CN201309113Y - Device for processing high-precision product with complicated shape by using micro-grinding process - Google Patents

Device for processing high-precision product with complicated shape by using micro-grinding process Download PDF

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Publication number
CN201309113Y
CN201309113Y CNU200720183428XU CN200720183428U CN201309113Y CN 201309113 Y CN201309113 Y CN 201309113Y CN U200720183428X U CNU200720183428X U CN U200720183428XU CN 200720183428 U CN200720183428 U CN 200720183428U CN 201309113 Y CN201309113 Y CN 201309113Y
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China
Prior art keywords
grinding
axle
drive unit
deceleration device
grinding tool
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CNU200720183428XU
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Chinese (zh)
Inventor
康什那·阿那托里·塞吉维基
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Olango Gnardviski Dmitriev
Conszyna Elena Borisov
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Olango Gnardviski Dmitriev
Conszyna Elena Borisov
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Abstract

The utility model relates to a device for processing a high-precision product with a complicated shape by using a micro-grinding process, which can be used for processing the oval conical raised surfaces and the concave tooth-shaped surfaces of conjugation paired elements intersected with the rotating axles of paired elements at one point. The device comprises a grinding machine (1) positioned according to the X, Y and Z coordinate systems taking O as the origin of the coordinate and a driving device capable of making corresponding longitudinal displacement and rotation, wherein the grinding machine (1) is provided with two grinding wheels (5) and (51), the first grinding wheel can be used for processing the concave surface, and the second grinding wheel can be used for processing the concave surface. The center of the curvatures of the grinding wheels (5) and (51) is coincident with the starting point of displacement of an executing mechanism of a machine tool (1) so as to be convenient for finishing the processing process according to the set precision. Two measuring probes (39) and (40) are also installed on the machine tool (1), wherein the geometric shape and the specification of the first probe (39) conform to the geometric shape and the specification of the first grinding wheel, the geometric shape and the specification of the second probe (40) conform to the geometric shape and the specification of the second grinding wheel, and the probes can rotate around the two vertically intersected axles C2 and D. The shape and the specification of the corresponding machined surface can be controlled by means of the probes (39) and (40).

Description

Utilize micro-grinding process manufacturing complex shapes high accuracy product equipment
Technical field
The utility model device is for utilizing micro-grinding process manufacturing complex shapes high accuracy product equipment.
The process application scope
The invention belongs to the high crisp material complicated shape processing and forming technology of exceptional hardness, specifically, utilize the high precision micro grinding process to make the product of complicated shape exactly.
Background technology
The existing processes level
Existing have a kind of novel processing technology, the conical toothed spiral transmission of this kind process using planetary gear contains a pair of conjugated elements, and conjugated elements has oval spiral protrusion surface, recessed toothed surfaces, and the rotating shaft of element intersects at a point.
The typical case of this processing technology is applied as radial-thrust bearing, and its specifying information is described for No. 2247876 to some extent at Russian Federation's patent certificate.
The above radial-thrust bearing is made up of outer member, inner member and rolling element.The supporting surface of inner member is minimum to be ground to three conical ellipse spiral raised face (RF)s, forms helix between each raised face (RF) and the inner conical surface.
Each rolling element all is a conical part, and the supporting surface of part is ground to the spiral head with two accesses at least, and the spiral head surface has oval conical recessed, forms helix between each recessed and another cylindrical conical camber.
The interior supporting surface of bearing outer member is conical curved surface, is the running track of each rolling element cylindrical conical surface.
The above bearing adopts the transmission of planetary gear toothed spiral, and the rotating shaft of two conjugated elements intersects at a point.For every pair of engaged element, spiral circle taper engagement side by side appears repeatedly, and each engagement guarantees the engagement of two teeth at least.
Also do not heard a kind of like this processing (adopt planetary gear, spiral conduction, the rotating shaft of element intersects at a point) the oval conical projection of radial-thrust bearing and the high accuracy of recessed toothed surfaces and equipment of high productive capacity of being applicable to till now.
More famous micro-grinding process processing unit (plant) (Russian Federation's patent license RU2165837 number) is by forming with the lower part: grinding machine, grinding tool is fixed on the fixedly servicing unit that lathe bed is used, working surface is the grinding tool of grinding with diamond dust, be placed on the knife rest under the fixing servicing unit, the workbench of the band workpiece fixture of on knife rest, placing, the drive unit that workbench is needed in the molding flat length travel along the lathe bed X-axis, to be with the knife rest of workbench along the drive unit of lathe bed Y-axis at molding flat length travel needs, grinding tool is the servicing unit drive device for rotation fixedly.
At this moment, be equipped with in the device with the continuous numerical control hypervisor device of managing electric output of corresponding drive unit.Each is used for finishing the adder that band cycloid meshing planetary gear rotation deceleration device all is housed along the drive unit of grinding machine X-axis and Y-axis length travel.Like this, the operating system of device can be supervised the static state and the dynamic change of cutting force, analyzes the cut quality of finished surface.
The above equipment is used to process plastic material to make the high accuracy product of complicated shape, can guarantee the suface processing quality that finished product is very high, the fragility that product surface can not occur is damaged, and crudy can match in excellence or beauty with manual quality fully, and the processing specification meets the requirements fully.
But the design feature of this device has determined it can not be used for processing the oval conical projection and the recessed surface of (adopt planetary gear, worm drive, the rotating shaft of element intersects at a point) radial-thrust bearing.
The utility model content
The problem settling mode
Can address the above problem by the utility model.
The device of making according to valid model is applicable to that processing planetary gear conical gear helicoidal gear accurately engages oval conical projection face and recessed surface to (rotating shaft that engages two elements of centering intersects at a point).After using location survey machinery, this device can also be monitored geometry, the Surface Machining parameter of workpiece.
The purpose of this utility model provides a kind of complicated shape high accuracy product trace grinding attachment, this complicated shape high accuracy product trace grinding attachment can solve an above-mentioned difficult problem, can be used for the oval circular cone bump surface of the paired element of conjugation that the rotating shaft of paired element intersects at a point, the processing of recessed toothed surfaces.
The designed device of the present invention is by forming with the lower part: according to the origin of coordinates is X, the Y of O, the grinding machine of Z coordinate system location, wherein origin of coordinates O is positioned at X, O, Y horizontal plane, the digital program controlled management devices of lathe executing agency and comprises the execution architecture below the lathe bed of being fixed on lower device: first grinding tool that can rotate around axle C1 be servicing unit fixedly, according to standard component, axle C1 and XOY level are tangent, and grinding is identical with the grinding face height that diamond dust is bonded.Fixedly under the servicing unit knife rest is being housed, workbench has been installed on knife rest, the fixing fixedly servicing unit of using of band workpiece on the workbench.First drive unit is used for workbench to begin to carry out length travel along the fuselage X-axis with respect to knife rest from origin of coordinates O, second drive unit is used to begin to carry out length travel along the fuselage Y-axis from origin of coordinates O with the knife rest of workbench, the 3rd drive unit is used to begin to carry out length travel along fuselage X1 axle from origin of coordinates O with the knife rest of workbench, and to be band workbench knife rest begin the result that moves along fuselage X-axis and Z axle from the origin of coordinates in above-mentioned displacement.The 4th tumbler is the servicing unit rotating driving device, be used for fixing around first grinding tool of axle C1 rotation, according to standard component, axle C1 and horizontal plane XOY are tangent, the 5th tumbler is that workpiece centers on locating shaft A device of rotation driving, and locating shaft A is parallel to the XOZ plane, and the 6th tumbler is that workpiece centers on locating shaft B device of rotation driving, locating shaft B is parallel with lathe bed locating shaft Y, and is tangent according to standard component and fuselage locating shaft A.The program control management devices of managing electric output links to each other with lathe executing agency administration portal.According to valid model, first grinding tool is applicable to the toothed surfaces of processing projection, be first emery wheel, the diamond dust of grinding tool working face is along circle distribution, plane, circumference place and XOY plane are tangent, the zero point O of the above-mentioned displacement of its center of curvature point and lathe executing agency overlaps, and the rotating shaft C1 of first grinding tool passes the center of curvature.In addition, as the executing agency that is fixed on lathe bed, second grinding tool is housed also above the grinding machine, second grinding tool is around axle C2 rotation, and C2 is tangent according to standard component and plane XOY for axle, and passes above-described origin of coordinates O.Second grinding tool can also be around axle D rotation, and axle D is tangent in the above-described origin of coordinates 0 according to standard component and axle C2.Second grinding tool can be used for processing the surface of indent, be second emery wheel, tool surfaces is the grinding diamond dust that is bonded together, the height of the outstanding adhesive of diamond dust is identical, the diamond dust of second emery wheel is along circle distribution, plane, circumference place and XOY plane are tangent, and the zero point O of the above-mentioned displacement of its center of curvature point and lathe executing agency overlaps.The 7th drive unit is that second grinding tool centers on an axle C2 rotating driving device, and the 8th transfer device is that second grinding tool is around an axle D rotating driving device.Many radio frequency channels device is used to monitor specification, the geometric shape parameters of processed projection and recessed toothed surfaces, first measuring probe is installed above, can directly contact with the projection working face, directly obtain data about finished surface shape and specification, so that determine the geometry and the specification of first wheel grinding working face, second measuring probe is directly with recessed working face contact, determining the shape and the size of sphere, can be with allowing the working face of abrasive grinding wheel of second emery wheel simultaneously around axle C2 and axle D rotation.The Linear displacement transducer of first measuring probe and second probe has been installed in the multiband device, and sensor positions according to X-axis.Like this, program control management devices has possessed auxiliary management output port, and this port connects with the management input port of the auxiliary executing agency of lathe.
The above design feature machining high-precision that this device possessed, (rotating shaft of two elements intersects at a point) in conjunction with to there being the product on oval trochoid spiral protrusion surface, recessed surface, utilize grinding machine as location survey equipment simultaneously, the geometry and the specifications parameter of monitoring surface to be machined.
In first, second, the 5th drive unit, adder is installed.First and second deceleration device are installed.Every transfer device is installed non-cycloid engagement, cycloid engagement first row and the second rows of planetary gear.First and second engine are installed, first engine connects with the first deceleration device power shaft, second engine power shaft connection of second deceleration device together, the second rows of planetary gear of second deceleration device connects with the first rows of planetary gear of first deceleration device, the second rows of planetary gear output shaft of first deceleration device is the output shaft of adder, and adder is used to finish the displacement of lathe respective execution mechanisms.These settings all are very rational.
The quantity of best first deceleration device, first row's pinion gear dentation element is Duoed one than the quantity of second row's pinion gear dentation element, the quantity of second deceleration device first row's pinion gear dentation element is lacked one than the quantity of second row's pinion gear dentation element, and the total quantity of such first deceleration device, first row's pinion gear and second row's pinion gear dentation element is identical with the total quantity of second row's pinion gear dentation element with second deceleration device, first row's pinion gear.
First emery wheel and second emery wheel, first measuring probe and second measuring probe all are installed in corresponding fixing with on the servicing unit, fixedly servicing unit adopts turret head, can show that lathe bed centers on the rotation of E axle, turret head is parallel with locating shaft Z, is rigidly fixed in lathe bed.
Each root measuring probe all can be changed, and measuring probe is installed on the corresponding fixedly servicing unit, and fixedly servicing unit is installed on the lathe bed.
According to the analytical model that adopts, the conical toothed spiral conduction device of planetary gear is innovation in principle of the present invention.When carrying out moment multiple tooth engagement, use as working face on the surface of drive unit element.Under the above moment multiple tooth meshing condition, working face is finished the geometric displacement sealing along the total length of each engaged element.
Designed device can be used for processing multiple tooth tangent oval circular cone engagement complicated shape high accuracy product, after using grinding machine as location survey equipment, can also monitor the geometry and the specifications parameter of workpiece.
Benefit of the present utility model
The utility model can be used for processing accurately (employing planetary gear, worm drive, the rotating shaft of element intersects at a point) the oval conical projection and the recessed surface of radial-thrust bearing, and use grinding machine as location survey equipment, so that monitor the geometry of finished surface, quantitative grinding parameter.
Description of drawings
In order better to understand this moulding process, hereinafter enumerated the application example of this processing technology, and referenced drawing is provided.Wherein:
Fig. 1-according to mathematics computing model, with the design apparatus of the present invention of equidistant projection technology to drawing;
First grinding tool longitudinal sectional drawing of Fig. 2-draw according to mathematics computing model;
Fig. 3-be fixed on second grinding tool longitudinal sectional drawing on the fixing servicing unit according to what mathematics computing model was drawn;
Fig. 4-be positioned at grinding machine longitudinal sectional drawing on the XOZ plane according to what mathematics computing model was drawn:
Fig. 5-be positioned at grinding machine longitudinal sectional drawing on the YOZ plane according to what mathematics computing model was drawn:
The machine tool motion conspectus of Fig. 6-draw according to mathematics computing model;
Fig. 7--be according to mathematics computing model draw at the fixing thin portion of this equipment longitudinal sectional drawing of servicing unit of axle A, B crosspoint planar band workpiece;
This equipment partial cutaway schematic of Fig. 8-draw according to mathematics computing model on the XOZ surface;
Second grinding tool longitudinal sectional drawing of Fig. 9-draw according to mathematics computing model with the 8th drive unit;
Figure 10-manage schematic diagram according to the lathe of mathematics computing model drafting;
Figure 11-according to first grinding tool of mathematics computing model drafting and the mechanical part longitudinal sectional drawing of second grinding tool.
The station list
The 1-grinding machine.
The 2-flexible manufacturing system (FMS).
3-grinder bed 1.
4,4 1-be used for fixing the servicing unit of first and second grinding tool.
5,5 1-the first and second grinding tool.
6,6 1-grinding working face.
7,7 1-grinding diamond dust.
8-lathe 1 knife rest.
9-lathe 1 workbench.
The 10-workpiece is fixedly used servicing unit.
11,11 1-workpiece.
The drive unit that 12-workbench 9 needs along the length travel of OX axle.
The drive unit that 13-knife rest 8 needs along the length travel of OY axle.
The drive unit that 14-knife rest 8 needs along the length travel of OX1 axle.
15-instrument 5 fixedly servicing unit 4 rotates the drive unit that needs around the C1 axle.
15 1-grinding tool 5 1Fixedly servicing unit 4 1Rotate the drive unit that needs around the C2 axle.
15 2-grinding tool 5 1Rotate the drive unit that needs around the D axle.
16-numerical control program device.
17,18,19,20,17 1, 17 2- management output port 12,13,14,15,15 from numerical control program device 16 to drive unit 1, 15 2
21,21 1-diamond dust binding agent.
The adder of 22-drive unit 12.
The adder of 23-drive unit 13.
24 1, 25 1, 24 2, 25 2Dual planetary gear-gear hobbing the deceleration device of- band adder 22,23.
26,27,28, the input element of 29- adder 22,23.
30,31,32, the stepping engine of 33- adder 22,23.
Many radio frequency channels of 34-operation supervise and control device.
35,36, the 37-electronic sensor.
38- electronic sensor 35,36,37 is fixedly used servicing unit.
First replaceable probe of 39-.
Second replaceable probe of 40-.
41-regulating and controlling voltage intensifier.
The 42-analogue-to-digital converters.
The output port of 43-analogue-to-digital converters.
Many radio frequency channels of 44-signal recorder.
The communication access interface of 45-numerical control program device 16 computers.
The communication access interface of cutting 47 in 46-is miniature.
Transplant a cutting in 47-is miniature
48...57-the output port of cutting 47 in miniature.
The 58-digital analog converter.
The input port of 59-digital analog converter 58.
The output port of 60-digital analog converter 58.
The guider of 61-lathe bed 3.
The paired dual planetary gear gear hobbing deceleration device of 62-drive unit 14.
The input element of 63-deceleration device 62.
The stepping engine of 64-drive unit 14.
65,66,67,68, the stepping engine management assembly of 69- drive unit 12,13,14.
75-ac frequency adjuster.
The output port of 76-ac frequency adjuster 75.
77- drive unit 15,15 1, 15 2Engine.
The axle of 78-engine 77.
79,80,81-spiral tourelle.
82,83,84,85-communication device.
86-grinding working face 6,6 1The center of curvature.
The 87-horizontal plane.
Second grinding tool 5 of 88- 1Grinding diamond dust 7 1Bonding place circumference.
89-workpiece 11,11 1Rotate the drive unit that needs around the A axle.
90-workpiece 11,11 1Rotate the drive unit that needs around the B axle.
91...96-the output port of cutting 47 in miniature.
97,98, the Management Unit of 99- drive unit 12,13,14,89,90 stepping engines.
100,101, the stepping engine of 102- drive unit 89,90.
103,104, the stepping engine 100,101 that is connected with Management Unit 97,98,99 of 105-
Figure Y20072018342800121
102 input radio frequency channel.
106,107, the output shaft of 108-stepping engine 100,101,102.
The paired dual planetary gear gear hobbing deceleration device of 109-drive unit 89.
The dual planetary gear gear hobbing deceleration device of 110-drive unit 89.
The deceleration device of 111-drive unit 90.
112, the 113-communication device.
114, the management output port of 115-numerical control management system 16 on drive unit 89,90.
116-assists rotary work-table.
Disk on the 117-workbench 116.
The catching of 118-disk 117.
Conical part on the 119-disk 117.
The spring of the conical part 119 of 120-.
The radial-thrust bearing of 121-rotary work-table 116.
122-carries out the first of the rotary work-table 116 of adder function.
The second portion of 123-rotary table 116.
124,125-rotary table 116 radially-thrust bearing.
The conical replaceable sleeve pipe of 126-workbench 116.
127-is installed in drive unit 15,15 1, 15 2On angle displacement sensor.
128...131-the power shaft of adder 22,23.
132, the output shaft of 133-deceleration device 136,137.
134, the stroke spiral of 135- spiral tourelle 79,80.
First no hysteresis effect planetary gear gear hobbing deceleration device of 136-adder 22.
First no hysteresis effect planetary gear gear hobbing deceleration device of 137-adder 22.
First no hysteresis effect planetary gear gear hobbing deceleration device of 138-adder 23.
First no hysteresis effect planetary gear gear hobbing deceleration device of 139-adder 23.
140, the output shaft of 141-deceleration device 138,139.
142...145-the planetary gear of deceleration device 136...139.
146...153-deceleration device 136...139 sun gear.
154, belt, the gear drive of 155- adder 22,23.
The output shaft of 156-deceleration device 62.
Stroke spiral in the 157-spiral tourelle 81.
Ball nut in the 158-spiral tourelle 81.
The specific embodiment
Application example of the present invention
The designed device of the present invention is used for the moulding of conical toothed spiral drive unit joggle piece projection of (the element rotating shaft intersects at a point) planetary gear and recessed toothed surfaces, according to mathematics computing model, this device is the grinding machine 1 (Fig. 1) of the digital program controlled management devices of band lathe executing agency, grinding machine is X, Y, the Z coordinate system location of O according to the origin of coordinates, and origin of coordinates O is positioned at X, O, Y horizontal plane.
Grinding machine 1 is made up of flexible manufacturing system (FMS) 2 and following executing agency.
Be fixed on the servicing unit 4., 4 on the lathe bed 3 1Be respectively applied for fixing corresponding first grinding tool and second grinding tool 5,5 1
Can be after first grinding tool 5 (Fig. 2) is fixing around the rotation of C1 axle, the same X of C1 axle, O, Y horizontal plane are tangent.The grinding working face 6 of first grinding tool is the highly identical grinding that is bonded Buddha's warrior attendant layer of sand 7.First grinding tool 5 is applicable to the toothed surfaces of processing protuberance, is first abrasive grinding wheel.Buddha's warrior attendant layer of sand 7 is grinding working face 6, and the Buddha's warrior attendant layer of sand is laid along circumference, and circumference is positioned at XOY plane, and the origin of coordinates O of circumferential curvature center and lathe displacement executing agency overlaps, and the rotating shaft C 1 of this emery wheel passes this point.The second cover grinding tool 51 (Fig. 3) is applicable to the surface that processing is recessed, can be around the rotation of C2 axle, and according to standard component, C2 axle and XOY plane are tangent, and pass origin of coordinates O.The second cover grinding tool can also be around the rotation of D axle, and according to standard component, the C2 axle passes origin of coordinates O.The grinding working face 61 of second grinding tool 51 is for being bonded highly identical model Buddha's warrior attendant layer of sand 71.
The grinding working face 71 of second emery wheel is laid along circumference, and circumference is positioned on the plane, and according to standard, circumference is tangent with the XOY horizontal plane, and the center of curvature of circumference and origin of coordinates O overlap.
Under the respective fixation servicing unit 4,41 (Fig. 1) that is used for fixing first grinding tool 5, second grinding tool 51, knife rest 8 has been installed, the fixedly workbench 9 of servicing unit 10 (Fig. 4) of band workpiece 11 or 111 has been installed on knife rest, and workpiece need be processed into corresponding protuberance or recessed surface.
The executing agency of institute's contrive equipment comprises:
-workbench 9 is begun to carry out first drive unit 12 that length travel needs along the X locating shaft of grinding machine 1 by origin of coordinates O at horizontal plane,
The knife rest 8 of-band workbench 9 is begun to vertically move second drive unit 13 (Fig. 5) that needs at horizontal plane along grinding machine 1 locating shaft Y by origin of coordinates O,
The knife rest 8 of-band workbench 9 is begun to carry out the 3rd drive unit 14 (Fig. 4) that displacement is wanted along grinding machine 1 locating shaft X1 by origin of coordinates O, and the displacement of this moment is begun along the result of grinding machine 1 locating shaft X, Z displacement by origin of coordinates O for the knife rest 8 of band workbench 9,
The 4th drive unit 15 (Fig. 6) that the fixedly servicing unit of-the first grinding tool 5 needs around axle C1 rotation, according to standard component, this moment, C1 axle and XOY horizontal plane were tangent,
-workpiece 11,11 1(Fig. 7) rotate needed the 5th drive unit around locating shaft A, the XOZ plane parallel of locating shaft A and lathe 1,
-workpiece 11,11 1Rotate needed the 6th drive unit around locating shaft B, the Y locating shaft of locating shaft B and lathe 1 is parallel, and is crossing according to the A locating shaft of standard component and lathe 1,
The 7th drive unit 151 (Fig. 8) that-the second cover grinding tool 51 needs around the rotation of C2 axle,
-the second the 8th drive unit 152 (Fig. 9) that grinding tool 51 needs around the rotation of D axle,
-be used to manage with the link to each other numerical control management devices 16 (Fig. 7,10) of electric output port 17,18,19,20,171,172 of above-mentioned drive unit.
Just as described above, the grinding working face 6,61 of first grinding tool 5, second grinding tool 51 is grinding with diamond dust 7,71, and the height of the outstanding adhesive layer 21,211 of Buddha's warrior attendant layer of sand is identical.
Every drive unit 12,13 (Fig. 6) all has corresponding adder 22,23.Every adder 22,23 all has corresponding first and second dual planetary gears-gear hobbing deceleration device, first and second cycloid engagement deceleration device 241,251 and 242,252, and they link to each other with 28,29 with feeding tooth 26,27 respectively.Every deceleration device 241,251 and 242,252 all has non-cycloid engagement of first and second rows and cycloid meshing gear spare.
In addition, every adder all has first and second engine 30,31 and 32,33, wherein the input port (power shaft) of first engine and first deceleration device 241,245 is connected, and the input port (power shaft) of second engine and second deceleration device 242,252 is connected.The second rows of planetary gear of second deceleration device 242,252 connects with the first rows of planetary gear of first deceleration device 241,251.The output shaft of the second rows of planetary gear of first deceleration device 241,251 is the output shaft of adder 22,23, can guarantee that the respective execution mechanisms of lathe 1 is carried out displacement.
Many radio frequency channels equipment 34 (Figure 10 .) has been installed on inventive device, can have been carried out quantitative monitoring and geometric shape parameters monitoring processing crowning and recessed toothed surfaces.In the equipment 34 circuit has been installed, electronic sensor 35,36,37 has been installed on every circuit.Each electronic sensor 35,36,37 all is installed on the corresponding fixedly servicing unit 38 (Fig. 1).
The measuring probe 39 (Fig. 6) that can change has been installed in many radio frequency channels equipment 34, and this probe can directly contact with the protuberance machined surface, and measuring probe 40 also has been installed simultaneously, and this probe can contact by direct and recessed machined surface.Like this, first probe 39 can be tested the shape and the specification of machined surface, so that conform to specification with the shape of wheel grinding face.Second probe be shaped as sphere, specification also meets spherical specification, carries out recessed processing around axle C2 and D rotation simultaneously by second wheel grinding working face.
By moving of measuring probe 39,40 (Fig. 6), each electronic sensor 35,36,37 (Figure 10) can be along X, Y, Z axle with workpiece 11,11 1Each contact point on surface moves, and the electric current of this moment is U.
In addition, voltage-regulation booster 41 and analogue-to-digital converters 42 have been installed in many radio frequency channels device 34 (Figure 10), the output of device connects with the input of multi channel signals logger 44, and manages the computer of device 16 by PORT COM 45 linking number keyholed back plates.
By communication interface 46, device 16 is connected to the linear little interpolation of many radio frequency channels of band buffer memory, and interpolation output port 48...57 connects with the corresponding management input port of drive unit 12,13,14.
Digital analog converter 58 also has been installed in the device, and the input port 59 of converter connects with the corresponding management output port of the computer of numerical control management devices 16, and the output port 60 of converter is with the management input port connection of drive unit 15,151,152.
In knife rest 8 band workbench needed the 3rd drive units 14 of 9 displacements (Fig. 6), servicing unit has been installed, under guider 61 effects of lathe bed 3, by this servicing unit (wedge shape), knife rest 8 steadily moves with respect to XOY horizontal plane tendency along locating shaft X 1 (and the angle between the locating shaft X is α).
Paired cycloid engagement dual planetary gear gear hobbing decelerator 62 (Fig. 4) have been installed in the said apparatus, and an input element 63 of decelerator connects with driving with stepping engine 64.
At this moment,, two elements 65,66 and 67,68 have been installed in each drive unit, have been respectively applied for management stepping engine 30,31 and 32,33 for first, second drive unit 12 (Figure 10), 13.In the 3rd drive unit 14 1 element 69 that is used to manage stepping engine 64 only has been installed.
In first grinding tool 5 the 4th drive unit 15 that fixedly servicing unit 4 rotations need ac frequency adjusting device 75 has been installed, the output port 60 of the input port of this device and digital simulation converter 58 is connected, and the output port 76 of this device is connected with the input port of engine 77.
Being provided with of the setting of the 7th drive unit 151 and the 8th drive unit 152 and the 4th drive unit 15 is similar.
Second grinding tool 51 can adopt cycloid meshing spiral ato unit to drive around the 8th drive unit (Fig. 3) that axle D rotation needs, in be located at and drive in the grinding tool 51 employed rotor field spiders.
The servicing unit 4 (Fig. 8), 41 that is used for fixing first cutter 5, second cutter 51 can be the grinding bearing parts, the benchmark adjusting device of each grinding bearing parts all is installed in aerostatic force axially and on the radial strut, and aerostatic force is axial and radial strut is fixed on the lathe bed 3.
Among above-described first, second, the 3rd drive unit 12 (Figure 10), 13,14 corresponding spiral tourelle 79,80,81 has been installed, the input element of each spiral tourelle connects with dual planetary gear gear hobbing deceleration device 241 (Fig. 6), 242,251,252,62 corresponding output shaft.
In the flexible manufacturing system (FMS) 2 of installing in the lathe 1 communication device 82 (Figure 10), 83,84,85 has been installed, can have been shown the stock removal rate that per step respective drive device operation is finished.Under the effect of above drive unit, the grinding working face center of curvature of corresponding grinding tool produces cutting force.
Cutting on the grinding working face 6 of first grinding tool 5 is fixed on the circumference on the adhesive layer 21 as independent point successively with every diamond dust 7 (Fig. 2), and the circumference and the center of curvature 86 are tangent.Meanwhile, the height of grinding layer diamond dust all must be on a horizontal plane 87 (XOY) of lathe 1.At this moment, the rotating shaft C1 with the center of curvature 86 tangent circle contours more than is crossing by the central point same level face 87 of the center of curvature 86.This point also is the origin of coordinates (O) that the grinding machine 1 used static elements of a fix are XZY.
Cutting on second grinding tool 51 grinding working face 61 is fixed on the circumference 88 on the adhesive layer 211 as independent point successively with every diamond dust 71 (Fig. 3), circumference in one plane, according to standard component, same level face XOY is tangent on this plane, and the center of curvature on plane and the above-described origin of coordinates (O) coincidence.
Just as described above, in the device of the present invention's design workpiece 11,11 has been installed 1Fixedly servicing unit rotates needed the 5th drive unit 89 (Figure 10), workpiece 11,11 around locating shaft A 1Fixedly servicing unit rotates needed the 6th drive unit 90 around locating shaft B.The 5th drive unit 89, six drive unit 9 electrical input terminal mouths are transplanted a cutting 47 corresponding output end mouth 91...96 in linear miniature and are connected with many radio frequency channels of band buffer memory.
The Management Unit 97,98 and 99 of corresponding stepping engine 100,101,102 has been installed in above-described the 5th drive unit 89 (Figure 10), six drive units 90.At this moment, the output port of cutting 47 had 91...96 in many radio frequency channels of band buffer memory were linear miniature, and these ports connect with the management input port of drive unit 89,90.
In addition, an input radio frequency channel 103,104 and 105 is arranged respectively in the stepping engine 100,101 and 102 of drive unit 89,90, an output shaft 106,107 and 108 is respectively arranged.
In addition, a paired dual planetary gear gear hobbing deceleration device 109 and a cycloid meshing planetary gear gear hobbing deceleration device 110 also have been installed in the drive unit 89 (Fig. 7).Set out synchronously output shaft 106 mechanical connections of motivation 100 of the power shaft of deceleration device 109, the power shaft of deceleration device 109 be arranged in locating shaft A concentric position on, with the XOZ plane parallel of locomotive 1, mechanical connection workpiece 11,11 1 Fixedly servicing unit 10.
Set out the synchronously output shaft 107 of motivation 101 of the power shaft of dual planetary gear gear hobbing deceleration device 110 connects, and by mechanical driving device, the output shaft of deceleration device 101 connects with the output shaft of the deceleration device 109 that is parallel to it.
Cycloid engagement dual planetary gear gear hobbing deceleration device 111 has been installed in above-described the 6th drive unit 90, set out the synchronously output shaft of motivation 102 of the output shaft of this device connects, the output shaft of deceleration device 110 be arranged in locating shaft B concentric position on, with the YOZ plane parallel of locomotive 1.
In the flexible manufacturing system (FMS) 2 that lathe 1 is installed communication device 112 (Figure 10), 113 has been installed, can have been shown the stock removal rate that per step respective drive device 89,90 operations are finished.Under the effect of above drive unit, the grinding working face center of curvature 86 of corresponding grinding tool produces cutting force.
The management output port 114 (Fig. 6) of numerical control operating device 16,115 connects the linear miniature plug-in part 47 of many radio frequency channels by PORT COM 46, and miniature plug-in part connects drive unit 89 and 90 by electrical means.
In many radio frequency channels digital signal recorder (Figure 10) operating memory device has been installed, the quantity of operating memory device conforms to quantity along locating shaft X, Y, Z linear displacement electronic sensor.In addition, impulse sender, pulsimeter measuring device and Management Unit also have been installed.
At this moment, the output port of Management Unit, pulse counter, each operating memory device also is the output port of many radio frequency channels digital signal recorder 44 simultaneously, and by PORT COM 45, these output ports connect with the computer of numerical control program management devices 16.
Workpiece 11,11 1Auxiliary table 116 (Fig. 7,8) fixedly also has been installed on the servicing unit 10, and this auxiliary table is installed on the workbench 9, so just can be with workpiece 11,11 1Around locating shaft A, B rotation.
The disk 117 of trying to get to the heart of a matter to flat horizontal surface also has been installed on rotary table, and rotary table is installed along the A axle.Catching 118 has been installed on the disk 117, and catching can be moved along the radial slot on the disk end face.In addition, conical part 119 has also been installed in being centered close on the locating shaft A of disk 117 on the disk 117, centers under the effect of A axle rotatory force at spring 120 and conical part, can be along A axle mobile disk on bearing 121.
The mechanical part of drive unit 89 is made up of two parts, and first and A axle are concentric, are installed in the center hole of rotary table 116 firsts (this part is born the effect of adder).The second portion of drive unit 89 is the above-mentioned deceleration device 110 of band stepping engine 101, is installed in the end face of rotary table 116 housings 122 the above first.At this moment, the output shaft rotating shaft 106,107 of stepping engine 100,101 is parallel to each other.
Second part 123 of rotary table 116 housings is installed on the above-described fixedly servicing unit 10, and fixedly servicing unit 10 is installed on the radial-thrust bearing 124, can be around axle B rotation to guarantee rotary table.
Rotary table 116 is installed on the radial-thrust bearing 125, conical replaceable sleeve pipe has been installed in the hole of second part 123 of rotary table 116 housings, so that workbench can be around the rotation of A axle, the round taper hole of inside pipe casing can be used for being aligned in the workpiece of processing in the sleeve pipe 11,111 simultaneously.
, can rigidly fix for one in first part 122 and second part at the shared linear specification numerical value of A axle according to workpiece 11,111, so that adjust the datum level of disk 117 and the rigid fixed range between the B axle.
Workpiece 11,11 1The mechanical part that rotates required drive unit 90 around axle B is installed on the housing of servicing unit 10, and mechanical part comprises above-described deceleration device 111 and stepping engine 102, and these equipment and axle B install with one heart.
The axle 78 of engine 77 drives fixedly servicing unit 4, last first grinding tool 5 of servicing unit rotates together with being installed in fixedly, and angle displacement sensor 127. has been installed on axle 78
Adder 22,23 has been installed in drive unit 12 (Figure 11), 13, and each adder has corresponding two power shafts that are parallel to each other 128,129,130,131.Power shaft correspondingly is connected with 28,29 with 32,33 output shaft 26,27 with two stepping engines 30,31, and each adder has individual output shaft 132,144, and output shaft is with stroke spiral 134,135 connections of spiral tourelle.
At this moment, each power shaft 128,129,130,131 of adder 22,23 also is the power shaft of first no hysteresis effect planetary gear gear hobbing deceleration device 136, the 138 and second no hysteresis effect planetary gear gear hobbing deceleration device 137,139.The non-centre of moment cycloid meshing planetary gear that each deceleration device 136,138,137,139 has two rows to be parallel to each other simultaneously.The transmission of driving of deceleration device 136,138,137,139 is to realizing with its concentric output shaft 132,133,140,141 transmissions by power shaft.At this moment, all installed in each deceleration device 136,138,137,139 and be with two fluted discs and two sun gear 146,147,148,149,150,151,152,153 pinion gears 142,143,144,145.When pinion gear 142,143,144,145 first all elements of fluted disc and sun gear 146,147,148,149 all cycloid engaged element synchronous operations thereof, pinion gear 142,143,144,145 second all elements of fluted disc and sun gear 150,151,152,153 all cycloids engagement original paper synchronous operations thereof, pinion gear 142,143,144,145 is finished the planetary gear motion simultaneously, so that will conduct rotation.At this moment, the output element 132,133,140,141 of each deceleration device 136,137,138,139 is finished complete circular motion.
First sun wheel 146,147 that dynamically connects second deceleration device 136,138 by second sun wheel 152,153 of 154,155, the second deceleration devices 137,139 of gear drive band.
Pinion gear 142,143 first rows' dentation number of elements is Duoed one than the second toothrow linear element quantity in first deceleration device 136,138, pinion gear first row's dentation number of elements is lacked one than the second toothrow linear element quantity in second deceleration device 137,139, like this, total quantity and second deceleration device (137 of pinion gear 142,143 first rows and the second toothrow linear element in first deceleration device 136,138,139,136,138) pinion gear 144,145 first rows are identical with the total quantity of the second toothrow linear element in.
Use above-described no hysteresis effect dual planetary gear gear hobbing geared assembly at drive unit 12,13,89,90 mechanical parts, when not reducing the highest order that reaches world standard and moving speed, can utilize the location displacement to guarantee the micro-grinding management of economic reliable (needn't adopt high-speed high-resolution feedback transducer), accurately determine displacement accuracy (accuracy can reach 0.02 micron) by the management pulse signal.
Simulation deceleration device 111 structures of the paired deceleration device 62 of drive unit 14 and drive unit 90 are similar.Comprised first and second deceleration device installing in order in pairs in the deceleration device 62, speed brake setting is installed on the lathe bed 3 of grinding machine 1.First and second deceleration device are no hysteresis effect planetary gear-gear hobbing deceleration device, the subsidiary non-centre of moment cycloid geared assembly of two rows of having installed is specifically designed to the output shaft 63 that will rotate from stepping engine 64 and conducts to the output shaft 156 (Fig. 4) of the deceleration device concentric with it 64.The output shaft 63 of stepping engine 64 is with the stroke spiral 157 rigid connections of ball spiral pair, and ball nut 158 connects with knife rest 8.
Contrive equipment is finished work flow in such a way.
We have studied the right processing instance of describing in the Russ P license passport the 2247876th of radial-thrust bearing conjugated elements.
In order to finish the fine finishining of product, need select the semi-finished product of moulding in advance for use, for example adopt casting process according to predefined shape of product moulding, but at first will leave finish allowance in semi-finished product, finish allowance is eliminated in using this device process.
1. select for use support (staggered relatively) that workpiece is placed on the centre of this device, make conical surface to be processed outside.
2, along the longitudinal axis with in the middle of workpiece is fixed on, allow workpiece conical surface to be processed upwards, make the peak of conical surface be positioned at the crosspoint of locating shaft A and B.
3. allow workpiece angled fixing with locating shaft A.At this moment the fixing fixture that can adopt hollow groove between two teeth of insertion allows grinding face conform to measuring probe.
4. according to the rule parameter value of having set, determine in process, workpiece geometry to be handled the maximum allowance of being eliminated because of the grinding working face.
Should use fixture this moment, and fixture is inserted in two each hollow grooves that connects between the tooth of workpiece successively, and machined surface and probe height meet.According to the error of distance setting value and actual occurrence value between locating shaft A, B crosspoint and the measuring probe section center of curvature point, determine the actual finish allowance on the recessed surface of two tooth spares.
5. according to calculating gained section radius of curvature the grinding working face of each emery wheel is revised, after the maximum allowance that guarantees should eliminate in deduction workpiece process, the section radius of curvature quantitatively conforms to measuring probe.
6, the processing of determining every pair of conjugate planes of workpiece begins the intersection point that (initial) position is locating shaft A, B axle, the central point at grinding surface curvature center, and the radius of curvature of this moment should be than adding that the radius of curvature that maximum allowance is provided with is little.
7. for every pair of conjugate planes of work piece surface, should determine identical executing agency's feed quantity according to the maximum nao-and micro relief Rz of the machined surface that is provided with, so that obtain the product of regulation shape and specification.
8,, all must consider the program of grinding machine executing agency linear displacement and circumferential displacement, so that the obtained effect of each feed all meets with setting shape and setting numerical value for the each feed that is based upon on the analysis foundation.
9, determine beginning (initially) position of corresponding wheel grinding machined surface, so that the peak of emery wheel grinding working face when finishing circular motion is positioned at grinding machine navigation system XOY plane.During each feed, workpiece all is placed on accordingly and begins (initially) position.
, make the virtual geometric model of workpiece finished product, the bump surface of geometrical model and recessed surface must meet the geometry and the specification of setting.
Must set the radius of curvature of protuberance and recessed surperficial conjugation coordinate, surperficial intersecting lens place sphere this moment.
11,,, and, determine the feed circuit on recessed surface according to the actual numerical value of crowning according to the respective face of dummy model finishing on the virtual geometric model based.
12, at workpiece 11,11 1Last grinding goes out single section, by workpiece 11,11 1The fixing servicing unit 10 of using is with respect to grinding tool 5,5 1Fixedly servicing unit 4,4 1Move, workpiece is placed on the initial position of grinding machine 1 executing agency.
Before each grinding of determining action of grinding, in drive unit 12, under the effect of stepping engine 30,31, move workpiece 11,11 along locating shaft X 1In drive unit 13 under the effect of stepping engine 32,33, Y moves workpiece along locating shaft, in drive unit 14 under the effect of stepping engine 64, X1 moves workpiece along locating shaft, and under the effect of stepping engine 100,101, A moves workpiece along locating shaft in drive unit 89, under the effect of stepping engine 102, B moves workpiece along locating shaft in drive unit 90.
Can guarantee that so corresponding wheel grinding working face is positioned on the straight line all the time with the contact point of workpiece, this straight line connects the center of curvature of medium plain emery wheel and the center of curvature in the virtual geometric model.
13, the stepping engine 100,101 of installation in the stepping engine 30,31 fixedly installed in 10 fixed drive devices 12 of servicing unit of management, the drive unit 89 is so that at grinding part 11,11 1The process of certain section in finish workpiece 11,11 1With respect to corresponding emery wheel 5,5 1The moulding displacement.
Along the displacement of axle A, realize the cutting feeding, by the first 122 that sets to eliminate workpiece 11,11 with respect to workbench 116 1Allowance, fixedly servicing unit 10 is used for fixing workpiece 11,11 1
14, the contact wire of the mutually conjugate every pair of conjugate surface of supervision, the geometric parameter of the geometry virtual surface of geometry according to actual needs, setting is determined the machining accuracy of each machined surface, so that finish the processing of multistage oval surface.Often by the surface composition of a plurality of conjugation, each surperficial rotating shaft intersects at a point this kind oval surface.
The accuracy that each finished surface conforms to the virtual geometric surface determines that by corresponding measuring probe 39,40 measuring probe can be measured the actual curvature radius of each point on every contact wire, and the radius of curvature of actual curvature radius with design compared.
15, the permission machining accuracy of actual machining accuracy that obtains and this product.
If the actual machining accuracy that obtains is lower than the permission machining accuracy, need replenish processing to bump surface and recessed surface, so that eliminate corresponding allowance, this processing can last till always that the machining accuracy of acquisition equals or be higher than the machining accuracy of permission.

Claims (5)

1, utilize micro-grinding process manufacturing complex shapes high accuracy product equipment, the processing of the oval circular cone bump surface of the paired element of the conjugation that its rotating shaft that can be used for paired element intersects at a point, recessed toothed surfaces, this installs by forming with the lower part:
According to the origin of coordinates is the X of O, Y, the grinding machine (1) of Z coordinate system location, wherein origin of coordinates O is positioned at X, O, the Y horizontal plane, the digital program controlled management devices of lathe (1) executing agency (16) and comprise and be fixed on the following execution architecture of lathe (1) lathe bed (3) with lower device: first grinding tool (5) that can rotate around axle C1 be servicing unit (4) fixedly, according to standard component, axle C1 and XOY level are tangent, grinding is identical with the height of grinding working face (6) on adhesive (21) that diamond dust (7) is bonded, fixedly under the servicing unit (4) knife rest (8) is being housed, workbench (9) has been installed on knife rest, has been with workpiece (11 on the workbench, 11 1) the fixing fixedly servicing unit of using; First drive unit (12) is used for workbench (9) to begin to carry out length travel along the fuselage X-axis with respect to knife rest (8) from origin of coordinates O, second drive unit (13) is used to begin to carry out length travel along the fuselage Y-axis from origin of coordinates O with the knife rest (8) of workbench (9), the 3rd drive unit (14) is used to begin to carry out length travel along fuselage (1) X1 axle from origin of coordinates O with the knife rest (8) of workbench (9), above-mentioned displacement is that the knife rest (8) of band workbench (9) begins the result that moves along fuselage (1) X-axis and Z axle from the origin of coordinates, the 4th tumbler (15) is used for fixing around axle C1 rotation first grinding tool (5), according to standard component, axle C1 and horizontal plane XOY are tangent, and the 5th tumbler (89) is workpiece (11,11 1) around locating shaft A device of rotation driving, locating shaft A is parallel to fuselage (1) XOZ plane, the 6th tumbler (90) is workpiece (11,11 1) around locating shaft B device of rotation driving, locating shaft B is parallel with lathe bed (1) locating shaft Y, tangent according to standard component and fuselage locating shaft A, the program control management devices (16) of managing electric output links to each other with lathe executing agency administration portal (48...57), it is characterized in that, according to valid model, first grinding tool (5) is applicable to the toothed surfaces of processing projection, be first emery wheel, the diamond dust (7) of grinding tool working face (6) is along circle distribution, plane, circumference place and XOY plane are tangent, the zero point O of the above-mentioned displacement of its center of curvature point and lathe (1) executing agency overlaps, the rotating shaft C1 of first grinding tool (5) passes the center of curvature, at this moment, grinding machine (1) is for being fixed on the executing agency of lathe bed (3), the fixedly servicing unit (41) of second grinding tool (51) is housed in addition, second grinding tool (51) is around axle C2 rotation, C2 is tangent according to standard component and plane XOY for axle, and pass above-described origin of coordinates O, second grinding tool (51) can also be around axle D rotation, axle D is tangent at above-described origin of coordinates O according to standard component and axle C2, second grinding tool (51) can be used for processing the surface of indent, be second emery wheel, the grinding diamond dust (71) of cutter grinding working face (61) surface for being bonded together, the height of the outstanding adhesive (211) of diamond dust (71) is identical, the diamond dust of second emery wheel (71) is along circle distribution, plane, circumference place and XOY plane are tangent, the zero point O of the above-mentioned displacement of its center of curvature point and lathe executing agency overlaps, the 7th drive unit (151) is that second grinding tool (51) is around axle C2 rotating driving device, the 8th transfer device (152) is that second grinding tool (51) is around axle D rotating driving device, many radio frequency channels device (34) is used to monitor the specification of processed projection and recessed toothed surfaces, geometric shape parameters, first measuring probe (39) is installed above, can directly contact with the projection working face, directly obtain data about finished surface shape and specification, so that determine the geometry and the specification of first wheel grinding working face (6), second measuring probe (40) is directly with recessed working face contact, to determine the shape and the size of sphere, allow the working face (61) of abrasive grinding wheel of second emery wheel can be simultaneously around axle C2 and axle D rotation, the Linear displacement transducer (35 of first measuring probe and second probe has been installed in the multiband device, 36,37), sensor positions according to X-axis, program control management devices (16) has possessed auxiliary management output port (91...96), and the management input port of the auxiliary executing agency of the same lathe of this port (1) connects.
2, the micro-grinding process manufacturing complex shapes of utilization according to claim 1 high accuracy product equipment, it is characterized in that, first, second, the 5th drive unit (12,13,89) in each the part drive unit in adder (22 has been installed all, 23,122), first and second deceleration device (241,242,251,252), first row and the no hysteresis effect cycloid meshing gear device of second row, first and second engine (30,31,32,33,100,101), first engine (30,32,100) and first deceleration device (241,251,109) power shaft (26,28,106) connect, second engine (31,33,101) with second deceleration device (242,252,110) power shaft (27,29,107) connect, second deceleration device (242,252,110) with first deceleration device (241,251,109) the first rows of planetary gear connects, first deceleration device (241,251,109) output shaft of the second rows of planetary gear is an adder (22,23,122) output shaft can guarantee that fuselage (1) executing agency finishes corresponding displacement.
3, the micro-grinding process manufacturing complex shapes of utilization according to claim 2 high accuracy product equipment, it is characterized in that, first deceleration device (136,138) pinion gear (142 in, 143) first row's dentation number of elements is Duoed one than the second toothrow linear element quantity, pinion gear (137 in second deceleration device, 139) first row's dentation number of elements is lacked one than the second toothrow linear element quantity, like this, first deceleration device (136,138) pinion gear (142 in, 143) total quantity and second deceleration device (137 of first row and the second toothrow linear element, 139) pinion gear (144 in, 145) first row and the second toothrow linear element (137,139,136,138) total quantity is identical.
4, the micro-grinding process manufacturing complex shapes of utilization according to claim 1 high accuracy product equipment, it is characterized in that, first and second emery wheel, first and second measuring probe (39,40) are installed on the corresponding fixedly servicing unit, fixedly servicing unit adopts turret head, can show the rotation of lathe (1) lathe bed (3) around the E axle, turret head is parallel with locating shaft Z, is rigidly fixed in lathe bed (3).
5, the micro-grinding process manufacturing complex shapes of utilization according to claim 1 high accuracy product equipment, it is characterized in that, each root measuring probe (39,40) all can be changed, and is installed on the corresponding fixedly servicing unit (38), and servicing unit is installed on the lathe bed (3).
CNU200720183428XU 2007-10-22 2007-10-22 Device for processing high-precision product with complicated shape by using micro-grinding process Expired - Fee Related CN201309113Y (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102390035A (en) * 2011-12-06 2012-03-28 上海理工大学 Workpiece center supporting frame of numerical control tool grinder
CN104140076A (en) * 2014-08-07 2014-11-12 哈尔滨工业大学 Device and method for same-direction etching and machining of complicated nanostructure based on AFM probe
CN104528632A (en) * 2014-12-24 2015-04-22 哈尔滨工业大学 Device and method for processing microstructure by utilizing track movement of triangular-pyramid microprobe
CN105014526A (en) * 2015-07-27 2015-11-04 尚德太阳能电力有限公司 Automatic polishing machine and automatic polishing method of silk-screen printing scraping strip
CN108237468A (en) * 2016-12-26 2018-07-03 台湾积体电路制造股份有限公司 Reduced down in thickness device and reduced down in thickness method
CN111580467A (en) * 2020-04-03 2020-08-25 中国航发哈尔滨东安发动机有限公司 Point position calculation method for complex space hole system programming

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102390035A (en) * 2011-12-06 2012-03-28 上海理工大学 Workpiece center supporting frame of numerical control tool grinder
CN102390035B (en) * 2011-12-06 2013-05-22 上海理工大学 Workpiece center supporting frame of numerical control tool grinder
CN104140076A (en) * 2014-08-07 2014-11-12 哈尔滨工业大学 Device and method for same-direction etching and machining of complicated nanostructure based on AFM probe
CN104140076B (en) * 2014-08-07 2015-12-02 哈尔滨工业大学 The method of a kind of AFM probe identical delineation direction machinery processed complex nanostructured
CN104528632A (en) * 2014-12-24 2015-04-22 哈尔滨工业大学 Device and method for processing microstructure by utilizing track movement of triangular-pyramid microprobe
CN105014526A (en) * 2015-07-27 2015-11-04 尚德太阳能电力有限公司 Automatic polishing machine and automatic polishing method of silk-screen printing scraping strip
CN105014526B (en) * 2015-07-27 2018-01-05 尚德太阳能电力有限公司 The automatic sander and automatically grinding method of scraping bar for silk screen printing
CN108237468A (en) * 2016-12-26 2018-07-03 台湾积体电路制造股份有限公司 Reduced down in thickness device and reduced down in thickness method
CN111580467A (en) * 2020-04-03 2020-08-25 中国航发哈尔滨东安发动机有限公司 Point position calculation method for complex space hole system programming
CN111580467B (en) * 2020-04-03 2023-05-02 中国航发哈尔滨东安发动机有限公司 Point location calculation method for programming complex space hole system

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