CN201311601Y - Pressure control device - Google Patents

Pressure control device Download PDF

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Publication number
CN201311601Y
CN201311601Y CNU2008201565822U CN200820156582U CN201311601Y CN 201311601 Y CN201311601 Y CN 201311601Y CN U2008201565822 U CNU2008201565822 U CN U2008201565822U CN 200820156582 U CN200820156582 U CN 200820156582U CN 201311601 Y CN201311601 Y CN 201311601Y
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CN
China
Prior art keywords
pressure
control device
frame
cylinder
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNU2008201565822U
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Chinese (zh)
Inventor
杨利宣
罗伟承
刘大全
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI MICSON SEMICONDUCTOR EQUIPMENT CO Ltd
Original Assignee
SHANGHAI MICSON SEMICONDUCTOR EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHANGHAI MICSON SEMICONDUCTOR EQUIPMENT CO Ltd filed Critical SHANGHAI MICSON SEMICONDUCTOR EQUIPMENT CO Ltd
Priority to CNU2008201565822U priority Critical patent/CN201311601Y/en
Application granted granted Critical
Publication of CN201311601Y publication Critical patent/CN201311601Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a pressure control device, which comprises a Z shaft moving mechanism, a pressure head mechanism, a spring, an air cylinder, an air pressure control valve and a dial gauze for measuring the elongation of the spring, wherein the air pressure control valve is equipped with an air pressure meter, the spring is connected between the Z shaft moving mechanism and the pressure head mechanism, the air cylinder is fixed to the Z shaft moving mechanism, a pushing rod of the air cylinder is connected with the pressure head mechanism, the air pressure control valve is mounted on the air cylinder, the dial gauze is fixed to the Z shaft moving mechanism, and a measuring end of the dial gauze fully contacts with the pressure head mechanism. Compared with the prior art, the utility model has the advantages of low cost, convenient control and adjustment.

Description

A kind of pressure control device
Technical field
The utility model relates to pressure control device, particularly relates to a kind of pressure control device.
Background technology
The boarded head of most of semiconductor packaging device such as FLIP CHIP flip chip bonding bonding machine, BGA ball attachment machine etc. requires the pressure size that boarded head carries is set control when carrying out pressing work.
Existing equipment is in order to realize the control of boarded head pressure, the basic employing is divided into pressure heads mechanism and Z axle reciprocating mechanism with boarded head, Z axle travel mechanism is moved by the control of moment servomotor, there is a pressure transducer Z axle travel mechanism and the pressure heads mechanism junction that links together, during work, moment driven by servomotor boarded head moves downward, when pressure head contacts with workplace and produces pressure, just by the size of pressure sensor senses to pressure, the moment servomotor just torque of the data adjustment output by sensor feedback makes the identical method of pressure and default value realize controlling the pressure of boarded head to stress reaction in the junction of two mechanisms.Because moment servomotor and pressure transducer is expensive, and the comparatively complicated difficulty of the control of electrical system, thus the cost of the method with having relatively high expectations of technician is difficult for grasp.
Summary of the invention
Technical problem to be solved in the utility model be exactly provide in order to overcome the defective that above-mentioned prior art exists a kind of cost low, control and debug pressure control device easily.
The purpose of this utility model can realize by following technical approach: a kind of pressure control device, it is characterized in that, comprise Z axle travel mechanism, pressure heads mechanism, spring, cylinder, with barometric pneumatic control valve and the clock gauge that is used for the measuring spring elongation, described spring is connected between Z axle travel mechanism and the pressure heads mechanism, described cylinder is fixed in the Z axle travel mechanism, the push rod of this cylinder is connected with pressure heads mechanism, described pneumatic control valve is located on the cylinder, described clock gauge is fixed in the Z axle travel mechanism, and its measuring junction fully contacts with pressure heads mechanism.
Described clock gauge adopts striker formula clock gauge, and its needle pellet fully contacts with pressure heads mechanism.
Described Z axle travel mechanism comprises that frame, line slideway, straight line move module and drive straight line and moves the common servomotor that module moves up and down, described frame and line slideway all are fixed in straight line and move on the module, and described straight line moves module and common servomotor is in transmission connection.
Described pressure heads mechanism comprises pressure head frame and pressure head, and described pressure head frame and line slideway are slidingly connected, and described pressure head is fixed under the pressure head frame.
Described spring is connected between frame and the pressure head frame.
Described cylinder is fixed on the frame.
Compared with prior art, this mechanism has the following advantages:
1, cost reduces: the utility model has only been used materials such as common servomotor, cylinder, pneumatic control valve and clock gauge, pressure transducer just uses when debugging, need not be cured in the mechanism, with respect to used moment servomotor of prior art and pressure transducer, consider to reduce greatly from cost price;
2, control is easy with debugging: the utility model is only with the size of the stool and urine may command pressure head output pressure of manual adjustment setting air pressure, with respect to the control method of prior art, implement simpler, mitigation technique personnel's workload.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is a right view of the present utility model;
Fig. 3 is a schematic diagram of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
As Figure 1-3, a kind of pressure control device, comprise Z axle travel mechanism 1, pressure heads mechanism 2, spring 3, cylinder 4, with barometric pneumatic control valve and the clock gauge 5 that is used for the measuring spring elongation, described spring 3 is connected between Z axle travel mechanism 1 and the pressure heads mechanism 2, described cylinder 4 is fixed in the Z axle travel mechanism 1, the push rod of this cylinder 4 is connected with pressure heads mechanism 2, described pneumatic control valve is located on the cylinder 4, described clock gauge 5 is fixed in the Z axle travel mechanism 1, and its measuring junction fully contacts with pressure heads mechanism 2.
Described clock gauge 5 adopts striker formula clock gauge, and its needle pellet fully contacts with pressure heads mechanism 2; Described Z axle travel mechanism 1 comprises that frame 6, line slideway 7, straight line move module 8 and drive straight line and moves the common servomotor 9 that module moves up and down, described frame 6 and line slideway 7 all are fixed in straight line and move on the module 8, and described straight line moves module 8 and is in transmission connection with common servomotor 9; Described pressure heads mechanism 2 comprises pressure head frame 10 and pressure head 11, and described pressure head frame 10 is slidingly connected with line slideway 7, and described pressure head 11 is fixed in the pressure head frame 10 times; Described spring 3 is connected between frame 6 and the pressure head frame 10; Described cylinder 4 is fixed on the frame 6; The utility model is to utilize clock gauge to measure the elongation x of spring under cylinder power output N effect that connects pressure heads mechanism and Z axle travel mechanism.When boarded head pressing object 12, pressure heads mechanism is moved up with respect to Z axle travel mechanism makes spring come back to initial length apart from x, think that then this moment, boarded head acted on the pressure size of object and the equal and opposite in direction of cylinder power output N, at this moment read the magnitude numerical value that rain glass numerical value just can obtain the cylinder power output, regulate atmospheric pressure value by pneumatic control valve, just can realize accurate control boarded head pressure.
Embodiment
The mechanism of present embodiment mainly forms pressure heads mechanism by working head frame and working head; Move module, line slideway and common servomotor by frame, straight line and form Z axle travel mechanism; Line slideway is fixed in and not only plays the effect of connection between Z axle travel mechanism and the pressure heads mechanism pressure heads mechanism is slided up and down with respect to Z axle travel mechanism; Cylinder is fixed in the Z axle travel mechanism and the push rod of power output is connected with pressure heads mechanism, and cylinder power output size is regulated by the barometric pneumatic control valve of being with of contact with it; Spring connects pressure head and the dynamic balance effect plays in Z axle travel mechanism; Striker formula clock gauge is fixed in the Z axle travel mechanism and needle pellet will fully be touched with pressure heads mechanism one plane.
Promptly debug after mechanism's assembling:
1, elder generation sets to zero air pressure and makes not power output of cylinder.Pressure heads mechanism just just can be with respect to Z axle travel mechanism to lower slider under the pulling force effect of spring, and this moment, spring tension F equaled the gravity G (F=G) of pressure heads mechanism.The relative position of Z axle travel mechanism and pressure heads mechanism just can not change when equilibrium state, and therefore the numerical value of handle striker formula this moment clock gauge is designated as 0 point.
2, adjust band rain glass pneumatic control valve, make cylinder power output N.Pressure heads mechanism moves down with respect to Z axle travel mechanism under the promotion of cylinder, the spring elongation, and spring tension F1 equals pressure head gravity G and adds upper cylinder power output N (F1=G+N).This moment, the numerical value of clock gauge was changed into x (F1-F=k*x k is a elastic coefficient), and this x value just is the elongation of spring.
3, with pressure transducer as on the workplace, operating personnel start the motion of driven by servomotor boarded head, up to the pressure head lower surface is contacted with pressure transducer, and the numerical value that continues to move down pressure transducer constantly rises (because pressure transducer is incompressible, so this moment, pressure heads mechanism just moved upward with respect to Z axle travel mechanism) turn back to 0 boarded head up to clock gauge numerical value from x and stop to move down, this moment spring tension and pressure head gravitational equilibrium F-G=0, so the size of the power N that just exports for pneumatic cylinder of the numerical value that shows of pressure transducer at this moment.
4, constantly adjusting each force value that pneumatic control valve is shown to pressure transducer to need and write down barometric numerical value, is that 0.15Mpa........... gets off resulting data recording for use in the future when air pressure is 0.1Mpa, 6N when being 5N such as pressure.
After the boarded head debugging is finished, as long as adjust atmospheric pressure value according to the data of record, stop when clock gauge is got back to 0 position whenever boarded head moves downward, the pressure of the pressing of boarded head just is the pairing force value of this atmospheric pressure value on the tables of data at this moment.So just, realized control to boarded head pressure.

Claims (6)

1. pressure control device, it is characterized in that, comprise Z axle travel mechanism, pressure heads mechanism, spring, cylinder, with barometric pneumatic control valve and the clock gauge that is used for the measuring spring elongation, described spring is connected between Z axle travel mechanism and the pressure heads mechanism, described cylinder is fixed in the Z axle travel mechanism, the push rod of this cylinder is connected with pressure heads mechanism, described pneumatic control valve is located on the cylinder, described clock gauge is fixed in the Z axle travel mechanism, and its measuring junction fully contacts with pressure heads mechanism.
2. a kind of pressure control device according to claim 1 is characterized in that, described clock gauge adopts striker formula clock gauge, and its needle pellet fully contacts with pressure heads mechanism.
3. a kind of pressure control device according to claim 1 and 2, it is characterized in that, described Z axle travel mechanism comprises that frame, line slideway, straight line move module and drive straight line and moves the common servomotor that module moves up and down, described frame and line slideway all are fixed in straight line and move on the module, and described straight line moves module and common servomotor is in transmission connection.
4. a kind of pressure control device according to claim 3 is characterized in that described pressure heads mechanism comprises pressure head frame and pressure head, and described pressure head frame and line slideway are slidingly connected, and described pressure head is fixed under the pressure head frame.
5. a kind of pressure control device according to claim 4 is characterized in that, described spring is connected between frame and the pressure head frame.
6. a kind of pressure control device according to claim 5 is characterized in that described cylinder is fixed on the frame.
CNU2008201565822U 2008-12-04 2008-12-04 Pressure control device Expired - Lifetime CN201311601Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008201565822U CN201311601Y (en) 2008-12-04 2008-12-04 Pressure control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2008201565822U CN201311601Y (en) 2008-12-04 2008-12-04 Pressure control device

Publications (1)

Publication Number Publication Date
CN201311601Y true CN201311601Y (en) 2009-09-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2008201565822U Expired - Lifetime CN201311601Y (en) 2008-12-04 2008-12-04 Pressure control device

Country Status (1)

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CN (1) CN201311601Y (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101556923B (en) * 2008-12-04 2010-10-13 上海微松工业自动化有限公司 Pressure control mechanism of semiconductor packaging device loading head
CN102350603A (en) * 2011-10-14 2012-02-15 蒋凌峰 Pressing mechanism for electric cleaver
CN102589660A (en) * 2012-02-24 2012-07-18 中国测试技术研究院力学研究所 Static balance force standard device and static balance measurement method
CN103411730A (en) * 2013-08-27 2013-11-27 中国测试技术研究院力学研究所 Weight exchange method and weight exchange device for force standard machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101556923B (en) * 2008-12-04 2010-10-13 上海微松工业自动化有限公司 Pressure control mechanism of semiconductor packaging device loading head
CN102350603A (en) * 2011-10-14 2012-02-15 蒋凌峰 Pressing mechanism for electric cleaver
CN102350603B (en) * 2011-10-14 2014-06-25 蒋凌峰 Pressing mechanism for electric cleaver
CN102589660A (en) * 2012-02-24 2012-07-18 中国测试技术研究院力学研究所 Static balance force standard device and static balance measurement method
CN102589660B (en) * 2012-02-24 2014-10-01 中国测试技术研究院力学研究所 Static balance force standard device and static balance measurement method
CN103411730A (en) * 2013-08-27 2013-11-27 中国测试技术研究院力学研究所 Weight exchange method and weight exchange device for force standard machine
CN103411730B (en) * 2013-08-27 2015-05-27 中国测试技术研究院力学研究所 Weight exchange method and weight exchange device for force standard machine

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20090916

Effective date of abandoning: 20081204