CN201273985Y - Clip for mask plate transferring and checking - Google Patents
Clip for mask plate transferring and checking Download PDFInfo
- Publication number
- CN201273985Y CN201273985Y CNU2008201471558U CN200820147155U CN201273985Y CN 201273985 Y CN201273985 Y CN 201273985Y CN U2008201471558 U CNU2008201471558 U CN U2008201471558U CN 200820147155 U CN200820147155 U CN 200820147155U CN 201273985 Y CN201273985 Y CN 201273985Y
- Authority
- CN
- China
- Prior art keywords
- mask
- mask plate
- framework
- support member
- gauging fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Respiratory Apparatuses And Protective Means (AREA)
Abstract
The utility model is suitable for the technical fields of transferring and checking clamp, and provides a mask plate transferring and checking clamp, which comprises a framework, a plurality of supporting pieces arranged on the framework and used for supporting the mask plate, as well as a plurality of locating pieces used for locating the mask plate; the heights of the supporting pieces are smaller than the heights of the locating pieces; the middle parts of a pair of sides of the framework are respectively and externally provided with a handle; and the handle and the framework are connected by the connectors. When transferring, a hand holds the handle and can not contact the mask plate, thus avoiding the pollution of the hand on the mask plate; when the mask plate is checked on an instrument, a protection film on the mask plate can not be damaged under the effect of large and small plastic pins.
Description
Technical field
The utility model belongs to transmission and gauging fixture technical field, relates in particular to a kind of mask transmission and gauging fixture.
Background technology
Mask is a kind of light shield in the mask industry, and it can be with figure transfer to wafer, because this technology is very high to the surface cleanliness and the defective requirement of mask, this has caused very big difficulty just for the cleaning and the inspection of mask.In the production run of general mask, staff must touch mask and just can transmit, and hand will pollute mask during transmission; Simultaneously, layer protecting film can be pasted in the mask surface, easily this diaphragm is staved when mask is checked on instrument.
The utility model content
The purpose of this utility model is to provide a kind of mask transmission and gauging fixture, is intended to solve that mask of the prior art is subject to pollution in one's hands when transmitting and the problem of fragile its surperficial diaphragm when checking.
The utility model is to realize like this, a kind of mask transmission and gauging fixture, it comprises a framework, somely is positioned at being used on the described framework and supports the support member of mask and the keeper of location mask, and the height of described support member is less than the height of described keeper; The one opposite side middle part of described framework outwards is provided with the leader respectively, connects by web member between described handle and the framework.
When transmitting, hold handle, can not touch mask, avoided the pollution of hand mask; When mask is checked, under the effect of big or small plastic pin, can guarantee that the diaphragm on the mask is not damaged on instrument.
Description of drawings
Fig. 1 is the synoptic diagram of the quadra of a kind of mask transmission that provides of the utility model embodiment and gauging fixture;
Fig. 2 is the synoptic diagram of the support member of a kind of mask transmission that provides of the utility model embodiment and gauging fixture;
Fig. 3 is the synoptic diagram of the keeper of a kind of mask transmission that provides of the utility model embodiment and gauging fixture.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
Consult shown in Figure 1ly, a kind of mask transmission and gauging fixture that the utility model embodiment provides comprise a quadra 1, several support members 6 and keeper 7, and described support member 6 can be selected little plastic pin for use, and keeper 7 can be selected big plastic pin for use.Described quadra 1 is made by duralumin, and each outwards is provided with leader 5 one opposite side middle part, is connected by web member between described handle 5 and the quadra 1, such as screw; Middle part, four limits of described quadra 1 and four jiaos offer an aperture 3 macropore 2 identical with two respectively, described two macropores 2 are symmetrically set in the both sides of aperture 3, described aperture 3 and support member 6 cooperate, described macropore 2 and keeper 7 cooperate, support member 6 and keeper 7 are fixed on the quadra 1, and the height of wherein said support member 6 is less than the height of keeper 7; Described support member 6 be used for supporting mask, described keeper 7 is used for limiting the position and the physical dimension of mask.
When transmitting, hold handle 5, can not touch mask, avoided the pollution of hand to mask; When mask was checked on instrument, owing to mask is placed on the support member 6, and keeper 7 was higher than support member 6, can guarantee that like this diaphragm on the mask is not damaged when checking.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (6)
1, a kind of mask transmission and gauging fixture, comprise a framework, it is characterized in that: comprise also somely being positioned at being used on the described framework and supporting the support member of mask and the keeper of location mask that and the height of described support member is less than the height of described keeper.
2, a kind of mask transmission as claimed in claim 1 and gauging fixture is characterized in that: described support member is fixing respectively by the aperture that is opened in frame perimeter middle part and four jiaos, and described keeper is fixed by the macropore that is arranged at described aperture both sides respectively.
3, a kind of mask transmission as claimed in claim 2 and gauging fixture is characterized in that: each outwards is provided with the leader opposite side middle part of described framework, connects by web member between described handle and the framework.
4, a kind of mask transmission as claimed in claim 3 and gauging fixture, it is characterized in that: described framework is square, is made by duralumin.
5, a kind of mask transmission as claimed in claim 1 or 2 and gauging fixture, it is characterized in that: described support member is little plastic pin.
6, a kind of mask transmission as claimed in claim 1 or 2 and gauging fixture, it is characterized in that: described keeper is big plastic pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201471558U CN201273985Y (en) | 2008-09-10 | 2008-09-10 | Clip for mask plate transferring and checking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201471558U CN201273985Y (en) | 2008-09-10 | 2008-09-10 | Clip for mask plate transferring and checking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201273985Y true CN201273985Y (en) | 2009-07-15 |
Family
ID=40884328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201471558U Expired - Lifetime CN201273985Y (en) | 2008-09-10 | 2008-09-10 | Clip for mask plate transferring and checking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201273985Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112731760A (en) * | 2020-12-23 | 2021-04-30 | 江苏高光半导体材料有限公司 | Metal mask frame fixing support |
| CN113510734A (en) * | 2020-04-10 | 2021-10-19 | Oppo（重庆）智能科技有限公司 | Protection film assembly and grabbing device and grabbing system thereof |
-
2008
- 2008-09-10 CN CNU2008201471558U patent/CN201273985Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113510734A (en) * | 2020-04-10 | 2021-10-19 | Oppo（重庆）智能科技有限公司 | Protection film assembly and grabbing device and grabbing system thereof |
| CN112731760A (en) * | 2020-12-23 | 2021-04-30 | 江苏高光半导体材料有限公司 | Metal mask frame fixing support |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: QINGYI PRECISION MASKMAKING (SHENZHEN) CO., LTD. Free format text: FORMER NAME: SHENZHEN QINGYI PRECISION MASKMAKING CO.,LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Two road high tech Industrial Zone in Shenzhen city Guangdong province 518057 North Song Ping Lang mountain No. 8 Patentee after: Qingyi Precision Maskmaking (Shenzhen) Co., Ltd. Address before: Two road high tech Industrial Zone in Shenzhen city Guangdong province 518057 North Song Ping Lang mountain No. 8 Patentee before: Qingyi Precision Mask Making (Shenzhen) Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20090715 |
|
| CX01 | Expiry of patent term |