splitters can only be installed at most also, and seem very crowded in the instrument this moment, install, debug and keep in repair all quite difficulty.
The utility model content
The purpose of this utility model provides the X fluorescence spectrum analyzer that number of elements that a kind of volume reduces, measures increases, has the two optical flat fixed element light splitters that can measure two kinds of elements simultaneously.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of X fluorescence spectrum analyzer with two optical flat fixed element light splitters, it comprises X-ray pipe and X-ray generator, several fixed element light splitters, vacuum measurement chamber and pumped vacuum systems, automatic control system, detector, elemental characteristic X-ray spectrum peak pick-up unit and upper PC computing machine are characterized in: the described fixed element light splitter of described fixed element light splitter includes the incident collimator assembly, the light-splitting box assembly that is connected with incident collimator assembly afterbody, the outgoing collimator assembly that is connected with the light-splitting box assembly;
Described incident collimator assembly includes the body of incident passage and is installed in the slit width regulator of this incident passage head; Described outgoing collimator assembly has two, respectively includes the body of exit channel, and this exit channel head is connected with the box body of light-splitting box assembly; The optical flat assembly that described light-splitting box assembly includes box body and is installed in this box body inside, this optical flat assembly include two optical flats, a crystal carriage and two incident angle governor motions that are connected with optical flat respectively; The optical axis of described incident passage is by the center of optical flat, and its incident angle equals the angle of diffraction of tested element, and the optical axis of described exit channel is by the center of same optical flat, and its emergence angle equals incident angle.
In the described X fluorescence spectrum analyzer, be one group wide incident pipeline in the described incident collimator assembly body, the body central axis is parallel; The incident angle of the incident light of incident passage and two optical flats is respectively θ
1And θ
2, θ
1And θ
2Be respectively the angle of diffraction of two kinds of tested elements.
The end of described each outgoing collimating apparatus connects an X-ray detector respectively.Described X-ray detector is following a kind of: flow gas proportional counter, closed proportional counter or scintillation counter.
The axial line of the body of described incident collimator assembly is by the center of box body.
Described optical flat is a triangle, two optical flat one positive one counter being installed on the crystal carriage.
Adopt above design, two optical flat fixed element light splitters have been made up in the utility model, compare with known fixed element light splitter, under the identical situation of optical splitter physical dimension, it is two kinds of elements that the element kind that each optical splitter can be measured is simultaneously become by original a kind of element, this makes the utility model co-shaping WDXRFS instrument not strengthen vacuum measurement chamber diameter and increase under the situation of optical splitter quantity, the element kind of Ce Dinging is multiplied simultaneously, thereby enlarges the range of application of instrument greatly.
On the other hand, under the certain situation of the element kind of required mensuration, can reduce the quantity and the diameter that reduces the vacuum measurement chamber of optical splitter behind the two optical flat fixed element light splitters of the utility model employing at double, thereby the utility model apparatus structure is greatly simplified, reduced manufacturing cost significantly; The fluorescent X-ray utilization ratio is significantly improved, and reduce the X-ray tube power.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present utility model.
Fig. 2 is the structural representation of fixed element light splitter in the utility model.
Embodiment
The utility model proposes a kind of X fluorescence spectrophotometer with the fixed element light splitter that can measure two kinds of elements simultaneously.This X fluorescence spectrum analyzer one-piece construction as shown in Figure 1, it comprises the X-ray pipe that is installed in the cabinet and X-ray generator 101, vacuum measurement chamber 102, several automatic control system, elemental characteristic X-ray spectrum peak pick-up units 107 that are connected with the fixed element light splitter 104 of detector 105, are made of control circuit integrated circuit board 106 etc., and the pumped vacuum systems 103, the band display 108 that is electrically connected with automatic control system and pick-up unit 107 and the parts such as computing machine 100 of printer 109 that place outer and vacuum measurement chamber 102 connections of cabinet.
Complete machine parts composition and annexation and existing co-shaping WDXRFS are basic identical, and this paper will not give unnecessary details.
In the utility model, fixed element light splitter 104 adopts special pair of optical flat channel architecture design.As shown in Figure 2, this fixed element light splitter 104 includes incident collimator assembly 1, the light-splitting box assembly 2 of assembly 1 afterbody connection therewith, the outgoing collimator assembly 3 that is connected with the light-splitting box assembly;
The wide luminosity regulating part 14 of slit that incident collimator assembly 1 includes the body 12 of incident passage 11 and is installed in this incident passage head, the afterbody of the body 12 of incident collimator assembly 1 is connected with box body 21, and its central axis is by the center of box body 21; Outgoing collimator assembly 3 includes the body 32 of exit channel 31, and these outgoing collimator assembly 3 afterbodys are connected with the box body 21 of light-splitting box assembly; The optical flat assembly 4 that light-splitting box assembly 2 includes box body 21 and is installed in this box body inside, this optical flat assembly 4 include optical flat 41, crystal carriage 42 and are used to adjust the governor motion 43 of crystal angle; The optical axis of incident passage 11 is by the center of optical flat 41, and its incident angle equals the angle of diffraction of tested element, and the optical axis of exit channel 31 is by the center of optical flat 41, and its emergence angle equals incident angle; In the utility model, optical flat assembly 4 includes two leg-of-mutton optical flat 41 and 41 ', one positive one counter being installed on the crystal carriage 42, and each optical flat is connected in order to regulate angle separately with a governor motion 43 separately;
The quantity of outgoing collimator assembly also is two (labels 3 and 3 '), and the afterbody of each outgoing collimator assembly is connected with the box body 21 of light-splitting box assembly respectively; Divide equally from the directional light of incident passage 11 and to be two parts, wherein a part of incident light, an optical flat 41 and an outgoing collimator assembly 3 constitute an optical diffraction, and another part incident light and another piece optical flat 41 ' and another outgoing collimator assembly 3 ' constitute another optical diffraction.In two light paths, the governor motion 43 by is separately adjusted incident angles and is equated with emergence angle.
Among the present invention, the incident light axis in the described incident collimator assembly I body is same parallel ray beam, and parallel with the body central axis; The angle of two crystal and incident ray is to regulate separately, makes from the incident light of incident passage and the incident angle of two optical flats and is respectively θ
1And θ
2, θ
1And θ
2Be respectively the angle of diffraction of two kinds of tested elements.
In the foregoing description, the end of each outgoing body 32 connects an X-ray detector 105 respectively, and this X-ray detector 34 can be flow gas proportional counter, closed proportional counter or scintillation counter.Each X-ray detector all links to each other with elemental characteristic X-ray spectrum peak pick-up unit 107 signals in the complete machine.
The fixed element light splitter 104 of above-mentioned design is assembled in the X fluorescence spectrum analyzer in the following manner, wherein: incident pipe assembly 1 stretches in the vacuum measurement chamber 102, and by seal assembly 104 and 102 assemblies are tightly connected, the spectrum groupware connection of this instrument is finished.
Claims (10)
1. X fluorescence spectrum analyzer with two optical flat fixed element light splitters, it comprises X-ray pipe and X-ray generator, several fixed element light splitters, vacuum measurement chamber and pumped vacuum systems, automatic control system, X-ray detector, elemental characteristic X-ray spectrum peak pick-up unit and upper PC computing machine, it is characterized in that: the outgoing collimator assembly that described fixed element light splitter includes incident collimator assembly, the light-splitting box assembly that is connected with incident collimator assembly afterbody, is connected with the light-splitting box assembly;
Described incident collimator assembly includes the body of incident passage and is installed in the slit width regulator of this incident passage head; Described outgoing collimator assembly has two, respectively includes the body of exit channel, and this exit channel head is connected with the box body of light-splitting box assembly; The optical flat assembly that described light-splitting box assembly includes box body and is installed in this box body inside, this optical flat assembly include two optical flats, a crystal carriage and two incident angle governor motions that are connected with optical flat respectively; The optical axis of described incident passage is by the center of optical flat, and its incident angle equals the angle of diffraction of tested element, and the optical axis of described exit channel is by the center of same optical flat, and its emergence angle equals incident angle.
2. X fluorescence spectrum analyzer according to claim 1 is characterized in that: be one group wide incident pipeline in the described incident collimator assembly body, the body central axis is parallel; The incident angle of the incident light of incident passage and two optical flats is respectively θ
1And θ
2, θ
1And θ
2Be respectively the angle of diffraction of two kinds of tested elements.
3. X fluorescence spectrum analyzer according to claim 1 is characterized in that: the end of described each outgoing collimating apparatus connects an X-ray detector respectively.
4. X fluorescence spectrum analyzer according to claim 2 is characterized in that: the end of described each outgoing collimating apparatus connects an X-ray detector respectively.
5. according to claim 3 or 4 described X fluorescence spectrum analyzers, it is characterized in that: described X-ray detector is following a kind of: flow gas proportional counter, closed proportional counter or scintillation counter.
6. according to claim 1 or 2 or 3 or 4 described X fluorescence spectrum analyzers, it is characterized in that: the axial line of the body of described incident collimator assembly is by the center of box body.
7. X fluorescence spectrum analyzer according to claim 5 is characterized in that: the axial line of the body of described incident collimator assembly is by the center of box body.
8. according to claim 1 or 2 or 3 or 4 described X fluorescence spectrum analyzers, it is characterized in that: described optical flat is a triangle, two optical flat one positive one counter being installed on the crystal carriage.
9. X fluorescence spectrum analyzer according to claim 5 is characterized in that: described optical flat is a triangle, two optical flat one positive one counter being installed on the crystal carriage.
10. X fluorescence spectrum analyzer according to claim 6 is characterized in that: described optical flat is a triangle, two optical flat one positive one counter being installed on the crystal carriage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920110572XU CN201464389U (en) | 2009-07-31 | 2009-07-31 | X fluorescence spectrometer with double flat crystal fixed element road optical splitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920110572XU CN201464389U (en) | 2009-07-31 | 2009-07-31 | X fluorescence spectrometer with double flat crystal fixed element road optical splitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201464389U true CN201464389U (en) | 2010-05-12 |
Family
ID=42391739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920110572XU Expired - Lifetime CN201464389U (en) | 2009-07-31 | 2009-07-31 | X fluorescence spectrometer with double flat crystal fixed element road optical splitter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201464389U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103245684A (en) * | 2013-04-26 | 2013-08-14 | 杨东华 | Light splitting system for wavelength dispersive X-ray fluorescence spectrometer |
| WO2016095787A1 (en) * | 2014-12-16 | 2016-06-23 | 深圳市善时仪器有限公司 | X-ray fluorescence spectrum analyzer |
| CN108508051A (en) * | 2018-04-24 | 2018-09-07 | 国家地质实验测试中心 | A kind of compound Xray fluorescence spectrometer of wave spectrum power spectrum |
| CN109900728A (en) * | 2019-03-19 | 2019-06-18 | 复旦大学 | A kind of soft X-ray spectroscopy measuring device |
-
2009
- 2009-07-31 CN CN200920110572XU patent/CN201464389U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103245684A (en) * | 2013-04-26 | 2013-08-14 | 杨东华 | Light splitting system for wavelength dispersive X-ray fluorescence spectrometer |
| WO2016095787A1 (en) * | 2014-12-16 | 2016-06-23 | 深圳市善时仪器有限公司 | X-ray fluorescence spectrum analyzer |
| CN108508051A (en) * | 2018-04-24 | 2018-09-07 | 国家地质实验测试中心 | A kind of compound Xray fluorescence spectrometer of wave spectrum power spectrum |
| CN109900728A (en) * | 2019-03-19 | 2019-06-18 | 复旦大学 | A kind of soft X-ray spectroscopy measuring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201464390U (en) | X fluorescence spectrometer with flat and bent double-crystal fixed element road optical splitters | |
| KR20160006155A (en) | Multi-channel aerosol scattering absorption measuring instrument | |
| CN103499545B (en) | Adopt the semiconductor laser gas detecting system of gas reference chamber feedback compensation | |
| CN201464389U (en) | X fluorescence spectrometer with double flat crystal fixed element road optical splitter | |
| CN102854168B (en) | Device for referenced measurement of reflected light and method for calibrating such a device | |
| CN103245414B (en) | Cross-spectral calibrating device and method for monochromator and imaging spectrometer | |
| CN101666681B (en) | Spectrometer using MOEMS movable blazed grating array | |
| CN102213675A (en) | Angle adjustable multichannel optical fiber surface plasmon resonance sensing probe | |
| CN102213682B (en) | Method for measuring transmission of interference-insensitive terahertz wave | |
| CN102486402B (en) | Method and system for measuring pulse laser energy | |
| CN103105284A (en) | Lithography machine illuminating system optical module transmittance measuring device and method | |
| CN103134588A (en) | Spectrograph | |
| CN201522463U (en) | Wavelength dispersion X-ray fluorescence analyzer with energy dispersion detecting technology | |
| CN101819140A (en) | Continuous monitoring device and method of gaseous elemental mercury concentration | |
| CN102162791A (en) | Real-time on-line adsorption detection system | |
| CN101813519B (en) | Stray light correction method of spectrograph | |
| CN106500844A (en) | A kind of clematis stem road point amplitude high speed Stokes polarimeter and its measurement method of parameters | |
| CN104833816A (en) | Laser doppler velocity measurement device based on rotating grating and velocity measurement method of laser doppler velocity measurement device | |
| CN100590429C (en) | Fixed element light splitter for co-shaping x-ray fluorescence spectrometer | |
| CN104344890A (en) | Weak light signal spectrum fast test device and method | |
| CN110231090A (en) | A kind of test method of thermal infrared spectrum instrument internal stray radiation | |
| CN102012310B (en) | Novel full-band CCD detector performance evaluating system and method | |
| CN203053569U (en) | Spectrograph | |
| JP6256216B2 (en) | Spectrometer, liquid chromatograph and spectrometer wavelength calibration method | |
| CN107561008A (en) | A kind of device for VUV diffusing reflection plate BRDF feature measurements |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100512 |
|
| CX01 | Expiry of patent term |