CN201458973U - Contour-bendable low-radiation coated glass - Google Patents

Contour-bendable low-radiation coated glass Download PDF

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Publication number
CN201458973U
CN201458973U CN2009200777950U CN200920077795U CN201458973U CN 201458973 U CN201458973 U CN 201458973U CN 2009200777950 U CN2009200777950 U CN 2009200777950U CN 200920077795 U CN200920077795 U CN 200920077795U CN 201458973 U CN201458973 U CN 201458973U
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low
layer
coated glass
rete
glass
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尚贵才
丁杰
陈绍木
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Fuyao Group Shanghai Automotive Glass Co Ltd
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Fuyao Group Shanghai Automotive Glass Co Ltd
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Abstract

The utility model relates to contour-bendable low-radiation coated glass. In the technical scheme, the structure of a coating layer of the contour-bendable low-radiation coated glass comprises a glass substrate, a first dielectric layer, a transitional layer, a low radiation layer, a transitional layer, a second dielectric layer and a protective layer in sequence from the glass substrate towards the outside. Compared with the prior art, the utility model has the advantages of excellent physical properties, firm coating layer, excellent mechanical properties, flexible configuration, easy control, high deposition efficiency and contour bending resistance. The key performance indicators can not change during the contour bending process. The utility model also has the low radiation function. For the laminated glass formed by the contour-bendable low-radiation coated glass, the visible light transmittance can reach above 76 percent and the solar transmittance is below 48 percent, or the visible light transmittance can reach above 70 percent and the solar transmittance is below 43 percent. Therefore, the utility model is applicable to the automotive front windshield.

Description

A kind of bendable low-emission coated glass
Technical field
The utility model relates to a kind of coated glass, especially relates to a kind of bendable low-emission coated glass.
Background technology
Common glass does not have heat insulating function, but can reach heat insulating function by different technologies means glass.
Chinese patent 200620004861.8 discloses a kind of heat reflection laminated glass, this patent has been described by changing polyvinyl butyral acetal (Polyvinyl Butyral, PVB) structure and material is realized the heat reflection function of laminated glass, because common laminated glass does not have heat reflection or heat-proof quality.Its structure comprises a PVB functional film layer and the PVB film layers between the first layer glass, second layer glass and the layer glass, the PVB functional film layer comprises PVB film layers and heat reflection rete laminated together with it, this heat reflection rete is made up of the ordered arrangement of plural layer non-metallic layer, has pasting property of height and snappiness.
Chinese patent 97209697.3 discloses a kind of heat reflection laminated glass, the used PVB of the structure of its PVB and common laminated glass is the same, having a slice at least in the former sheet glass substrate that its difference is to be adopted is coated glass, promptly adjacent with PVB glass surface is coated with one deck heat reflection rete, thereby makes laminated glass have the heat reflection function.
The glass coating product can be divided into thermal reflecting coating and low-radiation film according to functional classification.But by retrieval, do not have to find to be coated with the laminated glass of low-radiation film, thereby make laminated glass have the technical literature of low radiation functions or heat insulating function.The laminated glass that has the low radiation functions plated film is in space state at home.
Low radiation coated glass also is the Low-E coated glass, is meant that the surface plates the special glass of the stratified film that the metal that has extremely low emissivity or other compounds form.The Low-E coated glass is the glassy product of a kind of green, energy-saving and environmental protection.The emissivity of simple glass is about 0.84, and the emissivity of Low-E coated glass is below 0.25.This low-radiation film layer less than one of hairline percentage thickness is very high to the reflectivity of far-infrared thermal radiation, far-infrared thermal radiation more than 80% can be reflected back, and the far infrared reflectivity of normal transparent float glass, antisolar glass is only about 12%, so the Low-E coated glass has the effect that good blocking radiant heat sees through.In winter, the thermal radiation that it distributes room heater and indoor object can be as a hot mirror, and most reflected backs are indoor, guarantees that indoor heat does not does not scatter and disappear to outdoor, thereby saves heat cost.In summer, it can stop in the thermal radiation inlet chamber that outdoor ground, buildings send, and saves the air conditioner refrigerating expense.The visible reflectance of Low-E coated glass is generally below 11%, and is close with common white glass, is lower than the visible reflectance of common sunlight controlling coated glass, can avoid causing reflected light to pollute.
According to the manufacturing process of low-E coated glass, can be divided into two kinds of online low-E coated glass and off-line low-E coated glasses, the utility model belongs to off-line low-E coated glass field.
Off-line low-E coated glass is to be made of stratified film, be to adopt magnetron sputtering technology to produce, its functional layer is mainly silver layer, because silver layer oxidation especially easily, so common off-line low-E coated glass can not carry out heating operation, can only be that synthetic immediately double glazing uses behind the plated film.
Along with technology is constantly progressive, but tempering low-E coated glass had appearred in recent years, but the glass coating producer of the bigger employing magnetron sputtering technique of domestic a few family can produce this tempering low-E coated glass. but tempering low-E coated glass is meant that glass plates the low-radiation film layer earlier, and then remove tempering, key property behind the tempering, as radiant ratio (E value), transmitance etc., all can not change, but that is to say original performance that can also keep rete behind the tempering. the film layer structure of this tempering low-E coated glass is generally: glass/Si 3N 4/ TiO x/ ZnO/Ag/NiCrO x/ Si 3N 4This film layer structure can carry out tempering or thermal treatment, and still can keep original performance after carrying out tempering or thermal treatment; Described product relatively is suitable for the top-grade building cladding glass, and transmitance belongs to high-transparency coated glass product generally more than 65%, so can not produce the serious glare public hazards.
But Chinese patent 200710074842.1 discloses a kind of low emissivity glass and manufacture method thereof of following process, and this invents described low radiation coated glass can tempering, strange land transportation and processing, is applied to building fields such as residential houses.
But above-mentioned these radiation coated glass capable of being tougheneds, the film layer structure that has can not stand to dry by the fire curved operation, can cause low radiance decline or transmitance to change after baking is curved; The visible light transmissivity of the film layer structure that has can not satisfy the requirement of vehicle glass, particularly windshield glass; , particularly can not be used to make windshield glass of automobile so but these tempering coated glass products can not be used to make laminated glass.
The curved operation of baking is the critical process in the laminated glass manufacturing process, because although the hot bending operation in curved operation of baking and the toughened glass manufacturing process all will be born the high temperature more than 600 ℃, but the residence time of coated glass in two kinds of operations is different, the tempering of toughened glass, the hot bending operation stops 2-4min at most, and the curved operation of the baking of laminated glass need stop 5-10min in special continuous baking and bending furnace, thus the bendable low-emission coated glass that is used for laminated glass to the requirement of film system configuration than radiation coated glass capable of being toughened to the configuration of film system require much higher; And the residence time at high temperature is the most severe to the influence of the film quality of coated glass, so the residence time under the high temperature has just determined the complexity of low radiation coated glass technological development.
Develop a kind of key of bendable low-emission coated glass; just be a kind of rete configuration of appropriate design; upper and lower protective film can be adequately protected to silver layer; so that the whole film layer structure of configuration can stand 600-700 ℃ high temperature; and can allow under this high temperature, to stop for a long time; through this long-time pyritous test, product performance still remain unchanged.
Summary of the invention
The purpose of this utility model is exactly that a kind of excellent property, bendable low-emission coated glass that film layer structure is good are provided in order to overcome the defective that above-mentioned prior art exists.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of bendable low-emission coated glass; it is characterized in that the film layer structure of this bendable low-emission coated glass outwards is followed successively by from glass substrate: glass substrate, first dielectric layer, transition layer, low radiating layer, transition layer, second dielectric layer and protective layer.
Described first dielectric layer comprises the zinc oxide or the ZnSnOx film layer structure of ZnSnOx/ZnOy, ZnSnOx/ adulterated al, and the ZnSnOx thicknesses of layers is 20-40nm, and the ZnOy thicknesses of layers is 5-15nm, and the Zinc oxide film layer thickness of adulterated al is 5-15nm.
In the described ZnSnOx rete, 0<x≤3, in the ZnOy rete, 0<y≤1.
Described transition layer is the NiCrOx rete, and thickness is 1-5nm, in the NiCrOx rete, and 0<x≤2.5.
Described low radiating layer is a silver film, and thickness is 9-14nm.
Described second dielectric layer comprises the zinc oxide/ZnSnOy or the ZnSnOy film layer structure of ZnOx/ZnSnOy, adulterated al, and the ZnOx thicknesses of layers is 5-15nm, and the Zinc oxide film layer thickness of adulterated al is 5-15nm, and the ZnSnOy thicknesses of layers is 20-40nm.
In the zinc oxide of described adulterated al, the weight of adulterated al is not more than 5% of zinc oxide weight.
Described protective layer is SiNx or TiOy rete, and thickness is 5-15nm.
In the described SiNx rete, 0<x≤4/3, in the TiOy rete, 0<y≤2.
Superpose successively more outward polyvinyl butyral acetal layer and another glass substrate of the protective layer of described bendable low-emission coated glass constitutes low-emission coated laminated glass.
Compared with prior art, the utlity model has following advantage:
(1) adopts the ZnSnOx rete, be that zinc tin oxide directly contacts with glass substrate as first floor rete, can strengthen and glass substrate between sticking power, adopt the bendable low-emission coated glass of this transition layer and the bendable low-emission coated glass that PVB, another glass substrate are formed, have good physicals, as knock, anti-breakthrough experiment etc.; In addition, zinc tin oxide has good chemical machinery performance, can improve the resistance to elevated temperatures of film layer structure;
(2) low radiating layer and adjacent layers structure thereof are NiCrOx/Ag/NiCrOx, and the NiCrOx structure has the ability of enough seizure oxygen, adopt the planar targets sputter, have higher deposition efficiency, when realizing technology stability control, can also reduce cost;
(3) each thicknesses of layers reasonably combined in the film layer structure has ovenable curved characteristics, and the Key Performance Indicator before and after baking is curved as visible light transmissivity, radiant ratio etc., all can not change;
(4) low radiation coated glass substrate disclosed in the utility model stands the curved operation of baking in the laminated glass manufacturing process, bear long pyroprocess, after overbaking is curved, film layer structure remains intact, film quality can not change, Key Performance Indicator before and after baking is curved can not change, has unique low radiation effect, the visible light transmissivity of the laminated glass that is made of this bendable low-emission coated glass is no less than 76%, the sun power transmitance is not more than 48%, and perhaps visible light transmissivity is no less than 70%, the sun power transmitance is not more than 43%;
(5) coated laminated glass has low radiation functions, allow the visible light in the sunlight spectrum to pass through, the far-infrared heat radiation of reflection more than 80%, winter, the thermal radiation that it distributes object in heating installation and the car as minute surface, is reflected the overwhelming majority in the carriage return, guarantee that heat does not does not scatter and disappear in the car outside car, thereby save heat cost; Summer, it can stop thermal radiation that the outer sunlight of car and buildings, ground sends into the car, save air-conditioning refrigeration expense, has energy-conservation effect, every performance index all can satisfy GB9656-2003 " automobile shatter proof glass " national standard, can substitute common laminated glass, be specially adapted to windshield glass of automobile.
Description of drawings
Fig. 1 is the structural representation of bendable low-emission coated glass among the embodiment 3;
Fig. 2 is the structural representation of low-emission coated laminated glass among the embodiment 4.
1 is that glass substrate, 21 is ZnSnO among the figure 3Rete, 22 is ZnO 0.2Rete, 3 is NiCrO 0.5Rete, 4 is that silver film, 5 is NiCrO 2.5Rete, 61 is for being ZnO 0.8Rete, 62 is that ZnSnO rete, 7 is that TiO rete, 8 is that polyvinyl butyral acetal layer, 9 is glass substrate.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is elaborated.
Embodiment 1
Through after the cutting, edging, polishing, washing, oven dry, thickness is to plate ZnSnO successively on former of the green float glass of 1.8mm 2.3/ ZnO 0.8Film layer structure is as first dielectric layer, wherein ZnSnO 2.3Thicknesses of layers is 30nm, ZnO 0.8Thicknesses of layers is 10nm, and thickness is the NiCrO of 3nm 1.6Rete is as transition layer, and thickness is that the silver film of 12nm is the NiCrO of 2nm as low radiating layer, thickness 2.3Rete is as transition layer, ZnO 0.6/ ZnSnO 2.5Film layer structure is as second dielectric layer, wherein ZnO 0.6Thicknesses of layers is 13nm, ZnSnO 2.5Thicknesses of layers is 28nm, and thickness is the TiO of 10nm 1.9Rete is as protective layer.Wherein, what plate that first dielectric membranous layer and second dielectric membranous layer use is rotary target, and plating transition layer and the used target of low-radiation film layer are planar target, and this bendable low-emission coated glass is particularly suitable for windshield glass of automobile.It needs to be noted that the oxide compound of above-mentioned each rete of composition comprises ZnSnO 2.3, ZnSnO 2.5, ZnO 0.8, NiCrO 1.6And TiO 1.9Deng being non-stoichiometric be partial oxidation or nitrogenize all.For example, TiOx layer, 0<x≤2; When x=2, this layer is TiO 2, promptly be titanium oxide stoichiometric, complete oxidation; When 0<x<2, this layer is titanium oxide non-stoichiometric, partial oxidation.If adopt the oxide membranous layer of partial oxidation, so just mean that in the curved process of baking these oxide membranous layers will the more oxygen of preferential absorption, thereby avoid low radiating functional layer, the i.e. oxidation of silver film.
Optical property
Through online detection, the radiant ratio of monolithic low radiation coated glass is 0.06, and visible light transmissivity is 71.5%; The curved back of baking is detected, and the radiant ratio of monolithic low radiation coated glass is 0.04, and visible light transmissivity is 76%; Then through washing, close manufacturing processes such as sheet, first pressing, high pressure, packing and make low-emission coated laminated glass, after testing, its visible light transmissivity is 73%, the total transmitance of sun power is 42%.
Physicals
Knock experiment: this experiment is a most important detection method of weighing adhesiveproperties between rete and PVB, the glass, experimental procedure is: the experiment slice that downcuts 100mm * 300mm from the full wafer low-emission coated laminated glass, cut two altogether, two samples are placed on-18 ± 2 ℃ preserve 2h down, take out, place 2min at normal temperatures, be placed on the sample case and knock with iron hammer, after treating the water of condensation volatilization, the contrast of back sample and standard sample of photo will be knocked, just the grade of knocking experiment can be judged.After testing, knocking experiment is 3 grades, satisfies the requirement of GB9656-2003.According to GB9656-2003, impact experiment, anti-irradiation experiment, damp and hot circulation experiment etc. all can meet the demands.
Embodiment 2
Through after the cutting, edging, polishing, washing, oven dry, thickness is to plate ZnSnO successively on former of the transparent float glass of 2.1mm 2.5The zinc oxide of/adulterated al (AZO) film layer structure is as first dielectric layer, wherein ZnSnO 2.5Thicknesses of layers is 23nm, and the AZO thicknesses of layers is 15nm, and the weight of adulterated al is not more than 5% of zinc oxide weight, and thickness is the NiCrO of 2nm 1.4Film layer structure is as transition layer, and thickness is that the silver film of 12nm is the NiCrO of 2.5nm as low radiating layer, thickness 1.9Film layer structure is as transition layer, the zinc oxide of adulterated al (AZO)/ZnSnO 2.5Film layer structure is as second dielectric layer, and wherein the AZO thicknesses of layers is 15nm, ZnSnO 2.5Thicknesses of layers is 23nm, and the weight of adulterated al is not more than 5% of zinc oxide weight, and thickness is the SiN of 12nm 1.1Rete is as protective layer.Wherein, what plate that first dielectric membranous layer and second dielectric membranous layer use is rotary target, and plating transition layer and the used target of low-radiation film layer are planar target, and this bendable low-emission coated glass is particularly suitable for windshield glass of automobile.
Optical property
Through online detection, the radiant ratio of monolithic low radiation coated glass is 0.06, and visible light transmissivity is 77.5%; The curved back of baking is detected, and the radiant ratio of monolithic low radiation coated glass is 0.04, and visible light transmissivity is 80%; Then through washing, close manufacturing processes such as sheet, first pressing, high pressure, packing and make low-emission coated laminated glass, after testing, its visible light transmissivity is 76%, the total transmitance of sun power is 48%.
Physicals
Knock experiment: this experiment is to weigh rete and PVB, the most important detection method of adhesiveproperties between the glass, experimental procedure is: the experiment slice that downcuts 100mm * 300mm from the full wafer low-emission coated laminated glass, cut two altogether, two samples are placed on-18 ± 2 ℃ preserve 2h down, take out, place 2min at normal temperatures, be placed on the sample case and knock with iron hammer, after treating the water of condensation volatilization, the contrast of back sample and standard sample of photo will be knocked, just the grade of knocking experiment can be judged. after testing, knocking experiment is 3 grades, satisfy the requirement of GB9656-2003. according to GB9656-2003, impact experiment, anti-irradiation experiment, damp and hot circulation experiments etc. all can meet the demands.
Embodiment 3
A kind of bendable low-emission coated glass, its structure be as shown in Figure 1: after the cutting of learning from else's experience, edging, polishing, washing, the oven dry, thickness is that former of the transparent float glass of 1.6mm is glass substrate 1, plates ZnSnO in the above successively 3Rete 21, ZnO 0.2Rete 22 is as first dielectric layer, wherein ZnSnO 3.0Rete 21 thickness are 40nm, ZnO 0.2 Rete 22 thickness are 5nm, and thickness is the NiCrO of 1nm 0.5Rete 3 is as transition layer, and thickness is that the silver film 4 of 9nm is the NiCrO of 1nm as low radiating layer, thickness 2.5Rete 5 is as transition layer, ZnO 0.8Rete 61, ZnSnO rete 62 are as second dielectric layer, wherein ZnO 0.8 Rete 61 thickness are 10nm, and ZnSnO rete 62 thickness are 20nm, and thickness is that the TiO rete 7 of 5nm is as protective layer.Wherein, what plate that first dielectric membranous layer and second dielectric membranous layer use is rotary target, and plating transition layer and the used target of low-radiation film layer are planar target, and this bendable low-emission coated glass is particularly suitable for windshield glass of automobile.
Embodiment 4
A kind of low-emission coated laminated glass, its structure be as shown in Figure 2: after the cutting of learning from else's experience, edging, polishing, washing, the oven dry, thickness is that former of the green float glass of 2.0mm is glass substrate 1, plates ZnSnO in the above successively 3Rete 21, ZnO 0.2Rete 22 is as first dielectric layer, wherein ZnSnO 3 Rete 21 thickness are 20nm, ZnO 0.2 Rete 22 thickness are 15nm, and thickness is the NiCrO of 1nm 0.5Rete 3 is as transition layer, and thickness is that the silver film 4 of 9nm is the NiCrO of 1nm as low radiating layer, thickness 2.5Rete 5 is as transition layer, ZnO 0.8Rete 61, ZnSnO rete 62 are as second dielectric layer, wherein ZnO 0.8 Rete 61 thickness are 10nm, and ZnSnO rete 62 thickness are 20nm, and thickness is that the TiO rete 7 of 10nm is as protective layer.Wherein, what plate that first dielectric membranous layer and second dielectric membranous layer use is rotary target, and plating transition layer and the used target of low-radiation film layer are planar target, and this bendable low-emission coated glass is particularly suitable for windshield glass of automobile.
Utilize this bendable low-emission coated glass to prepare low-emission coated laminated glass, this low-emission coated laminated glass comprises bendable low-emission coated glass, polyvinyl butyral acetal layer (PVB rete) 8 and an other glass substrate 9.The bendable low-emission coated glass protective layer outwards constitutes low-emission coated laminated glass with PVB layer 8,9 stacks of an other glass-based flaggy successively, and wherein, the thickness of two glass substrates is 2.0mm, and the thickness of PVB rete 8 is 0.76mm; The low-radiation film layer is plated on the glass substrate, and is on the surface of the glass substrate of PVB.
The manufacture method of this low-emission coated laminated glass substrate: at first, get each operations such as a glass substrate process last slice, cutting, edging, washing, seal limit, oven dry and arrive curved stage of baking; Then with the glass substrate pairing that has rete, it is curved with on the mould then two glass substrates to be placed on baking, mould is put into the baking and bending furnace baking bend, through washing, closing operations such as sheet, first pressing, high pressure, packing, produce final low-emission coated laminated glass finished product then.
When baking was curved, two sheet glass were applied, and were placed on together to dry by the fire curvedly on the mould, and this two sheet glass abbreviates " sheet " and " small pieces " respectively as, and a slice of being close to mould is called " sheet ", is superimposed upon large stretch of top a slice and is called " small pieces ".Rete can be plated on " sheet ", also can be plated on " small pieces ", as long as rete towards pvb film, nestle up pvb film.No matter be plated on " sheet " or be plated on " small pieces ", can both play identical low radiation functions.
Embodiment 5
Through after the cutting, edging, polishing, washing, oven dry, thickness is to plate ZnSnO successively on former of the green float glass of 1.8mm 2/ ZnO film layer structure is as first dielectric layer, wherein ZnSnO 2The thickness of rete is 40nm, and the ZnO film layer thickness is 5nm, and thickness is the NiCrO of 5nm 2.5Film layer structure is as transition layer, and thickness is that the silver film of 14nm is the NiCrO of 3nm as low radiating layer, thickness 2.5Film layer structure is as transition layer, and thickness is the ZnSnO of 35nm 1.5Rete is as second dielectric layer, and thickness is the TiO of 15nm 2Rete is as protective layer.Wherein, what plate that first dielectric membranous layer and second dielectric membranous layer use is rotary target, and plating transition layer and the used target of low-radiation film layer are planar target, and this bendable low-emission coated glass is particularly suitable for windshield glass of automobile.

Claims (10)

1. bendable low-emission coated glass; it is characterized in that the film layer structure of this bendable low-emission coated glass outwards is followed successively by from glass substrate: glass substrate, first dielectric layer, transition layer, low radiating layer, transition layer, second dielectric layer and protective layer.
2. a kind of bendable low-emission coated glass according to claim 1, it is characterized in that, described first dielectric layer comprises the zinc oxide or the ZnSnOx film layer structure of ZnSnOx/ZnOy, ZnSnOx/ adulterated al, the ZnSnOx thicknesses of layers is 20-40nm, the ZnOy thicknesses of layers is 5-15nm, and the Zinc oxide film layer thickness of adulterated al is 5-15nm.
3. a kind of bendable low-emission coated glass according to claim 2 is characterized in that, in the described ZnSnOx rete, and 0<x≤3, in the ZnOy rete, 0<y≤1.
4. a kind of bendable low-emission coated glass according to claim 1 is characterized in that, described transition layer is the NiCrOx rete, and thickness is 1-5nm, in the NiCrOx rete, and 0<x≤2.5.
5. a kind of bendable low-emission coated glass according to claim 1 is characterized in that, described low radiating layer is a silver film, and thickness is 9-14nm.
6. a kind of bendable low-emission coated glass according to claim 1, it is characterized in that, described second dielectric layer comprises the zinc oxide/ZnSnOy or the ZnSnOy film layer structure of ZnOx/ZnSnOy, adulterated al, the ZnOx thicknesses of layers is 5-15nm, the Zinc oxide film layer thickness of adulterated al is 5-15nm, and the ZnSnOy thicknesses of layers is 20-40nm.
7. according to claim 2 or 6 described a kind of bendable low-emission coated glass, it is characterized in that in the zinc oxide of described adulterated al, the weight of adulterated al is not more than 5% of zinc oxide weight.
8. a kind of bendable low-emission coated glass according to claim 1 is characterized in that, described protective layer is SiNx or TiOy rete, and thickness is 5-15nm.
9. a kind of bendable low-emission coated glass according to claim 1 is characterized in that, in the described SiNx rete, and 0<x≤4/3, in the TiOy rete, 0<y≤2.
10. a kind of bendable low-emission coated glass according to claim 1 is characterized in that, superpose successively more outward polyvinyl butyral acetal layer and another glass substrate of the protective layer of described bendable low-emission coated glass constitutes low-emission coated laminated glass.
CN2009200777950U 2009-07-02 2009-07-02 Contour-bendable low-radiation coated glass Expired - Lifetime CN201458973U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102336529A (en) * 2010-07-27 2012-02-01 上海北玻镀膜技术工业有限公司 High transmittance toughenable low radiation glass and manufacture method thereof
CN102372446A (en) * 2010-08-24 2012-03-14 中国南玻集团股份有限公司 Dual-silver and low-radiation glass and manufacturing method thereof
CN102723387A (en) * 2012-06-29 2012-10-10 苏州嘉言能源设备有限公司 ZnSnO3-X transparent thin film for silicon solar battery
CN111253083A (en) * 2020-03-25 2020-06-09 四川猛犸半导体科技有限公司 Thin film device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102336529A (en) * 2010-07-27 2012-02-01 上海北玻镀膜技术工业有限公司 High transmittance toughenable low radiation glass and manufacture method thereof
CN102372446A (en) * 2010-08-24 2012-03-14 中国南玻集团股份有限公司 Dual-silver and low-radiation glass and manufacturing method thereof
CN102723387A (en) * 2012-06-29 2012-10-10 苏州嘉言能源设备有限公司 ZnSnO3-X transparent thin film for silicon solar battery
CN111253083A (en) * 2020-03-25 2020-06-09 四川猛犸半导体科技有限公司 Thin film device

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