CN201301359Y - Step progressive baffle jacket of polysilicon reduction furnace - Google Patents
Step progressive baffle jacket of polysilicon reduction furnace Download PDFInfo
- Publication number
- CN201301359Y CN201301359Y CNU2008201546855U CN200820154685U CN201301359Y CN 201301359 Y CN201301359 Y CN 201301359Y CN U2008201546855 U CNU2008201546855 U CN U2008201546855U CN 200820154685 U CN200820154685 U CN 200820154685U CN 201301359 Y CN201301359 Y CN 201301359Y
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- chuck
- jacket
- flow
- flow deflector
- cylinder
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Abstract
A step progressive baffle jacket of a polysilicon reduction furnace comprises a vessel flange, jacket cylinder joints, jacket baffles, a cylinder, a jacket head, an upper head and interlayer baffles, wherein, the vessel flange is welded at the lower end of the cylinder; the upper head is welded at the upper end of the cylinder; the jacket head is arranged above the upper head; a spiral channel is arranged between the jacket head and the upper head; the jacket cylinder joints are sleeved on the periphery of the cylinder in an axial direction; the interlayer baffles and the jacket baffles form step shaped ring diversion channels between the outer wall of the cylinder and the jacket cylinder joints; and in the operation process of the reduction furnace, cooling fluid enters from a jacket inlet at the bottom, flows in a horizontal and circumferential direction in the diversion channel in each layer of the jacket cylinder joint, goes up to the diversion channel at an upper layer via a step channel between the interlayer baffles, and finally flows out from a jacket outlet through the spiral channel, thereby achieving the aim of cooling the cylinder. The circular ring shaped jacket baffles can act as a cylinder stiffening ring, can effectively reduce the design thickness of the cylinder, and helps heat transfer between the cylinder and the jacket.
Description
Technical field:
The utility model relates to the photovoltaic energy technology field, relates in particular to production of polysilicon equipment, and particularly the tube structure of polycrystalline silicon reducing furnace is the progressive flow deflector chuck of a kind of polycrystalline silicon reducing furnace ladder.
Background technology:
Reduction furnace is to adopt SiHCl
3Reduction method is produced the key equipment of electronic-grade polycrystalline silicon.In the production process, SiHCl
3Depositing temperature about 1100 ℃, require the temperature of reduction furnace cylindrical shell wall not to be higher than 575 ℃.If the barrel temperature is too high, then SiHCl
3Can on the cylindrical shell wall, deposit, cause actual recovery to descend.In the prior art, in order to control wall surface temperature, external jacket is set on reduction furnace comes the cooling apparatus cylindrical shell, chuck adopts monoblock type to have the spiral stream guidance plate structure.But the manufacturing process complexity of spiral deflector, to carry out in the welding process deflection wayward with cylindrical shell.The chuck cylindrical shell is an one-piece construction simultaneously, has tolerance clearance between spiral deflector and the chuck cylindrical shell, causes the short circuit of flowing in the chuck, reduces the heat transfer efficiency of chuck.In addition, polycrystalline silicon reducing furnace need carry out the external pressure design to cylindrical shell, and the computational length of the same terms lower shell is long more, and barrel is thick more, and the thermal conduction resistance of barrel increases, and is unfavorable for the thermal exchange of reduction furnace cylindrical shell and chuck, causes the barrel overheating problem easily.
Summary of the invention:
The purpose of this utility model is to provide a kind of polycrystalline silicon reducing furnace ladder progressive flow deflector chuck, and the progressive flow deflector chuck of described this polycrystalline silicon reducing furnace ladder will solve the spiral stream guidance plate structure chuck manufacturing process complexity of polycrystalline silicon reducing furnace in the prior art, the technical problem that barrel is blocked up, heat transfer efficiency is low.
The progressive flow deflector chuck of this polycrystalline silicon reducing furnace ladder of the present utility model includes a vessel flange, the chuck shell ring of two above numbers, the chuck flow deflector of two above numbers, a cylindrical shell, a jacket head, the interlayer flow deflector of a upper cover and two above numbers, wherein, described vessel flange is welded on the lower end of described cylindrical shell, described upper cover is welded on the upper end of cylindrical shell, described jacket head is arranged on the top of upper cover, any one described chuck shell ring all is set in the periphery of cylindrical shell, two adjacent arbitrarily chuck shell rings are all along circumferentially being welded to connect, the upper end of top chuck shell ring and the welding of the periphery of jacket head, the lower end of bottom chuck shell ring and vessel flange welding, be provided with the gap between any one chuck shell ring and the cylinder body outer wall, any one described chuck flow deflector all is circular, any one chuck flow deflector is provided with a breach in annulus, the inner periphery of any one chuck flow deflector all welds with cylinder body outer wall, the excircle of any one chuck flow deflector all welds with adjacent chuck shell ring separately, any one chuck flow deflector all perpendicular to cylindrical shell axially, breach on two adjacent arbitrarily chuck flow deflectors all staggers in a circumferential direction, be provided with two described interlayer flow deflectors between two adjacent arbitrarily chuck flow deflectors, edge, the same side welding of the breach of one of them interlayer flow deflector and adjacent two chuck flow deflectors, the opposite side edge welding of the breach of another interlayer flow deflector and adjacent two chuck flow deflectors, cavity between cavity between two interlayer flow deflectors and two the adjacent chuck flow deflectors constitutes flow-guiding channel, be provided with an end socket flow deflector between jacket head and the upper cover, described end socket flow deflector twist, the downside of end socket flow deflector and the welding of the outer wall of upper cover, jacket head, constitute a spirality channel between upper cover and the end socket flow deflector, described spirality channel is communicated with described flow-guiding channel, the top of jacket head is provided with a Jacket outlet, described Jacket outlet is communicated with spirality channel, bottom chuck shell ring is provided with a chuck import, and described chuck import is communicated with flow-guiding channel.
Further, on the tangential direction that axially is positioned at bottom chuck shell ring of described chuck import.
Principle of work of the present utility model is: interlayer flow deflector and chuck flow deflector constitute stepped annular flow-guiding channel between cylinder body outer wall and chuck shell ring, in the reduction furnace operational process, cooling fluid enters from the chuck import of bottom, horizontal circumferential flow in the flow-guiding channel in each layer chuck shell ring, and rise to the last layer flow-guiding channel by the ladder passage between the interlayer flow deflector, flow out from Jacket outlet by the spirality channel between jacket head and the upper cover at last, realize cooling cylindrical shell.
The utility model is compared with prior art, and its effect is actively with tangible.The utility model utilizes interlayer flow deflector and chuck flow deflector to constitute stepped annular flow-guiding channel between cylinder body outer wall and chuck shell ring between the cylinder body outer wall of polycrystalline silicon reducing furnace and chuck, in the reduction furnace operational process, cooling fluid enters from the chuck import of bottom, horizontal circumferential flow in the flow-guiding channel in each layer chuck shell ring, and rise to the last layer flow-guiding channel by the ladder passage between the interlayer flow deflector, flow out from Jacket outlet by the spirality channel between jacket head and the upper cover at last, can realize cooling cylindrical shell.Flow deflector and cylindrical shell and chuck shell ring all are welded to connect, and do not exist the gap to prevent mobile short circuit, and the chuck flow deflector of annular can be used as the stiffening ring of cylindrical shell simultaneously, can effectively reduce the design thickness of cylindrical shell, are beneficial to the heat transmission of cylindrical shell and chuck.
Description of drawings:
Fig. 1 is the structural representation of the progressive flow deflector chuck of polycrystalline silicon reducing furnace ladder of the present utility model.
Embodiment:
Embodiment 1:
As shown in Figure 1, the progressive flow deflector chuck of polycrystalline silicon reducing furnace ladder of the present utility model, include a vessel flange 1, the chuck shell ring 2 of two above numbers, the chuck flow deflector 3 of two above numbers, a cylindrical shell 4, a jacket head 5, the interlayer flow deflector 9 of a upper cover 7 and two above numbers, wherein, described vessel flange 1 is welded on the lower end of described cylindrical shell 4, described upper cover 7 is welded on the upper end of cylindrical shell 4, described jacket head 5 is arranged on the top of upper cover 7, form inner chamber between jacket head 5 and the upper cover 7, any one described chuck shell ring 2 all is set in the periphery of cylindrical shell 4, two adjacent arbitrarily chuck shell rings 2 are all along circumferentially being welded to connect, the upper end of top chuck shell ring 2 and the welding of the periphery of jacket head 5, the lower end of bottom chuck shell ring 2 and vessel flange 1 welding, be provided with the gap between any one chuck shell ring 2 and cylindrical shell 4 outer walls, any one described chuck flow deflector 3 all is circular, any one chuck flow deflector 3 is provided with a breach in annulus, the inner periphery of any one chuck flow deflector 3 all welds with cylindrical shell 4 outer walls, the excircle of any one chuck flow deflector 3 all welds with adjacent chuck shell ring 2 separately, any one chuck flow deflector 3 all perpendicular to cylindrical shell 4 axially, breach on two adjacent arbitrarily chuck flow deflectors 3 all staggers in a circumferential direction, be provided with two described interlayer flow deflectors 9 between two adjacent arbitrarily chuck flow deflectors 3, edge, the same side welding of one of them interlayer flow deflector 9 and the breach of adjacent two chuck flow deflectors 3, the opposite side edge welding of another interlayer flow deflector 9 and the breach of adjacent two chuck flow deflectors 3, cavity between cavity between two interlayer flow deflectors 9 and two the adjacent chuck flow deflectors 3 constitutes flow-guiding channel, be provided with an end socket flow deflector 8 in the inner chamber between jacket head 5 and the upper cover 7, described end socket flow deflector 8 twist, the outer wall welding of the downside of end socket flow deflector 8 and upper cover 7, jacket head 5, constitute a spirality channel between upper cover 7 and the end socket flow deflector 8, described spirality channel is communicated with described flow-guiding channel, the top of jacket head 5 is provided with a Jacket outlet 6, described Jacket outlet 6 is communicated with spirality channel, bottom chuck shell ring 2 is provided with a chuck import 10, and described chuck import 10 is communicated with flow-guiding channel.
Further, on the tangential direction that axially is positioned at bottom chuck shell ring 2 of described chuck import 10.
Claims (2)
1. progressive flow deflector chuck of polycrystalline silicon reducing furnace ladder, include a vessel flange, the chuck shell ring of two above numbers, the chuck flow deflector of two above numbers, a cylindrical shell, a jacket head, the interlayer flow deflector of a upper cover and two above numbers, it is characterized in that: described vessel flange is welded on the lower end of described cylindrical shell, described upper cover is welded on the upper end of cylindrical shell, described jacket head is arranged on the top of upper cover, any one described chuck shell ring all is set in the periphery of cylindrical shell, two adjacent arbitrarily chuck shell rings are all along circumferentially being welded to connect, the upper end of top chuck shell ring and the welding of the periphery of jacket head, the lower end of bottom chuck shell ring and vessel flange welding, be provided with the gap between any one chuck shell ring and the cylinder body outer wall, any one described chuck flow deflector all is circular, any one chuck flow deflector is provided with a breach in annulus, the inner periphery of any one chuck flow deflector all welds with cylinder body outer wall, the excircle of any one chuck flow deflector all welds with adjacent chuck shell ring separately, any one chuck flow deflector all perpendicular to cylindrical shell axially, breach on two adjacent arbitrarily chuck flow deflectors all staggers in a circumferential direction, be provided with two described interlayer flow deflectors between two adjacent arbitrarily chuck flow deflectors, edge, the same side welding of the breach of one of them interlayer flow deflector and adjacent two chuck flow deflectors, the opposite side edge welding of the breach of another interlayer flow deflector and adjacent two chuck flow deflectors, cavity between cavity between two interlayer flow deflectors and two the adjacent chuck flow deflectors constitutes flow-guiding channel, be provided with an end socket flow deflector between jacket head and the upper cover, described end socket flow deflector twist, the downside of end socket flow deflector and the welding of the outer wall of upper cover, jacket head, constitute a spirality channel between upper cover and the end socket flow deflector, described spirality channel is communicated with described flow-guiding channel, the top of jacket head is provided with a Jacket outlet, described Jacket outlet is communicated with spirality channel, bottom chuck shell ring is provided with a chuck import, and described chuck import is communicated with flow-guiding channel.
2. the progressive flow deflector chuck of polycrystalline silicon reducing furnace ladder as claimed in claim 1 is characterized in that: on the tangential direction that axially is positioned at bottom chuck shell ring of described chuck import.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201546855U CN201301359Y (en) | 2008-10-30 | 2008-10-30 | Step progressive baffle jacket of polysilicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201546855U CN201301359Y (en) | 2008-10-30 | 2008-10-30 | Step progressive baffle jacket of polysilicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201301359Y true CN201301359Y (en) | 2009-09-02 |
Family
ID=41084982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201546855U Expired - Lifetime CN201301359Y (en) | 2008-10-30 | 2008-10-30 | Step progressive baffle jacket of polysilicon reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201301359Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769811A (en) * | 2013-12-24 | 2014-05-07 | 汪佳泉 | Manufacturing technology of upper sealing head of portable fire extinguisher cylinder body |
| CN104098100A (en) * | 2014-07-30 | 2014-10-15 | 张家港化工机械股份有限公司 | Clamping structure for bell jar of polycrystalline silicon reduction furnace |
| CN110078079A (en) * | 2019-05-30 | 2019-08-02 | 重庆大全泰来电气有限公司 | A kind of electronic grade high-purity polycrystalline reduction starting device and starting method |
-
2008
- 2008-10-30 CN CNU2008201546855U patent/CN201301359Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769811A (en) * | 2013-12-24 | 2014-05-07 | 汪佳泉 | Manufacturing technology of upper sealing head of portable fire extinguisher cylinder body |
| CN104098100A (en) * | 2014-07-30 | 2014-10-15 | 张家港化工机械股份有限公司 | Clamping structure for bell jar of polycrystalline silicon reduction furnace |
| CN110078079A (en) * | 2019-05-30 | 2019-08-02 | 重庆大全泰来电气有限公司 | A kind of electronic grade high-purity polycrystalline reduction starting device and starting method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090902 |