CN201212838Y - Space phase shifter for synchronous phase-shifting interferometer - Google Patents
Space phase shifter for synchronous phase-shifting interferometer Download PDFInfo
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- CN201212838Y CN201212838Y CNU2008201508745U CN200820150874U CN201212838Y CN 201212838 Y CN201212838 Y CN 201212838Y CN U2008201508745 U CNU2008201508745 U CN U2008201508745U CN 200820150874 U CN200820150874 U CN 200820150874U CN 201212838 Y CN201212838 Y CN 201212838Y
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Abstract
A space phase shifter for a synchronous phase-shifting interferometer is characterized by only consisting of a parallel beam splitter prism, a savart polarizer and an image sensor, wherein the parallel beam splitter prism, the savart polarizer and the image sensor are sequentially positioned in the advancing direction of light beams. The utility model discloses space phase shifter has contrast uniformity height, need not synchronous control, moves the characteristics that the volume is accurate, the position matching precision is high, simple structure is compact, easily the dress transfers.
Description
Technical field
The utility model relates to the optical interferometry field, is a kind of spacing phase shifter that is used for synchronous phase shift interferometer, particularly a kind of spacing phase shifter that receives several phase-shift interference images with the single image sensor simultaneously.
Background technology
Phase-shifting interferometer utilizes phase shift technology to come the assisted extraction phase information, can obtain high measuring accuracy and realize equal precision measurement on whole measured zone.Common phase-shifting interferometer is to adopt Piezoelectric Ceramic standard mirror to move or change measure such as optical maser wavelength to realize phase shift, and several phase-shift interference images collect in different time, are referred to as the time domain phase-shifting interferometer.The time domain phase-shifting interferometer is because the variation of interference image acquisition time makes its requirement to environment for use very harsh, and wherein Zhen Dong influence is particularly outstanding.Vibration will cause interference image to produce shake, distortion, fuzzy, make interferometer introduce random phase errors during images acquired in the phase shift process, influence measuring accuracy even measurement can't be carried out.Simultaneously, the phase-shift interference of time domain phase-shifting interferometer similarly is to produce in different time, so it only is suitable for static corrugated or quasistatic wavefront measurement, can't realize the real-time measurement on dynamic corrugated.The problems referred to above can adopt synchronous phase shift interferometer to solve, and synchronous phase shift interferometer moment obtains several phase-shift interference images, so can realize that the anti-vibration on static corrugated is measured and the dynamically real-time measurement on corrugated.
In synchronous phase shift interferometer, measuring beam is vertical mutually with the polarization direction of reference beam.Measuring beam and reference beam enter spacing phase shifter after closing bundle, spacing phase shifter carries out beam split to form a plurality of beamlet groups with measuring beam, reference beam, comprise in each beamlet group and measure beamlet and with reference to beamlet, simultaneously the measurement beamlet in the different beamlet groups, have different phase differential with reference to beamlet, and then form the interference image that several have different amount of phase shift.Spacing phase shifter is a core component of synchronous phase shift interferometer, and it directly influences the performance characteristic of synchronous phase shift interferometer.
Formerly technology [1] is (referring to Chris L.Koliopoulos.Simultaneous phase shift interferometer.Proc.SPIE, Vol.1531,119～127,1991) described a kind of spacing phase shifter in, this spacing phase shifter mainly is made up of one 1/2nd wave plate, a beam splitter prism, a quarter-wave plate, two polarization beam splitter prisms and four imageing sensors.Orthogonal measuring beam in polarization direction and reference beam close bundle and carry out the beam split first time through behind the half-wave plate by beam splitter prism, the transmission beamlet that beam split produces, reflection beamlet all comprise measure beamlet with reference to beamlet, the transmission beamlet is carried out the beam split second time by a polarization beam splitter prism, and the reflection beamlet carries out the beam split second time through behind the quarter-wave plate by another polarization beam splitter prism.Four groups of beamlets that produce after twice beam split form four width of cloth interference image of 90 ° of phase shifts successively.
Formerly technology [2] is (referring to Arjan J.P.van Haasteren, Hans J.Frankena.Real-timedisplacement measurement using a multicamera phase-stepping speckle interferometer.Applied Optics, Vol.33, No.19,4137～4142,1994) described a kind of spacing phase shifter in, this spacing phase shifter mainly is made up of a beam splitter prism, two blocks of quarter-wave plates, a single output analyzer, a dual output analyzer and three imageing sensors.Orthogonal measuring beam in polarization direction and reference beam close bundle and carry out beam split through beam splitter prism, its transmission beamlet, reflection beamlet all comprise measure beamlet with reference to beamlet.The reflection beamlet is 90 ° a interference image through entering single output analyzer behind the quarter-wave plate, forming an amplitude shift phasor, and this interferogram is received by an imageing sensor.The transmission beamlet is through entering the dual output analyzer behind the quarter-wave plate, and the dual output analyzer carries out polarization spectro and produces two width of cloth interference images that amount of phase shift is 0 ° and 180 °, is received by two imageing sensors respectively.This spacing phase shifter has formed the interference image that three amplitude shift phasors are respectively 0 °, 90 ° and 180 ° altogether on three imageing sensors.
Formerly technology [3] is (referring to Piotr Szwaykowski, Raymond J Castonguay, Frederick NBushroe.Simultaneous phase shifting module for use in interferometry.US Patent, No.20060146340) described a kind of spacing phase shifter in, this spacing phase shifter mainly is made up of a compound beam splitter prism, three blocks of quarter-wave plates, three analyzers and three imageing sensors.Orthogonal reference beam in polarization direction and measuring beam enter this spacing phase shifter after closing bundle, compound beam splitter prism carries out after twice beam split it being divided into three sub-sets of beams, each comprise measure beamlet, with reference to the beamlet group of beamlet respectively through on imageing sensor, forming interferogram behind quarter-wave plate, the analyzer, utilize the difference of three analyzer orientation angles to make the amount of phase shift of three width of cloth interference images be respectively 0 °, 90 ° and 180 °.
Above-mentioned technology formerly mainly contains following several shortcoming:
1, the contrast consistance is poor.Each is organized beamlet and interferes through producing behind the different optical components, and the material behavior of optical component, face shape, beauty defects and optical thin film can't guarantee identical, make each measure beamlet, with reference to the intensity of beamlet and distribute inequalityly, and then make background light intensity, contrast between the phase-shift interference inequality.A plurality of imageing sensors receive the interferogram of different amount of phase shift, and the photoelectric properties of each imageing sensor can there are differences, and also make the contrast between the phase-shift interference image inequality.
2, need precise synchronization control.A plurality of imageing sensors receive the interferogram of different amount of phase shift, gather the interference image in the identical moment and the identical time interval in order to make each imageing sensor, must precise synchronization control a plurality of imageing sensors and carry out synchronous acquisition.
3, amount of phase shift is difficult to accurate control.The azimuth angle error of the phase-delay quantity error of wave plate, fast axis direction angle error and inclined position error thereof, analyzer and lower extinction ratio thereof all can be introduced the phase shift error, and amount of phase shift can not accurately be controlled.
4, the location matches error is big.The measurement beamlet of different light paths with on the different images sensor, form phase-shift interference image with reference to beamlet, the difference of light path can make the relative position of a plurality of interference images different with the position difference of imageing sensor, the amount of spin difference of optical component, imageing sensor can make different interference images produce different distortion with tilt quantity difference, thereby makes the location matches error between the phase-shift interference image big.
5, complex structure, debug difficulty.Twice beam split of spacing phase shifter forms a plurality of beamlet groups to obtain three width of cloth or four amplitude shift interference images, many group sub-sets of beams are spatially separated fully and are not parallel, make that optics, complicated in mechanical structure and volume are bigger, the assembling of the debugging of light path and structure simultaneously is difficulty also.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, a kind of spacing phase shifter that is used for synchronous phase shift interferometer is provided, this spacing phase shifter should have contrast consistance height, need not synchro control, amount of phase shift accurately, location matches precision height, simple and compact for structure, the characteristics that are easy to debug.
Technical solution of the present utility model is as follows:
A kind of spacing phase shifter that is used for synchronous phase shift interferometer, characteristics are that it only is made up of a parallel beam splitter prism, a savart polariscope and an imageing sensor, and described parallel beam splitter prism, savart polariscope and imageing sensor are on the direct of travel of light beam successively.
Described parallel beam splitter prism is formed by the inclined-plane of rhombic prism and the inclined-plane gummed of right-angle prism, be coated with depolarization beam splitting film on the inclined-plane of this rhombic prism and right-angle prism gummed, another inclined-plane of rhombic prism plates reflective phase retardation film, and its phase-delay quantity is 90 °.
Described savart polariscope is made of the big birefringence rate variance uniaxial crystal flat board that two blocks of optical axises and plane of crystal normal form an angle, and the optical parametric of two uniaxial crystal flat boards is identical, and the principal section of two uniaxial crystal flat boards is vertical mutually.
The optical axis of two uniaxial crystal flat boards in the described savart polariscope is identical with the angle of its surface normal, and its variation range is 0 °～90 °.
Described imageing sensor can be ccd image sensor, cmos image sensor or photodetector array.
Compare with technology formerly, technique effect of the present utility model is as follows:
1, contrast consistance height.The single image sensor receive mode of the even dichroism of savart polariscope and multi-frame interferometry image makes the consistance of interference image contrast only be subjected to that parallel beam splitter prismatic decomposition is inhomogeneity to be influenced, the splitting ratio of control depolarization beam splitting film and the reflectance of phase retardation film, the intensity of two sub-sets of beams of parallel beam splitter prism outgoing is equated, and then make the contrast between the phase-shift interference identical.
2, need not synchro control.The single image sensor receives four amplitude shift interference images, can guarantee that the collection moment and the time interval of four amplitude shift interference images is identical, no longer has the problem of synchro control.
3, amount of phase shift is accurate.The parallel beam splitter prism utilizes reflective phase retardation film to produce phase shift, the film preparation process can guarantee that its amount of phase shift is 90 °, the savart polariscope determines that by its polarization characteristic the amount of phase shift of its two-way interference image is 180 ° accurately, so the amount of phase shift between the four amplitude shift interference images can accurately be controlled.
4, location matches precision height.The beamlet group that forms four amplitude shift interference figure in the utility model spatially is parallel to each other, its locus only is decided by the parallel beam splitter displacement of parallel beam splitter prism, savart polariscope, and the parallel beam splitter displacement of beam splitter prism, savart polariscope promptly is determined and is easy to accurate measurement after device fabrication, so the locus can accurately be mated between the phase-shift interference image.
5, simple and compact for structure, be easy to debug.Spacing phase shifter in the utility model only is made up of a parallel beam splitter prism, a savart polariscope and an imageing sensor, and it is simple in structure, compact and be easy to assembling.The beamlet group that parallel beam splitter prism and savart polariscope form spatially is parallel to each other, and four amplitude shift interference figure are received by the single image sensor, makes the debugging of light path become very simple.
In a word, the utlity model has contrast consistance height, need not synchro control, amount of phase shift accurately, location matches precision height, simple and compact for structure, the characteristics that are easy to debug.
Description of drawings
Fig. 1 is the index path of the utility model spacing phase shifter.
Fig. 2 is the structural drawing of the utility model parallel beam splitter prism.
Fig. 3 is the structural drawing of the utility model savart polariscope.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples, but should not limit protection domain of the present utility model with this.
See also Fig. 1 earlier, Fig. 1 is the index path of the utility model spacing phase shifter.As seen from the figure, spacing phase shifter described in the utility model is made up of with imageing sensor 3 parallel beam splitter prism 1, savart polariscope 2, and parallel beam splitter prism 1, savart polariscope 2 are on the direct of travel of light beam successively with imageing sensor 3.The plane of incidence of parallel beam splitter prism 1 overlaps with its beam-splitting surface.The beam-splitting surface angle at 45 of the principal section of crystal flat board and parallel beam splitter prism 1 in the savart polariscope 2, the beam-splitting surface of savart polariscope 2 is vertical mutually with the beam-splitting surface of parallel beam splitter prism 1.The reference beam A0 of synchronous phase shift interferometer output and measuring beam B0 are through the interference image of 90 ° of parallel beam splitter prism 1, savart polariscope 2 back formation four width of cloth phase shift successively, and four width of cloth interference images are received by imageing sensor 3.
The structure of parallel beam splitter prism 1 sees also Fig. 2.Parallel beam splitter prism 1 is formed by the inclined-plane gummed of the inclined-plane of rhombic prism 101 and right-angle prism 102, and the inclined-plane of rhombic prism 101 and the cemented surface 1a of right-angle prism 102 are coated with depolarization beam splitting film.Another inclined-plane 1b plating phase retardation film of rhombic prism 101, the phase-delay quantity of phase retardation film is 90 °.Being divided into two bundles behind the incident light process parallel beam splitter prism 1 is transmitted light beam 1t and folded light beam 1r, and the exit direction of this transmitted light beam 1t and described folded light beam 1r is parallel to each other and certain displacement is arranged.The reflectance Be Controlled of the splitting ratio of the depolarization beam splitting film of cemented surface 1a and the phase retardation film of inclined-plane 1b equates the intensity of transmitted light beam 1t and folded light beam 1r.Phase differential between the component that electric vector is parallel to the plane of incidence perpendicular to the component and the electric vector of the plane of incidence among the transmitted light beam 1t does not change, and the phase differential between the component that electric vector is parallel to the plane of incidence perpendicular to the component and the electric vector of the plane of incidence among the folded light beam 1r increases by 90 °.
The structure of savart polariscope 2 sees also Fig. 3.Savart polariscope 2 is made of optical parametric, two big refringence uniaxial crystal flat boards 201,202 that physical dimension is identical.The angle of the surface normal of the optical axis 2a of crystal flat board 201, the optical axis 2b of crystal flat board 202 and savart polariscope 2 all is θ, and the variation range of angle theta is 0 °～90 °.In the crystal flat board 201 in the principal section at optical axis 2a place and the crystal flat board 202 principal section at optical axis 2b place vertical mutually.Be divided into ordinary light 2o and non-ordinary light 2e behind the incident light process crystal flat board 201, non-ordinary light 2e produces displacement in the principal section of crystal flat board 201.The non-ordinary light 2e of dull and stereotyped 201 outgoing of crystal has become ordinary light 2eo in crystal flat board 202, the ordinary light 2o of dull and stereotyped 201 outgoing of crystal has become non-ordinary light 2oe in crystal flat board 202, and 2oe light also produces displacement in the principal section of crystal flat board 202.The displacement that crystal flat board 201,202 produces equates and is in the mutually perpendicular plane that promptly the principal section of the transversal displacement direction of savart polariscope 2 and crystal flat board 201,202 is at 45 respectively.
For synchronous phase shift interferometer, the reference beam A0 and the measuring beam B0 that are incident on the spacing phase shifter shown in Figure 1 are linearly polarized light, and reference beam A0 is vertical mutually with the polarization direction of measuring beam B0.Be divided into light beam A 11, A12 behind the reference beam A0 process parallel beam splitter prism 1 with certain transversal displacement amount, measuring beam B0 is divided into light beam B11, the B12 with certain transversal displacement amount after through parallel beam splitter prism 1, and the transversal displacement amount between light beam A 11, the A12 equates with transversal displacement amount between light beam B11, the B12.The polarization direction of light beam A 11, light beam B11 mutually vertically and respectively with reference beam A0, measuring beam B0 between the polarization direction identical, the polarization direction of light beam A 12, light beam B12 mutually vertically and respectively with reference beam A0, measuring beam B0 between the polarization direction identical.Phase differential between light beam A 11, the light beam B11 is identical with phase differential between reference beam A0, the measuring beam B0, and the phase differential between the light beam A 12, light beam B12 is compared with the phase differential between reference beam A0, the measuring beam B0 and increased by 90 °.Carry out polarization beam splitting behind the light beam A 11 process savart polariscopes 2 and form light beam A 21 and light beam A 22 with certain transversal displacement amount, light beam B11 carries out polarization beam splitting after through savart polariscope 2 and forms light beam B21 and the light beam B22 with certain transversal displacement amount, and the transversal displacement amount is identical between the transversal displacement amount between light beam A 21, the light beam A 22 and light beam B21, the light beam B22.The polarization direction of light beam A 21, light beam B21 is identical, so light beam A 21, light beam B21 will produce interference, forms a width of cloth interference image on the AB1 zone of imageing sensor 3.The polarization direction of light beam A 22, light beam B22 is identical, so light beam A 22, light beam B22 also will produce interference, forms a width of cloth interference image on the AB2 zone of imageing sensor 3.Because the polarization beam splitting characteristic of savart polariscope 2, interference light intensity complementation between the interference image that the interference image that light beam A 21, light beam B21 form and A22, light beam B22 form, promptly the amount of phase shift of two width of cloth interference images differs 180 ° on the AB1 of imageing sensor 3, the AB2 zone.In like manner, light beam A 12, light beam B12 also will obtain two width of cloth interferograms that amount of phase shift differs 180 ° after through savart polariscope 2 on the AB3 of imageing sensor 3, AB4 zone.Because the phase differential between the light beam A 12, light beam B12 is compared with the phase differential between light beam A 11, the light beam B11 and increased by 90 °, four width of cloth interferograms that phase-shift phase is respectively 0 °, 90 °, 180 °, 270 ° then on the AB1 zone of imageing sensor 3, AB2 zone, AB3 zone, AB4 zone, have been obtained.Four width of cloth interferogram of 90 ° of phase shifts are successively received, are gathered by imageing sensor 3, have promptly realized the simultaneous phase-shifting interferometry.
The light channel structure of most preferred embodiment of the present utility model such as Fig. 1, Fig. 2, shown in Figure 3, its concrete structure and statement parameter are as follows:
The optical material of parallel beam splitter prism 1 is the K9 glass material, and its parallel beam splitter displacement is 3.2mm.The reflectivity of depolarization beam splitting film is 50.04%:49.96% with the ratio of transmissivity in the parallel beam splitter prism 1, and the reflectivity of phase retardation film and phase-delay quantity are respectively 99.84% and 90.0 °.Savart polariscope 2 is made of the dull and stereotyped institute of the identical calcite crystal of two optical parametrics, physical dimension, and the principal section of two calcite crystal flat boards is vertical mutually.The optical axis of calcite crystal flat board and the angle of surface normal all are 42 °, and the parallel beam splitter displacement of savart polariscope 2 is 2.4mm.Imageing sensor 3 is 1/2 ＂ ccd image sensor.
The described spacing phase shifter of most preferred embodiment is applied in the synchronous phase shift interferometer, experimental result shows that it is 600 * 400 phase-shift interference image that the ccd image sensor single acquisition can obtain four width of cloth pixel counts simultaneously, and the amount of phase shift between the phase-shift interference image is respectively 0 °, 90 °, 180 °, 270 °.
Claims (5)
1, a kind of spacing phase shifter that is used for synchronous phase shift interferometer, it is characterized in that being made up of a parallel beam splitter prism (1), a savart polariscope (2) and an imageing sensor (3), described parallel beam splitter prism (1), savart polariscope (2) and imageing sensor (3) are on the direct of travel of light beam successively.
2, spacing phase shifter according to claim 1, it is characterized in that described parallel beam splitter prism (1) is formed by the inclined-plane of rhombic prism (101) and the inclined-plane gummed of right-angle prism (102), be coated with depolarization beam splitting film on the inclined-plane of described rhombic prism (101) and described right-angle prism (102) gummed, another inclined-plane of described rhombic prism (101) plates reflective phase retardation film, and its phase-delay quantity is 90 °.
3, spacing phase shifter according to claim 1, it is characterized in that described savart polariscope (2) is made of the big birefringence rate variance uniaxial crystal flat board that two blocks of optical axises and plane of crystal normal form an angle, the optical parametric of two uniaxial crystal flat boards is identical, and the principal section of two uniaxial crystal flat boards is vertical mutually.
4, spacing phase shifter according to claim 3 is characterized in that the optical axis of two uniaxial crystal flat boards in the described savart polariscope is identical with the angle of its surface normal, and its variation range is 0 °～90 °.
5, spacing phase shifter according to claim 1 is characterized in that described imageing sensor is ccd image sensor, cmos image sensor or photodetector array.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102043256A (en) * | 2010-10-18 | 2011-05-04 | 中国科学技术大学 | Polarization beam splitter |
| CN106510613A (en) * | 2016-12-02 | 2017-03-22 | 上海理工大学 | Optical phase retarder for measuring length of ocular axis |
| CN108885092A (en) * | 2016-03-29 | 2018-11-23 | 应用材料公司 | Metering system for base plate stress and deformation measurement |
| CN108871572A (en) * | 2018-04-16 | 2018-11-23 | 西安交通大学 | Birefringent Fourier transformation imaging spectral band extension method and its imaging device |
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2008
- 2008-07-16 CN CNU2008201508745U patent/CN201212838Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102043256A (en) * | 2010-10-18 | 2011-05-04 | 中国科学技术大学 | Polarization beam splitter |
| CN102043256B (en) * | 2010-10-18 | 2012-11-14 | 中国科学技术大学 | Polarization beam splitter |
| CN108885092A (en) * | 2016-03-29 | 2018-11-23 | 应用材料公司 | Metering system for base plate stress and deformation measurement |
| CN108885092B (en) * | 2016-03-29 | 2020-09-22 | 应用材料公司 | Metrology system for substrate stress and deformation measurement |
| CN106510613A (en) * | 2016-12-02 | 2017-03-22 | 上海理工大学 | Optical phase retarder for measuring length of ocular axis |
| CN106510613B (en) * | 2016-12-02 | 2018-03-13 | 上海理工大学 | Optical phase delay device for axiallength measurement |
| CN108871572A (en) * | 2018-04-16 | 2018-11-23 | 西安交通大学 | Birefringent Fourier transformation imaging spectral band extension method and its imaging device |
| CN108871572B (en) * | 2018-04-16 | 2019-11-08 | 西安交通大学 | Birefringent Fourier transformation imaging spectral band extension method and its imaging device |
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