CN201382675Y - Furnace body of 300 mm vertical oxidation furnace - Google Patents
Furnace body of 300 mm vertical oxidation furnace Download PDFInfo
- Publication number
- CN201382675Y CN201382675Y CN200820124688U CN200820124688U CN201382675Y CN 201382675 Y CN201382675 Y CN 201382675Y CN 200820124688 U CN200820124688 U CN 200820124688U CN 200820124688 U CN200820124688 U CN 200820124688U CN 201382675 Y CN201382675 Y CN 201382675Y
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- wall
- main body
- furnace
- fixed
- heat
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Abstract
The utility model discloses a furnace body of a 300 mm vertical oxidation furnace, wherein, a main body, a head cover and a base are arranged on the furnace; the main body is in the shape of an upright cylinder; a furnace wire, a furnace wire support part, a heat-insulating cotton layer, an inner wall, a cooling tube and an outer wall are sequentially arranged on the main body from inside to outside; the furnace wire is supported and fixed by the furnace wire support part; the heat-insulating cotton layer is arranged inside the inner wall; the cooling tube is arranged between the inner wall and the outer wall; a plurality of thermocouples and furnace wire lead wires are arranged so as to pass through a thermal insulation layer, the inner wall and the outer wall and fixed on the inner wall transversely; an annular top block is arranged on the upper opening edge of the main body; a top cap is arranged at the middle part of the top block; a bottom block is arranged at the lower opening of the main body; the thermal insulation layer is formed by the top cap, the top block, heat-insulating cotton and the bottom block; the thermal insulation layer is fixed on the inner wall; the cooling tube and the outer wall are also fixed on the inner wall which is fixed on the base; and a cooling sealing groove and a water inflow and outflow port are formed on the base. The furnace body of the 300 mm vertical oxidation furnace is suitable for the processes such as oxidation, annealing and the like for 300 mm silicon wafers, and is characterized by accurate temperature control, high quality, long service life and high efficiency.
Description
Technical field
The utility model belongs to a kind of vertical oxidation of the 300mm of being used for wafer heat, specifically is a kind of body of heater of 300mm vertical oxidation.
Background technology
Oxidation furnace is to be used for the semiconductor equipment that silicon chip carries out Technologies for Heating Processing such as oxidation, annealing, used oxidation furnace, it mostly is horizontal type structure, its temperature homogeneity and temperature-controlled precision are not ideal enough, operation and control are inadequately accurately flexibly, automaticity is low, production efficiency and product quality are not high enough, can not adapt to the production demand of 300mm silicon chip.Therefore, need to propose a kind of 300mm vertical oxidation furnace body of architecture advances.
The utility model content
The purpose of this utility model is in order to solve the problems of the technologies described above, to propose a kind of 300mm vertical oxidation furnace body, this oxidation furnace furnace binding novelty, perfect, temperature control flexibly, accurately, production efficiency and product quality improve greatly.
The purpose of this utility model is achieved through the following technical solutions: the 300mm vertical oxidation furnace body, be provided with main body, top cover, pedestal, it is characterized in that: described main body is a upright cylindrical shape, be provided with stove silk, stove silk support member, heat-preservation cotton layer, inwall, cooling tube, outer wall from inside to outside successively, described stove silk in main body from top to bottom multi-turn around, fix by stove silk supports support, the heat-preservation cotton layer is arranged on the inwall inboard, and the cooling tube of Yu rotation bending up and down is set between inner and outer wall; Cooling tube is provided with the cooling water intake-outlet; Be provided with a plurality of thermocouples, stove silk lead-in wire and pass heat-insulation layer, inwall, outer wall, crosswise fixed is on inwall, and the thermocouple inner end arrives temperature measurement location, and stove silk lead-in wire inner end is welded on the stove silk; Be provided with annular jacking block at the main body upper edge, be provided with top cover in the middle of this jacking block, be provided with annular sole piece at the end opening of main body, described top cover, jacking block, heat-preservation cotton, sole piece are formed heat-insulation layer, and this heat-insulation layer is fixed on the inwall by jacking block and sole piece; Cooling tube and outer wall also are fixed on the inwall, and outer wall coats cooling tube; Inwall is fixed on the pedestal, and this pedestal is provided with coolant seal groove and intake-outlet.
300mm vertical oxidation furnace body of the present utility model is a kind of novel furnace binding form, and difference and conventional horizontal chamber furnace (oven) body structure in the past structurally also are that a great difference is arranged with general vertical heater body of heater, novel structure, initiative.Flat-temperature zone length accounts for 70% of body of heater total length, has saved the space and the energy effectively.The temperature-controlled precision height has improved quality and the efficient of handling silicon chip.
Description of drawings
Fig. 1 is a surface structure schematic diagram of the present utility model;
Fig. 2 is an internal structure schematic diagram of the present utility model;
Fig. 3 is a base construction schematic diagram of the present utility model;
Fig. 4 is the local A enlarged diagram of Fig. 2;
Fig. 5 is Fig. 3 Local C enlarged diagram;
Fig. 6 is the local B enlarged diagram of Fig. 2.
The specific embodiment
Below in conjunction with drawings and Examples the utility model is further described: embodiment: referring to accompanying drawing, the 300mm vertical oxidation furnace body, be provided with main body, top cover, pedestal, described main body is a upright cylindrical shape, be provided with stove silk 8, stove silk support member 7, heat-preservation cotton layer 6, inwall 3, cooling tube 4, outer wall 5 from inside to outside successively, described stove silk in main body from top to bottom multi-turn around, fix by stove silk supports support, the heat-preservation cotton layer is arranged on the inwall inboard, and the cooling tube of Yu rotation bending up and down is set between inner and outer wall; Cooling tube is provided with cooling water intake-outlet (15); Be provided with a plurality of thermocouples 11, stove silk lead-in wire 12 and pass heat-insulation layer, inwall, outer wall, crosswise fixed is on inwall, and the thermocouple inner end arrives temperature measurement location, and stove silk lead-in wire inner end is welded on the stove silk; Be provided with annular jacking block 2 at the main body upper edge, be provided with top cover 1 in the middle of this jacking block, be provided with annular sole piece 9 at the end opening of main body, described top cover, jacking block, heat-preservation cotton, sole piece are formed heat-insulation layer, and this heat-insulation layer is fixed on the inwall by jacking block and sole piece; Cooling tube and outer wall also are fixed on the inwall, and outer wall coats cooling tube; Inwall is fixed on the pedestal 10, and this pedestal is provided with coolant seal groove 14 and intake-outlet 13.
Claims (1)
1, a kind of 300mm vertical oxidation furnace body, be provided with main body, top cover, pedestal, it is characterized in that: described main body is a upright cylindrical shape, be provided with stove silk (8), stove silk support member (7), heat-preservation cotton layer (6), inwall (3), cooling tube (4), outer wall (5) from inside to outside successively, described stove silk in main body from top to bottom multi-turn around, fixed by stove silk supports support, the heat-preservation cotton layer is arranged on the inwall inboard, and the cooling tube of Yu rotation bending up and down is set between inner and outer wall; Cooling tube is provided with cooling water intake-outlet (15); Be provided with a plurality of thermocouples (11), stove silk lead-in wire (12) and pass heat-insulation layer, inwall, outer wall, crosswise fixed is on inwall, and the thermocouple inner end arrives temperature measurement location, and stove silk lead-in wire inner end is welded on the stove silk; Be provided with annular jacking block (2) at the main body upper edge, be provided with top cover (1) in the middle of this jacking block, be provided with annular sole piece (9) at the end opening of main body, described top cover, jacking block, heat-preservation cotton, sole piece are formed heat-insulation layer, and this heat-insulation layer is fixed on the inwall by jacking block and sole piece; Cooling tube and outer wall also are fixed on the inwall, and outer wall coats cooling tube; Inwall is fixed on the pedestal (10), and this pedestal is provided with coolant seal groove (14) and intake-outlet (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200820124688U CN201382675Y (en) | 2008-12-17 | 2008-12-17 | Furnace body of 300 mm vertical oxidation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200820124688U CN201382675Y (en) | 2008-12-17 | 2008-12-17 | Furnace body of 300 mm vertical oxidation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201382675Y true CN201382675Y (en) | 2010-01-13 |
Family
ID=41526147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200820124688U Expired - Lifetime CN201382675Y (en) | 2008-12-17 | 2008-12-17 | Furnace body of 300 mm vertical oxidation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201382675Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102554617A (en) * | 2012-01-18 | 2012-07-11 | 北京七星华创电子股份有限公司 | Forming device of furnace body of vertical heat treatment equipment |
| CN103928373A (en) * | 2014-04-28 | 2014-07-16 | 北京七星华创电子股份有限公司 | Semiconductor heat treatment device |
| CN106012026A (en) * | 2016-08-04 | 2016-10-12 | 汪锐 | Annealing apparatus used for making LED wafers |
-
2008
- 2008-12-17 CN CN200820124688U patent/CN201382675Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102554617A (en) * | 2012-01-18 | 2012-07-11 | 北京七星华创电子股份有限公司 | Forming device of furnace body of vertical heat treatment equipment |
| CN103928373A (en) * | 2014-04-28 | 2014-07-16 | 北京七星华创电子股份有限公司 | Semiconductor heat treatment device |
| CN106012026A (en) * | 2016-08-04 | 2016-10-12 | 汪锐 | Annealing apparatus used for making LED wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CU01 | Correction of utility model |
Correction item: Patentee|Address Correct: Qixinghuachuang Electronic Co., Ltd., Beijing|100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing False: North China Science and technology group Limited by Share Ltd|100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Number: 22-02 Volume: 34 |
|
| CU01 | Correction of utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180806 Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: North China Science and technology group Limited by Share Ltd. |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100113 |
|
| CX01 | Expiry of patent term |