CN201358292Y - Vacuum decomposer capable of decomposing gallium arsenicde into metallic gallium and metallic arsenic - Google Patents
Vacuum decomposer capable of decomposing gallium arsenicde into metallic gallium and metallic arsenic Download PDFInfo
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- CN201358292Y CN201358292Y CNU2009200369330U CN200920036933U CN201358292Y CN 201358292 Y CN201358292 Y CN 201358292Y CN U2009200369330 U CNU2009200369330 U CN U2009200369330U CN 200920036933 U CN200920036933 U CN 200920036933U CN 201358292 Y CN201358292 Y CN 201358292Y
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- arsenic
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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Abstract
The utility model discloses a vacuum decomposer capable of decomposing the gallium arsenicde into metallic gallium and metallic arsenic, which comprises a vacuum furnace body provided with a cooling device, wherein the inside of the vacuum furnace body is divided into a heating zone, a buffering zone and a cooling zone from bottom to top, and the buffering zone is provided with an arsenic steam conductor arranged at the upper part of the heating zone; the cooling zone is provided with an arsenic collecting blindgut connected with the arsenic steam conductor, and the arsenic collecting blindgut is provided with a cooling device. The utility model can tolerate higher temperature than the conventional quartz decomposing system; the gallium arsenicde decomposition rate achieved by the utility model device approaches 100 %; the arsenic is efficiently collected, which not only removes the pollution upon the environment, but also is beneficial for the follow-up utilization of the arsenic.
Description
Technical field
The utility model relates to a kind of vacuum separation unit, relates in particular to a kind of vacuum decomposing apparatus that is used for gallium arsenide is separated into gallium and metallic arsenic.
Background technology
Since 60 years,,, all leave the tailing of gallium arsenide from the production of the preparation of semi-conductive synthetic, the monocrystalline of gallium arsenide compound, wafer and to the preparation of devices process along with the semi-conductive appearance of gallium arsenide compound.Therefore people have begun to reclaim the technical study of gallium from gallium arsenide, mainly contain two kinds and reclaim the technology thinking, are summarized as follows:
The separation of gallium arsenide in quartz system.Because the synthetic of gallium arsenide is in quartz system, under vacuum condition, about 1230 ℃, arsenic steam and gallium synthesize gallium arsenide.Therefore, China units concerned have carried out research work that this process is turned around, promptly in quartz system, under vacuum condition, arsenic steam are taken away, reach an isolating purpose of arsenic gallium.The weak point of this method is that the rate of decomposition of gallium arsenide is lower, has only about 60%; And arsenic is not collected, caused pollution environment.
The gallium arsenide oxidation style is separated.After gallium arsenide was oxidized, arsenic can become arsenic oxide arsenoxide, and gallium can reach arsenic, the isolating purpose of gallium because after the surface forms oxide film and do not participate in oxidizing reaction.There is producer to use this technology abroad.The weak point of this technology is that because gallium arsenide is more stable, the difficulty of oxidation is bigger, and the arsenic oxide arsenoxide that produces after the oxidation is a highly toxic substance in addition, causes environmental pollution easily in operating process, has also increased operator's work difficulty.
The utility model content:
The purpose of this utility model is to overcome above-mentioned deficiency, and a kind of vacuum decomposing apparatus that is used for gallium arsenide is separated into gallium and metallic arsenic is provided.
The technical solution of the utility model is as follows: a kind of vacuum decomposing apparatus that gallium arsenide is separated into gallium and metallic arsenic, comprise the vacuum furnace body that is provided with refrigerating unit, described vacuum furnace body inside is divided into heating zone, buffer zone, cooling zone from bottom to top, and described buffer zone is provided with the arsenic steam duct that is placed at top, heating zone; Described cooling zone is provided with the arsenic that is connected mutually with described arsenic steam duct and collects blind pipe, and described arsenic is collected blind pipe and is provided with refrigerating unit.
Described heating zone is made of crucible, well heater, thermal insulation layer, and well heater is an electric heater, and described thermal insulation layer is made of high-temperature ceramic fibre.
Described vacuum furnace body is made by stainless steel, and the refrigerating unit of vacuum furnace body is water cooling plant or air cooling equipment.
Be provided with cushioning fender with holes in the described arsenic steam duct.
The vacuum furnace body inwall at position, described cooling zone is close to described arsenic and is collected the blind pipe outer wall.
Described arsenic is collected blind pipe and is made by stainless steel.
The beneficial effect that the utility model compared with prior art has is: the utility model can be than conventional quartz decomposing system tolerance higher temperature; The rate of decomposition of the utility model gallium arsenide improves greatly than the conventional quartz system, and under 1200 ℃ to 1500 ℃ high temperature, the utility model device gallium arsenide rate of decomposition is near 100%; And arsenic has been carried out efficient collection, not only eliminated the pollution of environment but also help later use arsenic; Owing to decompose in a vacuum, avoided oxidation style to separate the arsenic oxide arsenoxide material that produces severe toxicity, also avoid causing environmental pollution and operator ' s health being damaged in operating process.
Description of drawings:
Fig. 1 is the utility model structural representation.
Embodiment:
Below in conjunction with the drawings and specific embodiments the utility model is described in detail.
Embodiment 1: as shown in Figure 1, a kind of vacuum decomposing apparatus that gallium arsenide is separated into gallium and metallic arsenic, comprise the vacuum furnace body 9 that is provided with refrigerating unit, described vacuum furnace body 9 inside are divided into heating zone 3, buffer zone 5, cooling zone 7 from bottom to top, described buffer zone 5 is provided with the arsenic steam duct 4 that is placed at 3 tops, heating zone, is used to provide arsenic steam rising passway; Described cooling zone 7 is provided with the arsenic that is connected mutually with described arsenic steam duct 4 and collects blind pipe 6, is provided with a block buffering baffle plate 8 with holes in the arsenic steam duct 4, speed that rises when slowing down the arsenic steam raising and the quantity that can increase cushioning fender 8 as required again; Described heating zone 3 is made of crucible 10, well heater 1, thermal insulation layer 11, crucible 10 is made for graphite, be used to place gallium arsenide to be separated 2, well heater 1 is the three-phase alternating current electric heater, gallium after part is decomposed produces stirring in three phase rotating field, can quicken gallium arsenide and decompose, described thermal insulation layer 11 is made of high-temperature ceramic fibre, in order to keep the high temperature of heating zone 3.Described vacuum furnace body 9 is made by stainless steel, and the refrigerating unit of vacuum furnace body 9 is water cooling plant or air cooling equipment.Vacuum furnace body 9 inwalls at 7 positions, described cooling zone are close to described arsenic and are collected blind pipe 6 outer walls, play the cooling effect of arsenic being collected blind pipe 6.Arsenic is collected blind pipe 6 and is made by stainless steel.
The described device of present embodiment can be than conventional quartz decomposing system tolerance higher temperature; The rate of decomposition of gallium arsenide improves greatly than the conventional quartz system, and under 1200 ℃ to 1500 ℃ high temperature, the gallium arsenide rate of decomposition is near 100%; And arsenic has been carried out efficient collection, not only eliminated the pollution of environment but also help later use arsenic; Owing to decompose in a vacuum, avoided oxidation style to separate the arsenic oxide arsenoxide material that produces severe toxicity, also avoid causing environmental pollution and operator ' s health being damaged in operating process.
In addition to the implementation, the utility model can also have other embodiments, and all employings are equal to the technical scheme of replacement or equivalent transformation formation, all drop within the protection domain of the utility model requirement.
Claims (10)
1. vacuum decomposing apparatus that gallium arsenide is separated into gallium and metallic arsenic, comprise the vacuum furnace body that is provided with refrigerating unit, it is characterized in that described vacuum furnace body inside is divided into heating zone, buffer zone, cooling zone from bottom to top, described buffer zone is provided with the arsenic steam duct that is placed at top, heating zone; Described cooling zone is provided with the arsenic that is connected mutually with described arsenic steam duct and collects blind pipe, and described arsenic is collected blind pipe and is provided with refrigerating unit.
2. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, it is characterized in that described heating zone is made of crucible, well heater, thermal insulation layer.
3. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, the refrigerating unit that it is characterized in that described vacuum furnace body is a water cooling plant.
4. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, the refrigerating unit that it is characterized in that described vacuum furnace body is an air cooling equipment.
5. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, it is characterized in that described vacuum furnace body made by stainless steel.
6. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, it is characterized in that being provided with cushioning fender with holes in the described arsenic steam duct.
7. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, the vacuum furnace body inwall that it is characterized in that position, described cooling zone is close to described arsenic and is collected the blind pipe outer wall.
8. according to claim 1ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, it is characterized in that described arsenic collects blind pipe and made by stainless steel.
9. according to claim 2ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, it is characterized in that described well heater is an electric heater.
10. according to claim 2ly a kind of gallium arsenide is separated into the vacuum decomposing apparatus of gallium and metallic arsenic, it is characterized in that described thermal insulation layer is made of high-temperature ceramic fibre.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200369330U CN201358292Y (en) | 2009-03-02 | 2009-03-02 | Vacuum decomposer capable of decomposing gallium arsenicde into metallic gallium and metallic arsenic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200369330U CN201358292Y (en) | 2009-03-02 | 2009-03-02 | Vacuum decomposer capable of decomposing gallium arsenicde into metallic gallium and metallic arsenic |
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| Publication Number | Publication Date |
|---|---|
| CN201358292Y true CN201358292Y (en) | 2009-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2009200369330U Expired - Lifetime CN201358292Y (en) | 2009-03-02 | 2009-03-02 | Vacuum decomposer capable of decomposing gallium arsenicde into metallic gallium and metallic arsenic |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103184339A (en) * | 2011-12-29 | 2013-07-03 | 广东先导稀材股份有限公司 | Gallium arsenide processing device and processing method |
| CN115451700A (en) * | 2022-09-05 | 2022-12-09 | 昆明理工大学 | Device and method for recovering arsenic and gallium |
| CN116425193A (en) * | 2023-04-03 | 2023-07-14 | 昆明理工大学 | Gallium arsenide cluster and preparation method and application thereof |
-
2009
- 2009-03-02 CN CNU2009200369330U patent/CN201358292Y/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103184339A (en) * | 2011-12-29 | 2013-07-03 | 广东先导稀材股份有限公司 | Gallium arsenide processing device and processing method |
| CN115451700A (en) * | 2022-09-05 | 2022-12-09 | 昆明理工大学 | Device and method for recovering arsenic and gallium |
| WO2024051139A1 (en) * | 2022-09-05 | 2024-03-14 | 昆明理工大学 | Arsenic and gallium recovery device and method |
| CN115451700B (en) * | 2022-09-05 | 2024-07-09 | 昆明理工大学 | Device and method for recycling arsenic and gallium |
| CN116425193A (en) * | 2023-04-03 | 2023-07-14 | 昆明理工大学 | Gallium arsenide cluster and preparation method and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091209 |