CN201374254Y - Improved structure of variable ceramic vacuum capacitor - Google Patents
Improved structure of variable ceramic vacuum capacitor Download PDFInfo
- Publication number
- CN201374254Y CN201374254Y CN200920035689U CN200920035689U CN201374254Y CN 201374254 Y CN201374254 Y CN 201374254Y CN 200920035689 U CN200920035689 U CN 200920035689U CN 200920035689 U CN200920035689 U CN 200920035689U CN 201374254 Y CN201374254 Y CN 201374254Y
- Authority
- CN
- China
- Prior art keywords
- location guide
- vacuum capacitor
- ceramic vacuum
- adjusting nut
- pull bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses an improved structure of a variable ceramic vacuum capacitor. The variable ceramic vacuum capacitor comprises a sleeve, an adjusting screw, an adjusting nut, a draw bar, a location guide sleeve, a corrugated pipe, an electrode and a housing, wherein one end of the adjusting screw is fixedly connected with a transmission piece, and the other end is freely engaged with the adjusting nut; the adjusting nut is fixedly connected with one end of the draw bar; the other end of the draw bar is fixedly connected with one end of the electrode; the location guide sleeve is sheathed outside the draw bar; one end of the location guide sleeve is fixedly connected with the inner wall of the housing; the corrugated pipe is sheathed outside the location guide sleeve; the sleeve is sheathed outside the adjusting screw and the adjusting nut and is fixedly connected with the housing; at least one air vent is formed on the location guide sleeve, the sleeve and the draw bar respectively for rapidly releasing heat generated by friction, thereby achieving smoother sliding and improving the mechanical life of the variable ceramic vacuum capacitor by above two millions times. Accordingly, the life circle of the variable ceramic vacuum capacitor is improved, and the use cost of semiconductor processing equipment is lowered.
Description
Technical field
The utility model relates to a kind of variable ceramic vacuum capacitor, particularly a kind of improvement of variable ceramic vacuum capacitor structure.
Background technology
At present, according to the requirement of standard GB/T 3788-1995, be 5,000 to 20,000 the mechanical endurance of variable ceramic vacuum capacitor.This standard is applicable to the life requirements of variable ceramic vacuum capacitor in broadcast transmission and the high-frequency heating apparatus.Along with progress of science and technology, variable ceramic vacuum capacitor has been widely used in semiconductor processing equipment at present, and to having higher requirement the mechanical endurance of variable ceramic vacuum capacitor, this requirement is that existing universal architecture can't satisfy.
Summary of the invention
In order to remedy above deficiency, the utility model provides a kind of improvement of variable ceramic vacuum capacitor structure, and improved the mechanical endurance of variable ceramic vacuum capacitor greatly, thereby has reduced the use cost of semiconductor processing equipment.
The utility model for the technical scheme that solves its technical problem and adopt is: a kind of improvement of variable ceramic vacuum capacitor structure, variable ceramic vacuum capacitor comprises sleeve, adjusting screw(rod), adjusting nut, pull bar, the location guide pin bushing, bellows, electrode and shell, adjusting screw(rod) one end and driving member are connected, the other end and adjusting nut freely mesh, adjusting nut and pull bar one end are connected, the pull bar other end and electrode one end are connected, the pull bar outside is arranged with the location guide pin bushing, location guide pin bushing one end and outer casing inner wall are connected, the guide pin bushing outside, location is arranged with bellows, jacket casing is located at outside adjusting screw(rod) and the adjusting nut and with shell and is connected, adjusting screw(rod) is the positive and negative alternate rotation under driving member drives, the rotation of adjusting screw(rod) then drives adjusting nut and does rectilinear motion up and down, adjusting nut then moves up and down by the drive pull bar and drives electrode moving linearly up and down, thereby regulate the electric capacity of variable ceramic vacuum capacitor, the location guide pin bushing, be respectively equipped with at least one pore on sleeve and the pull bar, when pull bar drives electrode up and down during rectilinear motion, because friction can produce heat, pore can be discharged heat, thereby prevents that pull bar and location guide pin bushing from having some setbacks because of fricative heat effects material surface causes sliding.
As further improvement of the utility model, be provided with the lubricant grease that heat resistant and wear resistant decreases between location guide pin bushing and the pull bar and between adjusting screw(rod) and the adjusting nut, can prevent effectively that part is stuck in mechanical movement repeatedly, make motion more smooth and easy.
As further improvement of the utility model, adjusting nut adopts high-abrasive material, Wear-resistant Treatment is carried out on adjusting screw(rod) and pull bar surface, wear resistant processing method has a lot, all be that the common engineers and technicians in this field are known, such as adopting CVD (Chemical Vapor Deposition) method to apply one deck attrition resistant materials, make the surface hard and smooth smooth at piece surface.
As further improvement of the utility model, bellows list ripple displacement is brought up to 1.8mm, has effectively improved the sealing of bellows.
Useful technique effect of the present utility model is: the utility model is under the situation that does not change the product installation dimension, brought up to more than 2,000,000 times the mechanical endurance of variable ceramic vacuum capacitor, thereby improved the life cycle of variable ceramic vacuum capacitor, reduced the use cost of semiconductor processing equipment.
Description of drawings
Fig. 1 is an internal structure schematic diagram of the present utility model.
Embodiment
Embodiment: a kind of improvement of variable ceramic vacuum capacitor structure, variable ceramic vacuum capacitor comprises sleeve 1, adjusting screw(rod) 2, adjusting nut 3, pull bar 4, location guide pin bushing 5, bellows 6, electrode 7 and shell 8, adjusting screw(rod) 2 one ends and driving member are connected, the other end and adjusting nut 3 freely mesh, adjusting nut 3 is connected with pull bar 4 one ends, pull bar 4 other ends and electrode 7 one ends are connected, pull bar 4 outsides are arranged with location guide pin bushing 5, location guide pin bushing 5 one ends and shell 8 inwalls are connected, guide pin bushing 5 outsides, location are arranged with bellows 6, sleeve 1 is sheathed on adjusting screw(rod) 2 and adjusting nut 3 outsides and is connected with shell 8, adjusting screw(rod) 2 is the positive and negative alternate rotation under driving member drives, the rotation of adjusting screw(rod) 2 then drives adjusting nut 3 and does rectilinear motion up and down, 3 of adjusting nuts move up and down and drive electrode moving linearly about in the of 7 by driving pull bar 4, thereby regulate the electric capacity of variable ceramic vacuum capacitor, location guide pin bushing 5, be respectively equipped with at least one pore 9 on sleeve 1 and the pull bar 4, when pull bar 4 drives electrodes about in the of 7 during rectilinear motion, because friction can produce heat, pore 9 can be discharged heat, thereby prevents that pull bar 4 and location guide pin bushing 5 from having some setbacks because of fricative heat effects material surface causes sliding.
Be provided with the lubricant grease that heat resistant and wear resistant decreases between described location guide pin bushing 5 and the pull bar 4 and between adjusting screw(rod) 2 and the adjusting nut 3, can prevent effectively that part is stuck in mechanical movement repeatedly, make motion more smooth and easy.
Described adjusting nut 3 adopts high-abrasive material, Wear-resistant Treatment is carried out on adjusting screw(rod) 2 and pull bar 4 surfaces, wear resistant processing method has a lot, all be that the common engineers and technicians in this field are known, such as adopting CVD (Chemical Vapor Deposition) method to apply one deck attrition resistant materials, make the surface hard and smooth smooth at piece surface.
Described bellows 6 single ripple displacements are brought up to 1.8mm, have effectively improved the sealing of bellows.
Claims (4)
1. improvement of variable ceramic vacuum capacitor structure, variable ceramic vacuum capacitor comprises sleeve (1), adjusting screw(rod) (2), adjusting nut (3), pull bar (4), location guide pin bushing (5), bellows (6), electrode (7) and shell (8), adjusting screw(rod) (2) one ends and driving member are connected, the other end and adjusting nut (3) freely mesh, adjusting nut (3) is connected with pull bar (4) one ends, pull bar (4) other end and electrode (7) one ends are connected, pull bar (4) outside is arranged with location guide pin bushing (5), location guide pin bushing (5) one ends and shell (8) inwall are connected, location guide pin bushing (5) outside is arranged with bellows (6), sleeve (1) is sheathed on outside adjusting screw(rod) (2) and the adjusting nut (3) and with shell (8) and is connected, and it is characterized by: location guide pin bushing (5), be respectively equipped with at least one pore (9) on sleeve (1) and the pull bar (4).
2. a kind of improvement of variable ceramic vacuum capacitor structure according to claim 1 is characterized by: be provided with the lubricant grease that heat resistant and wear resistant decreases between location guide pin bushing and the pull bar and between adjusting screw(rod) and the adjusting nut.
3. a kind of improvement of variable ceramic vacuum capacitor structure according to claim 1 is characterized by: adjusting nut adopts high-abrasive material, and Wear-resistant Treatment is carried out on adjusting screw(rod) and pull bar surface.
4. a kind of improvement of variable ceramic vacuum capacitor structure according to claim 1 is characterized by: bellows list ripple displacement is brought up to 1.8mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920035689U CN201374254Y (en) | 2009-03-16 | 2009-03-16 | Improved structure of variable ceramic vacuum capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920035689U CN201374254Y (en) | 2009-03-16 | 2009-03-16 | Improved structure of variable ceramic vacuum capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201374254Y true CN201374254Y (en) | 2009-12-30 |
Family
ID=41500335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920035689U Expired - Lifetime CN201374254Y (en) | 2009-03-16 | 2009-03-16 | Improved structure of variable ceramic vacuum capacitor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201374254Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101840782B (en) * | 2009-03-16 | 2011-08-31 | 昆山国力真空电器有限公司 | Improvement of variable ceramic vacuum capacitor structure |
| CN102959657A (en) * | 2010-06-28 | 2013-03-06 | 康姆艾德公司 | Vacuum variable capacitor |
| CN103563026A (en) * | 2011-05-18 | 2014-02-05 | 株式会社明电舍 | Bellows and method for manufacturing same |
-
2009
- 2009-03-16 CN CN200920035689U patent/CN201374254Y/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101840782B (en) * | 2009-03-16 | 2011-08-31 | 昆山国力真空电器有限公司 | Improvement of variable ceramic vacuum capacitor structure |
| CN102959657A (en) * | 2010-06-28 | 2013-03-06 | 康姆艾德公司 | Vacuum variable capacitor |
| CN102959657B (en) * | 2010-06-28 | 2016-05-18 | 康姆艾德公司 | Vacuum condenser |
| CN103563026A (en) * | 2011-05-18 | 2014-02-05 | 株式会社明电舍 | Bellows and method for manufacturing same |
| CN103563026B (en) * | 2011-05-18 | 2016-08-24 | 株式会社明电舍 | Snake belly tube and the method being used for manufacturing snake belly tube |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20091230 Effective date of abandoning: 20090316 |